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JPH0248155B2 - INSATSUHAISENBANNOSEIZOHOHO - Google Patents
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JPH0248155B2 - INSATSUHAISENBANNOSEIZOHOHO - Google Patents

INSATSUHAISENBANNOSEIZOHOHO

Info

Publication number
JPH0248155B2
JPH0248155B2 JP13419584A JP13419584A JPH0248155B2 JP H0248155 B2 JPH0248155 B2 JP H0248155B2 JP 13419584 A JP13419584 A JP 13419584A JP 13419584 A JP13419584 A JP 13419584A JP H0248155 B2 JPH0248155 B2 JP H0248155B2
Authority
JP
Japan
Prior art keywords
plating
insulating substrate
thermosetting resin
holes
catalyst
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13419584A
Other languages
Japanese (ja)
Other versions
JPS6114795A (en
Inventor
Nobuo Uozu
Hiroyoshi Yokoyama
Yoichi Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi Condenser Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Condenser Co Ltd filed Critical Hitachi Condenser Co Ltd
Priority to JP13419584A priority Critical patent/JPH0248155B2/en
Priority to US06/701,533 priority patent/US4585502A/en
Priority to DE19853505579 priority patent/DE3505579A1/en
Publication of JPS6114795A publication Critical patent/JPS6114795A/en
Publication of JPH0248155B2 publication Critical patent/JPH0248155B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

(産業上の利用分野) 本発明は、アデイテイブ法による印刷配線板の
製造方法に関するものである。 (従来の技術) 従来、CC―4法等のようなアデイテイブ法に
より無電解めつきして回路を形成し印刷配線板を
製造する場合、絶縁基板の表面に予め、めつき触
媒入り接着剤層を設けている。この場合、絶縁基
板にスルーホール用の孔が設けられているものに
あつては、孔を設けた後、無電解めつき処理をす
る前に、めつき触媒を孔に付着する処理を行なつ
ている。 (発明が解決しようとする課題) ところで、通常、接着剤層と無電解めつき処理
により形成されためつきの回路との接着力を向上
するために、孔にめつき触媒を付着した後に、接
着剤層を粗化している。接着剤層の粗化は、絶縁
基板を硼弗化水素酸溶液や無水クロム酸硫酸系溶
液等の粗化液に浸漬することにより行なつている
が、この浸漬処理により孔に付着しためつき触媒
の大部分が洗い流されてしまう。従つて、後に無
電解めつき処理を行なつても孔の箇所に、めつき
が析出するのに時間が掛かり、析出しためつき膜
は薄く剥離強度が小さいという欠点があつた。そ
のため、半田デイツプ等により孔に半田めつきを
したりさらに電子部品を接続する場合等に、孔内
周面に設けられためつき膜が部分的に薄く、絶縁
基板内のガスが孔壁のめつき膜を剥離して孔内に
充満し、半田が孔内部から押し出されて入口の表
面のみを被う状態(以下ブローホールという)に
なる。このような状態になると、電子部品の接続
不良が発生し易くなり、また、接着力も低下し易
くなる欠点があつた。 (課題を解決するための手段) 本発明は、上記の目的を達成するために、スル
ーホール用の孔を有しめつき触媒入り接着剤が塗
布された絶縁基板に無電解めつき法により所定の
回路を形成しうる印刷配線板の製造方法におい
て、絶縁基板を熱硬化性樹脂中に浸漬して孔壁面
にめつき触媒入りの熱硬化性樹脂を塗布する工程
と、該工程後に表面のエマルジヨンを除去し5
m/sec以下の風速の熱風により孔壁に付着した
熱硬化性樹脂を加熱する工程と、加熱後めつき触
媒を付着する工程と、めつきレジスト層を形成し
た後粗化液で接着剤層を粗化する工程とを施す印
刷配線板の製造方法を提供する。 (作用) すなわち、本発明は、絶縁基板に設けられたス
ルーホール用の孔の壁面に予め、めつき触媒入り
の熱硬化性樹脂層を設け、これを半硬化あるいは
硬化するのに、この樹脂が除去されない程度の風
速の熱風を用いているため、孔壁にはまんべん無
く熱硬化性樹脂が付着した状態を保持できる。そ
れ故、その後に、絶縁基板を粗化液に浸漬しても
孔壁にはめつき触媒が十分に分散されており除去
されることなく、無電解めつき処理により、孔壁
に十分な厚さのめつきが短時間に析出し、めつき
層が形成される。しかも、絶縁基板内のガスが孔
壁を通して放出されるのを熱硬化性樹脂層により
防止できるため、半田めつき処理等をした場合の
ブローホール等の欠点を防止できるとともに孔壁
面へのめつき析出速度を早めることができる。 (実施例) 以下、本発明を実施例に基づいて説明する。 先ず、第1図に示す通り、紙―フエノール樹脂
基材や紙―エポキシ樹脂基材からなる絶縁基板1
にパラジウム等のめつき触媒入りの接着剤を塗布
して接着剤層2を形成する。次に、第2図に示す
通り、この接着剤層2が形成された絶縁基板1を
パンチして所定のスルーホール用の孔3を形成す
る。孔3形成後、絶縁基板1の表面を整面し、高
圧水洗をしてパンチによる基板カスを除去する。
この水洗後の絶縁基板1を特にめつき触媒入り熱
硬化性樹脂のエマルジヨン中に浸漬し、第3図に
示す通り、孔3の壁面に厚さ2〜10μ程度の熱硬
化性の樹脂層4を設ける。熱硬化性樹脂として
は、エポキシ樹脂やウレタン樹脂、ポリエステル
樹脂等を用いるが、絶縁基板1がフエノール樹脂
系あるいはエポキシ樹脂系のものの場合には、エ
ポキシ樹脂が基板との密着性がよく好ましい。ま
た、硬化剤としては、アミン系のものが安定した
エマルジヨンが得られるので好ましい。そしてエ
マルジヨン中の固形分濃度としては0.3〜5wt%の
範囲のものが特に好ましい。すなわち、0.3wt%
未満の濃度では硬化剤としての効果が低くなつて
樹脂が硬化し難くなり、また5wt%より多いと孔
を塞ぐように樹脂が被覆されることがあり、除去
作業が必要となり作業上好ましくない。めつき触
媒は、パラジウム化合物あるいは錫化合物との併
用系のパラジウム系触媒を用い、樹脂分100重量
部に対して0.005〜0.5重量部添加したものが好ま
しく、0.005重量部未満では触媒効果が低く、0.5
重量部より多いと価格が高くなり製造コストが高
くなる。絶縁基板1をエマルジヨン中に浸漬した
後、絞りローラやバフにより表面のエマルジヨン
を除去する。表面のエマルジヨンを除去した後、
扇風機等により強制的に加熱された空気を5m/
sec以下の熱風により孔壁に付着した熱硬化性樹
脂を加熱乾燥して硬化状態にする。熱硬化性樹脂
層4を硬化した後、接着剤層2表面にめつきレジ
ストインクを所定のパターンに塗布・乾燥し、第
4図に示す通り、めつきレジスト層5を設ける。
めつきレジスト層5を形成後、絶縁基板1を硼弗
化水素酸溶液や無水クロム酸硫酸系溶液からなる
粗化液に浸漬し、第5図に示す通り、接着剤層2
を粗化する。接着剤層2を粗化した後、絶縁基板
1を無電解めつき溶液中に浸漬し所定のパターン
にめつきを析出して、第6図に示す通り、回路6
を形成する。回路6を形成後、通常の方法で絶縁
基板1を処理し、印刷配線板を製造する。 次に、本発明と従来例とについて、スルーホー
ル用の孔内のめつき付着性、スルーホール信頼性
及びブローホール発生率を測定したところ表の通
りの結果が得られた。
(Industrial Application Field) The present invention relates to a method for manufacturing a printed wiring board using an additive method. (Prior art) Conventionally, when manufacturing a printed wiring board by forming a circuit by electroless plating using an additive method such as the CC-4 method, an adhesive layer containing a plating catalyst is applied on the surface of an insulating substrate in advance. has been established. In this case, if the insulating substrate has holes for through holes, after the holes are formed and before electroless plating, a plating catalyst is applied to the holes. ing. (Problem to be Solved by the Invention) By the way, in order to improve the adhesion between the adhesive layer and the plating circuit formed by electroless plating, after the plating catalyst is attached to the holes, the adhesive is The layer is roughened. The adhesive layer is roughened by dipping the insulating substrate in a roughening solution such as a borofluoric acid solution or an anhydrous chromic acid/sulfuric acid solution. Most of the catalyst will be washed away. Therefore, even if an electroless plating treatment is performed later, it takes time for the plating to precipitate at the holes, and the deposited plating film is thin and has a low peel strength. Therefore, when soldering the hole with solder dip or connecting electronic components, etc., the dipping film provided on the inner circumferential surface of the hole is partially thin, and the gas inside the insulating substrate can leak onto the hole wall. The solder film is peeled off and the hole is filled with solder, and the solder is pushed out from inside the hole and covers only the surface of the entrance (hereinafter referred to as a blowhole). In such a state, there are disadvantages in that connection failures of electronic components are likely to occur and adhesive strength is also likely to decrease. (Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention provides a method for applying a predetermined method by electroless plating to an insulating substrate having holes for through holes and coated with a plating catalyst-containing adhesive. A method for manufacturing a printed wiring board on which a circuit can be formed includes a step of immersing an insulating substrate in a thermosetting resin and applying a thermosetting resin containing a plating catalyst to the hole wall surface, and removing an emulsion on the surface after this step. removed 5
A process of heating the thermosetting resin attached to the hole wall with hot air at a wind speed of m/sec or less, a process of attaching a plating catalyst after heating, and a process of forming an adhesive layer with a roughening liquid after forming a plating resist layer. Provided is a method for manufacturing a printed wiring board, which includes a step of roughening the printed wiring board. (Function) That is, in the present invention, a thermosetting resin layer containing a plating catalyst is previously provided on the wall surface of a through hole provided in an insulating substrate, and this resin is used to semi-cure or harden the layer. Since hot air is used at a speed that does not remove the thermosetting resin, the thermosetting resin can be kept evenly adhered to the hole walls. Therefore, even if the insulating substrate is subsequently immersed in a roughening solution, the catalyst plated on the pore walls is sufficiently dispersed and will not be removed. Plating precipitates in a short period of time, forming a plating layer. Moreover, since the thermosetting resin layer can prevent the gas in the insulating substrate from being released through the hole walls, it is possible to prevent defects such as blowholes when performing solder plating, etc., and prevent plating on the hole wall surfaces. The precipitation rate can be accelerated. (Examples) Hereinafter, the present invention will be described based on Examples. First, as shown in FIG. 1, an insulating substrate 1 made of a paper-phenol resin base material or a paper-epoxy resin base material is prepared.
An adhesive containing a plating catalyst such as palladium is applied to the adhesive layer 2 to form an adhesive layer 2. Next, as shown in FIG. 2, holes 3 for predetermined through holes are formed by punching the insulating substrate 1 on which the adhesive layer 2 is formed. After forming the holes 3, the surface of the insulating substrate 1 is leveled and washed with high-pressure water to remove substrate debris caused by punching.
The insulating substrate 1 after washing with water is immersed in an emulsion of thermosetting resin containing a plating catalyst, and as shown in FIG. will be established. As the thermosetting resin, epoxy resin, urethane resin, polyester resin, etc. are used, but when the insulating substrate 1 is made of phenol resin or epoxy resin, epoxy resin is preferred because of its good adhesion to the substrate. Furthermore, as the curing agent, an amine type curing agent is preferable since a stable emulsion can be obtained. The solid content concentration in the emulsion is particularly preferably in the range of 0.3 to 5 wt%. i.e. 0.3wt%
If the concentration is less than 5% by weight, the effect as a curing agent will be reduced and the resin will be difficult to cure, and if the concentration is more than 5wt%, the resin may be coated so as to close the pores, making removal work necessary, which is undesirable for work. The plating catalyst is preferably a palladium-based catalyst used in combination with a palladium compound or a tin compound, and is preferably added in an amount of 0.005 to 0.5 parts by weight per 100 parts by weight of the resin.If it is less than 0.005 parts by weight, the catalytic effect is low; 0.5
If the amount exceeds parts by weight, the price and manufacturing costs will increase. After the insulating substrate 1 is immersed in the emulsion, the emulsion on the surface is removed using a squeezing roller or a buff. After removing the surface emulsion,
Air that is forcibly heated by an electric fan, etc. is
The thermosetting resin adhering to the hole wall is heated and dried by hot air of less than sec to a hardened state. After the thermosetting resin layer 4 is cured, a plating resist ink is applied to the surface of the adhesive layer 2 in a predetermined pattern and dried to form a plating resist layer 5 as shown in FIG.
After forming the plating resist layer 5, the insulating substrate 1 is immersed in a roughening solution consisting of a borofluoric acid solution or an anhydrous chromic acid/sulfuric acid solution, and then the adhesive layer 2 is formed as shown in FIG.
coarsen. After roughening the adhesive layer 2, the insulating substrate 1 is immersed in an electroless plating solution to deposit plating in a predetermined pattern to form a circuit 6 as shown in FIG.
form. After forming the circuit 6, the insulating substrate 1 is processed in a conventional manner to produce a printed wiring board. Next, the plating adhesion inside the through-hole, the through-hole reliability, and the blowhole occurrence rate were measured for the present invention and the conventional example, and the results shown in the table were obtained.

【表】 スルーホール用の孔内のめつき付着性は孔内壁
全面にめつきが析出するまでの時間、スルーホー
ル信頼性はMIL―107D(−65℃、30分〜125℃、
30分のサイクルによる熱衝撃テスト)により抵抗
値が10%増化するサイクル数、ブローホール発生
率は半田あげ条件を240℃、5秒とする。 なお、製造条件は、実施例1)が、 a) 絶縁基板:エポキシ樹脂積層板にめつき触
媒入り接着剤(日立化成工業社製HA―04)を
塗布硬化したもの。 b) 熱硬化性樹脂層形成工程:エポキシ樹脂エ
マルジヨン(カネボウNSC社製エポルジヨン
EA―1の固形分100重量部に対し硬化剤EB―
1を80重量部添加したもの)に、パラジウム液
PEC―8(日立化成工業社製めつき触媒)をパ
ラジウム濃度が樹脂分100重量部に対し0.03重
量部となるように添加した濃度1%の液中に浸
漬後、バブにより接着剤表面のエマルジヨンを
取り除き、さらに、100℃程度に加熱された風
速3m/secの熱風により加熱する。 c) めつきレジスト工程:めつきレジストイン
ク(日立化成工業社製HGM―02BK―1)を
スクリーン印刷し、温度160℃で30分間加熱し
て硬化する。 d) 粗化工程:硼弗化水素酸系粗化液により接
着剤表面を粗化し、洗浄して乾燥する。 e) 無電解めつき工程:通常の無電解銅めつき
処理により厚さ30μの銅層を形成する。 実施例2)は、実施例1)において熱硬化性樹
脂の樹脂分100重量部に対してニトリルブタジエ
ン系ゴム(日本ゼオン社製ハイヤー1522)を10重
量部添加し、 実施例3)は、実施例1)において粗化液を弗
化ソーダ・クロム硫酸系とし、 実施例4)は、実施例1)においてb)の工程
でエマルジヨン除去後に100℃程度に加熱された
風速4.5m/secの熱風により加熱し、 実施例5)は、実施例1)においてb)の工程
でエマルジヨン除去後に100℃程度に加熱された
風速5m/secの熱風により加熱し、 実施例6)は、実施例1)においてb)の工程
でエマルジヨン除去後に100℃程度に加熱された
風速5.5m/secの熱風により加熱し、 従来例は、実施例1)においてb)の工程を省
略したものである。 表から明らかな通り、本発明によれば、従来例
に比べて、スルーホール用の孔壁面のめつき付着
性は約1/2以下になり、めつき析出速度が早くな
り、スルーホールの信頼性は約1.4倍以上となり、
ブローホール発生率は1/5以下になる。また、本
発明によれば、熱風の風速は、5m/secを越す
とめつき付着性が急激に増加することが明らかで
あり、5m/sec以下が好ましい。 (発明の効果) 以上の通り、本発明によれば、スルーホール用
の孔壁面に熱硬化性樹脂をまんべん無く設けるこ
とにより孔壁面へのめつき析出が早くなり製造時
間を短縮できるとともにブローホールの発生率が
低く信頼性の高い印刷配線板の製造方法が得られ
る。
[Table] The adhesion of plating inside the hole for through holes is the time until plating is deposited on the entire inner wall of the hole, and the through hole reliability is MIL-107D (-65℃, 30 minutes to 125℃,
The number of cycles at which the resistance value increases by 10% (thermal shock test with a 30-minute cycle) and the blowhole occurrence rate are determined by soldering conditions of 240°C and 5 seconds. The manufacturing conditions of Example 1) were as follows: a) Insulating substrate: An epoxy resin laminate plate was coated with a plating catalyst-containing adhesive (HA-04 manufactured by Hitachi Chemical Co., Ltd.) and cured. b) Thermosetting resin layer forming step: Epoxy resin emulsion (Epolsion manufactured by Kanebo NSC)
Hardening agent EB- for 100 parts by weight of solid content of EA-1
1) to which 80 parts by weight of 1) was added, palladium liquid
After immersing PEC-8 (a plating catalyst manufactured by Hitachi Chemical Co., Ltd.) in a 1% solution containing palladium at a concentration of 0.03 parts by weight per 100 parts by weight of resin, the emulsion on the surface of the adhesive was removed using a bub. is removed, and further heated with hot air heated to about 100°C at a wind speed of 3 m/sec. c) Plating resist process: Screen printing the plating resist ink (HGM-02BK-1 manufactured by Hitachi Chemical Co., Ltd.) and curing it by heating at a temperature of 160°C for 30 minutes. d) Roughening step: The surface of the adhesive is roughened with a borofluoric acid roughening solution, washed and dried. e) Electroless plating process: A 30μ thick copper layer is formed by a normal electroless copper plating process. In Example 2), 10 parts by weight of nitrile butadiene rubber (Higher 1522 manufactured by Nippon Zeon Co., Ltd.) was added to 100 parts by weight of the thermosetting resin in Example 1), and in Example 3), In Example 1), the roughening liquid was a sodium fluoride/chromium sulfate system, and in Example 4), hot air heated to about 100°C at a wind speed of 4.5 m/sec was used after removing the emulsion in step b) in Example 1). Example 5) was heated with hot air at a wind speed of 5 m/sec heated to about 100°C after the emulsion was removed in step b) in Example 1), and Example 6) was heated with Example 1). In step b), after removing the emulsion, heating was performed using hot air heated to about 100° C. at a wind speed of 5.5 m/sec, and the conventional example was obtained by omitting step b) in Example 1). As is clear from the table, according to the present invention, compared to the conventional example, the plating adhesion on the hole wall surface for through-holes is about 1/2 or less, the plating deposition rate is faster, and the through-holes are more reliable. The sex is about 1.4 times more,
The blowhole occurrence rate will be less than 1/5. Further, according to the present invention, it is clear that when the hot air velocity exceeds 5 m/sec, the adhesion of the hot air sharply increases, so it is preferably 5 m/sec or less. (Effects of the Invention) As described above, according to the present invention, by uniformly disposing the thermosetting resin on the hole wall surface of a through hole, plating precipitation on the hole wall surface is accelerated, and manufacturing time can be shortened. A highly reliable printed wiring board manufacturing method with a low blowhole occurrence rate can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第6図は本発明実施例の製造工程を示
し、第1図は接着剤層を設けた絶縁基板の断面
図、第2図は孔を形成した絶縁基板の断面図、第
3図は孔壁に熱硬化性樹脂層を設けた絶縁基板の
断面図、第4図はめつきレジスト層を設けた絶縁
基板の断面図、第5図は接着剤層を粗化した絶縁
基板の断面図、第6図は回路を設けた絶縁基板の
断面図を示す。 1…絶縁基板、2…接着剤層、3…孔、4…熱
硬化性樹脂層、5…めつきレジスト層、6…回
路。
1 to 6 show the manufacturing process of an embodiment of the present invention, in which FIG. 1 is a cross-sectional view of an insulating substrate provided with an adhesive layer, FIG. 2 is a cross-sectional view of an insulating substrate with holes formed, and FIG. The figure is a cross-sectional view of an insulating substrate with a thermosetting resin layer provided on the hole wall, Figure 4 is a cross-sectional view of an insulating substrate with a plating resist layer provided, and Figure 5 is a cross-sectional view of an insulating substrate with a roughened adhesive layer. FIG. 6 shows a cross-sectional view of an insulating substrate provided with a circuit. DESCRIPTION OF SYMBOLS 1... Insulating substrate, 2... Adhesive layer, 3... Hole, 4... Thermosetting resin layer, 5... Plating resist layer, 6... Circuit.

Claims (1)

【特許請求の範囲】[Claims] 1 スルーホール用の孔を有しめつき触媒入り接
着剤が塗布された絶縁基板に、無電解めつき法に
より所定の回路及びスルーホールを形成する印刷
配線板の製造方法において、絶縁基板をめつき触
媒入り熱硬化性樹脂のエマルジヨン中に浸漬して
孔壁面にめつき触媒入りの熱硬化性樹脂を塗布す
る工程と、該工程後に表面のエマルジヨンを除去
し5m/sec以下の風速の熱風により孔壁面に付
着した前記熱硬化性樹脂を加熱する工程と、該工
程後に前記熱硬化性樹脂にめつき触媒を付着する
工程と、めつきレジスト層を形成した後粗化液に
絶縁基板を浸漬し接着剤層を粗化する工程とを施
すことを特徴とする印刷配線板の製造方法。
1. In a method for manufacturing a printed wiring board in which a predetermined circuit and through holes are formed by an electroless plating method on an insulating substrate having holes for through holes and coated with a plating catalyst-containing adhesive, an insulating substrate is plated. A process of dipping into an emulsion of a thermosetting resin containing a catalyst and plating the thermosetting resin containing a catalyst onto the hole wall surface, and after this process, removing the emulsion on the surface and drying the hole with hot air at a wind speed of 5 m/sec or less. A step of heating the thermosetting resin attached to the wall surface, a step of adhering a plating catalyst to the thermosetting resin after the step, and a step of immersing the insulating substrate in a roughening solution after forming the plating resist layer. A method for manufacturing a printed wiring board, comprising the step of roughening an adhesive layer.
JP13419584A 1984-04-27 1984-06-29 INSATSUHAISENBANNOSEIZOHOHO Expired - Lifetime JPH0248155B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP13419584A JPH0248155B2 (en) 1984-06-29 1984-06-29 INSATSUHAISENBANNOSEIZOHOHO
US06/701,533 US4585502A (en) 1984-04-27 1985-02-14 Process for producing printed circuit board
DE19853505579 DE3505579A1 (en) 1984-04-27 1985-02-18 METHOD FOR PRODUCING A PRINTED CIRCUIT BOARD

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13419584A JPH0248155B2 (en) 1984-06-29 1984-06-29 INSATSUHAISENBANNOSEIZOHOHO

Publications (2)

Publication Number Publication Date
JPS6114795A JPS6114795A (en) 1986-01-22
JPH0248155B2 true JPH0248155B2 (en) 1990-10-24

Family

ID=15122652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13419584A Expired - Lifetime JPH0248155B2 (en) 1984-04-27 1984-06-29 INSATSUHAISENBANNOSEIZOHOHO

Country Status (1)

Country Link
JP (1) JPH0248155B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6838548B2 (en) * 2017-12-07 2021-03-03 株式会社村田製作所 Coil parts and their manufacturing methods
JP6838547B2 (en) * 2017-12-07 2021-03-03 株式会社村田製作所 Coil parts and their manufacturing methods

Also Published As

Publication number Publication date
JPS6114795A (en) 1986-01-22

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