JPH024152B2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention provides a
Constructs a ceramic multilayer wiring board for LSI mounting.
LSI on thick ceramic green sheet
The present invention relates to a through-hole forming device for forming through-holes for mounting.

Ceramic multilayer wiring boards for mounting LSIs have begun to be put into practical use as high-density mounting boards for large electronic computers, and are expected to become more widespread in the future.
The manufacturing process includes (1) thick film multilayer printing method, (2) green sheet multilayer printing method, and (3) green sheet multilayer lamination method, each of which has its own characteristics. Among these, the main manufacturing process of green sheet multilayer lamination method is:
(1) Molding the slurry into a thick film with a thickness of 100 μm to 300 μm, (2) Producing a green sheet cut to a predetermined size, (3)
Diameter 100μm ~ 250μm, through hole pitch 250μm
~600μm through hole molded, (4) wiring width 70μm
~150μm, conductor printing with line spacing 70μm ~ 150μm, (5)
(6) firing in multiple layers. The green sheet multilayer lamination method has few printing defects and there is no limit in principle to the number of laminated layers, but shrinkage control during sintering is important. One of the more practical issues is
The problem lies in how efficiently a green sheet can be cut into a predetermined size and a large number of fine through holes can be formed.

Conventionally, the method of cutting a green sheet to a predetermined size and forming through holes was to use concave and convex molds to form the through holes and pressurize them with a hydraulic press machine. 1) It is difficult to change the circuit pattern. (2) The manufacturing cost of the mold is expensive. (3) Predetermined size, e.g. 70mm width x 100mm length
In order to form a plurality of through holes in a green sheet, an extremely large pressing force is required.
For this reason, not only is there a risk that a press machine with low rigidity may be deformed, but also (4) a mold with low rigidity deforms when pressurized, making it difficult to uniformly open through holes. (5) There were problems such as the process of forming the through hole and cutting it into rectangles are separate processes.

In order to eliminate the drawbacks of forming through-holes in green sheets made of ceramic or the like as described above, the present invention is capable of efficiently and easily forming through-holes with low pressure and at the same time forming them into rectangular shapes of a predetermined size. A through-hole mold for cutting consisting of a convex through-hole mold and a concave through-hole mold, a roller mechanism for adhesive tape adhesion equipped with an adhesive tape for taking out the cutting residue, and a mold for molding. The present invention provides a through-hole forming device comprising a roller.

Embodiments of the present invention shown in the drawings will be described in detail below.

In Fig. 1, Fig. 2, Fig. 3, Fig. 4, and Fig. 5, 1 is a ceramic green film formed from a material whose main component is Al ₂ O ₃ and has a thickness of 50 to 200 μm and a width of 100 mm. Sheets 201 and 202 are convex through-hole molds. The convex through-hole molds 201 and 202 have protrusions 301 and 302, each having a diameter of 100 μm to 250 μm, a depth of 150 μm, and a pitch of 250 to 600 μm, at predetermined positions on a smooth plane made of stainless steel. Convex through-hole molding surfaces 401 and 402 formed by multiple photo etching and convex through-hole molding surfaces 401 and 402 have a width w of 70 mm, a length 1 of 100 mm, and a depth h of 3 mm. convex cutting parts 501 and 502 whose edges are formed by four edges surrounded by a rectangle, and a pair of positioning pins located on the outside of the width of the green sheet 1 and fixed on the diagonal lines of the convex through-hole molding surfaces 401 and 402, respectively. 6
01,602, and 603,604. Reference numeral 7 indicates a buffer plate made of an elastically deformable material such as a rubber plate having a slightly thinner circular shape of 3 mm on the outer circumferential plane of the convex cut portions 501 and 502, and reference numerals 801 and 802 indicate stainless steel plates. It is a concave through-hole mold consisting of. The concave through-hole molds 801 and 802 have an appropriate clearance with the protrusions 301 and 302 formed on the convex through-hole molds 201 and 202, and the protrusions 301 and 302
The plate thickness is approximately
80 μm concave through hole molding surfaces 101 and 1
02 and the convex cut portions 501 and 502 of the convex through-hole mold, forming a rectangular edge having an appropriate clearance, and forming a through-hole molding surface 1.
Concave cut portions 111 and 112 formed to a depth of approximately 1 mm from the surfaces of 01 and 102, and positioning holes 121, 122 and 12 at positions corresponding to positioning pins 601, 602, 603 and 604.
It consists of 3,124. Furthermore, on the back A side of the molding surface, apply a release agent such as silicone sealant (trade name of Toray Silicone Co., Ltd.) or Rocol (trade name of Sumitomo Metal Mining Co., Ltd.), a spray mold release agent whose main component is fluorocarbon. The molding agent is applied uniformly over the entire surface. 13 is an adhesive tape wound around the core. In this embodiment, Scotchi No. 845 book tape (trade name) manufactured by Sumitomo 3M Limited, cellophane tape (trade name), and other packaging adhesive tapes are suitable. The adhesive tape 13 is rotatably supported by a bobbin 15 supported by a side plate 14. 16 is rotatably supported by side plates 17 and 18, has a cylindrical shape, and is uniformly lined with an elastic material such as rubber up to a position wider than the width of the through-hole molds 201 and 202 with convex outer peripheral surfaces. The upper adhesive roller 19 is an upper adhesive roller whose outer peripheral surface is uniformly lined with an elastic material such as rubber up to a position wider than the width of the convex through-hole molds 201 and 202.
Both shaft ends are rotatably supported by bearing boxes 22 and 23 which are vertically slidable within rectangular guide portions 20 and 21 provided on side plates 17 and 18. Furthermore, the upper portions of the bearing boxes 22 and 23 are rotatably supported by both ends of the leaf spring 24. A pressure screw 25 is rotatably supported at the center of the leaf spring 24 and screwed into the center of a support plate 26 fixed to the tops of the side plates 17 and 18. 2
7 is a lower molding having a cylindrical shape and having a convex outer circumferential surface, and is lined uniformly with an elastic material such as relatively hard rubber or plastic such as polyacetal resin (Delrin) up to a position wider than the width of the through-hole molding molds 201 and 202. Both shaft ends of the lower forming roller 27 are rotatably supported by bearing boxes 30 and 31 that are vertically slidable within rectangular guide portions 28 and 29 provided on the side plates 17 and 18. Further, a handle 32 is fixed to one shaft end of the lower forming roller 27 to drive the lower forming roller 27 in the direction of arrow C. The means for driving the lower forming roller 27 may be a motor (not shown) or the like instead of the handle 32. A gear 33 is fixed to the other shaft end of the lower forming roller 27. Reference numeral 34 denotes an upper forming roller having a cylindrical shape and whose outer peripheral surface is uniformly lined with an elastic material such as rubber having a hardness of 50 to 70 degrees to a position wider than the width of the convex through-hole molds 201 and 202. Both shaft ends of the roller 34 are rotatably supported by bearing boxes 35 and 36 that can slide up and down inside rectangular guide portions 28 and 29 provided on the side plates 17 and 18, and a gear is attached to one shaft end. A gear 37 meshing with the handle 33 is fixed and rotated in the direction of arrow D by rotating the handle 32. The upper portions of the bearing boxes 35 and 36 are rotatably supported by both ends of a leaf spring 38. Reference numeral 39 denotes a pressure screw, which is rotatably supported in the center of the leaf spring 38 and is attached to the side plate 17.
and 18 are screwed into the center of a support plate 40 fixed to the upper part of the support plate 40 . 411,412,4
13, 414, and 415 are side plates 1 so that their outer peripheral surfaces are located on a plane including the outer peripheral surfaces of the lower adhesive roller 16 and the lower forming roller 27.
Guide rollers 4, 17, and 18 are rotatably supported, and 42 is a substrate that supports the entire device.

Next, the operation of the above embodiment will be described.

1 and 2, a ceramic green sheet 1 is placed between a convex through-hole mold 201 and a mold 201.
02 is cut slightly longer than the combined length, and placed on the convex through-hole molding surfaces 401 and 402 of the convex through-hole molding molds 201 and 202,
From above, insert the concave through-hole molds 801 and 802 into the positioning pins 601, 602 and 6.
Insert along 03,604. In this state, silicone sealant (trade name) or Rocol (trade name), a spray mold release agent containing fluorocarbon as a main component, is thinly and uniformly applied to the surfaces A of the concave through-hole molds 801 and 802.

In this way, the entire molding mold consisting of the convex through-hole molding molds 201 and 202 and the concave through-hole molding molds 801 and 802 in which the ceramic green sheet 1 is set is moved by the guide rollers 411 and 4.
At the same time as the adhesive tape 13 is placed on the surface of 12 and fed into the device, the tip of the adhesive tape 13 supported rotatably is placed on the surface A of the concave through-hole mold 801 or 802.
When the adhesive tape 13 is bonded to the concave through-hole molding surface 1 and fed while being held between the lower adhesive roller 16 and the upper adhesive roller 19 as shown in FIG.
It is evenly adhered to the surfaces of 01 and 102. After adhesion, the adhesive tape 13 is cut with a cutter (not shown) or scissors (not shown). Furthermore, the convex through-hole molds 201 and 202 and the concave through-hole molds 801 and 802 with the ceramic green sheet 1 set thereon are placed on the surface of the guide roller 413 and fed into the apparatus, and the plate springs shown in FIG. When the roller 34 is inserted between the upper forming roller 34 and the lower forming roller 27, the pressure of which is adjusted using the pressure screw 38 and the pressure screw 39, and is driven in the directions of arrows D and C by the handle 32, the roller 34 is inserted as shown in FIG. As shown in FIG.
A through hole is formed by 02. At the same time, the convex cutting parts 501 and 502 and the concave cutting part 11
1 and 112, it is cut into a rectangle with a width of 70 mm and a length of 100 mm. In particular, since the outer peripheral surface of the upper molding roller 34 is made of a rubber elastic material having appropriate hardness, the concave through-hole molding molds 801 and 802 can be easily formed without deforming them and with extremely low pressure. It is possible to mold a rectangular ceramic green sheet with through holes molded in it, but if the outer peripheral surface of the upper molding roller 34 is made of a hard material such as metal, the concave through hole mold 801 and 80
2 is easily deformed and it is difficult to form a through hole. The scraps generated when the through-holes are molded are inserted into the holes 901 and 902 and pressurized during molding, so that they are uniformly adhered to the adhesive layer of the adhesive tape 13. By further driving the handle 32, the ceramic green sheet 1 placed on the convex through-hole molds 201 and 202 is formed into a rectangular sheet with a plurality of through holes through the process described above. Ru. Next, the convex through-hole molds 201 and 202 and the concave through-hole molds 801 and 8 passed between the molding rollers 27 and 34.
In 02, the adhesive tape 13 adhered to the A surface of the concave through-hole molds 801 and 802.
When peeled off, holes 90 occur during through-hole molding.
The scraps inserted in 1 and 902 adhere to the adhesive layer of the adhesive tape 13 and are easily removed. At this time, the adhesive tape 13 can be easily peeled off from the surfaces of the concave through-hole molds 801 and 802 because a release agent is applied in advance to the surfaces A of the concave through-hole molds 801 and 802. Finally, concave through-hole molds 801 and 802 are respectively inserted into convex through-hole mold 2.
01 and 202, and the molded ceramic green sheet is peeled off from the surfaces of the convex through-hole molding surfaces 401 and 402 using tweezers or the like.

By sequentially repeating the manufacturing process as described above, a plurality of ceramic green sheets having through holes formed therein can be easily formed.

As described above, according to the present invention, the convex through-hole molds 201 and 202 and the concave through-hole mold 8 formed by the photo etching method are used.
01 and 802, on ceramic green sheets with a thickness of 50 μm to 200 μm.
Through-hole patterns of 100 μm to 250 μm and pitches of 250 μm to 600 μm can be easily drilled, and at the same time, rectangular shapes of a predetermined size (in this example, width 70 mm and length 100 mm) can be easily drilled.
It can be easily cut into pieces. Furthermore, continuous molding can be performed with low pressure by continuously adhering the adhesive tape onto the mold coated with a release agent with low pressure, and at the same time using a molding roller lined with relatively soft rubber. Compared to conventional methods, this method has the advantage of being able to mold complex through-hole patterns extremely efficiently with low pressure without deforming the molding die, at a lower cost, and significantly improving workability. .

[Brief explanation of drawings]

Fig. 1 is a perspective view including a partial sectional view of a molding die according to the present invention, Fig. 2 is a front view showing an embodiment of the present invention, Fig. 3 is a cross-sectional view AA of Fig. 2, and Fig. 4 The figure is a cross-sectional BB view of FIG. 2, and FIG. 5 is an enlarged partial cross-sectional view showing the operation of forming a through-hole using an apparatus according to an embodiment of the present invention. In the figure, 1 is a ceramic green sheet, 201 and 202 are convex through-hole molds, 301 and 302 are protrusions, and 4
01,402 is a convex through hole molding surface, 50
1,502 is a convex cutting part, 601, 602, 60
3,604 is a positioning pin, 7 is a buffer plate, 80
1,802 is a concave through-hole mold, 901,
902 is a hole, 101 and 102 are concave through-hole molding surfaces, 111 and 112 are concave cutting parts, 121,
122, 123, 124 are positioning holes, 13 is an adhesive tape, 14 is a side plate, 15 is a bobbin, 16 is a lower adhesive roller, 17, 18 is a side plate, 19 is an upper adhesive roller, 20, 21 is a guide part, 22 ,23
is a bearing box, 24 is a leaf spring, 25 is a pressure screw, 2
6 is a support plate, 27 is a lower forming roller, 28, 2
9 is a guide part, 30, 31 are a bearing box, 32 is a handle, 33, 37 are gears, 34 is an upper forming roller, 35, 36 are a bearing box, 38 is a leaf spring, 39 is a pressure screw, 40 is a support body, 411,412,4
Reference numerals 13, 414, and 415 indicate guide rollers, and 42 indicates a substrate.

Claims (1)

[Claims] 1. In order to form a plurality of through holes for forming logic circuits, etc. in a ceramic green sheet, a convex through hole forming surface is constructed by arranging a plurality of protrusions each having a minute diameter at a predetermined position. A plurality of sets of convex through-hole molds including a convex cut and a positioning pin each having a convex cut and a positioning pin formed of four edges that surround a convex through-hole molding surface with a rectangle of a predetermined size; and the convex through-hole mold. a buffer plate made of an elastically deformable material inserted on the outer circumferential plane of the rectangular convex cut portion at a position flush with or slightly lower than the through-hole molding surface; and a protrusion of the convex through-hole mold. A concave through-hole molding surface is formed with a plurality of micro-diameter holes, which are opened with an appropriate clearance from the part and are arranged at positions corresponding to the protrusions, and a convex cutting part of the convex through-hole mold and an appropriate It is composed of a concave cutting part composed of a rectangular edge having a clearance, and a plurality of sets of concave through-hole molds including positioning holes at positions corresponding to the positioning pins provided in the convex through-hole mold. A mold for through-hole molding, an adhesive tape for removing punching slag generated during through-hole molding and clogged in the hole of the concave through-hole mold, and the adhesive tape is adhered to the concave through-hole mold. a pair of rotatable adhesive roller mechanisms each having a cylindrical shape with an elastic surface and having a pressure spring device on one side;
The mold has a cylindrical shape and a surface made of an elastic material, and is equipped with a driving device to sandwich a ceramic green sheet and pressurize the entire through-hole mold with adhesive tape adhered to the back side of the concave through-hole mold. A through-hole forming device comprising a pair of forming rollers, one of which is provided with a spring device for pressure and whose clamping interval is adjustable.