JPH0145737B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a charged beam exposure apparatus for drawing fine patterns for LSIs, etc., and in particular, to a forming aperture for forming a rectangular shaped beam with highly accurate dimensions. Regarding.

[Technical background of the invention and its problems]

As is well known, in the forming aperture, a conductive thin plate with a small rectangular hole is inserted on the optical axis of the electron optical system of a charged beam exposure device, and the charged beam emitted from the electron source passes through this rectangular hole. When doing so, a part of the charged beam is blocked to create a rectangular hole-shaped light source image.

FIGS. 1 and 2 show a conventional forming aperture. In FIG. 1, 1 is a forming aperture and 2 is a rectangular hole of the forming aperture. Moreover, FIG. 2 is a diagram in which two forming apertures having rectangular holes are stacked.

11 and 12 are forming apertures, 21 is a rectangular hole in the forming aperture 11, 22 is a rectangular hole in the forming aperture 12,
23 is a rectangular hole formed by these rectangular holes 21 and 22, and 30 is a plurality of positioning flanges.

Figures 3a, b, and c show a fixing method for using the forming aperture described above. Reference numeral 50 designates a forming aperture fixing base, 51 a forming aperture insertion groove, 52 a circular arc groove for positioning, 60 a retaining ring, and 70 a tightening screw.

FIG. 4 shows an example of an electron optical mirror body of an exposure apparatus using a forming aperture. 80 is an electron gun, 8
1 is a condensing lens, 82 and 83 are beam shaping lenses, 84 is a reduction lens, 85 is an objective lens, 86 is a beam blanker, 87 is a beam shaping deflector, 88 is a beam deflector, 86 is a beam current limiting aperture, 90 is the sample surface, 13 is the first forming aperture, 14 is the second forming aperture, and 91 is the first forming aperture 1.
Cross-sectional shape of the shaped electron beam formed in 3, 15
is a rectangular hole of the second shaping aperture 14, 92 is a shaped electron beam image formed by the first shaping aperture 13 which is imaged and deflected onto the second shaping aperture 14, and 93 is a shaped electron beam imaged onto the sample surface. It is.

By the way, in FIG. 3, the method of fixing the forming aperture 1 is as shown in FIG.
The forming aperture 1 is inserted into the inside, and a clamping screw 70 is screwed in to fix the forming aperture 1 with a presser ring 60 interposed therebetween in order to press the forming aperture 1 with an even tightening force.

The forming apertures 11 and 12 in FIG. 2 are the rectangular holes 21 of the forming aperture 11 and the rectangular holes 22 of
A rectangular hole 23 is formed by overlapping the forming apertures 11 and 12 such that they are perpendicular to each other. The method of fixing the forming apertures 11 and 12 is also the same as that of the forming aperture 1 shown in FIG. In order to maintain the shape accuracy of the rectangular hole 23 and to prevent the rotation of the forming apertures 11 and 12 and the positional displacement of the sides, a positioning device is used to divide the outer periphery of the forming aperture insertion groove 51 into four equal parts as shown in Fig. 3c. There is a circular arc groove 52. By inserting the positioning flange 30 of the forming apertures 11 and 12 into this arcuate groove 52, the overlapping position of the forming apertures 11 and 12 is determined. In this way, the forming aperture fixing base 50 to which the forming aperture 1 or the forming apertures 11 and 12 are fixed is mounted at the positions of the first forming aperture 13 and the second forming aperture 14 of the electron optical mirror shown in FIG. .

In the electron optical mirror body, a crossover image formed by the electron beam generated from the electron gun 80 and a rectangular electron beam image formed by the shaping aperture image are focused in a predetermined state. The shaped beam is
An electron beam image 91 formed into a rectangular shape by the first shaping aperture 13 is focused onto the second shaping aperture 14 by the shaping lenses 82 and 83, and at the same time is deflected by the beam shaping deflector 87. . This deflected beam 92 passes through the rectangular hole 15 of the second shaping aperture 14 and is shaped into a predetermined rectangular shape and size. The beam thus formed is imaged by a reduction lens 84 and an objective lens 85 onto a sample surface 90 in a predetermined shape and size.

Forming aperture 1 used under such a configuration
Alternatively, in the forming apertures 11 and 12, the rectangular holes in the forming aperture 1 and the rectangular holes in the forming apertures 11 and 12 are processed by photosetting etching or electrohoming. In these processes, due to the grain size of the material of the forming draw, the rolling direction, and the limits of phototypesetting accuracy, the roundness of the four corners, the squareness, and the width of the four sides are limited, as shown in Figures 1 and 2. Shape errors such as uneven edges δ occur. Among these, the radius R of the corner causes an error amount of about 1/10 of the plate thickness, and the unevenness δ of the edge largely depends on the grain size and rolling direction.

In Figures 1 and 2, the forming aperture is made of molybdenum.
When manufactured by etching with Mo, if the plate thickness is 30 μm, the roundness of the corners is approximately 3 μm, and the unevenness of the edges is 2 to 3 μm on the rectangular side in the same direction as the rolling direction.
4μm, 3-5μm on the rectangular side perpendicular to the rolling direction
This results in an amount of unevenness. The machining accuracy of the perpendicularity is approximately 90°±30′, and the parallelism of the rectangular sides is 200 μm on each side.
Then, it is approximately ±1.75 μm.

In addition, when forming copper by electroforming and applying gold plating (1 to 2 μm thick), if the copper plate thickness is 20 μm, the roundness of the corners is approximately 2 μm, the unevenness of the edges is approximately 2 μm, and the squareness is approximately 2 μm. is about 90°±30′.

Here, the forming aperture used for the electron optical mirror body is the first forming aperture of 2 mm and the second forming aperture of 20μ.
m, and the combined magnification of the reduction lens 84 and objective lens 85 of this electron optical mirror body is 1/20.
Now, if the image of the rectangular hole of the second shaping aperture is formed as it is on the sample surface, the beam will be 10 μm in diameter, and in the case of a molybdenum aperture, the rounded corner will be about 0.15 μm.
The unevenness of the edges results in a shape error of approximately 0.25 μm. Furthermore, in the case of a diaphragm made of copper plated with gold, the roundness of the corners will be approximately 0.1 μm, and the unevenness of the edges will have a shape error of approximately 0.1 μm. Also, the parallelism of the sides of the rectangle is approximately ±
It becomes 0.18 μm. This becomes a pattern error that cannot be ignored when drawing patterns in the submicron region.

On the other hand, in forming apertures 11 and 12, in which a rectangular hole is formed by combining the rectangular holes of two forming apertures, as shown in FIG. When mounted on the forming drawing fixing stand 50 shown in FIG. 3, angular errors θ ₁ to _{θ 4} occur due to overlapping positioning errors and positional deviations due to rotation of the tightening screws 70. Furthermore, there is the complexity of having to select the overlapping position depending on the period of the edge unevenness.

As described above, conventional forming apertures have the disadvantage that when drawing fine patterns of submicron size, the accuracy of the rectangular beam shape and the accuracy of connection between beam shots deteriorate, resulting in poor pattern quality.

[Purpose of the invention]

The present invention has been made to solve these drawbacks, and its purpose is to construct a forming drawing by combining thin wires with good edge accuracy orthogonally to each other, thereby improving the perpendicularity and parallelism of rectangles. The object of the present invention is to provide a shaping aperture for a charged beam exposure apparatus that can eliminate shaping beam shape errors caused by irregularity shape errors of edges and edges, and can draw patterns of excellent quality.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 5a and 5b, thin gold wires 101 and 10
1', 102, 102' form the edges of the forming drawing, and these thin gold wires 101, 101',
102 and 102' have a cylindrical shape and have a smooth surface with irregularities (surface roughness) of 0.1 μm or less. Such fine gold wires are commercially available and easy to obtain. In an electron optical system with a magnification of 1/10 to 1/20, the amount of unevenness is 0.01 μm or less, so it does not pose a problem in pattern formation. Therefore, by applying tension to the thin gold wire, edges with good straightness can be obtained. Also, the rounded corners do not allow straight lines to intersect at right angles.

The rectangular hole 100 has thin gold wires 101, 101', 10
It is formed by applying tension to 2,102' and assembling it into a cross-shaped structure. The thin gold wire 1 is formed so that the rectangular hole 100 has highly accurate parallelism and squareness.
To assemble 01, 101', 102, 102', use a cylindrical pin 21 with the same outer diameter as the rectangular hole.
0, 211, 220, 221 on the drawing stand 400
Cylindrical pins 210 and 21 provided on the top and facing each other
1, thin gold wire 10 along the outer peripheral surface of 220 and 221
It is obtained by stretching 1,101', 102, 102'. That is, the cylindrical pin 210,
211, attach another thin gold wire to the cylindrical pin,
Parallel gold wires 101, 101', 102, and 102' are attached to the wires 220 and 221, respectively. Here, the cylindrical pins 210, 211, 220, and 221 can be machined with high accuracy by grinding with a diameter dimensional error of 1 μm. The perpendicularity of the rectangular hole 100 is determined by using cylindrical pins 210, 211, 22 on the forming drawing base 400.
0,221 is obtained as the positioning accuracy in machining when arranging in the X and Y directions. Here, the arrangement of the cylindrical pins 210, 211, 220, 221 is as follows:
10 and 211 are in the X direction, and 220 and 221 are in the Y direction. Four cylindrical pins 210, 211, 22
By using a high-precision jig borer in the processing machine, a positioning accuracy of about 3 μm can be obtained for each of the 0 and 221 pieces. Cylindrical pin 21
0, 211, 220, 221 is the base 4 for forming and drawing
00 is press-fitted. 210' and 211' are press-fit parts.

Fine gold wire 10 wrapped around cylindrical pins 210, 211, 220, 221 and stretched in a straight line with tension applied
1, 101', 102, and 102' are fixed by gluing both ends of the thin gold wire onto the base 400 for forming and drawing. Reference numerals 111, 111', 112, and 112' are fixing parts bonded with silver paste or instant adhesive, respectively.

By the way, the gold wires 101, 101', 102,
In forming the rectangular hole 100 by 102', opposing cylindrical pins 210 and 211, 220 and 221
When a rectangular hole of 200 μm is formed with a spacing of 10 mm, the parallelism of the gold wire (between the gold wires 101 and 101', and between 102 and 102') is 1 μm, which is the diameter error of the cylindrical pin. It is. Regarding the squareness, as mentioned above, the cylindrical pins 210, 21
1,220,221 are arranged with a positioning accuracy of 3μm, so the angular error is ±0.3mrad (3μm/10
mm), and the squareness is 90° ± 1′. Than this,
In a 200μm rectangular hole, the parallelism of the gold wire is
0.02μm/200μm, squareness is 90°±1'.

Here, in FIG. 5, 130 and 131 are molybdenum thin plates that block the beam that irradiates areas other than the rectangular hole 100 formed by the thin gold wires 101, 101', 102, and 102', and are slightly larger than the rectangular hole 100. It has rectangular holes 130' and 131'.
The molybdenum thin plate 130 has thin gold wires 101, 101',
102, 102' are fixed to the forming drawing base 400 before being stretched. Molybdenum thin plate 1
30, positioning knock pins 410, 411 are provided on the forming drawing base 400, and molybdenum thin plates 130 are attached to the knock pins 410, 411.
This is done by fitting the positioning holes 420, 421 provided in the. The molybdenum thin plate 131 is the thin gold wire 101,
Cover 5 is something that covers 101', 102, 102'.
00, thin gold wires 101, 101',
102 and 102'. The positioning of this molybdenum thin plate 131 is as follows:
Similar to No. 30, the same dowel pins 410 and 411 are used.

The cover 500 is fixed to the forming drawing base 400 with a tightening screw 510. The cover 500 and the base 400 for forming and drawing are positioned using the dowel pins 410 and 41 in the same way as the molybdenum thin plates 130 and 131.
Do it with 1.

By the way, in this embodiment, the molybdenum thin plate 13
0,131 is gold wire 101, 101', 102,
Although the structure is such that 102' is sandwiched between the upper and lower parts, it is also possible to use only one of the upper and lower parts. Also, gold thin wire 10
1,101', 102, 102' were fixed at both ends of thin gold wires, but the thin gold wires 101, 10 were used when assembling the thin molybdenum plates 130, 131 and the cover 500.
In order to prevent displacement or loosening of the parts 1', 102, 102', they may be fixed to the lower molybdenum thin plate 130 or the cylindrical pins 210, 211, 220, 221 with adhesive. Furthermore, although a cylindrical pin was used as a reference pin for forming the rectangular hole 100, this may be a rectangular pin.

A forming aperture base 400 is installed in the electron optical mirror body at the forming aperture positions 13 and 14 shown in FIG.
Regarding the step of the rectangular edge due to the wire diameter that occurs when the thin gold wires 101, 101', 102, 102' are assembled in a # girder shape, the plate thickness of the forming aperture is Even if there is a step difference of 30 μm, it does not affect the shaped beam, so there is no problem in forming the shaped beam.

With this structure, when it is attached to an electron optical mirror body and a shaped beam is formed to draw a pattern, if the magnification is set to 1/20, the amount of edge unevenness is 0.01 in the formed rectangular beam of 10 μm. μm
Thereafter, the corners are not rounded and the parallelism of the rectangular sides is ±0.001 μm/10 μm or less, making it possible to obtain a shaped beam with good shape accuracy.

The thin gold wire that forms the rectangle has a maximum strength of about 20 μm, but if tungsten or glass fiber is used, it is possible to construct the forming aperture with a thin wire of more than 10 μm. In the case of glass fiber, the surface is coated with gold to make it a conductor.

Next, other embodiments of the present invention will be described.

FIG. 6 shows an example in which the rectangular hole is so small as, for example, 100 μm or less that a cylindrical pin having the same dimensions as the rectangular hole cannot be manufactured. In FIG. 6, the same parts as in FIG. 5 are given the same reference numerals.

In this case, a rectangular hole 6 is formed on the forming drawing base 400.
Cylindrical pins 701, 701', which are the basis for forming 00.
702, 702', 703, 703', 704, 7
Four pieces of 04' are arranged in each of the X and Y directions. here,
The cylindrical pins arranged in the X direction are 701, 701',
702, 702', and the cylindrical pins arranged in the Y direction are 703, 703', 704, 704'. Each pin is press-fitted into the forming drawing base 400. In this cylindrical pin arrangement, the cylindrical pins 701 and 7 in the X direction
02, between 701' and 702', between cylindrical pins 703 and 704 in the Y direction, and between 703' and 704' by the sum of the rectangular hole dimension of the rectangular hole 600 to be formed and the diameter of the two thin gold wires. The cylindrical pins in the X direction are 701 and 701', 702 and 702', and the cylindrical pins in the Y direction are 703 and 703', and the lines connecting the centers of 704 and 704' are parallel, and the X and Y directions are parallel. They are installed so that they are perpendicular to each other. Here, cylindrical pins 701, 701', 702, 702', 703,
703', 704, and 704' have the same dimensions.

Gold thin wires 601, 602, 603, 604 are X,
Opposing cylindrical pins arranged in the Y direction in the X direction 701
and 701', 702 and 702', Y direction 703 and 7
03', 704, and 704' are assembled in a # girder shape to form a rectangular hole 600. Gold thin wire 601, 60
2, 603, and 604 are fixed at both ends with adhesive. 601', 602', 603', and 604' are bonding points.

Here, cylindrical pins 701, 701', 702,
The arrangement of 702', 703, 703', 704, and 704' allows a positioning accuracy of 3 μm as in the embodiment shown in FIG. From this, the cylindrical pin intervals 701 and 701', 702 and 702', 703 and 7
When 03', 704 and 704' are 10mm and a 40μm rectangular hole is formed, the parallelism is ±0.012μm/40μ
m, and a highly accurate rectangular hole can be obtained.

Regarding the pin that serves as a reference when forming a rectangular hole with a thin gold wire, in the example shown in FIG.
Cylindrical pins with the same dimensions as the rectangular holes were used in all cases, but in this example, cylindrical pins with different diameters or eccentric pins were used to improve the parallelism of the thin gold wire.
Orthogonality can be changed.

On the other hand, FIG. 7 shows an example in which one side of the thin gold wire forming the rectangular hole is tilted using cylindrical pins of different diameters. In Figure 7, 810,8
11,820 is a cylindrical pin with the same diameter _D1 . 82
1 is a cylindrical pin with a diameter _D2 larger than _D1 . Here, the cylindrical pin 821 may have a diameter smaller than _D1 .
The thin gold wires 801, 801' are stretched parallel to each other with reference to cylindrical pins 810, 811 having the same diameter _D1 . The cylindrical pin 821 is connected to the cylindrical pin 821 so that the thin gold wire 802 is perpendicular to the thin gold wires 801 and 801'.
20, the difference in the radius of the cylindrical pin (D ₂ /2 - D ₁ /
The center position of the cylindrical pin is shifted by 2). As a result, the thin gold wire 802' is (D ₂ −
D ₁ ). Therefore, the cylindrical pin 82
The rectangular hole 80 of D ₁ , where the distance between 0 and 821 is l,
0, the thin gold wire 801 of the rectangular hole 800
2 formed by intersecting 802', 801' and 802'
The squareness of the two corners can be changed by α ₁ (tanα ₁ =(D ₂ −D ₁ )/l). Regarding the angle variation α ₁ , in the example shown in Fig. 5, which consists of a cylindrical pin with the same dimensions as the rectangular hole, the parallelism of the thin gold wire is 1μ.
Since it can be stretched with an accuracy of m/10 mm and a squareness of 90°±1', the angular error of α ₁ is ±1', making it possible to give an accurate angle. 130a is a thin molybdenum plate as in the embodiment shown in FIG. The rectangular hole 830 of the molybdenum thin plate 130a has gold wires 801, 8
Rectangular hole 800 formed by 01', 802, 802'
A rectangular hole 80 is used to block beams other than those passing through the
It has the same shape as 0, but the dimensions are slightly larger. Numerals 410 and 411 are knock pins for positioning the thin molybdenum plate 130a.

With this structure, when drawing a pattern using the forming aperture of the embodiment shown in Fig. 5, when the perpendicularity of the rectangular pattern changes due to image distortion due to astigmatism. , the amount of change in this perpendicularity is measured, and the drawn pattern is corrected by tilting the side of the rectangular hole corresponding to the side of the rectangular pattern where the perpendicularity has changed by the amount of change in the measurement result. Can be done.

FIG. 8 shows an example in which a trapezoidal hole is formed by stretching a thin gold wire diagonally. One thin gold wire is attached to the cylindrical pins 910 and 911 which are the same diameter and serve as references, and two parallel thin gold wires 901 and 901' are stretched. For these thin gold wires 901 and 901', the thin gold wire 90
2 is stretched by arranging cylindrical pins 920 and 921 orthogonal to each other, and the other thin gold wire 903 has cylindrical pins 922 and 923 arranged so as to form an angle α ₂ =45° with respect to the thin gold wire 901'. Tighten it. Since the angle α ₂ is determined by the accuracy of the arrangement of the charged beams 910, 911, 922, and 923, the angle α 2 is ±
It can be formed with an angular error of 1'. Therefore, a trapezoidal hole 900 having an accurate angle α ₂ =45° can be formed by the thin gold wires 901, 901', 902, and 903. 130b is a thin molybdenum plate, and thin gold wires 901, 901', 902, 903
It has a trapezoidal hole 930 that is slightly larger than the trapezoidal hole 900 formed in .

In this example, the case where the angle α ₂ is 45° is shown, but
α ₂ can be set to any number as long as 0°<α ₂ <180°.

With this structure, conventionally, a pattern having a hypotenuse was drawn by decomposing the hypotenuse into strips, but it is now possible to draw the pattern without decomposing the hypotenuse into strips. For example, A graphical aperture having a hypotenuse as shown in FIG. 4 can be installed in the electron optical system and used as a shaping aperture when forming a shaped beam having an oblique side.

FIG. 9 shows an embodiment in which a rectangular hole is formed by stretching thin gold wires in a mesh shape.

Cylindrical pins 1010, 1010' having the same dimensions as the plurality of rectangular holes 1000 to be formed are placed in the X and Y directions on the forming drawing base 400 (not shown in FIG. 9 of this embodiment). 1011, 1011',
1012, 1012', 1013, 1013', 1
014, 1014', 1015, 1015' are arranged. A thin gold wire is attached to each of the pair of reference cylindrical pins arranged in the X and Y directions to form a mesh consisting of two parallel thin gold wires. That is, the cylindrical pins 1010 and 101 in the X direction
Thin gold wires 1021, 1021' are attached to 0', and thin gold wires 1022, 1021' are attached to the cylindrical pins 1011 and 1011'.
1022' and cylindrical pins 1012 and 1012' are stretched with thin gold wires 1023 and 1023'. In addition, thin gold wires 10 are attached to the cylindrical pins 1013 and 1013' in the Y direction.
24, 1024', and cylindrical pins 1014 and 1
014' has gold wires 1025, 1025', and cylindrical pins 1015 and 1015' have gold wires 1026, 1.
026' is stretched. The distance between the cylindrical pins arranged in the X direction and the Y direction (1010, 1011 in the X direction,
Between 1012 and 1010', 1011', 101
2', Y direction is 1013, 1014, 1015
between 1013', 1014', 1015')
The diameter of the beam irradiating the shaping aperture is approximately 500 μm in the electron optical system shown in Figure 4, so care must be taken to avoid irradiating adjacent rectangular holes and causing beam leakage or contamination.
At least 500μm apart. A molybdenum thin plate 1300 is placed below the thin gold wire, and blocks the beam that irradiates areas other than the plurality of rectangular holes 1000 formed of the thin gold wire. For this reason, molybdenum thin plate 1300
A rectangular hole 1301 slightly larger than the rectangular hole 1000 is formed in the hole. The number of rectangular holes 1301 in this molybdenum thin plate 1300 is the same as the number of rectangular holes 1000 formed of thin gold wire. 131
0 is a molybdenum thin plate placed above the thin gold wire, and like the molybdenum thin plate 1300, the rectangular hole 13 is
11 to block excess beams and protect the thin gold wire. The positioning of the thin molybdenum plates 1300 and 1310 is performed by positioning knock pins 410 and 411 arranged on the forming drawing base 400 (not shown here).

Here, in this embodiment, the rectangular hole 1000
is a rectangular portion 110 whose one side is defined by the diameter of the cylindrical pin, but is not limited to this, and the length of one side is defined by the interval between the cylindrical pins arranged in the X and Y directions.
It may be configured using 0. In addition, considering the diameter of the beam irradiated on the forming aperture surface, the rectangular holes were spaced apart so that the beam would not irradiate adjacent rectangular holes, and the rectangular holes formed with pins of the same diameter were formed with a pin spacing. Both rectangular holes may be constructed on the same forming drawing table to produce rectangular holes with different dimensions.

With this structure, if one rectangular hole is used for a long time and contamination occurs, another rectangular hole can be used.
Complicated maintenance work such as replacing the forming aperture, cleaning the forming aperture, and adjusting the axis after replacing the forming aperture can be reduced. In addition, for axis adjustment, it is possible to provide rectangular holes without variations in shape accuracy in parallelism and perpendicularity, and since the rectangular holes are arranged in the same direction on the forming aperture, it is possible to provide rectangular holes with no variation in shape accuracy in parallelism and squareness. Adjustments can be easily made by simply moving the mirror without changing the alignment conditions of the mirror.

It should be noted that the present invention is not limited to the above embodiments; for example, the conductive thin wire may be made of gold, platinum,
Any one of silver, tungsten or gold-coated tungsten and gold-coated glass fiber; the conductive thin plate may be molybdenum, titanium, tungsten, stainless steel, copper, aluminum, gold; In addition,
Any one of gold-coated molybdenum, titanium, tungsten, stainless steel, copper, and aluminum, and the drawing base is made of titanium, stainless steel, copper, phosphor bronze, brass, beryllium copper, aluminum, and aluminum alloy. and gold-coated ceramics.

It goes without saying that other modifications can be made without departing from the gist of the invention.

〔Effect of the invention〕

As described in detail above, according to the present invention, the rectangular hole of the forming aperture is constructed based on a thin wire with good linearity and a highly accurate pin and its arrangement, thereby improving the squareness, parallelism, and edges of the rectangle. This method has the advantage that it is possible to eliminate shaping beam shape errors caused by shape errors of unevenness, and it is possible to draw patterns with superior quality.

In addition, since the pins and their arrangement are used as the basis for assembly, it is possible to easily form a rectangular hole with high precision, and also to set an accurate angle, making it possible to correct the rectangular pattern. moreover,
Since a trapezoidal hole can be formed, this forming aperture can be used to draw a pattern having an oblique side.

In addition, by constructing a mesh of gold wire and forming a large number of rectangular holes, it is possible to provide rectangular holes with uniform shape accuracy, and to prevent contamination of rectangular holes, it is possible to The rectangular hole can be replaced without changing the alignment conditions of the mirror by simply moving it to a normal rectangular hole that is not in use, which has the advantage of facilitating maintenance and adjustment of the mirror.

[Brief explanation of drawings]

1 and 2 respectively show the configuration of a conventional forming aperture, and FIG. 3 shows a fixing base of the forming aperture.
5 is a cross-sectional view taken along the line, FIG. 4 is a plan view showing an enlarged insertion groove, FIG. This figure shows an example of a shaping aperture for a beam exposure device, and figure a is a partially cutaway plan view and figure b is
6 is a cross-sectional view taken along the - line of FIG.
is a cross-sectional view taken along the - line in FIG. 400... Base for forming and drawing, 210, 211,
220, 221, 701, 701', 702, 7
02', 703, 703', 704, 704', 8
10,811,820,821,910,91
1,920,921,922,923,101
0,1010',1011,1011',101
2,1012',1013,1013',101
4, 1014', 1015, 1015'... Cylindrical pin, 101, 101', 102, 102', 60
1,602,603,604,801,801',
802, 802', 901, 901', 902, 9
03,1021,1021',1022,102
2', 1023, 1023', 1024, 102
4', 1025, 1025', 1026, 102
6'...Gold wire, 100, 600, 800, 10
00, 130', 830, 1301... rectangular hole,
900,930...Trapezoidal hole, 130,131,1
30a, 130b, 1300, 1310...Molybdenum thin plate.

Claims (1)

[Claims] 1. A charged beam exposure device that exposes a pattern by imaging a charged beam that has passed through a beam shaping aperture on a sample surface, comprising: a shaping aperture base provided at a predetermined position of the device; A conductive thin plate disposed on a base and having a through hole, a plurality of pins disposed on the base corresponding to the shape of the through hole, and a side surface of a conductive thin wire attached to the pin. A forming aperture for a charged beam exposure apparatus, characterized in that the aperture is arranged inside the periphery of the through hole, and the aperture edge is formed by the thin wire. 2. The through hole of the conductive thin plate is a rectangular hole, the plurality of pins are cylindrical with a diameter slightly smaller than one side of the rectangular hole, and the thin conductive wire is attached to the outer peripheral surface of the pin to form a rectangular hole. 2. A shaping aperture for a charged beam exposure apparatus according to claim 1, wherein an aperture edge is formed. 3. The through hole of the conductive thin plate is made into a rectangular hole, the diameter of a predetermined pin among the plurality of pins is different from that of the other pins, and at least one of the attached conductive thin wires is inclined with respect to the other thin wires. A shaping aperture for a charged beam exposure apparatus according to claim 1, wherein the shaping aperture is characterized in that: 4 The through hole of the conductive thin plate is a polygonal hole with one corner set at a right angle, and the side surface of the conductive thin wire attached by the plurality of pins is arranged inside the periphery of the polygonal hole. 2. A shaping aperture for a charged beam exposure apparatus according to claim 1, characterized in that the aperture edge is formed by forming an aperture edge. 5 A plurality of rectangular holes are provided in the conductive thin plate, and a side surface of the conductive thin wire attached by the plurality of pins is arranged inside the periphery of each of the rectangular holes, and a plurality of apertures are formed. 2. A shaping aperture for a charged beam exposure apparatus according to claim 1, characterized in that: 6. The conductive thin wire is made of any one of gold, platinum, silver, tungsten, or gold-coated tungsten and gold-coated glass fiber, and the conductive thin plate is made of molybdenum, titanium, tungsten, stainless steel, copper, aluminum, gold,
Furthermore, in addition to the above materials, any one of gold-coated molybdenum, titanium, tungsten, stainless steel, copper and aluminum,
The forming and drawing base is made of titanium, stainless steel, copper,
Phosphor bronze, brass, beryllium copper, aluminum,
2. The shaping aperture for a charged beam exposure apparatus according to claim 1, wherein the shaping aperture is made of one of an aluminum alloy and gold-coated ceramics.