JPH0242738B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a container for filling and storing chemical solutions such as a resist developer and a rinse solution used in the manufacture of semiconductors.

(Prior Art) Advances in microfabrication technology for integrated circuits, transistors, etc. have been remarkable, and requirements for quality control of resist developers and rinse solutions used in their manufacture are becoming increasingly strict. Particularly, the contamination of fine particulate foreign matter, which directly affects the product yield, is contraindicated, so the liquid is usually subjected to precision filtration and filled into a clean container in a clean environment (in a clean room) to become a product. In general,
Approximately 1 to 8 glass bottles are used as containers. However, since the developer is filled into the glass bottle in an open environment, although it is inside a clean room, there is an unavoidable possibility that dirt, foreign matter, etc. may enter the bottle, even if it is not as bad as in the outside air. Furthermore, the glass bottle has the drawback of being damaged during the distribution stage, and since the container itself is disposable, there is a problem in how to deal with it. Furthermore, the user must take the time to open the glass bottle and transfer it to the container of the equipment on the production line for integrated circuits, etc., and at that time, the contents, which have been carefully and precisely cleaned, may be contaminated with dirt or foreign matter. There may also be problems such as mixing, or in extreme cases, spilling or overflowing.

(Problems to be Solved by the Invention) Therefore, an object of the present invention is to provide the above-mentioned method that can be easily used by connecting to semiconductor manufacturing equipment without having to open the package to transfer the contents each time it is used. It is an object of the present invention to provide a storage container for a chemical solution for semiconductor manufacturing, such as a resist developer or a rinse solution, which has its drawbacks eliminated.

(Means for Solving the Problems) That is, the present invention is a storage container for a chemical solution for semiconductor manufacturing, and a coupler for transporting a chemical solution for closely joining a coupler for receiving a chemical solution in a semiconductor manufacturing device, and a gas for transporting a chemical solution. Gas flow couplers for tightly joining the inlet couplers pass through flanges installed at the top of the storage container at arbitrary intervals and are inserted into the storage container while keeping the container in a sealed state. The chemical liquid transport coupler has a length such that its tip reaches near the bottom of the storage container, while the gas flow coupler has a length such that its tip is located near the flange inside the storage container. The present invention relates to a storage container for chemical solutions for semiconductor manufacturing, characterized in that the storage container is made of an anticorrosive material. Note that, hereinafter, unless otherwise specified, the term "chemical liquid" means a chemical liquid for semiconductor manufacturing, such as a resist developer or a rinsing liquid used in semiconductor manufacturing.

The material of the container body must be one that does not generate foreign matter due to rust, and generally
Metal materials such as SUS 304, SUS 302, aluminum, and brass, or plastics such as polyethylene, polypropylene, and polytetrafluoroethylene are used, and materials made of SUS 304, polyethylene, or polytetrafluoroethylene are particularly preferred. Although the dimensions of the container can be selected arbitrarily, the container can have a larger capacity than conventional glass bottles (capacity 1 to 8). In general, it is preferable that the capacitance is 10 to 30 cm and the height is 45 cm or less for connection to semiconductor manufacturing equipment.

A coupler for transporting chemical liquids and a coupler for gas distribution must both have simple connection performance and the ability to seal the filling. As long as it has these two functions, it can be male (plug) or female (socket) in shape, but in general, the male type is less likely to accumulate dust and is easier to remove. It is also preferred because it is easy to capture. In particular, a double-way open/close type male coupler is most preferred as one that meets this requirement. In addition, the material is selected from materials that have the same anti-corrosion properties as the container body. A preferred coupler is SUS 304 SP manufactured by Nitto Kohki Co., Ltd.
Examples include plug type couplers. Note that the drug solution transporting coupler and the gas distribution coupler can be installed in arbitrary locations and in arbitrary numbers. Further, it is preferable to protect the coupler with a cap when not in use to prevent contamination by dust and foreign matter.

(Example) Hereinafter, embodiments of the present invention will be described based on the drawings.

FIG. 1 shows an overall overhead view of the container 10 of the present invention, and FIG. 2 shows a sectional view taken along line XX' in FIG. A coupler for transporting a drug solution, that is, a male coupler 11 for transporting the drug solution content, and a coupler for gas flow;
That is, the male coupler 12 that feeds the gas serving as the transport power is welded and fixed to a flange 14 that is fixed to the container body 13 with a threaded portion 15.

The contents of the chemical liquid pass through the coupler 11 or 12 and are filled into the container body 13, which is then sealed with a clean gas (preferably a nonflammable gas, such as clean nitrogen passed through a 0.22 micron filter). As shown in FIG. 3, the user places the container 10 filled in this way on the cart 5 and transports it to the semiconductor manufacturing equipment 1, connects the coupler 11 to the female coupler 16 for receiving the chemical liquid in the equipment 1, and Similarly, the coupler 12 is connected to the female coupler 17 for feeding a gas (for example, nitrogen) for transporting a chemical solution in the device 1, and nitrogen is caused to flow into the container 10, so that the chemical solution is passed through the couplers 11 and 16 to the semiconductor manufacturing device 1. Just send it to.
In short, by simply connecting the male coupler 11 of the container 10 to the female coupler of the semiconductor manufacturing equipment 1, the chemical solution can be easily transferred and used without the hassle of transfer or contamination during transfer.

Figures 4 to 6 show embodiments in which the coupler is capped to prevent contamination. That is, Fig. 4 shows an example of capping the couplers 11 and 12 themselves, Fig. 5 shows an example of capping the couplers 11 and 12 and the flange 14, and Fig. 6 shows an example of capping the entire upper part of the container. is preferred. The material of the cap is not particularly limited, and generally it may be made of the same metal as the container body, or may be made of rubber or plastic.

(Effects of the Invention) As described above, the container for storing chemical solutions such as resist developer or rinse solution for semiconductor manufacturing according to the present invention can be easily made and can be used cleanly and safely without contaminating dust or foreign matter. It is.

[Brief explanation of the drawing]

FIG. 1 is an overall view of a chemical solution storage container 10 of the present invention, and FIG. 2 is a sectional view taken along line XX' in FIG.
FIG. 3 shows an embodiment in which the chemical solution storage container 10 of the present invention is connected to the semiconductor manufacturing apparatus 1. 4th~
Figure 6 shows an embodiment in which the coupler is captured,
4 shows the couplers 11, 12 themselves, FIG. 5 shows the couplers 11, 12 and the flange 14,
The figure shows a state in which the entire upper part of the container is covered with a cap 30, respectively. DESCRIPTION OF SYMBOLS 1... Semiconductor manufacturing equipment, 5... Container transportation cart, 10... Chemical liquid storage container, 11... Coupler for chemical liquid transportation, 12... Gas distribution coupler, 13...
...Medical solution storage container body, 14...Flange, 15...
...Screw, 16...Coupler for receiving chemical liquid in semiconductor manufacturing equipment, 17...Coupler for gas delivery for transporting chemical liquid, 20...Chemical liquid for semiconductor manufacturing, 30...Cap.

Claims (1)

[Claims] 1 Storage containers for chemical solutions for semiconductor manufacturing, including couplers for transporting chemical solutions for tightly joining couplers for receiving chemical solutions in semiconductor manufacturing equipment, and couplers for gas distribution for tightly joining couplers for supplying gas for transporting chemical solutions. The couplers are inserted into the storage container by penetrating the flanges installed on the top of the storage container at arbitrary intervals and are inserted into the storage container while keeping the container in an airtight state. It has a length that reaches near the bottom of the storage container,
On the other hand, the chemical solution storage container for semiconductor manufacturing is characterized in that the gas distribution coupler has a length such that its tip is located near the flange inside the storage container, and the storage container is made of an anticorrosive material. .