JPH0135466B2 - - Google Patents
Info
- Publication number
- JPH0135466B2 JPH0135466B2 JP58206149A JP20614983A JPH0135466B2 JP H0135466 B2 JPH0135466 B2 JP H0135466B2 JP 58206149 A JP58206149 A JP 58206149A JP 20614983 A JP20614983 A JP 20614983A JP H0135466 B2 JPH0135466 B2 JP H0135466B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- circuit
- output
- high voltage
- panel meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 13
- 150000002500 ions Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Audible And Visible Signals (AREA)
- Particle Accelerators (AREA)
Description
【発明の詳細な説明】
(イ) 産業上の利用分野
この発明は、イオン注入装置や電子線照射装置
などの荷電粒子加速装置の加速電圧を供給する高
電圧電源装置に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a high voltage power supply device that supplies an accelerating voltage for a charged particle accelerator such as an ion implanter or an electron beam irradiator.
(ロ) 従来の技術
従来公知のイオン注入装置用高電圧電源装置の
一例を第１図に示す。この高電圧電源装置１は、
電圧設定器２と、制御回路３と、その制御回路３
により制御されて加速電圧（V0）を出力する高
電圧発生回路４と、その高電圧発生回路４の出力
電圧（V0）を分圧して前記制御回路３に帰還す
る分圧器５および測定抵抗器６と、その測定抵抗
器６の両端電圧（V1）を出力電圧（V0）に換算
して表示するパネルメータ７とからなつている。(b) Prior Art An example of a conventionally known high voltage power supply device for an ion implanter is shown in FIG. This high voltage power supply device 1 is
Voltage setting device 2, control circuit 3, and its control circuit 3
a high voltage generation circuit 4 which outputs an accelerating voltage (V 0 ) under the control of the high voltage generation circuit 4; a voltage divider 5 which divides the output voltage (V 0 ) of the high voltage generation circuit 4 and feeds it back to the control circuit 3; and a measuring resistor. A panel meter 7 converts the voltage (V 1 ) across the measuring resistor 6 into an output voltage (V 0 ) and displays it.
加速電圧（V0）は、パネルメータ７の表示を
見ながらオペレータが電圧設定器２を調節して設
定し、設定後は帰還によつて設定値に保たれる。 The accelerating voltage (V 0 ) is set by the operator adjusting the voltage setting device 2 while looking at the display on the panel meter 7, and after setting, it is maintained at the set value by feedback.
さて、加速電圧（V0）はイオンに加速エネル
ギーを与え、これにより半導体などの材料へのイ
オンの注入深さが定まるから、正確でななければ
ならない。このために、上記したように帰還制御
が行われているが、その外にオペレータがたびた
びパネルメータ７の監視を行つている。この監視
によつて、電圧設定器２、制御回路３および高電
圧発生回路４の特性変化を発見することができ、
ただちに正しく再設定できるようになる。 Now, the accelerating voltage (V 0 ) gives accelerating energy to the ions, and this determines the depth of ion implantation into a material such as a semiconductor, so it must be accurate. For this reason, feedback control is performed as described above, but in addition to this, the operator frequently monitors the panel meter 7. Through this monitoring, changes in the characteristics of the voltage setting device 2, control circuit 3, and high voltage generation circuit 4 can be discovered.
You will be able to reconfigure it correctly immediately.
ところが、上記装置１では、分圧器５、測定抵
抗器６およびパネルメータ７に特性変化がある
と、所定の加速電圧（V0）が出力されていても
パネルメータ７では所定の加速電圧（V0）が出
力されていないと表示されるから、これを見たオ
ペレータが誤つた値に再設定してしまう危険があ
る。 However, in the device 1 described above, if there is a change in the characteristics of the voltage divider 5, measuring resistor 6, and panel meter 7, even if a predetermined accelerating voltage (V 0 ) is output, the panel meter 7 will not output the predetermined accelerating voltage (V 0 ). 0 ) is not output, there is a risk that an operator who sees this will reset the value to an incorrect value.
(ハ) 発明の目的
この発明は、出力電圧表示系に特性変化があつ
たときに警報を出力する機能を備えた荷電粒子加
速装置用高電圧電源装置を提供することを目的と
する。(c) Purpose of the Invention The purpose of the present invention is to provide a high voltage power supply device for a charged particle accelerator, which has a function of outputting an alarm when a characteristic change occurs in an output voltage display system.
(ニ) 発明の構成
この発明の荷電粒子加速装置用高電圧電源装置
は、高電圧発生回路の出力電圧の分圧回路から得
た分圧電圧をパネルメータに入力し、そのパネル
メータで出力電圧の表示を行う荷電粒子加速装置
用高電圧電源装置において、前記分圧回路とは別
に第２の分圧回路を付設すると共に、その第２の
分圧回路による分圧電圧と前記パネルメータに入
力される分圧電圧とを比較して所定値以上に差が
あるとき警報出力を発する比較警報回路を付設し
たことを特徴とするものである。(d) Structure of the Invention The high voltage power supply device for a charged particle accelerator of the present invention inputs the divided voltage obtained from the output voltage dividing circuit of the high voltage generation circuit to a panel meter, and calculates the output voltage using the panel meter. In a high-voltage power supply device for a charged particle accelerator that performs display, a second voltage divider circuit is provided separately from the voltage divider circuit, and the divided voltage from the second voltage divider circuit is input to the panel meter. The present invention is characterized in that it is equipped with a comparison alarm circuit that compares the divided voltages and issues an alarm output when there is a difference of more than a predetermined value.
上記第２の分圧回路は、パネルメータへの分圧
回路とは全く別系統とするのが好ましいが、高電
圧側の一部を共通としてもよい。 Although it is preferable that the second voltage dividing circuit is a completely separate system from the voltage dividing circuit to the panel meter, a part of the high voltage side may be shared.
(ホ) 実施例
第２図に示す１１は、この発明の荷電粒子加速
装置用高電圧電源装置の一実施例である。(E) Embodiment Reference numeral 11 shown in FIG. 2 is an embodiment of a high voltage power supply device for a charged particle accelerator according to the present invention.
電圧設定器２の出力は制御回路３に入力され、
その制御回路３の出力は高電圧発生回路４に入力
され、その高電圧発生回路４は制御回路３からの
入力に基いてライン８に加速電圧（V0）を供給
している。加速電圧（V0）の値は、たとえば
200KVである。 The output of the voltage setting device 2 is input to the control circuit 3,
The output of the control circuit 3 is input to a high voltage generation circuit 4, and the high voltage generation circuit 4 supplies an accelerating voltage (V 0 ) to the line 8 based on the input from the control circuit 3. The value of accelerating voltage (V 0 ) is, for example,
It is 200KV.
加速電圧（V0）は、分圧器５、分流抵抗器１
２および測定抵抗器６を介して制御回路３に帰還
され、これにより高電圧発生回路４は帰還制御さ
れている。分圧器５たとえば2000MΩの抵抗器、
分流抵抗器１２はたとえば1MΩの抵抗器、測定
抵抗器６はたとえば2KΩの抵抗器である。 Accelerating voltage (V 0 ) is determined by voltage divider 5 and shunt resistor 1.
2 and a measuring resistor 6 to the control circuit 3, whereby the high voltage generating circuit 4 is feedback-controlled. Voltage divider 5 For example, a 2000MΩ resistor,
The shunt resistor 12 is, for example, a 1MΩ resistor, and the measuring resistor 6 is, for example, a 2KΩ resistor.
パネルメータ７は、Ａ／Ｄコンバータを内蔵し
たデジタル電圧計で、デジタル出力ポート７ａを
有している。 The panel meter 7 is a digital voltmeter with a built-in A/D converter and has a digital output port 7a.
１３は第２の分流抵抗器、１４は第２の測定抵
抗器で、前述の出力電圧表示系統とは異なる第２
の分圧回路を構成している。第２の分流抵抗器１
３はたとえば1MΩの抵抗器、第２の測定抵抗器
１４はたとえば2KΩの抵抗器である。 13 is a second shunt resistor, 14 is a second measuring resistor, which is a second resistor different from the output voltage display system described above.
It constitutes a voltage divider circuit. Second shunt resistor 1
3 is, for example, a 1MΩ resistor, and the second measuring resistor 14 is, for example, a 2KΩ resistor.
前記パネルメータ７のデジタル出力はＤ／Ａコ
ンバータ１５を介して比較回路１６に入力され、
前記第２の測定抵抗器１４の両端の電圧はアナロ
グ量であるからそのまま比較回路１６に入力さ
れ、比較回路１６はこれらの入力を比較して、そ
の差がたとえば２の測定抵抗器１４からの入力電
圧の±５％以上となつたときに警報回路１７に判
定信号を出力する。 The digital output of the panel meter 7 is input to a comparison circuit 16 via a D/A converter 15,
Since the voltage across the second measuring resistor 14 is an analog quantity, it is input as is to the comparator circuit 16, and the comparator circuit 16 compares these inputs and calculates the difference from the measuring resistor 14 of 2, for example. A determination signal is output to the alarm circuit 17 when the input voltage is ±5% or more.
警報回路１７は、判定信号が入力されると、た
とえばブザーを作動してオペレータに警告を与え
ると共に公知の荷電粒子ビームストツパを作動し
て荷電粒子ビームをターゲツトに照射しないよう
にする。 When the judgment signal is input, the alarm circuit 17 operates, for example, a buzzer to give a warning to the operator, and also operates a known charged particle beam stopper to prevent the target from being irradiated with the charged particle beam.
なお上記装置１１では、出力電圧表示系の分圧
回路と第２の分圧回路とで分圧器５を共通に使用
している。これは一般に高電圧側に接続される抵
抗器は非常に安定したものを使用するので実質的
にその特性変化が問題とならないことおよび高電
圧側の絶縁空間を広げなくてもよいので現実的で
あることによるもので、第２の分圧回路用に第２
の分圧器を設けてもよいことは言うまでもない。 In the above device 11, the voltage divider 5 is commonly used by the output voltage display system voltage divider circuit and the second voltage divider circuit. This is practical because the resistor connected to the high voltage side is generally very stable, so there is virtually no problem with changes in its characteristics, and there is no need to expand the insulation space on the high voltage side. This is due to the fact that the second
It goes without saying that a voltage divider may be provided.
(ヘ) 発明の効果
この発明の荷電粒子加速装置用高電圧電源回路
によれば、出力電圧表示系の異常がチエツク可能
であるからオペレータが誤つた出力電圧表示に基
いて誤つた出力電圧設定を行うことが防止され、
信頼性を向上できると共に保守管理の負担を軽減
できる。(f) Effects of the Invention According to the high voltage power supply circuit for a charged particle accelerator of the present invention, it is possible to check for an abnormality in the output voltage display system, so that an operator can set the output voltage incorrectly based on an incorrect output voltage display. is prevented from doing;
It is possible to improve reliability and reduce the burden of maintenance management.
第１図は従来公知の荷電粒子加速装置用高電圧
電源装置の一例の回路図、第２図はこの発明の荷
電粒子加速装置用高電圧電源装置の一実施例の回
路図である。
１１……荷電粒子加速装置用高電圧電源装置、
２……電圧設定器、３……制御回路、４……高電
圧発生回路、５……分圧器、６，１４……測定抵
抗器、７……パネルメータ、１２，１３……分流
抵抗器、１６……比較回路、１７……警報回路。
FIG. 1 is a circuit diagram of an example of a conventionally known high voltage power supply device for a charged particle accelerator, and FIG. 2 is a circuit diagram of an embodiment of the high voltage power supply device for a charged particle accelerator according to the present invention. 11... High voltage power supply device for charged particle accelerator,
2... Voltage setting device, 3... Control circuit, 4... High voltage generation circuit, 5... Voltage divider, 6, 14... Measuring resistor, 7... Panel meter, 12, 13... Shunt resistor , 16...comparison circuit, 17...alarm circuit.
Claims (1)
た分圧電圧をパネルメータに入力し、そのパネル
メータで出力電圧の表示を行う荷電粒子加速装置
用高電圧電源装置において、前記分圧回路とは別
に第２の分圧回路を付設すると共に、その第２の
分圧回路による分圧電圧と前記パネルメータに入
力される分圧電圧とを比較して所定値以上に差が
あるとき警報出力を発する比較警報回路を付設し
たことを特徴とする荷電粒子加速装置用高電圧電
源装置。1. In a high voltage power supply device for a charged particle accelerator that inputs a divided voltage obtained from a voltage dividing circuit of an output voltage of a high voltage generation circuit to a panel meter and displays the output voltage on the panel meter, the voltage dividing circuit A second voltage dividing circuit is separately provided, and the divided voltage from the second voltage dividing circuit and the divided voltage input to the panel meter are compared and an alarm is generated when the difference exceeds a predetermined value. A high voltage power supply device for a charged particle accelerator, characterized in that it is equipped with a comparison alarm circuit that emits an output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58206149A JPS60100350A (en) | 1983-11-02 | 1983-11-02 | High voltage power supply for charged particle accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58206149A JPS60100350A (en) | 1983-11-02 | 1983-11-02 | High voltage power supply for charged particle accelerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60100350A JPS60100350A (en) | 1985-06-04 |
| JPH0135466B2 true JPH0135466B2 (en) | 1989-07-25 |
Family
ID=16518601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58206149A Granted JPS60100350A (en) | 1983-11-02 | 1983-11-02 | High voltage power supply for charged particle accelerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60100350A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0793123B2 (en) * | 1986-01-27 | 1995-10-09 | 日新電機株式会社 | Ion implanter |
| JPS63133251U (en) * | 1987-02-25 | 1988-08-31 |
-
1983
- 1983-11-02 JP JP58206149A patent/JPS60100350A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60100350A (en) | 1985-06-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |