JPH0210526B2 - - Google Patents
Info
- Publication number
- JPH0210526B2 JPH0210526B2 JP58172140A JP17214083A JPH0210526B2 JP H0210526 B2 JPH0210526 B2 JP H0210526B2 JP 58172140 A JP58172140 A JP 58172140A JP 17214083 A JP17214083 A JP 17214083A JP H0210526 B2 JPH0210526 B2 JP H0210526B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- solvent
- coating
- transparent conductive
- poor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 67
- 239000002904 solvent Substances 0.000 claims description 32
- 238000000576 coating method Methods 0.000 claims description 29
- 239000011248 coating agent Substances 0.000 claims description 25
- 229920006393 polyether sulfone Polymers 0.000 claims description 18
- 229920005989 resin Polymers 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 11
- 229910003437 indium oxide Inorganic materials 0.000 claims description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 claims description 4
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000012046 mixed solvent Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 2
- 229920002492 poly(sulfone) Polymers 0.000 claims description 2
- 238000000034 method Methods 0.000 description 17
- 230000006866 deterioration Effects 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 4
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 4
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Laminated Bodies (AREA)
Description
【発明の詳細な説明】
本発明はポリエーテルスルフオン(以下PESと
略す)またはポリスルフオン(以下PSと略す)
を透明基板とし、この少なくとも片面に紫外線硬
化樹脂層を形成し、該樹脂層の上に酸化インジウ
ムを主成分とする薄膜を形成する積層透明導電フ
イルムの製造法に係るものである。
詳しくはPESおよびPSフイルムの欠点を改良
したコーテイングフイルムを得、この上に導電薄
膜を形成して優れた性質を有する透明導電性フイ
ルムを得んとするものである。
近年液晶を用いる表示素子の伸長は著じるしい
ものが有り、これに用いられる透明電極の重要性
も増しつつある。
従来液晶表示素子用透明電極としては薄いガラ
ス板上に半導体薄膜を形成した謂ゆるネサガラス
が広く用いられて来たが、素子の薄型化、軽量
化、量産化が要求され、高分子フイルム上に半導
体薄膜を形成した透明電極の検討が広範に行なわ
れるようになり、一部実用化され始めている。
然しながら、高分子フイルムを用いた導電性フ
イルムは薄型化、軽量化、連続製造、打抜きが可
能であることの為の量産化等の要求は満足するも
のの各種の問題を有していることも事実である。
即ち、
(1) 液晶の配向処理に際してのラビング処理工程
で耐摩耗性が悪く表面抵抗が悪くなる。
(2) 一般にポリエステルフイルムが高分子フイル
ム支持体として用いられるが耐熱性に劣る。
(3) 水蒸気透過性の大きい支持体の場合、液晶に
悪影響を及ぼす。
(4) 高分子支持体によつては薄膜のエツチング等
の加工に耐えない場合が有る。
(5) 光学異方性を有する支持体の場合、光学異方
性軸を偏光板軸と厳密に一致させなくてはなら
ず作業性に劣る。
(6) 形成された薄膜との密着性に劣る。
等である。
これ等欠点のうち(2)および(5)項の問題を解消す
る為には、基板フイルムの選定が重要になる。そ
こで本発明者らは各種フイルムを巾広く検討した
結果、耐熱性を有し、透明であり、且つ光学的に
等方性を有するPESフイルム若しくはPSフイル
ムが優れていることを見い出した。
また他の(1)(3)(4)(6)項の問題を解消する方法とし
て、従来半導体層とフイルム支持体との間に謂ゆ
るアンダーコート層を設ける方法が提案されてい
る。この様なアンダーコート剤としては、一般に
エポキシ樹脂、メラミン樹脂、アルキツドメラミ
ン樹脂等の熱硬化性樹脂およびアクリル系プレポ
リマーをモノマーによつて希釈したUV硬化樹脂
等が提案されている。
然しながらPESフイルムまたはPSフイルムは、
周知の如く耐溶剤性に劣ること、コーテイング樹
脂との密着性に劣ることのために、これらフイル
ムへのアンダーコートは未だ成功していない。
即ち熱硬化性樹脂をコーテイング材料として用
いた場合、硬化に長時間を要す上に、薄い膜を形
成しなければならないため、硬化剤、架橋剤の飛
散のために樹脂が未硬化状態になつてしまうとい
う不都合さも有り、薄膜化に限界が有る。
また紫外線、電子線等の放射線硬化樹脂系が提
案されているが、これとて塗布における問題は解
消されず、希釈モノマーによつてフイルムが劣化
してしまうとか、密着性が悪いといつた現象の他
に、更に薄膜化した場合酸素禁止効果による重合
阻害が生じるといつた問題も生じて来る。
本願発明者らは放射線硬化樹脂によるコーテイ
ング法を用いてPESフイルムおよびPSフイルム
を支持体とした透明導電フイルムの製造法につい
て鋭意検討を行ない本願発明に到達した。
即ちPESおよびPSフイルムの少くとも片面に、
本発明の重要な構成要件である特定の塗液をコー
テイングし、乾燥により室温状態でタツクフリー
の透明なコート膜を形成した後、放射線を該塗膜
に照射してこれを硬化せしめ、透明コーテイング
膜を形成させた後、酸化インジウムを主成分とす
る半導体薄膜を形成せしめる方法を見い出した。
この方法によれば上記の問題点はことごとく解
消され、優れた工業的に有用な透明導電フイルム
が得られる。
以下に本発明の詳細につき述べる。
本発明に用いられるPESフイルムおよびPSフ
イルムは常法(押出機法、カレンダー法等)によ
り得られたフイルムであればすべて使用可能であ
るが、フイルム厚みは20〜100μmのものが好ん
で用いられる。また本発明達成の為に用いる塗液
は増感剤を添加したエポキシアクリレートプレポ
リマーおよび/またはウレタンアクリレートプレ
ポリマーの溶液が用いられるが、該プレポリマー
の融点は50℃以上のものが好ましい。
この理由としては50℃以上の融点を有している
場合、溶剤を除去した際未硬化ながら良好な、室
温でタツクフリーの膜を形成する能力があるた
め、急速に溶剤を除去しても均一な膜を形成出来
るため、ピンホール、ハジキ等が生じ難いこと
と、乾燥したものを一旦ロール状に巻き取ること
が出来ること、PESおよびPSが液状物に長時間
晒されることが無くなるため支持フイルムの劣化
が少ないといつた理由による。
また該溶液に密着性を改良する目的でビニルシ
ラン等のカツプリング剤を添加することも効果の
ある方法である。
また該塗液作製に際して溶剤の選定も支持フイ
ルムの劣化防止の観点から本発明の重要な構成要
件である。
即ち該支持フイルム(PES、PS)に対して良
溶媒である溶剤と貧溶媒である溶剤の混合溶媒で
あり、且つプレポリマーに対しては該混合溶液が
良溶媒であることが不可欠であり、良溶媒の量が
貧溶媒のそれより少ないことが望ましい。
特に好ましくは良溶媒と貧溶媒の混合比率が
30/70〜15/85であり、良溶媒がこれより多いと
PESまたはPSフイルムの塗布工程での劣化が問
題になつて来る。またこれより少ない場合は支持
フイルムと塗膜との密着性が低下してしまう。極
端な場合貧溶媒のみでは全く接着しない。
エポキシアクリレートプレポリマーおよびウレ
タンアクリレートプレポリマーに対しては良溶媒
であり、且つPSまたはPESフイルムに対しても
良溶媒であるものとしては、アセトン、メチルエ
チルケトン、ジメチルホルムアミド、セロソルブ
アセテート、カルビトールアセテート等があげら
れる。
一方該プレポリマーに対しては良溶媒であつ
て、且つPES、PSフイルムに対しては貧溶媒で
あるものとしては、セロソルブ類、カルビトール
類、酢酸ブチル、キシレン、トルエン等があげら
れる。
更に該プレポリマーと混合溶媒の量的な関係は
所望する塗膜の厚みにより適宜調整可能である。
塗布厚みは乾燥物で0.1〜10μmが通常の厚みであ
り、これより厚い場合は最終的に得られるフイル
ムの可撓性に問題が生じる場合が有る。
塗布方法としてはデイツプ法、バーコーター
法、ロールコーター法、スプレー法、カーテンコ
ーター法等の通常の塗布方法が用いられるが、可
及的速かに塗布後溶剤を除去することが好まし
い。
また溶剤除去の温度は100℃以下が好ましく、
これより高温の場合は増感剤の飛散が懸念され未
硬化になる恐れがある。
かくしてPESフイルムまたはPSフイルムの少
くとも片面に均一に樹脂塗膜が形成されたフイル
ムが得られるが、この塗膜は室温下で完全にタツ
クフリーであり非常に取扱いに便利なものであ
る。
次いで該塗膜面に放射線(一般には紫外線)を
照射し完全硬化せしめる。この場合乾燥塗膜への
照射であり、従来の液状物への照射と根本的に異
なる方法である。
即ち固体状態での照射硬化であり、極端に薄い
塗膜であつても増感剤の飛散、酸素禁止効果の影
響は受け難い。
更に完全を期すために照射硬化後、更に加熱処
理することも効果の有る方法である。
次いで硬化塗膜上に透明半導体層が形成され
る。酸化インジウム、酸化錫、酸化カドミウム等
の酸化物を主体にした謂ゆる薄膜が一般的であ
り、その膜厚は50〜500Å程度であり、形成方法
としてはスパツタリング法やイオンプレーテイン
グ法が好んで用いられる。
かくしてPESフイルムまたはPSフイルムを支
持体とし、少なくとも片面にアンダーコート層を
有する透明導電フイルムが得られる。このものは
以下の特徴を有する工業的に意義のある優れた透
明導電性フイルムである。
導電層の耐摩耗性が大巾に向上するためラビ
ング処理工程での表面抵抗の劣化が防止出来
る。
水蒸気透過性が小さくなるため液晶の信頼性
が向上する。
エツチング加工時の耐薬品性が大巾に向上す
るため、回路加工歩留りが大巾に向上する。
金属酸化薄膜とアンダーコート層との密着が
優れている。
以下に実施例を示す。
実施例 1
分子量1540、融点70℃のエポキシアクリレート
プレポリマー100重量部、酢酸ブチル400重量部、
セロソルブアセテート100重量部、ベンゾインエ
チルエーテル2重量部を50℃にて撹拌し均一な溶
液とした。
得られた溶液を75μm厚のポリエーテルサルフ
オンフイルム両面に塗布し、85℃で乾燥し完全に
溶剤を除去した。
この結果室温においてタツクフリーは塗膜が形
成された。
次いでコーテイング膜に80w/cmの高圧水銀灯
により15cmの距離で紫外線を照射し樹脂層を硬化
させた。
次にこのコートフイルム片面に酸化インジウム
の酸化錫の混合物を真空中で電子ビームで加熱し
ながら蒸着し、これを空気中180℃、1時間熱処
理することにより約300Åの透明導電層を設けた。
この透明導電性フイルムの特性を第1表に記
す。
比較例 1
75μmのポリエーテルサルフオンフイルム上に
アンダーコートを施すこと無く実施例1と全く同
様な方法で透明導電層を設けた。
この透明導電性フイルムの特性を第1表に示
す。
比較例 2
実施例1において100重量部のフイルムに対し
て良溶媒であるセロソルブアセテートを酢酸ブチ
ル100重量部に置き換えた以外は全く同様な方法
で導電フイルムを作製した。
この導電性フイルムの特性を第1表に示す。
比較例 3
実施例1においてフイルムに対して貧溶媒であ
る酢酸ブチルをすべて良溶媒であるセロソルブア
セテートに置換し塗布したところ、フイルム全面
にクラツクが生じ全く塗膜を形成出来なかつた。
【表】[Detailed Description of the Invention] The present invention relates to polyether sulfon (hereinafter abbreviated as PES) or polysulfon (hereinafter abbreviated as PS).
The present invention relates to a method for producing a laminated transparent conductive film, in which a transparent substrate is used, an ultraviolet curable resin layer is formed on at least one side of the transparent substrate, and a thin film containing indium oxide as a main component is formed on the resin layer. Specifically, the objective is to obtain a coating film that improves the drawbacks of PES and PS films, and to form a conductive thin film thereon to obtain a transparent conductive film with excellent properties. In recent years, there has been a remarkable growth in display elements using liquid crystals, and the importance of transparent electrodes used therein is also increasing. Conventionally, so-called Nesa glass, in which a semiconductor thin film is formed on a thin glass plate, has been widely used as a transparent electrode for liquid crystal display elements, but as elements are required to be thinner, lighter, and mass-produced, Transparent electrodes formed with semiconductor thin films have been widely studied, and some have begun to be put into practical use. However, although conductive films using polymer films meet the demands of mass production due to thinness, weight reduction, continuous production, and punching capability, they also have various problems. It is. That is, (1) the abrasion resistance is poor and the surface resistance is poor in the rubbing process during the liquid crystal alignment process. (2) Polyester film is generally used as a polymer film support, but it has poor heat resistance. (3) Supports with high water vapor permeability have a negative effect on liquid crystals. (4) Some polymer supports may not be able to withstand processing such as thin film etching. (5) In the case of a support having optical anisotropy, the optical anisotropy axis must strictly coincide with the polarizing plate axis, resulting in poor workability. (6) Poor adhesion to the formed thin film. etc. In order to resolve problems (2) and (5) among these drawbacks, selection of the substrate film is important. The inventors of the present invention extensively studied various films and found that PES film or PS film, which has heat resistance, is transparent, and is optically isotropic, is superior. In addition, as a method for solving the problems in other items (1), (3), (4), and (6), a method has been proposed in which a so-called undercoat layer is provided between the semiconductor layer and the film support. As such an undercoat agent, thermosetting resins such as epoxy resins, melamine resins, alkyd melamine resins, and UV-curing resins prepared by diluting acrylic prepolymers with monomers have been proposed. However, PES film or PS film is
As is well known, undercoating of these films has not yet been successful due to poor solvent resistance and poor adhesion to coating resins. In other words, when a thermosetting resin is used as a coating material, it takes a long time to cure and a thin film must be formed, so the resin may become uncured due to scattering of the curing agent and crosslinking agent. There is also the inconvenience that the film becomes thinner, and there is a limit to how thin the film can be made. In addition, radiation-curable resin systems such as ultraviolet rays and electron beams have been proposed, but these do not solve the problems of coating, such as deterioration of the film due to diluted monomers and poor adhesion. In addition, when the film is made even thinner, there arises the problem that polymerization is inhibited due to the oxygen inhibition effect. The inventors of the present application have conducted intensive studies on a method of manufacturing transparent conductive films using PES films and PS films as supports using a coating method using a radiation-cured resin, and have arrived at the present invention. That is, on at least one side of PES and PS films,
After coating with a specific coating liquid, which is an important component of the present invention, and drying to form a tack-free transparent coating film at room temperature, the coating film is irradiated with radiation to harden it to form a transparent coating film. After the formation of indium oxide, a method was found to form a semiconductor thin film containing indium oxide as the main component. According to this method, all of the above problems are solved and an excellent industrially useful transparent conductive film can be obtained. The details of the present invention will be described below. The PES film and PS film used in the present invention can be any film obtained by conventional methods (extrusion method, calendar method, etc.), but films with a thickness of 20 to 100 μm are preferably used. . The coating solution used to achieve the present invention is a solution of an epoxy acrylate prepolymer and/or a urethane acrylate prepolymer to which a sensitizer is added, and the prepolymer preferably has a melting point of 50° C. or higher. The reason for this is that if the solvent has a melting point of 50°C or higher, it has the ability to form a good, uncured, tack-free film at room temperature when the solvent is removed. Because a film can be formed, pinholes and cissing are less likely to occur, and the dry material can be wound up into a roll once, and PES and PS are not exposed to liquid materials for a long time, making it easier to use the support film. This is due to the fact that there is little deterioration. It is also an effective method to add a coupling agent such as vinyl silane to the solution for the purpose of improving adhesion. Furthermore, the selection of a solvent in preparing the coating liquid is also an important component of the present invention from the viewpoint of preventing deterioration of the support film. That is, it is essential that the mixed solution is a mixed solvent of a solvent that is a good solvent and a solvent that is a poor solvent for the support film (PES, PS), and that the mixed solution is a good solvent for the prepolymer. It is desirable that the amount of good solvent is less than that of poor solvent. Particularly preferably, the mixing ratio of good solvent and poor solvent is
30/70 to 15/85, and if the amount of good solvent is higher than this
Deterioration during the coating process of PES or PS film becomes a problem. If the amount is less than this, the adhesion between the support film and the coating film will deteriorate. In extreme cases, using only a poor solvent will not bond at all. Acetone, methyl ethyl ketone, dimethyl formamide, cellosolve acetate, carbitol acetate, etc. are good solvents for epoxy acrylate prepolymers and urethane acrylate prepolymers, and are also good solvents for PS or PES films. can give. On the other hand, examples of solvents that are good solvents for the prepolymer and poor solvents for PES and PS films include cellosolves, carbitols, butyl acetate, xylene, and toluene. Furthermore, the quantitative relationship between the prepolymer and the mixed solvent can be adjusted as appropriate depending on the desired thickness of the coating film.
The normal coating thickness is 0.1 to 10 μm on a dry basis, and if it is thicker than this, problems may arise in the flexibility of the final film. Conventional coating methods such as a dip method, a bar coater method, a roll coater method, a spray method, and a curtain coater method are used as the coating method, but it is preferable to remove the solvent as soon as possible after coating. In addition, the temperature for solvent removal is preferably 100℃ or less.
If the temperature is higher than this, there is a fear that the sensitizer will scatter and the film may not be cured. In this way, a PES film or PS film with a uniform resin coating formed on at least one side is obtained, and this coating is completely tack-free at room temperature and is very convenient to handle. Next, the coating surface is irradiated with radiation (generally ultraviolet rays) to completely cure it. In this case, the dry paint film is irradiated, which is a fundamentally different method from conventional irradiation of liquid materials. That is, it is irradiation curing in a solid state, and even an extremely thin coating film is not susceptible to sensitizer scattering or oxygen inhibition effects. It is also an effective method to further heat-treat after irradiation curing to ensure completeness. A transparent semiconductor layer is then formed on the cured coating. So-called thin films mainly made of oxides such as indium oxide, tin oxide, cadmium oxide, etc. are generally used, and the film thickness is approximately 50 to 500 Å. Sputtering and ion plating are the preferred methods of formation. used. In this way, a transparent conductive film using a PES film or PS film as a support and having an undercoat layer on at least one side is obtained. This film is an industrially significant and excellent transparent conductive film having the following characteristics. Since the abrasion resistance of the conductive layer is greatly improved, deterioration of surface resistance during the rubbing process can be prevented. The reliability of the liquid crystal is improved because the water vapor permeability is reduced. Since the chemical resistance during etching processing is greatly improved, the circuit processing yield is greatly improved. Excellent adhesion between the metal oxide thin film and the undercoat layer. Examples are shown below. Example 1 100 parts by weight of epoxy acrylate prepolymer with a molecular weight of 1540 and a melting point of 70°C, 400 parts by weight of butyl acetate,
100 parts by weight of cellosolve acetate and 2 parts by weight of benzoin ethyl ether were stirred at 50°C to form a uniform solution. The obtained solution was applied to both sides of a 75 μm thick polyether sulfon film and dried at 85° C. to completely remove the solvent. As a result, a tack-free coating was formed at room temperature. Next, the coating film was irradiated with ultraviolet rays at a distance of 15 cm from a high-pressure mercury lamp of 80 W/cm to cure the resin layer. Next, a mixture of indium oxide and tin oxide was vapor-deposited on one side of this coated film while heating with an electron beam in a vacuum, and this was heat-treated in air at 180° C. for 1 hour to form a transparent conductive layer with a thickness of about 300 Å. The properties of this transparent conductive film are shown in Table 1. Comparative Example 1 A transparent conductive layer was provided on a 75 μm polyether sulfon film in exactly the same manner as in Example 1 without applying an undercoat. Table 1 shows the properties of this transparent conductive film. Comparative Example 2 A conductive film was produced in exactly the same manner as in Example 1 except that cellosolve acetate, a good solvent, was replaced with 100 parts by weight of butyl acetate. The properties of this conductive film are shown in Table 1. Comparative Example 3 When a film in Example 1 was coated by replacing all butyl acetate, which was a poor solvent, with cellosolve acetate, which was a good solvent, cracks appeared on the entire surface of the film and no coating could be formed. 【table】
Claims (1)
ンフイルムの少くとも片面に紫外線硬化樹脂層を
形成し、該塗膜上に酸化インジウムを主成分とす
る薄膜を形成して積層透明導電フイルムを得る製
造方法において、紫外線硬化樹脂層を形成するた
めに塗布される塗液が、エポキシアクリレートプ
レポリマーおよび/またはウレタンアクリレート
プレポリマーを増感剤とともに溶解した溶液であ
り、且つ溶液を構成する溶媒が該フイルムに対し
て良溶媒と貧溶媒の混合溶媒であり、更に該プレ
ポリマーに対しては両者とも良溶媒であり、且つ
良溶媒/貧溶媒の混合比率が30/70〜15/85であ
ることを特徴とする透明導電性フイルムの製造方
法。1. A manufacturing method for obtaining a laminated transparent conductive film by forming an ultraviolet curable resin layer on at least one side of a polyether sulfon or polysulfon film, and forming a thin film containing indium oxide as a main component on the coating film, The coating liquid applied to form the ultraviolet curable resin layer is a solution in which an epoxy acrylate prepolymer and/or a urethane acrylate prepolymer is dissolved together with a sensitizer, and the solvent constituting the solution is compatible with the film. It is a mixed solvent of a good solvent and a poor solvent, and further, both are good solvents for the prepolymer, and the mixing ratio of good solvent/poor solvent is 30/70 to 15/85. A method for producing a transparent conductive film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58172140A JPS6065036A (en) | 1983-09-20 | 1983-09-20 | Preparation of transparent conductive film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58172140A JPS6065036A (en) | 1983-09-20 | 1983-09-20 | Preparation of transparent conductive film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6065036A JPS6065036A (en) | 1985-04-13 |
| JPH0210526B2 true JPH0210526B2 (en) | 1990-03-08 |
Family
ID=15936303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58172140A Granted JPS6065036A (en) | 1983-09-20 | 1983-09-20 | Preparation of transparent conductive film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6065036A (en) |
-
1983
- 1983-09-20 JP JP58172140A patent/JPS6065036A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6065036A (en) | 1985-04-13 |
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