JPH0248848B2 - - Google Patents
Info
- Publication number
- JPH0248848B2 JPH0248848B2 JP55099603A JP9960380A JPH0248848B2 JP H0248848 B2 JPH0248848 B2 JP H0248848B2 JP 55099603 A JP55099603 A JP 55099603A JP 9960380 A JP9960380 A JP 9960380A JP H0248848 B2 JPH0248848 B2 JP H0248848B2
- Authority
- JP
- Japan
- Prior art keywords
- spherical mirror
- mirror
- optical system
- spherical
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
Description
【発明の詳細な説明】
本発明は分光光度計に付属させる反射測定装置
に関し、特に入射（反射）角度を容易に可変でき
る新規な光学系に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a reflection measuring device attached to a spectrophotometer, and particularly to a novel optical system that can easily vary the angle of incidence (reflection).
分光光度計を用いた測定は種々行われている
が、特に反射スペクトルを得る反射測定は吸収ス
ペクトル測定が困難な試料に対して有効な測定方
法である。従来の反射測定には例えば第１図に示
す様な構成の装置が使用されている。同図におい
て１は入射光、２は出射光、３は試料、M1，M2
は平面鏡、M3，M4は凹面鏡である。そして入射
角（反射角）θを変えるためには(1)試料の位置を
ずらし、(2)入射側の凹面鏡M3を調節（回転）し、
(3)出射側の凹面鏡M4を調節（回転）するという
３段階の操作が必要であり、手間がかかると共に
熟練を要する結果となつていた。 Although various measurements have been performed using a spectrophotometer, reflection measurement to obtain a reflection spectrum is particularly effective for samples whose absorption spectra are difficult to measure. For example, an apparatus having a configuration as shown in FIG. 1 is used for conventional reflection measurement. In the figure, 1 is the incident light, 2 is the output light, 3 is the sample, M 1 , M 2
is a plane mirror, and M 3 and M 4 are concave mirrors. To change the incident angle (reflection angle) θ, (1) shift the position of the sample, (2) adjust (rotate) the concave mirror M3 on the incident side,
(3) A three-step operation of adjusting (rotating) the concave mirror M4 on the emission side is required, which is time-consuming and requires skill.
そこで、特公昭47−39911号公報に記載されて
いるように、試料３の上下動に連動して凹面鏡
M3，M4を直線移動及び回転させることにより操
作性を改善することが提案されている。 Therefore, as described in Japanese Patent Publication No. 47-39911, a concave mirror is used in conjunction with the vertical movement of sample 3.
It has been proposed to improve operability by linearly moving and rotating M 3 and M 4 .
しかしながら、この提案装置は、入射角度を変
化させるために試料と２つの凹面鏡を連結する複
雑なリンク機構が必要不可欠であり、製作面でも
価格面でも大きな問題がある。また、複雑なリン
ク機構にはガタや遊びが発生することは避けられ
ず、そのガタや遊びにより設定角度に誤差が発生
してしまうという問題もある。 However, this proposed device requires a complicated link mechanism that connects the sample and two concave mirrors in order to change the incident angle, and has major problems in terms of manufacturing and cost. Furthermore, it is inevitable that a complicated link mechanism will have backlash or play, and this backlash or play may cause an error in the set angle.
本発明は上述した諸点に鑑みてなされたもので
あり、試料を上下動させる機構や凹面鏡と試料と
を連結する複雑なリンク機構が不要で、簡単な構
成及び簡単な操作により入射（反射）角度を変化
させることのできる新規な光学系を提供すること
を目的とするものである。以下図面を用いて本発
明を詳説する。 The present invention has been made in view of the above-mentioned points, and does not require a mechanism to move the sample up and down or a complicated link mechanism to connect the concave mirror and the sample, and has a simple configuration and easy operation to adjust the angle of incidence (reflection). The purpose of this invention is to provide a novel optical system that can change the . The present invention will be explained in detail below using the drawings.
第２図は本発明の一実施例の構成を示す断面図
であり、第３図はその側面図である。両図におい
て０は光軸、１は入射光、３は光軸上に表面が来
るように配置された試料、４は試料台、５は試料
上方に伸びた腕６を持つ回転部材である。該腕６
の先端にはその中心が試料上の光照射点Ｐを通り
光軸０に直交する面ι上に来る様に球面鏡７が試
料に向けて取付けられている。 FIG. 2 is a sectional view showing the structure of an embodiment of the present invention, and FIG. 3 is a side view thereof. In both figures, 0 is the optical axis, 1 is the incident light, 3 is a sample arranged so that its surface is on the optical axis, 4 is a sample stage, and 5 is a rotating member having an arm 6 extending above the sample. The arm 6
A spherical mirror 7 is attached to the tip of the mirror 7 so as to face the sample so that its center is on a plane ι passing through the light irradiation point P on the sample and perpendicular to the optical axis 0.
上記回転部材５には平面鏡８が支持体９を介し
て固定されており、該平面鏡８はレンズ１０及び
回転部材５に設けられた通過口１１を介して光軸
に沿つて進行して来た入射光が上記球面鏡７へ向
けて進む様な角度に設定されている。 A plane mirror 8 is fixed to the rotating member 5 via a support 9, and the plane mirror 8 is advanced along the optical axis through a lens 10 and a passage hole 11 provided in the rotating member 5. The angle is set so that the incident light travels toward the spherical mirror 7.
更に上記回転部材５には歯車１２が取付けられ
ており、それと噛合わされたウオーム１３によつ
て該部材５は光軸０を中心に回転されるため、該
部材５に取付けられた平面鏡８及び球面鏡７もそ
れにつれて光軸０を中心に回転することとなる。 Further, a gear 12 is attached to the rotating member 5, and since the member 5 is rotated about the optical axis 0 by the worm 13 meshed with the gear 12, the plane mirror 8 and the spherical mirror attached to the member 5 are rotated. 7 will also rotate around the optical axis 0 accordingly.
上述の如き構成において、光軸０に沿つて進行
して来た入射光１はレンズ１０により例えば照射
点Ｐへ集束する様に進行し、平面鏡８によつて球
面鏡７へ向けられる。該球面鏡７は平面鏡８から
の入射光を上記点Ｐへ集束させる様に方向及び焦
点距離が設定されており、従つて入射光１は前記
面ιに沿つて点Ｐへ所望角度θで入射することに
なる。しかも点Ｐ及び平面鏡８は光軸上にあり、
該平面鏡８と球面鏡７は一体的に光軸０を中心と
して回転するので、ウオーム１３を回転させ入射
角θを可変しても、入射光の照射位置は点Ｐから
ずれることがなく、且つ常に点Ｐに集束された状
態で入射する。 In the configuration as described above, the incident light 1 traveling along the optical axis 0 travels so as to be focused, for example, at an irradiation point P by the lens 10, and is directed toward the spherical mirror 7 by the plane mirror 8. The direction and focal length of the spherical mirror 7 are set so as to focus the incident light from the plane mirror 8 on the point P, and therefore the incident light 1 is incident on the point P along the surface ι at a desired angle θ. It turns out. Moreover, point P and plane mirror 8 are on the optical axis,
Since the plane mirror 8 and the spherical mirror 7 rotate integrally around the optical axis 0, even if the worm 13 is rotated to vary the incident angle θ, the irradiation position of the incident light does not deviate from the point P and always The light is incident on point P in a focused state.
この様に本発明によれば平面鏡８と球面鏡７を
一体的に光軸を中心に回転させるという簡単な構
成及び簡単な操作で入射角度θを可変でき、その
際照射位置がずれることはない。又光はどんな入
射角度でも常にＰ点に集束されて入射するので、
効率の良い測定を行うことができる。 As described above, according to the present invention, the incident angle θ can be varied with a simple configuration and simple operation in which the plane mirror 8 and the spherical mirror 7 are rotated integrally around the optical axis, and the irradiation position does not shift in this case. Also, since light is always focused at point P no matter what the angle of incidence,
Efficient measurements can be performed.
尚上述した実施例では入射光学系に本発明を適
用したが、光の進行方向を逆にすれば出射光学系
にも適用できることは言うまでもない。第４図は
その様な考え方に基づく実施例を示し、第５図は
その側面図である。本実施例では第２図の光学系
２つを照射点Ｐにおける法線ｈを軸として180゜回
転させた回転対称位置に配置し、一方を入射光学
系に他方を出射光学系として用いている。そして
駆動用のウオーム１３，１３′は例えば歯車を用
いた伝達機構１４により互いに反対方向へ同じ角
度回転する様に連結されている。従つてウオーム
１３を回転させて入射角θを適宜設定すれば、出
射光学系も自動的に反射角θに設定されるため、
入射光学系から入射角θで点Ｐに入射し同じ角度
で反射された光は球面鏡７′平面鏡８′から成る出
射光学系へ導かれることになる。 In the embodiments described above, the present invention was applied to the input optical system, but it goes without saying that it can also be applied to the output optical system by reversing the traveling direction of the light. FIG. 4 shows an embodiment based on such a concept, and FIG. 5 is a side view thereof. In this example, the two optical systems shown in Fig. 2 are arranged at rotationally symmetrical positions rotated by 180 degrees around the normal h at the irradiation point P, and one is used as the input optical system and the other as the output optical system. . The driving worms 13 and 13' are connected by a transmission mechanism 14 using gears, for example, so that they rotate in opposite directions at the same angle. Therefore, by rotating the worm 13 and appropriately setting the incident angle θ, the output optical system will also be automatically set to the reflection angle θ.
Light that enters point P from the input optical system at an incident angle θ and is reflected at the same angle is guided to an output optical system consisting of a spherical mirror 7' and a plane mirror 8'.
この様に本実施例によれば入射角を希望する角
度にセツトすれば出射側の光学系も自動的にセツ
トされ、即座に測定を開始できる。又光軸を中心
に入射及び出射光学系が回転するので、入射側と
出射側で光軸のずれが全くない。 In this manner, according to this embodiment, once the incident angle is set to a desired angle, the optical system on the exit side is automatically set, and measurement can be started immediately. Furthermore, since the input and output optical systems rotate around the optical axis, there is no misalignment of the optical axes between the input and output sides.
第１図は従来の問題点を説明するための光学
図、第２図及び第３図は本発明の一実施例の断面
図及び側面図、第４図及び第５図は本発明の他の
実施例の断面図及び側面図である。
０：光軸、１：入射光、２：出射光、３：試
料、５，５′：回転部材、６，６′：腕、７，
７′：球面鏡、８，８′：平面鏡、１２，１２′：
歯車、１３，１３′：ウオーム、１４：伝達機構。
FIG. 1 is an optical diagram for explaining the conventional problems, FIGS. 2 and 3 are sectional views and side views of one embodiment of the present invention, and FIGS. 4 and 5 are another optical diagram of the present invention. FIG. 3 is a cross-sectional view and a side view of the embodiment. 0: Optical axis, 1: Incident light, 2: Outgoing light, 3: Sample, 5, 5': Rotating member, 6, 6': Arm, 7,
7': Spherical mirror, 8, 8': Plane mirror, 12, 12':
Gear, 13, 13': Worm, 14: Transmission mechanism.
Claims (1)
試料に向けて配置される球面鏡と、上記点Ｐを通
り上記面と直交する軸上に配置され、該軸に沿つ
て上記点Ｐに向けて進行する光が上記球面鏡に向
かうように反射する反射鏡とを備え、前記球面鏡
は前記反射鏡から到来し該球面鏡によつて反射さ
れた光が前記面に沿つて進行し前記照射点Ｐへ集
束するように設定され且つ該球面鏡及び反射鏡を
前記軸を中心として一体的に回転する機構を設け
たことを特徴とする反射測定装置における光学
系。 ２ 前記球面鏡と前記方線を挟んで対称な位置に
配置され、前記照射点Ｐから反射し前記面に沿つ
て進行する反射光を受ける第２の球面鏡と、前記
反射鏡と前記方線を挟んで対称に配置され、上記
第２の球面鏡からの反射光を前記軸に沿う方向に
反射する第２の反射鏡と、該第２の球面鏡及び第
２の反射鏡を前記軸を中心として回転させる第２
の回転機構と、前記第１の球面鏡と第２の球面鏡
が前記方線を挟んで常に対称な位置にあるように
該第２の回転機構と前記第１の回転機構とを連結
する連結機構とを設けたことを特徴とする特許請
求の範囲第１項記載の反射測定装置における光学
系。[Claims] 1. A spherical mirror placed facing the sample on a plane including a normal line at the irradiation point P on the sample, and a spherical mirror placed on an axis passing through the point P and perpendicular to the plane, a reflecting mirror that reflects light traveling toward the point P along the surface toward the spherical mirror, and the spherical mirror reflects light that comes from the reflecting mirror and is reflected by the spherical mirror along the surface. 1. An optical system for a reflection measurement apparatus, characterized in that the optical system is set to advance and focus on the irradiation point P, and is provided with a mechanism for integrally rotating the spherical mirror and the reflecting mirror about the axis. 2. A second spherical mirror that is disposed at a symmetrical position with the spherical mirror and the normal line in between, and receives reflected light that is reflected from the irradiation point P and travels along the surface, and a second spherical mirror that is placed on both sides of the reflecting mirror and the normal line. a second reflecting mirror that is arranged symmetrically at and reflects the reflected light from the second spherical mirror in a direction along the axis, and the second spherical mirror and the second reflecting mirror are rotated about the axis. Second
and a coupling mechanism that connects the second rotation mechanism and the first rotation mechanism so that the first spherical mirror and the second spherical mirror are always in symmetrical positions across the normal line. An optical system in a reflection measuring device according to claim 1, characterized in that the optical system is provided with:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9960380A JPS5724833A (en) | 1980-07-21 | 1980-07-21 | Optical system in reflection measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9960380A JPS5724833A (en) | 1980-07-21 | 1980-07-21 | Optical system in reflection measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5724833A JPS5724833A (en) | 1982-02-09 |
| JPH0248848B2 true JPH0248848B2 (en) | 1990-10-26 |
Family
ID=14251662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9960380A Granted JPS5724833A (en) | 1980-07-21 | 1980-07-21 | Optical system in reflection measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5724833A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043541A (en) * | 2015-09-08 | 2015-11-11 | 四川双利合谱科技有限公司 | Polygon mirror assembly of swing-scanning spectrometer |
-
1980
- 1980-07-21 JP JP9960380A patent/JPS5724833A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043541A (en) * | 2015-09-08 | 2015-11-11 | 四川双利合谱科技有限公司 | Polygon mirror assembly of swing-scanning spectrometer |
| CN105043541B (en) * | 2015-09-08 | 2017-09-19 | 四川双利合谱科技有限公司 | A kind of tilting mirror component of sweeping type spectrometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5724833A (en) | 1982-02-09 |
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