JPH0136150B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is an image processing device, in particular, the surface of the object to be inspected is captured on a cathode ray tube by a TV camera while the object to be inspected is moved by driving a table on which the object to be inspected is placed. Regarding a method for determining the edge position of an object to be inspected in an image processing device that tracks the surface image of the object, its purpose is to speed up the driving of a table that moves the object to be inspected, thereby speeding up the work of the image processing device. The purpose of this invention is to improve the accuracy and measurement accuracy of edge positions.

The present invention displays a cross-shaped cursor line and a mouth-shaped cursor frame surrounding the line on a cathode ray tube, and provides a deceleration command signal for decelerating the drive of the table when the cursor frame detects an edge of an object to be inspected. and when the cursor line detects the edge, outputs a measurement command signal that causes the coordinate position of the edge to be measured, and the output of the measurement command signal causes the drive of the table to stop and the The XY coordinates of the table at the position are detected and determined as the coordinate position of the edge.

By moving the table in a preset direction, the coordinate positions of multiple edges of the object to be inspected are measured, and based on these measurement data, the dimensions, shape, area, center point, etc. of the object to be inspected are determined. Calculated.

According to the CRT image, the edges of the object to be inspected are not necessarily straight, but appear uneven.
Edge detection using the cursor frame occurs when the cursor frame first touches any unevenness on the edge, and edge detection using the cursor line occurs when the cursor line first touches any unevenness on the edge, or when the cursor frame first touches any unevenness on the edge. This occurs when the intersection of the cursor lines touches an edge, or when the entire length of the cursor lines joins the object to be inspected.

Embodiments of the present invention will be described with reference to the drawings.
The figure shows an automatic dimension measuring device, in which 1 is a machine stand, 2 is an inspection table, 3 is a microscope, 4 is a TV camera, 5 is an image processing device, and 10 is an object to be inspected.

The inspection table 2 is configured by a combination of a Y table 2a that moves in the Y-axis direction and an X-table 2b that moves in the X-axis direction, and each table 2a, 2b is equipped with a driving motor 11, 11, such as a pulse motor or a servo motor, respectively. ' are connected and driven, and linear scales 12, 12' are provided to detect the amount of movement.

The object to be inspected 10 is placed on the X-table 2b and its dimensions are measured.

Further, a support 1' is installed on the machine base 1, and a Z table 2c that moves in the vertical direction (Z-axis direction) is attached to the tip of the support 1', and the microscope 3 is mounted on this Z-axis table 2c. 2. Install it so that it is located above.

A drive motor 13 such as a servo motor is connected to the Z table 2c, and a linear scale 14 is also provided.

The microscope 3 has a reflection light source 15, and the light source 15
The light emitted from the object to be inspected 1 is transmitted through the objective lens 16.
0, the surface of the object to be inspected 10 is magnified by the microscope 3, and the image is taken by the TV camera 4.

The microscope 3 focuses on the object to be inspected 10 by driving the motor 13 and moving the Z table 2c up and down.

The TV camera 4 is connected and installed on the microscope 3 and connected to the image processing device 5 via the cord 17.
The inspection object 1 is connected to the microscope 3 and is magnified by the microscope 3.
0 is imaged and transmitted to the image processing device 5.

As shown in FIG. 2, the image processing device 5 has a display cathode ray tube 20 on the front panel, and the image of the object to be inspected 10 transmitted from the TV camera 4 is displayed on the tube 20. Make it.

Further, the cathode ray tube 20 has an upper limit line 6a and a lower limit line 6.
A', a mouth-shaped cursor frame 6 formed by a left limit line 6b and a right limit line 6b' is displayed, and a vertical cursor line 7a and a horizontal cursor line 7b are displayed in a cross shape within the frame. Cursor frame 6 and cursor line 7
a, 7b to track the image of the moving object 10.

The cursor frame 6 can be moved by moving the upper limit line 6a and the lower limit line 6a' in the vertical direction, and moving the left limit line 6b and the right limit line 6b' in the left and right directions, respectively, by operating keys on an input device (not shown). The cursor frame 6 can be reduced or expanded.

In addition, the cursor lines 7a and 7b are also controlled by the input device to move the vertical cursor line 7a to the left and right, and to move the horizontal cursor line 7 to the left and right.
b is movable in the vertical direction.

The image processing device 5 is connected to a built-in central processing unit (CPU) via an NC controller 9 and a motor driver 9' to each motor 11, 11', 13 of the tables 2a, 2b, 2c. ), the inspection table 2 is driven in the X-axis direction or the Y-axis direction according to a pre-stored sequence, and the object 10 to be inspected is moved under the microscope 3, while the surface image thereof is displayed on the cathode ray tube 20 by the TV camera 4. reflected.

Therefore, the image of the object to be inspected 10 is sequentially moved on the cathode ray tube 20, and an edge is detected where the edge a of the object to be inspected joins the cursor frame 6 and the cursor lines 7a and 7b.

Therefore, under the control of the central processing unit (CPU),
Until the cursor frame 6 detects the edge a of the object to be inspected 10, the motor 11 or 11' is driven at high speed to fast-forward the Y table 2a or the X table 2b.

Then, the lower limit line 6a' of the cursor frame 6 is at the edge a.
When the edge is detected by connecting to the leading end a' of to move the Y table 2a or the X table 2b at low speed in the same direction as before.

Furthermore, the Y table 2a or
When joining a′ and detecting the edge (Fig. 4),
The image processing device 5 outputs a measurement designation signal Q to a central processing unit (CPU).

Upon reception of this measurement command signal Q, the central processing unit (CPU) stops the motor 11 or 11' to stop the movement of the table 2a or 2b, and then uses the linear scales 12, 12' to move the Y table 2a,
The position of the X table 2b is measured, thereby the coordinate position of the edge a is measured, and the measured data is stored in the central processing unit (CPU).

3 and 4 show the case where the X-table 2b is driven to detect the edge a' on the front end side of the object 10 to be inspected. The same applies when detecting the trailing edge using the cursor frame 6 and cursor lines 7a and 7b.Furthermore, when the Y table 2a is moved, the trailing edge is detected by the left limit line 6b or right limit line 6b' of the cursor frame 6. This is for detecting edge edges.

In addition, in FIG. 4, edge detection using a cursor line was shown to detect the position where the horizontal cursor line 7b joins the leading end a' of edge a, but as shown in FIG. Alternatively, as shown in FIG. 6, the position where the entire length of the horizontal cursor line 7b joins the object to be inspected 10 may be detected.

Furthermore, although FIG. 1 shows an example using incident light,
Chipping 1 as shown in FIG. 7 is placed on the edge of the object to be inspected 10
If 0a exists, the edge is determined in a state as shown in FIG.

That is, in FIG. 8, when the inspected object 10 moves in the direction of arrow _A1 , the part where the horizontal cursor line 7b senses the beginning of the edge image is measured as an edge, and when it moves in the direction of arrow _A2 , the edge is measured. The part where the image completely exceeds the horizontal cursor line 7b is defined as an edge.

Thereby, the chipping 10a does not cause a measurement error due to reflection of light, thereby improving measurement accuracy.

FIG. 9 shows an edge determination method using transmitted light that is projected from below the object to be inspected.

That is, edges are detected in the opposite way to the case of incident light in _FIG .
When moving in the direction of arrow A, the edge image is defined as the part where the edge image of the inspected object 10 completely crosses the horizontal cursor line 7b, and when the inspected object 10 is moving in the direction of arrow _A , the beginning of the edge image is defined as the edge. Horizontal cursor line 7b
The area that is sensed is measured as an edge.

Note that when moving the Y table 2a, edge detection using the cursor line is performed using the intersection of the cursor lines 7a and 7b or the vertical cursor line 7a.

As described above, the present invention displays a cross-shaped cursor line and a mouth-shaped cursor frame surrounding the line on a cathode ray tube, and when the cursor frame detects the edge of the object to be inspected, the drive of the table is slowed down. Therefore, it is possible to speed up the driving of the section in which the table is moved by a fixed distance, thereby making it possible to perform fast forwarding, thereby shortening the time required for edge position measurement of the image processing apparatus and improving work efficiency.

Furthermore, when the cursor line detects an edge after the cursor frame detects an edge and the table drive is decelerated, the coordinate position of the edge is measured, so that edge detection using the cursor line is performed in a low-speed driving state. As a result, high detection accuracy can be maintained.

[Brief explanation of drawings]

Fig. 1 is a front block diagram of an automatic dimension measuring device explaining the present invention, Fig. 2 is an enlarged surface view of an image processing device, Fig. 3 is a surface view showing edge detection using a cursor frame, and Fig. 4 is a cursor line. 5 and 6 are surface views showing modified examples of edge detection using cursor lines. FIG. 7 is a plan view showing an example of an object to be inspected. FIG. 8 is a sectional view thereof. The figure is a surface view showing edge detection using reflected light, and FIG. 9 is a surface view showing edge detection using transmitted light. In the figure, 2 is an inspection table, 4 is a TV camera, and 5
is an image processing device, 6 is a cursor frame, 7a, 7b are cursor lines, 10 is an object to be inspected, a is an edge, 20
is a cathode ray tube.

Claims (1)

[Claims] 1 The surface of the object to be inspected is inspected while moving the object to be inspected by driving the table on which the object to be inspected is placed.
In an image processing device that tracks the surface image of a cathode ray tube captured by a TV camera, a cross-shaped cursor line and a mouth-shaped cursor frame surrounding the line are displayed on the cathode ray tube, and the cursor frame indicates the edge of the object to be inspected. A deceleration command signal for decelerating the drive of the table is output when the cursor line detects the edge, and a measurement command signal for measuring the coordinate position of the edge is output when the cursor line detects the edge. A method for determining the edge position of objects.