JPH023263B2 - - Google Patents
Info
- Publication number
- JPH023263B2 JPH023263B2 JP60278846A JP27884685A JPH023263B2 JP H023263 B2 JPH023263 B2 JP H023263B2 JP 60278846 A JP60278846 A JP 60278846A JP 27884685 A JP27884685 A JP 27884685A JP H023263 B2 JPH023263 B2 JP H023263B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- substrate
- radioactive material
- anode according
- tungsten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
Abstract
Description
【発明の詳細な説明】
本発明はX線管で使用される陽極、特に回転陽
極に係る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to anodes used in X-ray tubes, particularly rotating anodes.
放射線分野で主に使用されているX線管が、陰
極から発生される十分高レベルの運動エネルギー
を有する電子束の作用を受ける表面部分からX線
を放射する機能を有するデイスク状の陽極又は対
陰極を備えていることは、当業者に周知である。 X-ray tubes, which are mainly used in the radiology field, have a disc-shaped anode or pair that has the function of emitting X-rays from a surface area that is affected by a flux of electrons with a sufficiently high level of kinetic energy generated from the cathode. The provision of a cathode is well known to those skilled in the art.
X線管では電子の運動エネルギーのうちX線エ
ネルギーに変換されるのは約1%に過ぎず、電子
エネルギーの大部分が熱に変換されることも知ら
れている。 It is also known that in an X-ray tube, only about 1% of the kinetic energy of electrons is converted into X-ray energy, and most of the electron energy is converted into heat.
そのため当初このような陽極は、X線放射に関
する良好な特性に加えて非常に高い融点を有する
材料、例えばタングステン及びタングステン合
金、特にタングステンとレニウムとの合金でしか
構成されなかつた。やがてこのような陽極の高費
用と重量とを憂慮する技術者らは、電子を受ける
部分、即ち陽極の「活性ゾーン」又は「焦点トラ
ツク」を作成するためにはタングステンを単独で
使用すれば十分であることを知見した。その後開
発の方向は、タングステンより好適な物質から基
体を構成し、タングステン又はその合金の被覆か
ら得られる活性ゾーンを基体に付着して成る複合
陽極に向けられた。 Initially, such anodes were therefore initially composed only of materials which, in addition to good properties with respect to X-ray radiation, had a very high melting point, such as tungsten and tungsten alloys, in particular alloys of tungsten and rhenium. Eventually, concerned about the high cost and weight of such anodes, engineers realized that the use of tungsten alone was sufficient to create the electron-receiving portion, the "active zone" or "focal track" of the anode. We found that. Development subsequently turned to composite anodes comprising a substrate made of a material more suitable than tungsten and having an active zone obtained from a coating of tungsten or its alloys attached to the substrate.
陽極を正確に機能させるためには、基体が高融
点、高比熱レベル及び良好な熱伝導率を有してい
なければならなかつた。まずモリブデンが使用さ
れたが、その後グラフアイトが比熱レベルが著し
く高く、また著しく軽量であるため回転陽極とし
た場合に回転が容易であるという理由によりこれ
に関心が向けられた。しかし乍らその後、タング
ステン層とグラフアイトとの間に生じて中間層を
脆弱化せしめる反応と使用される材料間の膨脹差
とによる活性ゾーンの亀裂という問題が提起され
た。この問題を解決するために、グラフアイトと
タングステンとの間に例えば仏国特許第1575111
号に教示されるような純粋レニウムから成るバリ
ア層を堆積することが提案された。更に放射線分
野の進歩に伴い、材料考案者らは陽極の回転速度
の増加について検討し、10000回/分を大幅に超
え得る速度に到達するべく研究するようになつ
た。このような速度では基体の機械的性質が高く
なければならず、また基体は低比重、高レベルの
比熱及び良好な熱伝導率を有する必要がある。 In order for the anode to function properly, the substrate had to have a high melting point, high specific heat level and good thermal conductivity. At first molybdenum was used, but then interest turned to graphite because it had a significantly higher level of specific heat and was also significantly lighter, making it easier to rotate when used as a rotating anode. However, problems subsequently arose of cracking in the active zone due to reactions occurring between the tungsten layer and the graphite, weakening the intermediate layer, and due to expansion differences between the materials used. To solve this problem, for example, French Patent No. 1575111
It has been proposed to deposit a barrier layer consisting of pure rhenium as taught in No. Further advances in the radiation field have led material designers to consider increasing the rotational speed of the anode, working to reach speeds that can significantly exceed 10,000 rotations per minute. At such speeds the mechanical properties of the substrate must be high and the substrate must have a low specific gravity, a high level of specific heat and good thermal conductivity.
本出願人は、基体の密度がモリブデンよりも小
さい複合陽極により得られる利点に着目し、上記
基準に合致し、グラフアイトと異なりバリア層を
備える必要がなく、しかもその高い機械的特性に
より10000回/分を超え得る回転速度に達するこ
との可能な材料を発見するべく鋭意努力した。 The applicant focused on the advantages obtained by a composite anode whose substrate density is lower than that of molybdenum, and it meets the above criteria, does not require a barrier layer unlike graphite, and due to its high mechanical properties, it can be used up to 10,000 times. Efforts have been made to discover materials capable of reaching rotational speeds that can exceed 1/2 min.
本願出願人の研究の結果、基体が窒化アルミニ
ウムにより構成されていることを特徴とする陽極
が開発されるに至つた。 As a result of research conducted by the present applicant, an anode characterized in that the substrate is made of aluminum nitride has been developed.
前記物質は化学式AlNで表されるアルミニウ
ムの窒素化合物であり、粉末状で得られ、従来の
焼結法により成形できるような熱及び機械的特性
を有しており、比重約3.26、即ちグラフアイトよ
りやや大きいがモリブデンより著しく小さい比重
の固体を形成し得る。この物質は更に比較的高い
融点と、特に活性ゾーン中に発生された重大な熱
流束を電極中に伝導及び排出できるような良好な
熱伝導率とを有している。これらの特性こそ陽極
製造に有益な物質たらしめる特性であるが、この
ような物質は、本願出願人が結合層又はバリア層
を備える必要なしに該物質に放射性材料を直接被
覆できることを発見せず、また該物質が高速度回
転で使用できるような機械的特性を備えていなか
つたとしたら、グラフアイト又は固体金属陽極に
対して競合するには十分でなかつたであろう。 The substance is a nitrogen compound of aluminum with the chemical formula AlN, obtained in powder form, has thermal and mechanical properties such that it can be shaped by conventional sintering methods, and has a specific gravity of approximately 3.26, i.e. graphite. It can form solids with a specific gravity slightly larger than that of molybdenum but significantly lower than that of molybdenum. This material also has a relatively high melting point and good thermal conductivity, such that in particular the significant heat flux generated in the active zone can be conducted into and discharged into the electrode. It is these properties that make the material useful for anode production, but it is important to note that it is not until the applicant discovered that the material could be directly coated with radioactive materials without the need for a bonding or barrier layer. , and if the material did not have mechanical properties that allowed it to be used at high rotational speeds, it would not have been sufficient to compete against graphite or solid metal anodes.
本願出願人は事実、活性ゾーンを構成している
金属又は合金の性質及び該金属又は合金を基体に
堆積する方法に関係なく、こうして製造された複
合素子間に完全な接着が得られること、及び非常
に高レベルの運動エネルギーの電子束の作用下で
あつても経済的に品質が維持されることを確認し
た。 The applicant has in fact discovered that, irrespective of the nature of the metal or alloy constituting the active zone and the method of depositing it on the substrate, perfect adhesion is obtained between the composite elements thus produced; It was confirmed that the quality was economically maintained even under the action of electron fluxes with very high levels of kinetic energy.
こうして極めて多様な方法、例えば溶融塩浴電
解、物理的又は化学的気相蒸着、鑞付け固定、あ
るいは最新の放射線技術で使用される高出力管で
長期間使用後も接着力低下又は劣化減少を認める
ことなく平坦表面又は中空構造の表面に焼結金属
素子をリング状又はリングの一部として固定する
ための他の任意の方法を用いて、タングステン、
レニウム、イリジウム、オスミウム及びこれらの
合金、又は炭化物、窒化物もしくは硼化物型のこ
れらの化合物から成る厚さ0.5〜2mmの堆積物が
形成された。 Thus, a wide variety of methods, such as molten salt bath electrolysis, physical or chemical vapor deposition, brazing fixing, or even after long-term use in high-power tubes used in modern radiation technology, can reduce adhesion or deterioration. Tungsten, using any other method for fixing the sintered metal element in the form of a ring or as part of a ring on a flat surface or on the surface of a hollow structure without admitting
A 0.5-2 mm thick deposit of rhenium, iridium, osmium and their alloys or their compounds in the carbide, nitride or boride type was formed.
例として、活性ゾーンの温度が2500〜3000℃と
なるような出力及び時間条件下で使用されていた
ある種の従来陽極に替えて本発明の陽極を使用し
た。同一条件下で使用した処、活性ゾーンの温度
は200〜400℃に低下し、窒化アルミニウムの熱伝
導の良好な特性を示した。 By way of example, the anode of the present invention was used to replace certain conventional anodes that were used under power and time conditions such that the active zone temperature was between 2500 and 3000<0>C. When used under the same conditions, the temperature of the active zone decreased to 200-400°C, indicating the good thermal conductivity properties of aluminum nitride.
本発明の陽極は、高出力レベル及び10000回/
分を超え得る回転速度を使用する最新型のものを
含む凡ゆるX線管で使用される。 The anode of the present invention has high power level and 10000 times/
It is used in all X-ray tubes, including the latest models, which use rotational speeds that can exceed minutes.
Claims (1)
材料層により被覆されている基体により構成され
たX線管用回転陽極であつて、該基体が窒化アル
ミニウムから形成されていることを特徴とする前
記陽極。 2 基体が粒子の焼結により形成されることを特
徴とする特許請求の範囲第1項に記載の陽極。 3 放射性材料が基体と直接接触していることを
特徴とする特許請求の範囲第1項に記載の陽極。 4 放射性材料が、タングステン、レニウム、オ
スミウム及びイリジウムの金属、それ等の合金、
及び炭化物、窒化物、硼化物のようなそれ等の金
属の化合物から構成される群に属していることを
特徴とする特許請求の範囲第1項に記載の陽極。 5 放射性材料が、溶融浴電解、水相化学的蒸
着、気相物理的蒸着、鑞付け固定及び他の任意の
焼結金属素子固定方法から構成される群に属する
方法により得られることを特徴とする特許請求の
範囲第1項に記載の陽極。 6 放射性材料の厚みが0.5から2mmの範囲であ
ることを特徴とする特許請求の範囲第1項に記載
の陽極。[Scope of Claims] 1. A rotating anode for an X-ray tube constituted by a substrate whose so-called "active" surface is at least partially coated with a layer of radioactive material, the substrate being formed from aluminum nitride. The anode characterized by: 2. The anode according to claim 1, wherein the substrate is formed by sintering particles. 3. The anode according to claim 1, wherein the radioactive material is in direct contact with the substrate. 4 The radioactive material is tungsten, rhenium, osmium and iridium metals, alloys thereof,
2. An anode according to claim 1, characterized in that it belongs to the group consisting of compounds of these metals, such as carbides, nitrides and borides. 5. characterized in that the radioactive material is obtained by a method belonging to the group consisting of molten bath electrolysis, aqueous phase chemical vapor deposition, vapor phase physical vapor deposition, brazing fixing and any other method of fixing the sintered metal element. An anode according to claim 1. 6. The anode according to claim 1, wherein the thickness of the radioactive material is in the range of 0.5 to 2 mm.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8419398A FR2574988B1 (en) | 1984-12-13 | 1984-12-13 | ROTATING ANODE FOR X-RAY TUBE |
| FR8419398 | 1984-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61143929A JPS61143929A (en) | 1986-07-01 |
| JPH023263B2 true JPH023263B2 (en) | 1990-01-23 |
Family
ID=9310746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60278846A Granted JPS61143929A (en) | 1984-12-13 | 1985-12-11 | Rotary positive electrode for x ray tube |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0185598B1 (en) |
| JP (1) | JPS61143929A (en) |
| AT (1) | ATE39784T1 (en) |
| DE (1) | DE3567318D1 (en) |
| FR (1) | FR2574988B1 (en) |
| SU (1) | SU1479013A3 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4975621A (en) * | 1989-06-26 | 1990-12-04 | Union Carbide Corporation | Coated article with improved thermal emissivity |
| JPH0793099B2 (en) * | 1990-07-27 | 1995-10-09 | 信淳 渡辺 | Method for manufacturing rotating anode X-ray tube target |
| RU2307422C1 (en) * | 2005-12-26 | 2007-09-27 | Институт структурной макрокинетики и проблем материаловедения Российской Академии наук | X-ray tube combined rotating anode and its manufacturing process |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1178523B (en) * | 1962-07-04 | 1964-09-24 | Patra Patent Treuhand | X-ray tube rotating anode, in particular a plate-shaped rotating anode |
| US3459678A (en) * | 1966-01-03 | 1969-08-05 | Eastman Kodak Co | Olefin hydration catalyst |
| DE2201979C3 (en) * | 1972-01-17 | 1979-05-03 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Process for the production of a blackened layer on rotating anodes of X-ray tubes |
| US3819971A (en) * | 1972-03-22 | 1974-06-25 | Ultramet | Improved composite anode for rotating-anode x-ray tubes thereof |
| AT336143B (en) * | 1975-03-19 | 1977-04-25 | Plansee Metallwerk | X-ray anode |
| CA1142211A (en) * | 1978-11-20 | 1983-03-01 | Richard G. Weber | Rotatable x-ray target having off-focal track coating |
| JPS56141153A (en) * | 1980-04-03 | 1981-11-04 | Toshiba Corp | Target for x-ray tube |
-
1984
- 1984-12-13 FR FR8419398A patent/FR2574988B1/en not_active Expired
-
1985
- 1985-12-10 AT AT85420225T patent/ATE39784T1/en not_active IP Right Cessation
- 1985-12-10 DE DE8585420225T patent/DE3567318D1/en not_active Expired
- 1985-12-10 EP EP85420225A patent/EP0185598B1/en not_active Expired
- 1985-12-11 SU SU853985468A patent/SU1479013A3/en active
- 1985-12-11 JP JP60278846A patent/JPS61143929A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| EP0185598B1 (en) | 1989-01-04 |
| EP0185598A1 (en) | 1986-06-25 |
| SU1479013A3 (en) | 1989-05-07 |
| ATE39784T1 (en) | 1989-01-15 |
| DE3567318D1 (en) | 1989-02-09 |
| FR2574988A1 (en) | 1986-06-20 |
| JPS61143929A (en) | 1986-07-01 |
| FR2574988B1 (en) | 1988-04-29 |
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