JPH0247858B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for fixing a probe card in a prober, and more particularly, to a device that can easily fix a probe card.

In order to measure the electrical characteristics of semiconductor elements (hereinafter referred to as chips) within a wafer, a tester that applies electrical signals to the chips and determines the response to distinguish between good and defective products, and a tester that sequentially probes the chips within the wafer are used. A probe card is required, which has a prober that makes contact with the probes on the card, and a probe that makes contact with electrodes in the chip to send and receive electrical signals.Generally, the probe card is mechanically attached to the prober, and electrically coupled to the tester.
Particularly when performing high-frequency measurements, the test station, which is the signal input/output section of the tester, is installed directly above the prober and is further connected to the probe card with an extremely short measurement cable. In recent years, devices have been developed that eliminate this measurement cable and directly bring the electrodes of the test station into contact with the probe card.

Conventionally, the probe cards used for these were disk-shaped, and at present, approximately
A device equipped with as many as 300 probes has been put into practical use. Generally, a plurality of terminal pins are provided on the top surface of these probe cards on the same circumference inside the outer periphery, and are inserted into a probe card socket for connecting to a test station.

According to this method, the greater the number of terminal pins, the greater the force exerted between the probe card sockets and the more difficult it becomes to attach and detach the probe card.

Recently, the terminal pins have been eliminated, and instead of the probe card socket, spring-type contacts (hereinafter referred to as pogo pins) that connect electrically to the test station are installed on the prober body or on the relay board attached to the prober body. Probe cards have been developed that eliminate the mounting forces described above.

However, although screws are used to fix the probe card using the pogo pins to the prober, there is a drawback that the screwing operation is difficult due to the reaction force of a large number of pogo pins.

An object of the present invention is to eliminate the screw-fastening work in installing the pogo pin type probe card,
This is an attempt to easily fix a probe card to a prober.

In order to achieve the above object, the present invention includes a spring-type contactor on the prober body or a relay board attached to the prober body, which contacts the probe card and connects the probe card to the test station. The prober has a locking piece provided on the prober body or the relay board, and an annular probe card fixing jig that holds the outer peripheral edge of the probe card and is removably coupled to the locking piece, The stopper has a large-diameter head at the lower end of the shaft, and consists of at least two or more pins fixed at positions on the same circumference, and is attached to the annular collar of the probe card fixing jig. A specific section whose wall thickness is gradually increased in the circumferential direction is provided, and a large diameter part 13a that passes through the specific section vertically and allows the head of the locking piece to pass therethrough, and a small diameter part that guides the shaft part of the locking piece. 13b and an engagement hole into which the head of the locking piece is engaged, which is opened in an arc shape.

Embodiments of the present invention will be described below with reference to the drawings.

1, 2 and 3 show one embodiment of the present invention.

FIG. 1 is a schematic cross-sectional view of the peripheral portion of the probe card when the probe card is attached. FIG. 2 is a perspective view illustrating the attachment of the ring 5, the pin 6 as a locking piece, and the ring-shaped probe card fixing jig 7 in FIG. 1. FIG. 3 is a partial schematic diagram of the pin 6, jig 7, and arc-shaped engagement hole 13 in FIG. 2.

Pogo pin 2 installed on test station 1
is in contact with a relay board 12, and the relay board 12 is attached to the prober head plate 3.
The relay board 12 is further provided with pogo pins 4 for making contact with the probe card 8. A ring 5 is fixed to the lower surface of the head plate 3, and a plurality of probe card fixing pins 6, 6 are fixed to the ring 5 on the same circumference. The pin 6 has a large-diameter head 6a at the lower end of a shaft portion 6b planted on the lower surface of the ring 5. The outer circumferential diameter of the probe card 8 is slightly larger than the inner circumferential diameter of the ring-shaped probe card fixing jig 7, and the probe card 8 is fitted and held on the inner circumferential step 7a of the jig 7. A plurality of arc-shaped engagement holes 1 are formed in the collar portion 7b on the outer peripheral edge of the jig 7 so as to match the pins 6 in position as shown in FIGS. 2 and 3, A and B.
3 and 13 are provided. Each arcuate engagement hole 13 is opened in a specific section where the wall thickness of the jig 7 is gradually increased, as shown in FIG. A large diameter part 13a that penetrates the part 6a, a small diameter part 13b that guides the shaft part 6b of the pin 6, and a small diameter part 13b that prevents the head part 6a of the pin 6 from escaping. A locking portion 13c having a flat seat surface for locking is provided in series. In the embodiment, an example is shown in which a specific section in which the engagement hole 13 is opened is tapered upward from the large diameter portion 13a to the locking portion 13c. Also 1
Reference numeral 1 denotes a wafer stage, on which a wafer 10 is placed, and probes 9 of a probe card 8 are brought into contact with the wafer 10.

To install the probe card 8, first fit and hold the probe card 8 on the step 7a of the jig 7,
The top surface of the probe card 8 is brought into contact with the pogo pin 4 of the relay board 12 so as to be pressed against it. At this time, the head 6a of the pin 6 is fitted into the large diameter portion 13a of the engagement hole 13 as shown in FIG.

Next, when the jig 7 is rotated in the direction A in Fig. 2,
As shown in FIG. 3, the pin 6 moves relatively in the B direction. The peripheral edge of the engagement hole 13 of the jig 7 is tapered as shown in FIG.
When the jig 7 moves, the jig 7 is pressed in the B' direction, that is, the probe card 8 is pressed in the direction of the pogo pin 4. The locking portion 13c at the tapered end is flat, and when the pin 6 reaches this point, the jig 7 is locked to the head 6a of the pin 6, the jig is stabilized, and the jig 7 is held by the reaction force of the pogo pin 4. is fixed to the prober body.

As mentioned above, the probe card 8 is attached to the pogo pin 4.
As a result, it is connected to the test station 1.

Naturally, if the jig 7 is reversely rotated in the direction A' in FIG. 2, the jig 7 will come off the head plate 3 with the help of the reaction of the pogo pins 4.

As described above, according to the present invention, when fixing the probe card, the conventional screw tightening work is no longer required, so the probe card can be mounted with a very simple work, and the work efficiency can be improved. It is something that you have.

[Brief explanation of drawings]

Fig. 1 is a sectional view of the vicinity of the probe card attachment part of an embodiment of the present invention, Fig. 2 is a perspective view showing the probe card attachment state, and Fig. 3 A and B explain the method of fixing the probe card. In the figure, the third
Figure A is a plan view, and Figure 3B is a front view. 1... Test station, 2... Tester side pogo pin, 3... Prober head plate, 4...
... Relay board side pogo pin, 5... Probe card fixing ring, 6... Probe card fixing pin (locking piece), 7... Probe card fixing jig, 8
...Probe card, 9...Probe, 10...
Wafer, 11... Wafer stage, 12... Relay board, 13... Engagement hole.

Claims (1)

[Claims] 1. In a prober equipped with a spring-type contactor that connects a probe guard to the prober body or a relay board attached to the prober body to provide electrical relay between the probe card and the test station. , a locking piece provided on the prober body or the relay board, and an annular probe card fixing jig that holds the outer periphery of the probe card and is removably coupled to the locking piece, the locking piece being It has a large-diameter head at the lower end of the shaft, and consists of at least two or more pins fixed at the same circumferential position, and the annular flange of the probe card fixing jig has a wall thickness. a large diameter portion 13a that vertically passes through the specific section and through which the head of the locking piece is inserted; and a small diameter portion 13b that guides the shaft of the locking piece; A probe card fixing device characterized in that an engagement hole including an engagement hole into which a head of a locking piece is engaged is opened in an arc shape.