JPH0150189B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a rotating disk type high voltage generator that can be used, for example, in ion implanters, energy analysis for surface analysis, and the like.

[Prior Art] Generally, the Van de Graaf type electrostatic generator is known as a device that generates high voltage of several hundred KV or more, but it is large and difficult to handle, so recently it has been replaced with the one described above. For these purposes, electrostatic power generation type rotating disk type high voltage generators, which are small and easy to handle, have come to be used. In principle, a rotating disk type high voltage generator is an insulator with a central axis located between a low voltage part on the input side that receives charges and a high voltage part on the output side that sends out charges in opposition to this low voltage part. A large number of charge carriers of the same shape are provided at equal intervals on a concentric circle along the outer periphery of the rotating disk, and by rotating the insulated rotating disk, the inside of the inductor electrode of the same shape in the low voltage section and the high voltage section can be It is configured to cross-pass and carry charge from the low voltage section to the high voltage section by electrostatic induction. An example of this type of device is Patent No. 1452812 (Tokuko Sho
62-60918).

Such a rotating disk type high voltage generator is usually used as a constant current source, but due to its structure, pulsating current appears on the high voltage side, so ripples in the output voltage are unavoidable. , the ripple rate is approximately 2×10 ^-3 .

By the way, the ripple rate generally required for high-voltage power supplies for surface analysis using particle acceleration is
10 ^-4 , and it is not possible to obtain an output voltage with such a low ripple rate with the above-mentioned rotating disk type high voltage generator.

In order to meet these requirements, we first installed an insulated rotating disk, a large number of charge carriers of the same shape arranged concentrically along its outer periphery, and diametrically opposed charge carriers passing through the center of rotation of the insulated rotating disk. a low-voltage side inductor electrode assembly and a high-voltage side inductor electrode assembly of the same shape, each of which is provided along the rotational trajectory of each charge carrier at a position and generates an induced charge with respect to each of the charge carriers; a grounded low voltage side conductive conductor disposed along the regions of the low voltage side inductor electrode assembly and the high voltage side inductor electrode assembly and sequentially contacting each charge carrier passing within these regions; In a rotating disc-type high voltage generator having a belt member and a high voltage side conductive belt member connected to a high voltage output terminal, the low voltage side inductor electrode assembly and the high voltage side inductor electrode assembly are respectively rotated in an insulated manner. It consists of two planar electrodes parallel to an insulated rotating disk that is divided by a gap that forms an angle to the radial direction of the disk and connected to a voltage source with opposite polarity. We propose that the width of the region sandwiching the front end in the rotation direction and the rear end in the rotation direction of the charge carrier be set larger than the width in the circumferential direction including the distance between adjacent charge carriers when viewed from the center of rotation. , it was possible to substantially reduce the pulsating current flowing into the high voltage side.

[Problems to be Solved by the Invention] By the way, in order to increase the current value generated by such a rotating disk type high voltage generator, it is necessary to increase the rotation speed of the insulated rotating disk provided with the charge carrier. Alternatively, it is necessary to apply as high a voltage as possible to the inductor electrode.

Increasing the rotational speed of the insulated rotating disk provided with the charge carrier is limited to 30 rotations/second because the centrifugal force increases in proportion to the square of the rotational speed.

On the other hand, when the voltage applied to the inductor electrode is increased, the capacitance changes as each charge carrier leaves the inductor electrode, resulting in a high potential difference between each charge carrier and the inductor electrode, causing a discharge. may occur. Therefore, the voltage applied to the inductor electrode is also limited, and as a result, the increase in the current value on the output side may also be limited.

Therefore, an object of the present invention is to significantly increase the output current value by preventing discharge from occurring when each charge carrier leaves the inductor electrode even if the voltage applied to the inductor electrode is increased. An object of the present invention is to provide a rotating disk type high voltage generator.

[Means for Solving the Problems] In order to achieve the above object, a rotating disk type high voltage generator according to the present invention includes an electrically insulating rotating disk, a large number of charge carriers having the same shape, and a plurality of charge carriers having the same shape. A flat plate-shaped low-voltage side inductor electrode and a high-voltage side inductor electrode, and the same number of intermediate electrodes each having a corresponding shape and arranged between these inductor electrodes in the same plane as the low-voltage side inductor electrode and the high-voltage side inductor electrode. It consists of an inductor electrode, a grounded low-voltage side conductive belt member, and a high-voltage side conductive belt member connected to the high voltage output terminal, and each charge carrier extends concentrically across both sides of an insulated rotating disk. The low voltage conductive belt includes an outer contact surface that is provided at equal intervals and that contacts the low voltage side conductive belt member and the high voltage side conductive belt member, and an opposing surface that faces the low voltage side inductor electrode and the high voltage side inductor electrode. A side inductor electrode and a high-voltage side inductor electrode are provided along the rotational trajectory of each charge carrier at diametrically opposed positions passing through the rotation center of the insulated rotating disk, and are configured to generate induced charges for each charge carrier. A low voltage side conductive belt member and a high voltage side conductive belt member are respectively provided along the areas where the low voltage side inductor electrodes and the high voltage side inductor electrodes are provided, and pass through these areas. The present invention is characterized in that the outer contact surface of each charge carrier contacts the low-voltage conductive belt member and the high-voltage conductive belt member in sequence.

Preferably, the front edge portions of the low-voltage side inductor electrode, the high-voltage side inductor electrode, and each intermediate inductor electrode with respect to the rotational direction of each charge carrier have a large distance from the rotation orbit of each charge carrier, respectively. It can be bent like this.

[Function] In the rotating disk type high voltage generator according to the present invention, the same number of intermediate inductors with corresponding shapes are provided between the low voltage side inductor electrode and the high voltage side inductor electrode, respectively, in the same plane as these inductor electrodes. By providing the electrodes, the potential between the low voltage inductor electrode and the high voltage side inductor electrode is divided and has a stepped potential gradient, so that each charge carrier is separated from the low voltage side inductor electrode. Charges can be stably transported from the low-voltage side to the high-voltage side without causing discharge when leaving the battery.

In addition, the low voltage side inductor electrode, the high voltage side inductor electrode, and each intermediate inductor electrode are connected to each charge carrier that rotates and passes by bending the edge portion on the exit side of each charge carrier in a direction away from the rotational orbit of each charge carrier. Because the distance between the charge carriers and the inductor electrodes is large, even if a high potential difference occurs between each charge carrier and each inductor electrode as each charge carrier leaves each inductor electrode, the distance between them is maintained. Due to the long distance, the electric field strength can be reduced to about 1/3. Thereby,
It is possible to prevent discharge from occurring when each charge carrier leaves each inductor electrode.

[Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

Hereinafter, one embodiment of the present invention will be described with reference to the accompanying drawings.

1 to 4 show the main parts of a rotating disk type high voltage generator according to an embodiment of the present invention, 1 and 2 are fixed acrylic disks, and an insulated rotating A rotating acrylic disk 3 in the form of a disk is arranged, which is connected to a suitable drive device so as to rotate at the required rotational speed.

The fixed acrylic disk 1 has two low voltage side inductor electrodes 1a, 1 as shown in FIG.
b, these low voltage side inductor electrodes 1a, 1b
and high voltage side inductor electrodes 1c, 1d which are diametrically opposed to each other and have the same symmetrical shape as these low voltage side inductor electrodes 1a, 1b, and low voltage side inductor electrodes 1a, 1b and high voltage side inductor electrodes 1c,
1d, 12 intermediate inductor electrodes 1e, 6 on each side, are installed at intervals from each other. These intermediate inductor electrodes 1e equally divide the high potential difference between the low voltage side inductor electrodes 1a, 1b and the high voltage side inductor electrodes 1c, 1d to create a stepwise potential gradient.

As shown, the low voltage side inductor electrode 1a is connected to the negative terminal of the low voltage side power source E1, and the low voltage side inductor electrode 1b is connected to the positive terminal of the low voltage side power source E1. Similarly, the high voltage side inductor electrode 1c is connected to the negative terminal of the high voltage side power source E2, and the high voltage side inductor electrode 1d is connected to the positive terminal of the high voltage side power source E2. Although the fixed acrylic disc 2 is not shown, it is constructed in exactly the same way as the fixed acrylic disc 1.

As shown in FIG. 3, the two low voltage side inductor electrodes 1a, 1b, the two high voltage side inductor electrodes 1c, 1d, and each intermediate inductor electrode 1e are located at the front edge portion of the rotating acrylic disk 3 in the direction of rotation. are bent away from each charge carrier 4 on the rotating acrylic disk 3, so that the gap between each charge carrier and each inductor electrode as each charge carrier 4 exits each inductor electrode Even if a high potential difference occurs between them, the strength of the electric field between them is significantly reduced (by about 1/3).

As shown in FIG. 2, the rotating acrylic disk 3 is
Twenty-four charge carriers 4 are attached concentrically to the outer periphery at equal intervals. Each charge carrier 4 has a fourth
As shown in the partially enlarged sectional view in the figure, each inductor electrode 1a provided on the fixed acrylic disks 1 and 2,
1b; flat surface 4a that closely opposes 2a and 2b;
4b and an outer contact surface 4c that comes into contact with the conductive rubber belts 5 and 6. Flat surfaces 4a and 4b on both sides of each charge carrier 4 and each inductor electrode 1a,
The distance between 1b and 2a and 2b can be set as narrow as possible.

As shown in FIGS. 1 and 2, the conductive rubber belt 5 is connected to the low voltage side inductor electrodes 1a and 1b.
A pulley 5 is provided at a position where it contacts the outer contact surface 4c of each charge carrier 4 within the range provided with.
a and 5b, and is configured to rotate at the same speed as the circumferential speed of the outer contact surface 4c of each charge carrier 4 on the rotating acrylic disk 3. Further, the conductive rubber belt 5 can be made of a synthetic rubber material containing carbon powder, for example, and is connected to the ground potential as shown in FIG. 2 via pulleys 5a and 5b. 5
is each charge carrier 4 in the rotating acrylic disk 3
When it comes into contact with the outer contact surface 4c, it contacts smoothly without impact, reliably transmits the electric potential, and moves away smoothly.

Similarly to the conductive rubber belt 5 on the low voltage side, the conductive rubber belt 6 provided on the high voltage side extends over the outer contact surface of each charge carrier 4 within the range where the high voltage side inductor electrodes 1c and 1d are provided. The high voltage output terminal HV
electrically connected to. Note that the configuration of each part is point symmetrical in order to achieve operational balance.

The illustrated device can be used with the whole housed in high-pressure SF ₆ gas, and each charge carrier 4 passes through the low-voltage side inductor electrodes 1a, 1b by the low-voltage side conductive rubber belt 5. When passing through the low-voltage inductor electrode 1a, which is connected to the negative terminal of the low-voltage power source E1 and has a negative potential, the flat surfaces on both sides of each charge carrier 4 are caused by electrostatic induction. Positive charges appear on surfaces 4a and 4b. This positive charge is maintained as it is without generation of sparks even when the charge carrier 4 is separated from the low voltage side conductive rubber belt 5 and is cut off from the ground potential. Each of these positively charged charge carriers 4 is connected to six intermediate inductor electrodes 1 that provide a stepped potential gradient.
By passing through e, the potential can be stably increased without discharge, and the high voltage side inductor electrode 1
c and comes into contact with the high voltage side conductive rubber belt 6. In this case, the high voltage side conductive rubber belt 6 is inside the high voltage side inductor electrode 1c.
Since there is exactly the same potential relationship with respect to the low voltage side inductor electrode 1a, no spark discharge occurs. When each charge carrier 4 with a positive charge passes through the gap 1g between the high voltage side inductor electrodes 1c and 1d, each charge carrier 4
The positive charge is sent to the high voltage side. Thereafter, each charge carrier 4 is connected to the positive terminal of the high voltage side power source E2, and the high voltage side inductor electrode 1d is at a positive potential.
each charge carrier 4 due to electrostatic induction.
Negative charges appear on the flat surfaces 4a and 4b on both sides. In this way, each charge carrier 4 having a negative charge enters the low voltage side inductor electrode 1b again and contacts the low voltage side conductive rubber belt 5 to ground the negative charge. By repeating this operation many times one after another, a desired high voltage can be obtained at the high voltage side power supply. The principle of generating such a high voltage is the same as that disclosed in, for example, Japanese Patent No. 1452812 (Japanese Patent Publication No. 62-60918), and is well known per se, so a detailed explanation will be omitted. As a specific example, between the inductor electrode and each charge carrier 4
When a voltage of 40KV is applied, the electric field between the front edge of the inductor electrode and each charge carrier 4 is 65KV/mm, whereas in the conventional inductor electrode structure in which all the electrodes are arranged on the same plane, the electric field between the front edge of the inductor electrode and each charge carrier 4 is 65KV/mm. , the electric field can be reduced to 22 KV/mm in the structure of the embodiment of the invention shown in FIG. As a result, it is possible to increase the voltage applied between the low voltage side inductor electrode and each charge carrier by 50%, thereby increasing the amount of current transfer by nearly 50%.

Note that the present invention is not limited to the types of devices shown in FIGS. 1 and 2, but can be similarly applied to other types of electrostatic power generation devices as disclosed in the above-mentioned publications.

[Effects of the Invention] As explained above, according to the present invention, the same number of intermediate portions are provided between the low-voltage side inductor electrode and the high-voltage side inductor electrode, each having a corresponding shape and in the same plane as these inductor electrodes. Since the inductor electrode is provided, the potential between the low-voltage side inductor electrode and the high-voltage side inductor electrode is divided, resulting in a stepped potential gradient, and the potential between each charge carrier and each inductor electrode is divided. It is possible to prevent abnormal discharge such as sparks between the two, and it is possible to stably transport charge from the low voltage side to the high voltage side.

In addition, the front edge portion of the low voltage side inductor electrode, the high voltage side inductor electrode, and each intermediate inductor electrode between them with respect to the rotational direction of each of the charge carriers is defined as the rotational trajectory of each of the charge carriers. , so that each charge carrier passes across each adjacent inductor electrode even if the applied voltage between the low-voltage inductor electrode and each charge carrier increases. There is no risk of electrical discharge occurring during this process, and as a result, the amount of current carried to the high voltage side can be significantly increased.

[Brief explanation of drawings]

FIG. 1 is a schematic plan view showing a rotating disk type high voltage generator embodying the present invention, FIG. 2 is a schematic diagram showing the internal structure of the device shown in FIG. 1, and FIG. FIG. 2 is an enlarged partial sectional view showing the structure of the main part of the device, and FIG. 4 is an enlarged sectional view showing the structure of the charge carrier. In the figure, 1: fixed acrylic disk, 1a, 1b: low voltage side inductor electrodes, 1c, 1d: high voltage side inductor electrodes, 1e: intermediate inductor electrode, 3:
Rotating acrylic disk, 4: charge carrier, 5, 6: conductive rubber belt.

Claims (1)

[Claims] 1. An electrically insulating rotating disk 3, a large number of charge carriers 4 having the same shape, low voltage side inductor electrodes 1a, 1b and high voltage side inductor electrodes 1c, 1d having the same shape and flat plate shape. , low voltage side inductor electrode 1
a, 1b and high voltage side inductor electrodes 1c, 1d
These inductor electrodes 1a, 1 in the same plane as
b; The same number of intermediate inductor electrodes 1e with corresponding shapes arranged between 1c and 1d.
, a low voltage side conductive belt member 5 which is grounded, and a high voltage side conductive belt member 6 which is connected to the high voltage output terminal HV, and each charge carrier 4 straddles both sides of the insulated rotating disk 3. The outer contact surface 4c is provided at equal intervals on a concentric circle and contacts the low voltage side conductive belt member 5 and the high voltage side conductive belt member 6, the low voltage side inductor electrodes 1a and 1b, and the high voltage side inductor electrode 1c. , 1d, and low voltage side inductor electrodes 1a, 1b and high voltage side inductor electrodes 1c, 1.
d are provided along the rotational trajectory of each charge carrier 4 at diametrically opposite positions passing through the center of rotation of the insulated rotating disk 3, and generate an induced charge for each charge carrier 4, and also generate a low voltage. A side conductive belt member 5 and a high voltage side conductive belt member 6 are provided along the regions where the low voltage side inductor electrodes 1a, 1b and the high voltage side inductor electrodes 1c, 1d are provided, respectively. A rotating disk-type high voltage generator characterized in that the outer contact surface 4c of each charge carrier 4 passing through contacts the low voltage side conductive belt member 5 and the high voltage side conductive belt member 6 in sequence. Device. 2. The front edge portion of the low voltage side inductor electrodes 1a, 1b, the high voltage side inductor electrodes 1c, 1d, and each intermediate inductor electrode 1e with respect to the rotational direction of each charge carrier 4 is connected to the rotational trajectory of each charge carrier 4, respectively. The rotating disk type high voltage generator according to claim 1, characterized in that the rotating disk type high voltage generator is bent so as to increase the distance between the rotating disk type high voltage generator and the rotating disk type high voltage generator.