JPH0237533B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method and apparatus for detecting the arrangement of linear sensors in a measuring method and apparatus using linear sensors as detection means.

In recent years, with the advancement of semiconductor technology, for example, CCD, which has minute light-receiving elements arranged in a straight line,
Linear sensors such as (Charge Coupled Device) are applied to focusing devices and measuring devices.

For example, in Japanese Patent Application No. 56-30223 and Japanese Patent Application No. 56-85490, the present applicant has previously reported that the optical properties of a test lens, especially a spectacle lens, are mainly spherical refractive power, cylindrical refractive power, cylindrical axis angle, and A curvature measuring device for measuring the radius of curvature of the cornea of the human eye or a contact lens was disclosed in Japanese Patent Application No. 173529/1983. Special application 1986-
In No. 173526, an autorefractometer for measuring the refractive power of the human eye was further developed in patent application No. 173526.
In No. 173531, we proposed alignment devices for adjusting the working distance and vertical and horizontal alignment between the eye to be examined and the ophthalmological optical device.

The devices of these earlier applications combine a first parallel straight line group consisting of at least two parallel straight lines, and a first parallel straight line group consisting of at least two parallel straight lines. A second parallel straight line group consisting of at least two parallel straight lines arranged in different directions is selected using a measurement mask pattern, and the projection pattern created by the selected light beam is projected onto the measurement surface within the measurement plane. Detection is performed along at least two straight lines that are not parallel to each other, and various optical characteristics of the optical system to be tested are measured from changes in pitch and inclination angle of two groups of parallel straight line patterns in the projection pattern. For this purpose, either one linear sensor is rotated around the optical axis and detection is carried out in at least two rotational positions, or at least two linear sensors are arranged on the measuring surface.

The principle of measurement is that a linear sensor detects first and second parallel lines along at least two straight lines that are in a positional relationship such that they actually intersect or virtually intersect, that is, at least two straight lines that are not parallel to each other. The projected position of each straight line in the group is detected, and the coordinates of the straight line in each group are determined by calculation. In reality, coordinate calculations are performed using two straight lines in the measurement plane where detection is performed as the coordinate axes, and the intersection of the coordinate axes as the origin, and a specific light-receiving element on each linear sensor represents the origin. , detection is performed based on the origin. In this case, there is no problem if the two linear sensors intersect each other at the light receiving element, which is the origin, and there is no error in the intersection angle, but the intersection position of the linear sensors is scheduled as the origin. If it is off the light receiving element or if there is an error in the intersection angle,
The coordinates of the projected straight line obtained as a result of the calculation will be different from the actual coordinates. The same thing applies when the linear sensors do not actually intersect but intersect on their extension lines, and when measuring by rotating one linear sensor, the same problem occurs due to the deviation of the center of rotation and the error in the amount of rotation. A problem arises. Specifically, this measurement can be used to determine the optical properties of optical systems such as lenses, but if the measurement includes errors as described above, the obtained optical properties may differ from the actual ones. Become something.

The present invention has been made to solve the drawbacks of such conventional devices, and a first object of the present invention is to provide a method and device for detecting the arrangement relationship of linear sensors serving as detection means.

A second object of the present invention is to determine whether, when one linear sensor is rotated and positioned at at least two different locations with a certain crossing angle, the center of rotation is different from a predetermined designed center of rotation. An object of the present invention is to provide a method and device for detecting the same.

A third object of the present invention is to detect whether at least two linear sensors arranged so as to intersect with each other within a substantial or virtual plane intersect at a predetermined designed intersection. An object of the present invention is to provide a method and a device for the same.

A fourth object of the present invention is to provide a method and apparatus for detecting whether the rotation angle of one linear sensor or the intersection angle of two linear sensors satisfies a predetermined design intersection angle. There is a particular thing.

A fifth object of the present invention is to provide a method and an apparatus for correcting measurement data even when measuring with a linear sensor arranged differently from the predetermined designed linear sensor arrangement.

The structural feature of the present invention for achieving such an object is that in a measuring method using linear sensors located at at least two locations intersecting each other as detection means, a first linear sensor composed of at least two mutually parallel straight lines is provided. A parallel line group pattern, a second parallel line group pattern consisting of at least two mutually parallel lines having different arrangement directions from the first parallel line group pattern.
input information consisting of a group of parallel straight lines is input to the linear sensor, the input position of the input information to the linear sensor is detected by the linear sensor, and the input position and a predetermined reference position on the linear sensor are and calculate the distance between the linear sensors, and use a proportional relationship between the lengths of at least two similar triangles formed by the intersection of the linear sensors and the input positions of at least two parallel straight lines to the linear sensors. and calculating an origin error amount given as a difference in distance between the intersection and the reference position. The invention also provides an apparatus for use in carrying out this method.

If the present invention is used, the arrangement relationship of linear sensors, that is, the rotation center and rotation angle when one linear sensor is rotated, or the intersection and intersection angle when multiple linear sensors are used. It is possible to detect whether or not the value satisfies a predetermined design value. Furthermore, based on this detection data, the measured value can be corrected even if the measured value is measured using a linear sensor arranged differently from the designed value. Furthermore, by employing the detection device of the present invention in a measurement device that uses a conventional linear sensor as a detection means, the linear sensor can be assembled very roughly on the assembly line of this type of device.
Since almost no adjustment is required on the adjustment line, it is expected that assembly and adjustment work will be greatly simplified and work time will be shortened. Furthermore, by incorporating a program sequence to perform the detection method according to the present invention before measurement, even if the installation state of the linear sensor changes due to aging of the device,
Since the sensor arrangement is always checked before proceeding to the measurement step, the measurement accuracy of the device can always be guaranteed, which is extremely convenient for maintenance.

The principle of the present invention will be explained below.

FIG. 1 is a schematic diagram showing the arrangement relationship between a projection pattern and a linear sensor serving as a detection means for explaining the principle of the detection method of the present invention. In Fig. 1, linear sensors S ₁ and S ₂ are composed of a large number of minute light detection elements arranged in a straight line, for example, CCD (Charge
Coupled Device) etc. may be used. Linear sensors S ₁ and S ₂ have their respective predetermined standards
It is assumed that O ₁ and O ₂ are arranged so as to intersect at a different position O. The same applies to the case where one linear sensor is used and rotated to the positions shown by S ₁ and S ₂ , and there is an error in the rotation center, so in the following explanation, two linear sensors S Only the case where ₁ and S ₂ are used will be explained.

Now, as shown in FIG. 1, a first parallel straight line group pattern L ₁ consisting of two mutually parallel straight line patterns L ₁₁ and L ₁₂ is arranged in a different direction from this first parallel straight line group pattern L ₁ . It is assumed that a second parallel straight line pattern _L2 composed of two mutually parallel straight line patterns _L21 and _L22 is projected onto the linear sensors _S1 and _S2 . By scanning the linear sensors S ₁ and S ₂ respectively, the projection points of each linear pattern projected onto the sensor can be detected.

That is, the linear sensor S ₁ is sequentially scanned from the E _11th element to the E _1Nth element, and the projected linear pattern L ₁₁ ,
The projection points of L ₁₂ , L ₂₁ and L ₂₂ are detected as points E _1a , F _1b , E _1c
and E _1d . The distances from the reference position O ₁ set on the linear sensor S ₁ to each detection point E _1a to _{E 1d} are expressed as b ₁ , (a ₁ +b ₁ ), (a ₃ +b ₃ ), and b ₃ as shown in the figure. do.
Similarly, for linear sensor S ₂ a straight line pattern
The detection points of L ₁₁ to _{L 22} are detection points E _2a , E _2b , E _2c , E _2d
Each of these detection points and a linear sensor can be detected as
Distance from predetermined reference position O ₂ on S ₂ (a ₂ +
b ₂ ), b ₂ , (a ₄ +b ₄ ), and b ₄ can be obtained, respectively. Since the projected straight line patterns L ₁₁ and L ₁₂ are parallel, the triangle <O, E _1a , E _2b > and the triangle <O,
E _1b , E _2a > are similar shapes. If we pay attention to this relationship, the relationship , _1a :, _1b =, _2b :, _2a holds true, and as a result, (b ₁ − x _p ): {(b ₁ − x _p ) + a ₁ } = (b ₄ − y _p ): {b ₄ −y _p )+a ₄ } ...(1) is obtained.

Similarly, since the projected straight line patterns L ₂₁ and L ₂₂ are parallel, the triangle <O, E _1c , E _2c > and the triangle <O, E _1d , E _2d > are similar shapes, and from this, _1c : , _1d =, _2c :, _2d holds, from this (b ₃ − x _p ): {(b ₃ − x _p ) + a ₃ } = (b ₂ − y _p ): {b ₂ − y _p ) + a ₃ } ...(2) is obtained. From equations (1) and (2) above, can be found.

Here, x _p is the amount of deviation between the reference position O ₁ and the intersection position O, and y _p is the amount of deviation between the reference position O ₂ and the intersection position O. That is, (x _p , y _p ) represents the origin error amount.

Therefore, each distance data (a _i , b _i ) (here i
= 1, 2, 3 or 4), the corrected distance data (a' _i , b' _i ) based on the actual intersection O is calculated using the formula b' ₁ = b ₁ + x _p b' ₂ = b ₂ +y _p b' ₃ = b ₃ +x _p b' ₄ = b ₄ +y _p ......(4) It can be calculated. As a result, a coordinate system with the intersection O as the new origin can be obtained.

The above explanation was about any two parallel straight lines in the first parallel straight line pattern group L ₁ and the second parallel straight line pattern group L ₂ , but when each straight line pattern group consists of three or more straight lines, As shown in Fig. 2 for all the straight line patterns constituting each straight line pattern group, jb' ₁ = jb ₁ +x _p jb' ₂ = jb ₂ +y _p jb' ₃ = jb ₃ +x _p jb' ₄ = jb ₄ +y _p ...(5) Here, we can obtain j=1, 2,...n.
Thus, according to the principle of the present invention, the first and second
Any two of each of the projected straight line pattern groups
Based on the detection points of the linear sensor S ₁ and S ₂ of the projected linear pattern of the book, find the distance from the reference position,
Using this distance, calculate x _p and y _p based on equation (3),
The origin can be corrected, and other projected straight line patterns can be directly calculated based on the x _p and y _p values obtained.
Correction can be made using equation (5).

Next, FIG. 3 is a schematic diagram showing the principle of a method for detecting the intersection angle γ of linear sensors S ₁ and S ₂ . In Fig. 3, two linear sensors S ₁ and S ₂ intersect at intersection O and one straight line forming the first parallel straight line group.
The triangle formed by the projected straight line pattern L′ ₁₂ of L ₁₂ <O,
E _1a , E _2b >, the distance between the intersection O and the detection point E _1a and the distance between the intersection O and the detection point E _2b are respectively corrected according to equation (4), and the distances b′ ₁ , b′ ₄ . Also, when the distance between detection point E _1a and detection point E _2b is l, the intersection angle between linear sensors S ₁ and S ₂ is γ, and the intersection angle between projected straight line pattern L ₁₂ and linear sensor S ₁ is θ, a triangle is formed. For <O, E _1a , E _2b > l ² = b′ ₁ ² + b′ ₄ ² −2b′ ₁ b′ ₄ cosγ b′ ₄ ² = l ² +b′ ₁ ² −2lb′ ₁ cosθ……(6) Since there is a relationship, from this equation, b′ ₄ ² cos ² γ + 2b′ ₁ b′ ₄ (cos ² θ−1) cosγ +b′ ₁ ² (1−cos ² θ)−b′ ₄ ² cos ² θ=0 ...(7) is obtained. Further, the distance between the detection point E _1b and the detection point E _1a of the projected linear pattern L ₁₁ by the linear sensor S ₁ is a ₁ as described above, and the pitch between the projected linear pattern L ₁₁ and the projected linear pattern L ₁₂ is If the quantity P is known in advance, it is given as θ=sin ^-1 [P/a ₁ ]...(8). From equation (8) we get cos ² θ-1=-(P/a ₁ ) ² , so from equation (7) we get b' ₄ ² cos ² γ+2b' ₁ b' ₄ (P/a ₁ ) cos γ +b′ ₁ ² (P/a ₁ ) ² −b′ ₄ ² [1−(P/a ₁ ) ² ]=0 Organize this and a ₁ ² b′ ₄ ² cos ² γ−2b′ ₁ b′ ₄ P ² cosγ + {b′ ₁ ² P ² −b′ ₄ ² [a ₁ ² −P ² ]}=0 Therefore This gives the intersection angle γ of linear sensors S ₁ and S ₂
can be found.

Note that the measurement principle for determining the intersection angle of the linear sensors S ₁ and S ₂ does not necessarily require the use of two adjacent straight line patterns constituting one parallel straight line group pattern, as described above.

When the parallel straight line pattern group is composed of a large number of straight line patterns as shown in Fig. 2, the linear sensor for one arbitrarily selected straight line pattern among the parallel straight line patterns (hereinafter referred to as the first straight line pattern) Detection points and linear sensors in S ₁ and S ₂
The distance between the intersections of S ₁ and S ₂ can be calculated using the above equation (4) or the
The corrected distances after correction according to equation (5) are Bm and Bn, respectively, and are one of the constituent elements of the parallel straight line group pattern to which the first straight line pattern belongs, but are arbitrary different from the first straight line pattern. Select a second _straight line pattern that can be selected in Then, equation (9) to find the intersection angle γ of linear sensors S ₁ and S ₂ is It can be generalized as

As an application to an actual measuring device, for example, in a lens meter, the cylindrical axis angle is measured based on a predetermined reference line, for example, the running direction x _p of a holder that holds an eyeglass lens.

Now the linear sensor S ₁ is parallel to the x _p axis, i.e. the third
In the figure, if α=90°, there is a relationship of γ+β=90°, so we obtain the relationship α=90° β=90°−γ ……(10). From this, if we obtain γ using equation (9), we can use the well-known orthogonal-oblique transformation based on the measured values of _the oblique coordinate system [X' _p , Y' _p ] created by the linear sensors S ₁ and S 2. The _{accuracy when} converting to the orthogonal coordinate system [ _{X p , Y p ] using the formula} Since this can be guaranteed, it is possible to accurately determine the measured values obtained by measurement, especially the cylinder axis angle and prism base direction where errors in α and β act as linear errors.

Embodiments of the present invention will be described below using an automatic lens meter as an example.

FIG. 4 is a schematic diagram showing the optical system of the automatic lens meter according to the present invention. The light from the light-emitting diode 2a, which is turned on under the control of the drive circuit 1, is reflected by the dichroic surface 3a of the dichroic prism 3, focused by the relay lens 4 onto the pinhole 5, and then converted into a parallel beam by the collimator lens 6, which is reflected into the mirror. The light enters the test lens 8 held by a test lens holding means (not shown) via the lens 7 . The light beam that passes through the test lens 8 and is changed by its refractive properties passes through the mirror 9 and the relay lens 10 to the dichroic surface 11a of the dichroic prism 11.
5a after being reflected by mirror 17.
As shown in the figure, a large number of straight openings 201, 202 are parallel to each other and have an inclination of _m1 with a pitch of _P1 .
After being selected by the mask 13a having a linear pattern 20 consisting of 20i...20n, the half mirror 14 is reflected and transmitted by the mirror surface, and then projected onto the linear sensors 15 and 16, respectively. On the other hand, when the light-emitting diode 2b is switched on under the control of the drive circuit 1, the light emitted from the light-emitting diode 2b has a different emission wavelength from that of the light-emitting diode 2a, so that the emitted light beam passes through the dichroic surface 3a of the dichroic prism 3. , relay lens 4, pinhole 5, collimator lens 6, mirror 7,
It passes through the test lens 8, the mirror 9, and the relay lens 10, passes through the dichroic surface 11a of the dichroic prism 11, and passes through the mirror 12 to the fifth a.
As shown in the figure, they are parallel to each other and their pitch is P ₂ ,
A large number of straight openings 211, 212 with an inclination of m ₂
. . 21i . In this embodiment, the relay lens 10 is arranged so that the optically conjugate surfaces of the masks 13a and 13b are positioned at MA in FIG.
The optical conjugate lines 5 and 16 are made to intersect in the same plane at the position D, respectively.

Now, as shown in FIG. 6, the linear sensors 15 and 16 differ from their design values and are at their respective reference positions O ₁ ,
It is assumed that they are assembled into the apparatus so as to virtually intersect within the detection conjugate plane D at a position O different from _O2 . When the light emitting diode 2a is turned on without the test lens 8 being inserted into the measurement optical path, a projected linear pattern 20' corresponding to the linear pattern 20 of the mask 13a is projected onto the linear sensors 15 and 16. Next, the linear sensor 15 is sequentially scanned from one end to the other end elements using a readout pulse train as shown in FIG. 7A, and the outputs of the light receiving elements constituting the linear sensor are read out. Now, FIG. 7B shows the readout output of the linear sensor 15 for the projected linear patterns 20i- ₁ ' and 20i' of the projected linear pattern group 20. Similarly, the readout output of the linear sensor 16 is shown in FIG. 7C.

Next, the light emitting diode 2b is turned on, and a projection pattern 21' is projected onto the linear sensors 15 and 16 in accordance with the mask pattern of the mask 13b. The readout output of the linear sensor 15 for arbitrary two straight line patterns 21 _i-1 ', 21i' of this projected straight line pattern group 21' is shown in FIG. 7D, and the readout output of the linear sensor 16 is shown as E, respectively. . Based on these outputs, the center positions of the respective projection patterns E _1a , E _1b , E _1c , E _1d and E _2a ,
Find E _2b , E _2c , and E _2d . Then, from the predetermined reference position of each linear sensor, for example, if the linear sensor is composed of 1000 elements, the 500th element O ₁ , O ₂ to the center position E _1a to E _1d , E _2a
The distances a ₁ to a ₄ and b ₁ to b ₄ from ~E _2d are counted and determined based on the clock pulse of the readout output pulse for scanning the linear sensor. Based on the determined distances a ₁ to a ₄ and b ₁ to b ₄ , x _p and y _p are obtained according to the above equation (3), and based on these x _p and y _p values, the 4th)
Origin correction, detected value correction, or intersection angle detection is performed based on the equation, equation (5), or equation (9).

FIG. 8 shows a block diagram of an arithmetic processing system of an automatic lens meter including a correction device for performing the above correction, and FIG. 9 is a flowchart showing a processing program of the correction device.

As shown in FIGS. 7B and 7C, the linear sensors 15 and 16 driven by the linear sensor drivers 100 and 101 first operate the light source drive circuit 1 under the control of the control section 301 of the microprocessor 105. The light emitting diode 2a is driven to emit light, and the detection output of the projected linear pattern group of the mask 13a is sent to the signal lines 102 and 103. Reference numeral 104 denotes an analog switch, which is controlled by the control section 301. When the control unit 301 receives an interrupt from the linear sensor scan start pulse 106 from the driver 100 that drives the linear sensor 15, it controls the analog switch so that the output of the linear sensor 15 is input to the A/D converter 107. Make it. A/D converter 107 is driver circuit 1
The output of each element of the linear sensor read out by the linear sensor read pulse 108 as shown in FIG. Here, the A/D converter 107 is selected to have a resolution of about 8 bits (1/256) and a conversion time faster than the scanning frequency of the linear sensor. The data bus control unit 302 of the microprocessor 105 stores the output of the linear sensor 15, which has been converted into a digital value for each element, into the first memory unit 401 of the data memory 109 configured with RAM or the like.
Store sequentially in . Therefore, the first memory section 401 stores digital values in order from the output of the first element of the linear sensor from a predetermined position (address). For example, if the linear sensor has 1000 elements, storage will be stopped after 1000 data have been captured.

Next, based on the output data of the linear sensor 15 stored in the first memory section 401, the pattern center calculation section 303 calculates the center positions E _1c and E _1d and stores the values in the fifth memory section 405 of the data memory 109. Store. When the storage is completed, the control unit 301 drives the driver circuit 101 and the linear sensor 16
scan. When receiving the interruption of the scan start pulse 110 of the linear sensor 16, the control unit 301 controls the analog switch 104 to input the output of the linear sensor 16 read by the linear sensor read pulse 111 to the A/D converter 107. The digital value from the D converter is stored in the second memory section 402 of the data memory 109 by the data bus control section 302, and further, based on this stored output value, the pattern center calculation section 303 calculates the center position E _2a , E _2c is obtained and stored at another address in the fifth memory section 405 .

Next, the control unit 301 controls the drive circuit 1 to turn off the light emitting diode 2a, turn on the light emitting diode 2b, and turn on the linear sensor 15 by the same driving as described above.
The output of the third memory section 40 of the data memory 109
3, the output of the linear sensor 16 is stored in the fourth memory section 40.
Furthermore, based on these stored data, the pattern center positions E _1a , E _1b , E _2b , and E _2d are determined and stored in the fifth memory unit 405, respectively. Center position E _1a stored in the fifth memory unit 405 ~
Based on E _1d , E _2a to _{E 2d} and the reference position previously stored in the reference position (address) memory 406 of the data memory 109, the distance calculation unit 304 calculates the distances a ₁ to a ₄ ,
Calculate b ₁ to _{b 4} and use the correction value calculation unit 3 based on this value.
05, the correction values x _p and y _p are calculated, and the obtained correction values are stored in the correction memory 407 of the data memory 109.

The calculation of optical characteristics is based on the b _j calculated by the pattern center calculation section based on the detection data of each straight line pattern.
(j=1 to n) and the x _p and y _p values stored in the correction value memory 408 in the data correction unit 306.
After the data is corrected based on formula (5), it is calculated by the optical property calculation unit 307 based on the calculation formula described in the patent application No. 56-30223 previously filed by the present applicant. A display device 11 composed of
2 and the printer 113 if necessary.
will be printed out. These series of drives are controlled by the program in the program memory 114. Furthermore _, the intersection angle _γ of the linear sensors 15 _and 16 is detected using the equation (4 ₎ or ( Find the correction distances B _n and B _o using equations 5), calculate the intersection angle γ based on the pitch Pm stored in advance in the reference value memory 406 and equation (9)′,
The value is supplied to the optical property calculation unit, and the measured value inputted from the data correction unit 306 is subjected to orthogonal-oblique coordinate transformation based on equation (11), and then the optical property calculation unit described in the above application is performed. Various characteristic values of the lens to be tested are calculated according to the formulas and outputted on the display 112 or printer 113.

In the embodiment described above, the two linear sensors 15 and 16 were configured to intersect within the optical conjugate plane D of the relay lens 10, but the present invention is not limited to this. As shown in FIG.
000 and detecting at least two different arrangement positions, the same effect as in the above embodiment can be obtained, or alternatively, as shown in FIG. The linear sensor 15 may be rotated asynchronously to detect the speed of light selected at at least two positions where the arrangement of the parallel straight line groups 20 is mutually changed by rotating the linear sensor 15, respectively.

Further, in the first to third embodiments described above, the light beam selection mask for specifying the optical characteristics of the lens to be tested and the mask for detecting the arrangement relationship of the linear sensors are shared, but the present invention is limited to this. Rather, the speed of light selection mask for measuring the optical characteristics of the lens to be tested is made independent, and at least three straight lines are formed, for example, as in Japanese Patent Applications No. 55-56581 and No. 30222 filed earlier by the present applicant. It may consist of a straight line pattern that intersects at least three points, or it may consist of a straight line pattern that intersects at least three points.
It may also have a circular pattern as shown in the figure.

Furthermore, the present invention is not only applicable to the lens meter exemplified in the embodiment or the above-mentioned optical measuring device for ophthalmology and eyeglasses, but also applies to a wide range of devices that use linear sensors as detection means. Can be used for detection. Further, the linear sensor may be a linear sensor for detecting electron beams or magnetism instead of for detecting light.

[Brief explanation of drawings]

Fig. 1 is a schematic diagram showing the relationship between a linear sensor and a projection pattern to explain the principle of the present invention;
The figure is a schematic diagram illustrating the principle of the present invention when a projection pattern is formed from a large number of linear patterns, FIG. 3 is a schematic diagram illustrating the principle of determining the intersection angle of a linear sensor, and FIG. The optical layout of the first embodiment of the present invention, FIGS. 5a and 5b are plan views showing examples of linear patterns of the mask, and FIG.
FIG. 7 is an output waveform diagram showing the relationship between the output of the linear sensor and the detection point, FIG. 8 is a block diagram of the electrical system of the first embodiment, and FIG. FIG. 9 is a flowchart showing the measurement procedure of the first embodiment, FIG. 10 is a partially omitted optical arrangement diagram showing the second embodiment of the present invention, and FIG. 11 is a flow chart showing the third embodiment of the present invention. FIG. 2 is a partially omitted optical system layout diagram. 8...Test lens, 13a, 13b...Mask, 15, 16...Linear sensor, 304...Distance calculation section, 305...Correction value calculation section, 308...
Intersection angle detection section, 1000...Motor.

Claims (1)

[Scope of Claims] 1. A measuring method using at least one linear sensor located at at least two locations that intersect with each other as a detection means, comprising: a first parallel straight line group pattern composed of at least two mutually parallel straight lines; At least two parallel straight line group patterns having different arrangement directions from the first parallel straight line group pattern.
a step of inputting input information consisting of a second parallel straight line group pattern made up of mutually parallel straight lines of a book into the linear sensor; and a step of detecting with the linear sensor the input position of the input information to the linear sensor. and calculating a distance between the input position and a predetermined reference position on the linear sensor, and the input position of information formed by an intersection of the linear sensor and at least two mutually parallel straight lines. A linear sensor comprising the step of calculating an origin error amount given as a difference in distance between the intersection and the reference position using a proportional relationship between the lengths of sides of at least two mutually similar triangles. How to detect the placement relationship of 2. When the linear sensor is located at different first and second positions simultaneously or at different times, the respective input positions of the first straight line pattern constituting the first parallel straight line group pattern to the linear sensor and the correcting the distance to the intersection based on the origin error amount to obtain a corrected distance; a distance between respective input positions to the linear sensor located at the first position with a second linear pattern different from the pattern; and a known pitch amount between the first and second linear patterns; 2. A method for detecting a positional relationship of linear sensors according to claim 1, further comprising the step of determining an intersection angle of said linear sensors from said correction distance. 3 the linear sensor rotates in one plane;
3. The method for detecting the arrangement relationship of linear sensors according to claim 1 or 2, characterized in that at least one linear sensor is arranged at at least two different positions. 4. Claim 1 or 2, characterized in that the linear sensors are at least two linear sensors that intersect with each other at a substantial or virtual intersection within a substantially or virtual plane. A method for detecting the arrangement relationship of linear sensors described in Section 1. 5. In a measuring device whose detection means is at least one linear sensor located at at least two locations that intersect with each other, a first parallel straight line group pattern composed of at least two mutually parallel straight lines; and the first parallel straight line group pattern. At least two patterns with different arrangement directions
means for inputting input information consisting of a second parallel straight line group pattern made up of mutually parallel straight lines of a book into the linear sensor; detecting the input position of the input information to the linear sensor with the linear sensor; a first calculation means for calculating the distance between the input position and a predetermined reference position on the linear sensor; Detecting the arrangement relationship of the linear sensors, characterized in that it is comprised of a second calculation means that calculates an origin error amount given as a difference in distance between the intersection and the reference position using a proportional relationship of lengths. device to do. 6. When the linear sensor is located at different first and second positions simultaneously or at different times, the respective input positions of the first straight line pattern constituting the first parallel straight line group pattern to the linear sensor and the means for correcting the distance to the intersection based on the origin error amount to obtain a corrected distance; a distance between respective input positions to the linear sensor located at the first position with a second linear pattern different from the pattern; and a known pitch amount between the first and second linear patterns; 6. The device for detecting the arrangement of linear sensors according to claim 5, further comprising means for determining the intersection angle of the linear sensors from the correction distance. 7 the linear sensor rotates in one plane;
7. The apparatus for detecting the arrangement relationship of linear sensors according to claim 5 or 6, characterized in that the device is at least one linear sensor arranged at at least two different positions. 8. Claim 5 or 6, characterized in that the linear sensors are at least two linear sensors that intersect with each other at a substantial or virtual intersection within a substantially or virtual plane. A device for detecting the arrangement relationship of the linear sensors described in 1. 9. Detect the measurement projection pattern that has changed according to the optical characteristics of the optical system to be tested with at least one linear sensor positioned so as to intersect at a substantial or virtual intersection, and In a method for measuring optical characteristics of an optical system, the first parallel straight line group pattern is composed of at least two mutually parallel straight lines, and at least two parallel straight line group patterns having different arrangement directions.
projecting on the linear sensor a detection projection pattern made of a second parallel straight line group pattern made up of mutually parallel straight lines of a book; a step of detecting a projected position onto a sensor with the linear sensor; a step of calculating a distance between the projected position and a reference position predetermined for the linear sensor; and at least two intersections of the linear sensor. The origin error amount given as the difference in distance between the intersection and the reference position is calculated by using the proportional relationship between the lengths of the sides of at least two similar triangles formed by the projected positions of parallel straight lines. A method for detecting a positional relationship of linear sensors in a method for measuring optical characteristics of an optical system, comprising the step of calculating. 10 The first and second linear sensors are different from each other.
The distance between each input position of the first straight line pattern constituting the first parallel straight line group pattern to the linear sensor and the intersection point is set to the origin error amount when the positions are simultaneously or at different times. a step of correcting the first straight line pattern and determining a corrected distance; and a second straight line pattern that is a component of the first parallel straight line group pattern and is different from the first straight line pattern. The intersection angle of the linear sensor is determined from the distance between each input position to the linear sensor located at the first position, the known pitch between the first and second linear patterns, and the correction distance. 10. A method for detecting a positional relationship of linear sensors in a method for measuring optical characteristics of an optical system according to claim 9, further comprising the step of determining. 11. Claim 9 or 10, characterized in that the linear sensor is at least one linear sensor that rotates within one plane and is arranged at at least two different positions.
A method for detecting the arrangement relationship of linear sensors in the method for measuring optical characteristics of an optical system as described in 1. 12. Claim 9 or 10, characterized in that the linear sensors are at least two linear sensors that intersect with each other at a substantial or virtual intersection within a substantially or virtual plane. A method for detecting the arrangement relationship of linear sensors in the method for measuring optical characteristics of an optical system as described in 1. 13. The linear sensor in the method for measuring optical characteristics of an optical system according to any one of claims 9 to 12, wherein the measurement projection pattern and the detection projection pattern have the same configuration. How to detect placement relationships. 14 Detect the measurement projection pattern that has changed according to the optical characteristics of the optical system under test with at least one linear sensor positioned so as to intersect at a substantial or virtual intersection, and In an optical property measuring device for an optical system that measures optical properties, a first parallel straight line group pattern composed of at least two mutually parallel straight lines, and at least two parallel straight line group patterns having different arrangement directions.
means for projecting on the linear sensor a detection projection pattern made of a second parallel straight line group pattern made up of mutually parallel straight lines of a book; a first calculation means for detecting a projection position on a sensor with the linear sensor and calculating a distance between the projection position and a reference position predetermined for the linear sensor; and an intersection of the linear sensor and the projection position. and second calculating means for calculating an origin error amount given as a difference in distance between the intersection and the reference position by using a proportional relationship between the lengths of the sides of at least two mutually similar triangles created by the above. 1. A device for detecting the arrangement relationship of linear sensors in an optical characteristic measuring device for an optical system, characterized in that: 15 The first and second linear sensors are different from each other.
The distance between each input position of the first straight line pattern constituting the first parallel straight line group pattern to the linear sensor and the intersection point is set to the origin error amount at the same time or at different times. a means for initially correcting and determining a corrected distance; and a second straight line pattern that is a component of the first straight line pattern and the first parallel straight line group pattern and is different from the first straight line pattern. The intersection angle of the linear sensor is calculated from the distance between each input position to the linear sensor located at the first position, the known pitch between the first and second linear patterns, and the correction distance. Claim 14, characterized in that it consists of means for determining
A device for detecting the arrangement relationship of linear sensors in the optical characteristic measuring device for an optical system as described in 1. 16. Claim 14 or 1, wherein the linear sensor is at least one linear sensor that rotates within one plane and is arranged at at least two different positions.
A device for detecting the arrangement relationship of linear sensors in the optical characteristic measuring device for an optical system according to item 5. 17. Claim 14 or 15, characterized in that the linear sensors are at least two linear sensors that intersect each other with a substantial or virtual intersection within a substantially or virtual plane. A device for detecting the arrangement relationship of linear sensors in the optical characteristic measuring device for an optical system as described in 1. 18. A linear sensor in an optical characteristic measuring device for an optical system according to any one of claims 14 to 17, wherein the measurement projection pattern and the detection projection pattern have a common configuration. A device that detects placement relationships.