JPH0150188B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a rotating disk type high voltage generator that can be used, for example, in ion implanters, energy analysis for surface analysis, and the like.

[Prior Art] Generally, the Juan de Graaf type electrostatic generator is known as a device that generates high voltage of several hundred KV or more, but it is large and difficult to handle, so it is difficult to handle it. For this purpose, a small, easy-to-handle electrostatic power generation rotating disk type high voltage generator was developed. In principle, a rotating disk type high voltage generator is an insulator with a central axis located between a low voltage part on the input side that receives charges and a high voltage part on the output side that sends out charges in opposition to this low voltage part. A large number of charge carriers of the same shape are provided at equal intervals on a concentric circle along the outer periphery of the rotating disk, and by rotating the insulated rotating disk, the inside of the inductor electrode of the same shape in the low voltage section and the high voltage section can be It is configured to cross-pass and carry charge from the low voltage section to the high voltage section by electrostatic induction. An example of this type of device is Japanese Patent No. 1452812 (Japanese Patent Publication No. 62-60918). In the device described in this publication, as shown in FIG. 4 of the attached drawings, the device rotates by contacting a large number of charge carriers B provided at equal intervals along the outer periphery of an insulated rotating disk A. Conductive belt members C and D of the same shape are connected to a low voltage side inductor electrode E and a high voltage side inductor electrode F of the same shape.
It is placed in the area where it is provided.

[Problems to be Solved by the Invention] The rotating disk type high voltage generator as described above is usually used as a constant current source, but the current obtained in this case is not a complete direct current, but is generated by the charge carrier B.
When passing through the gap H between the inductor electrode pieces F1 and F2 of the high-voltage side inductor electrode F, charges are sent to the high voltage part, so that the inductor electrode pieces E1, E2; F1, F2 as shown in FIG. The gap G, H between them is radial, that is, each charge carrier B
In the device described above, which extends perpendicularly to the direction of motion, the flow actually becomes pulsating as shown in FIG. Therefore, ripples in the output voltage are unavoidable. As a specific example, if the rotation speed of the insulated rotating disk A is 20 r.ps, the number of charge carriers B in the insulated rotating disk A is 24, the load resistance is 10 ⁹ Ω, and the stray capacitance is 10 ^-4 F, then the ripple The rate is approximately 2×
10 ^-3 .

By the way, the ripple rate generally required for high-voltage power supplies for surface analysis using particle acceleration is
10 ^-4 , and it is not possible to obtain an output voltage with such a low ripple rate with the above-mentioned rotating disk type high voltage generator.

SUMMARY OF THE INVENTION An object of the present invention is to provide an improved rotating disc type high voltage generator that can substantially reduce the pulsating current flowing into the high voltage side.

[Means for Solving the Problems] In order to achieve the above object, according to the present invention, an insulated rotating disk, a large number of charge carriers 4 having the same shape, and a flat plate-like low voltage side having the same shape. Each charge carrier has an inductor electrode assembly, a high voltage side inductor electrode assembly, a grounded low voltage side conductive belt member and a high voltage side conductive belt member connected to a high voltage output terminal. An outer contact surface, a low voltage side inductor electrode assembly, and a high voltage side inductor electrode assembly, which are provided at equal intervals on a concentric circle spanning both sides of the insulated rotating disk and are in contact with the low voltage side conductive belt member and the high voltage side conductive belt member. The rotational trajectory of each charge carrier is provided with an opposing surface facing the side inductor electrode assembly, and the low voltage side inductor electrode assembly and the high voltage side inductor electrode assembly are located at diametrically opposed positions passing through the rotation center of the insulated rotating disk. A low voltage side conductive belt member and a high voltage side conductive belt member are provided along the low voltage side inductor electrode assembly and the high voltage side The outer contact surface of each charge carrier passing through the areas of the inductor electrode assembly is sequentially connected to a low voltage side conductive belt member and a high voltage side conductive belt member. In a rotating disk type high voltage generator that is in contact with each other, a low voltage side inductor electrode assembly and a high voltage side inductor electrode assembly are separated by a gap that is at an angle with respect to the radial direction of the insulated rotating disk, and are separated from each other. It consists of two planar electrodes parallel to the insulated rotating disk connected to a voltage source with opposite polarities, and has a width of an area sandwiching the front end and rear end of each gap in the rotational direction as seen from the center of rotation. It is characterized in that the width is set larger than the width in the direction including the gap between the charge carrier and the adjacent charge carrier when viewed from the center of rotation.

[Function] In the rotating disk type high voltage generator according to the present invention, the gap between the two plate-shaped electrodes of the low voltage side inductor electrode assembly and the high voltage side inductor electrode assembly is arranged in the radial direction of the insulated rotating disk. The charge carriers are provided at an angle to the gap and are configured such that a plurality of the charge carriers simultaneously pass through the gap. It passes between the gaps of the high voltage side inductor electrode assembly at a substantially constant areal velocity. In other words, there are always multiple charge carriers passing through the gap, and as a result,
The pulsating current flowing to the high voltage side is reduced to a substantially negligible level.

[Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings FIGS. 1, 2, and 3.

1, 2 and 3 show the main parts of a rotating disk type high voltage generator according to an embodiment of the present invention, 1 and 2 are fixed acrylic disks; A rotating acrylic disk 3 forming an insulating rotating disk is arranged between them, and this rotating acrylic disk 3 is connected to a suitable drive so as to rotate at the required rotational speed.

The fixed acrylic disk 1 has two low voltage side inductor electrodes 1a and 1a, respectively, as shown in FIG.
1b, these low voltage side inductor electrodes 1a, 1
high voltage side inductor electrodes 1c, 1d that are diametrically opposed to b and have the same symmetrical shape as these low voltage side inductor electrodes 1a, 1b, and low voltage side inductor electrodes 1a, 1b and high voltage side inductor electrode 1.
Twelve intermediate inductor electrodes 1e, six on each side, are installed at intervals between the electrodes c and 1d. Two low voltage side inductor electrodes 1a, 1b
The gap 1f between them and the gap 1g between the two high voltage side inductor electrodes 1c and 1d each form an angle of 10° to 30° with respect to the radial direction of the rotating acrylic disk 3. charge carriers 4 can pass through at the same time. As shown, the low voltage side inductor electrode 1a is connected to the negative terminal of the low voltage side power source E1, and the low voltage side inductor electrode 1b is connected to the positive terminal of the low voltage side power source E1. Similarly, the high voltage side inductor electrode 1c is connected to the negative terminal of the high voltage side power source E2, and the high voltage side inductor electrode 1d is connected to the positive terminal of the high voltage side power source E2. Although the rotating acrylic disk 2 is not shown, it is constructed in exactly the same way as the rotating acrylic disk 1.

As shown in FIG. 2, the rotating acrylic disk 3 is
Twenty-four charge carriers 4 are attached concentrically to the outer periphery at equal intervals. Each charge carrier 4 has a third
As shown in the partially enlarged sectional view in the figure, each inductor electrode 1a provided on the rotating acrylic disks 1 and 2,
1b; flat surface 4a that closely opposes 2a and 2b;
4b and an outer contact surface 4c that comes into contact with the conductive rubber belts 5 and 6. Flat surfaces 4a and 4b on both sides of each charge carrier 4 and each inductor electrode 1a,
The distance between 1b and 2a and 2b can be set as narrow as possible.

As shown in FIGS. 1 and 2, the conductive rubber belt 5 is connected to the low voltage side inductor electrodes 1a and 1b.
A pulley 5 is provided at a position where it contacts the outer contact surface 4c of each charge carrier 4 within the range provided with.
a and 5b, and is configured to rotate at the same speed as the circumferential speed of the outer contact surface 4c of each charge carrier 4 on the rotating acrylic disk 3. Further, the conductive rubber belt 5 can be made of a synthetic rubber material containing carbon powder, for example, and is connected to the ground potential as shown in FIG. 2 via pulleys 5a and 5b. 5
is each charge carrier 4 in the rotating acrylic disk 3
When it comes into contact with the outer contact surface 4c, it contacts smoothly without impact, reliably transmits the electric potential, and moves away smoothly.

Similarly to the conductive rubber belt 5 on the low voltage side, the conductive rubber belt 6 provided on the high voltage side extends over the outer contact surface of each charge carrier 4 within the range where the high voltage side inductor electrodes 1c and 1d are provided. The high voltage output terminal HV
electrically connected to. Note that the configuration of each part is point symmetrical in order to achieve operational balance.

The illustrated device can be used with the entire device housed in high-pressure SF ₆ gas, and each charge carrier 4 passes through the low voltage side inductor electrodes 1a, 1b.
The low voltage side inductor electrode 1a is at ground potential because it contacts the low voltage side conductive rubber belt 5, and is at a negative potential because it is connected to the negative terminal of the low voltage side power source E1.
When passing through, positive charges appear on the flat surfaces 4a, 4b on both sides of each charge carrier 4 due to electrostatic induction.
This positive charge is maintained as it is without generation of sparks even when the charge carrier 4 is separated from the low voltage side conductive rubber belt 5 and is cut off from the ground potential. In this way, each positively charged charge carrier 4 has its potential increased through the six intermediate inductor electrodes 1e, enters the high voltage side inductor electrode 1c, and comes into contact with the high voltage side conductive rubber belt 6. do. In this case, high voltage side inductor electrode 1
Since there is exactly the same potential relationship between the conductive rubber belt 6 on the high voltage side and the inductor electrode 1a on the low voltage side in the area c, no spark discharge occurs. When each charge carrier 4 carrying a positive charge passes through the gap 1g between the high voltage side inductor electrodes 1c and 1d, the positive charge of each charge carrier 4 is sent to the high voltage side. Thereafter, when each charge carrier 4 passes through the high voltage side inductor electrode 1d which is connected to the positive terminal of the high voltage side power supply E2 and is at a positive potential, the flat surfaces on both sides of each charge carrier 4 are caused by electrostatic induction. Negative charges appear on surfaces 4a and 4b. In this way, each charge carrier 4 having a negative charge enters the low voltage side inductor electrode 1b again and contacts the low voltage side conductive rubber belt 5 to ground the negative charge. By repeating this operation many times one after another, a desired high voltage can be obtained at the high voltage side power supply. The principle of generating such a high voltage is the same as that disclosed in, for example, Japanese Patent No. 1452812 (Japanese Patent Publication No. 62-60918), and is well known per se, so a detailed explanation will be omitted.

In the illustrated embodiment, the inductor electrodes on the low voltage side and the high voltage side may be of any shape as long as the inductor gap is provided at an angle with respect to the radial direction of the rotating acrylic disk. Furthermore, the number and structure of the charge carriers and intermediate inductor electrodes can be changed as desired. Additionally, the fixed and rotating acrylic disks may be constructed of other suitable electrically insulating materials. The conductive rubber belt may also be replaced by other suitable materials, such as conductive elastomer.

[Effects of the Invention] As explained above, in the rotating disk type high voltage generator according to the present invention, the low voltage side inductor electrode assembly and the high voltage side inductor electrode assembly are each connected to a large number of charge carriers. is divided by a gap formed at an angle with respect to the radial direction of an insulated rotating disk provided on the outer periphery, and consists of at least two electrodes electrically connected with mutually opposite polarities, and the gap is connected to the charge carrier. Since a plurality of charge carriers are configured to cross and pass simultaneously, each charge carrier passes between the gaps of the low-voltage side inductor electrode assembly and between the gaps of the high-voltage side inductor electrode assembly at a nearly constant areal velocity. In other words, there are always a plurality of charge carriers passing through the gap, and as a result, the pulsating current flowing to the high voltage side can be reduced to a substantially negligible level. In fact, the ripple rate of the output voltage can be much lower than in the case of conventional high voltage generators, i.e. as low as 10 ^-4 . This results in
The device according to the invention can be satisfactorily used as a high voltage power source for surface analysis etc. by particle acceleration.

[Brief explanation of drawings]

FIG. 1 is a schematic plan view showing an embodiment of the present invention;
FIG. 2 is a schematic diagram showing the internal structure of the device in FIG. 1;
FIG. 3 is an enlarged partial sectional view taken along the arrow - in FIG. 1, FIG. 4 is a partial sectional view showing a conventional example of a rotating disk type high voltage generator, and FIG. It is a graph showing a current waveform flowing on the high voltage side. In the figure, 1: fixed acrylic disk, 1a, 1b: low voltage side inductor electrodes, 1c, 1d: high voltage side inductor electrodes, 1f, 1g: gap, 3: rotating acrylic disk, 4: charge carrier, 5, 6 : Conductive rubber belt, E1, E2: Power supply, HV: High voltage output terminal.

Claims (1)

[Claims] 1. An insulated rotating disk 3, a large number of charge carriers 4 having the same shape, low voltage side inductor electrode assemblies 1a, 1b and a high voltage side inductor electrode assembly 1c having the same shape and flat plate shape. 1d, a grounded low voltage side conductive belt member 5 and a high voltage side conductive belt member 6 connected to the high voltage output terminal HV, each charge carrier 4 is connected to both sides of the insulated rotating disk 3. An outer contact surface 4c, which is provided at equal intervals on a concentric circle and contacts the low-voltage side conductive belt member 5 and the high-voltage side conductive belt member 6, the low-voltage side inductor electrode assembly 1a, 1b, and the high voltage side. a facing surface 4a facing the side inductor electrode assemblies 1c, 1d;
4b, and the low-voltage side inductor electrode assemblies 1a, 1b and the high-voltage side inductor electrode assemblies 1c, 1d are arranged in the rotation orbit of each charge carrier 4 at diametrically opposed positions passing through the rotation center of the insulated rotating disk 3. A low-voltage side conductive belt member 5 and a high-voltage side conductive belt member 6 are provided along the low-voltage side inductor electrode assembly 1a, respectively, and generate an induced charge for each charge carrier 4. 1b and high voltage side inductor electrode assemblies 1c and 1d, and the outer contact surface 4c of each charge carrier 4 passing through these areas is a low voltage side conductive belt member. 5 and high voltage side conductive belt member 6, the low voltage side inductor electrode assemblies 1a, 1b and the high voltage side inductor electrode assemblies 1c, 1d are insulated, respectively. Two planar electrodes 1a, 1b; 1c parallel to the insulated rotating disk 3, which are divided by a gap 1f; 1g and connected to a voltage source with opposite polarities to each other; ,1d
The width of the region sandwiching the front end in the rotational direction and the rear end in the rotational direction of each gap 1f and 1g as seen from the center of rotation is the distance between one charge carrier 4 and the adjacent charge carrier 4 when seen from the center of rotation. A rotating disk type high voltage generator characterized in that the width is set larger than the circumferential width including the circumferential width.