JPH0256773B2 - - Google Patents
Info
- Publication number
- JPH0256773B2 JPH0256773B2 JP60116624A JP11662485A JPH0256773B2 JP H0256773 B2 JPH0256773 B2 JP H0256773B2 JP 60116624 A JP60116624 A JP 60116624A JP 11662485 A JP11662485 A JP 11662485A JP H0256773 B2 JPH0256773 B2 JP H0256773B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- objective lens
- interference member
- interference
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 1
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電子顕微鏡において、試料を微動
させる試料移動装置に係り、特に試料を対物レン
ズの内部で観察するタイプの電子顕微鏡に用いら
れる試料移動装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a sample moving device for finely moving a sample in an electron microscope, and particularly to a sample moving device used in an electron microscope of the type in which the sample is observed inside an objective lens. Relating to mobile devices.
一般に電子顕微鏡の試料移動装置として電子顕
微鏡の鏡筒の下方に設けられた試料室内に位置
し、試料を載置する試料台と、この試料台を互い
に直交する３方向、Ｘ、Ｙ、Ｚ方向への移動する
移動装置及び対物レンズの光軸に直交する回転軸
Ｔを中心とする回転を可能とする傾斜装置からな
る試料移動装置１３とを備えたものがある。ここ
でＸ方向は対物レンズの中心を通り光軸Ｏと垂直
な方向、Ｙ方向は光軸Ｏに垂直でかつＸ軸に垂直
な方向、Ｚ方向は光軸と平行な方向、また回転軸
Ｔは光軸Ｏと垂直な方向であり、通常Ｘ方向と同
一方向かつ試料の電子線照射位置を通るものとし
ている。
Generally, the sample moving device of an electron microscope is located in a sample chamber provided below the lens barrel of an electron microscope, and includes a sample stage on which the sample is placed, and a sample stage that moves the sample stage in three directions perpendicular to each other: X, Y, and Z directions. There is one equipped with a sample moving device 13 consisting of a moving device for moving the objective lens and a tilting device that enables rotation about a rotation axis T perpendicular to the optical axis of the objective lens. Here, the X direction is a direction passing through the center of the objective lens and perpendicular to the optical axis O, the Y direction is a direction perpendicular to the optical axis O and perpendicular to the X axis, the Z direction is a direction parallel to the optical axis, and the rotation axis T. is a direction perpendicular to the optical axis O, usually in the same direction as the X direction, and passing through the electron beam irradiation position of the sample.
従来この電子顕微鏡の試料移動装置１３として
第１１図に示すようなものがある。これは、試料
１を載置する試料台２を第１の移動台３上に設け
ている。この第１の移動台３は、第２の移動台６
にＹ方向に沿つて設けられた第１のレール４上を
移動可能としている。そして、この第２の移動台
６は、第１の移動台３と同様に、第３の移動台１
９上にＸ方向に沿つて設けられた第２のレール５
上を移動可能としており、この第３の移動台１９
は上述した回転軸Ｔを中心として、回転動可能で
かつＺ方向に沿つて設けられた第３のレール７上
を移動可能な第４の移動台８に設置されている。
そして、これらの移動台は手動又はモータ（図示
していない）で移動するようにしている。 Conventionally, there is a sample moving device 13 for this electron microscope as shown in FIG. In this, a sample stage 2 on which a sample 1 is placed is provided on a first movable stage 3. This first moving table 3 is connected to the second moving table 6.
It is possible to move on a first rail 4 provided along the Y direction. This second movable base 6 is similar to the first movable base 3, and the third movable base 1
A second rail 5 provided along the X direction on 9
This third moving platform 19
is installed on a fourth moving table 8 which is rotatable about the rotation axis T mentioned above and movable on a third rail 7 provided along the Z direction.
These moving tables are moved manually or by a motor (not shown).
ところで、電子顕微鏡において、性能を高める
ためには、ワーキングデイスタンスWdをできる
だけ小さくすることが望ましく、近年にあつては
試料を対物レンズの内部に入れて観察を行なう装
置がある。この場合には、試料台の移動可能範囲
は狭いものとなり、試料台と対物レンズとを干渉
させて試料等を破損させるおそれがある。このた
め観察者は試料の移動に際しては細心の注意をは
らわなければならず、大きな負担となる。
By the way, in order to improve the performance of an electron microscope, it is desirable to make the working distance Wd as small as possible, and in recent years there are devices in which a sample is placed inside an objective lens for observation. In this case, the movable range of the sample stage becomes narrow, and there is a risk that the sample stage and the objective lens may interfere with each other, causing damage to the sample and the like. For this reason, the observer must be extremely careful when moving the sample, which puts a heavy burden on him.
本出願に係る発明は、上述の問題点を解決し
て、試料の移動を容易に行えるようにするため、
第１の発明にあつては、電子顕微鏡の試料移動装
置を電子顕微鏡の対物レンズの内部に試料を載置
する試料台と、この試料台を直交する３方向に移
動しうる移動装置と、対物レンズの光軸に対して
垂直な回転軸で回転させる傾斜装置と、対物レン
ズの内部と略同一の内部形状を有する第１の干渉
部材と、上記試料を載置した試料台と略同一形状
を有し第１の干渉部材内を試料と対物レンズとの
位置関係で移動して試料と対物レンズとの干渉を
防止する第２の干渉部材とで構成するようにし
た。
The invention according to the present application solves the above-mentioned problems and makes it possible to easily move the sample.
In the first invention, a sample moving device for an electron microscope includes a sample stage for placing a sample inside an objective lens of an electron microscope, a moving device capable of moving this sample stage in three orthogonal directions, and an objective. a tilting device that rotates on a rotation axis perpendicular to the optical axis of the lens; a first interference member having an internal shape substantially the same as the inside of the objective lens; and a first interference member having a shape substantially the same as the sample stage on which the sample is placed. and a second interference member that moves within the first interference member in a positional relationship between the sample and the objective lens to prevent interference between the sample and the objective lens.
また本願に係る第２発明にあつては、上述した
第１発明の構成に加えて、第１及び第２の干渉部
材の当接位置を表示する干渉位置表示装置を設け
るようにしたものである。 In addition to the configuration of the first invention described above, a second invention according to the present application is provided with an interference position display device that displays the contact positions of the first and second interference members. .
更に第３発明にあつては、第１発明の構成に加
えて、試料をどの方向に移動可能かを表示する移
動方向表示装置を設けるようにしたものである。 Furthermore, in the third invention, in addition to the structure of the first invention, a moving direction display device is provided to display in which direction the sample can be moved.
以下本願発明に係る電子顕微鏡の試料移動装置
の実施例を説明する。
Embodiments of the sample moving device for an electron microscope according to the present invention will be described below.
第１図乃至第３図は、本願の第１発明に係る電
子顕微鏡の試料移動装置の実施例を示すものであ
る。本実施例において、試料１０は対物レンズ１
１内に位置するように試料台１２上に載置されて
おり、この試料１０には対物レンズ１１から電子
線Ｅが射照される。 1 to 3 show an embodiment of a sample moving device for an electron microscope according to the first invention of the present application. In this example, the sample 10 is the objective lens 1.
The sample 10 is placed on a sample stage 12 so as to be located within the center of the sample 10 , and an electron beam E is irradiated onto the sample 10 from an objective lens 11 .
そしてこの試料台１２は従来と同様にＸ、Ｙ、
Ｚ，方向への移動及び回転軸Ｔを中心として回転
動が可能な試料移動装置１３上に設けられてい
る。この試料移動装置１３は従来に示したものと
同一構造であるため、同一の部材には同一の符号
を付して、その詳細な説明は省略する。そしてこ
れらの試料移動装置等が収納されている試料室１
５内であつて、回転軸Ｔと対物レンズ１１との間
には、試料１０が入れられている対物レンズ１１
の内部形状と同一の内部形状を有する第１の干渉
部材１６が設けられている。この第１の干渉部材
１６は、回転軸ＴとＹ、Ｚ方向に対しては、対物
レンズ１１と同位置となるように試料室１５に固
定される。 As before, this sample stage 12 has X, Y,
It is provided on a sample moving device 13 that can move in the Z direction and rotate around the rotation axis T. Since this sample moving device 13 has the same structure as that shown conventionally, the same members are given the same reference numerals and detailed explanation thereof will be omitted. And sample chamber 1 where these sample moving devices etc. are housed.
5 and between the rotation axis T and the objective lens 11 is the objective lens 11 in which the sample 10 is placed.
A first interference member 16 having the same internal shape as the internal shape of the first interference member 16 is provided. This first interference member 16 is fixed to the sample chamber 15 so as to be at the same position as the objective lens 11 with respect to the rotation axis T and the Y and Z directions.
また、試料移動装置１３の第１の移動台３に
は、試料台１２に試料１０を載置した形状よりや
や大きい相似形状の第２の干渉部材１７が腕１８
を介して取り付けられている。この第２の干渉部
材１７は、第１の干渉部材１６と同様に、回転軸
Ｔおの延長上であつて、試料台１２とＹ、Ｚ方向
において同位置となり、かつ第１の干渉部材１６
内に位置して、対物レンズ１１と試料台１２との
位置関係と同一の位置関係となるよう腕１８で支
承されている。 Further, on the first moving table 3 of the sample moving device 13, a second interference member 17 having a similar shape, which is slightly larger than the shape of the sample 10 placed on the sample table 12, is attached to an arm 18.
It is attached via. Like the first interference member 16, this second interference member 17 is on the extension of the rotation axis T, is at the same position as the sample stage 12 in the Y and Z directions, and is located at the same position as the sample stage 12 in the Y and Z directions.
It is supported by an arm 18 so that the positional relationship is the same as that between the objective lens 11 and the sample stage 12.
従つて本実施例によれば、第２図及び第３図に
示したように、試料移動装置１３を作動させて、
試料１０を対物レンズ内で移動、傾斜させた場
合、第２の干渉部材１７は第１の干渉部材１６内
で同様に移動、傾斜する。そして試料１０及び試
料台１２が対物レンズ１１に近ずくと、第２の干
渉部材は試料１０及び試料台より大きく形成され
ているから、第２の干渉部材１７は第１の干渉部
材１６に当接し、試料１０及び試料台１２は対物
レンズ１１には干渉しない。 Therefore, according to this embodiment, as shown in FIGS. 2 and 3, the sample moving device 13 is operated,
When the sample 10 is moved and tilted within the objective lens, the second interference member 17 is similarly moved and tilted within the first interference member 16. When the sample 10 and the sample stage 12 approach the objective lens 11, the second interference member 17 hits the first interference member 16 because the second interference member is larger than the sample 10 and the sample stage. The sample 10 and the sample stage 12 are in contact with each other and do not interfere with the objective lens 11.
従つて、本実施例によれば、試料１０及び試料
台１２と対物レンズ１１との干渉は発生しないた
め、試料の移動を容易に行なうことができる。 Therefore, according to this embodiment, since no interference occurs between the sample 10, the sample stage 12, and the objective lens 11, the sample can be easily moved.
次に本願の第２発明の実施例について説明す
る。第４図乃至第７図は本願第２発明の実施例を
示すものである。本実施例においては、試料移動
装置の構造及び第１及び第２の干渉部材を設けて
いる点については上述した第１発明の実施例と同
様であるためその説明は省略する。本発明にあつ
ては、上述した第１発明の構成に加えて、第１の
干渉部材が第２の干渉部材に当接した場合、第２
の干渉部材が第１の干渉部材のどの位置に当接し
たかを表示する干渉位置表示装置を設けている。
この干渉位置表示装置は、第１の干渉部材２０及
び第２の干渉部材２１に電極を設け、第１及び第
２の干渉部材２０，２１が接触した場合におい
て、第１の干渉部材２０のどの位置に接触してい
るかを表示盤に表示するようにしたものである。 Next, an embodiment of the second invention of the present application will be described. 4 to 7 show an embodiment of the second invention of the present application. In this embodiment, the structure of the sample moving device and the provision of the first and second interference members are the same as those in the above-described embodiment of the first invention, so a description thereof will be omitted. In the present invention, in addition to the configuration of the first invention described above, when the first interference member abuts the second interference member, the second interference member
An interference position display device is provided for displaying at which position of the first interference member the interference member contacts the first interference member.
In this interference position display device, electrodes are provided on the first interference member 20 and the second interference member 21, and when the first and second interference members 20 and 21 come into contact, It is designed to display on the display panel whether or not it is in contact with the position.
干渉部材に設けた電極は、第４図乃至第６図に
示すように、第１の干渉部材２０にあつては、側
壁２０ａ内面に等角度ごとに長方形状の電極２２
を全周にわたり設ける他、天板２０ｂ内面には、
中心から放射状に等角度ごとに扇形の電極２３を
設けている。また第２の干渉部材２１には略全面
にわたつて一体となつた電極２４を設けている。
そして表示盤は第７図に示すように第１の干渉部
材２０に設けられた電極２２に対応した発光ダイ
オード等の表示装置２５と、電極２３に対応した
同様の表示装置２６とで構成される。そしてこれ
らの表示装置２５，２６は、夫々の対応する電極
と第２の干渉部材２１に設けられた電極２４とが
接触した場合に点灯するものとしている。 As shown in FIGS. 4 to 6, the electrodes provided on the interference member are, in the case of the first interference member 20, rectangular electrodes 22 arranged at equal angles on the inner surface of the side wall 20a.
In addition to providing the entire circumference, on the inner surface of the top plate 20b,
Fan-shaped electrodes 23 are provided radially from the center at equal angles. Further, the second interference member 21 is provided with an electrode 24 that is integrated over substantially the entire surface.
As shown in FIG. 7, the display panel is composed of a display device 25 such as a light emitting diode, which corresponds to the electrode 22 provided on the first interference member 20, and a similar display device 26, which corresponds to the electrode 23. . These display devices 25 and 26 are designed to light up when their corresponding electrodes come into contact with the electrodes 24 provided on the second interference member 21.
従つて観察者は、試料１０及び試料台１２が対
物レンズ１１内壁のどの位置に近接しているかを
知ることができ、試料１０の移動等を容易に行な
うことができる。 Therefore, the observer can know to which position on the inner wall of the objective lens 11 the sample 10 and the sample stage 12 are close, and can easily move the sample 10 and the like.
尚本実施例においては、接触個所の検出は、両
干渉部材に設けた電極により行なうようにした
が、これは他のセンサー等により検出するように
してもよい。 In this embodiment, the contact point is detected using electrodes provided on both interference members, but this may be detected using other sensors or the like.
次に本願の第３発明の実施例を説明する。第８
図乃至第１０図は本願の第３発明の実施例を示す
ものであり、本実施例において、試料移動装置の
構造及び第１及び第２の干渉部材を設けている点
については上述した第１発明の実施例と同様であ
るため、その詳細な説明は省略する。本発明にあ
つては、上述した第１発明の構成に加えて、試料
をどの方向に移動可能かを示す移動方向表示装置
を設けている。この移動方向表示装置は、上述し
た第２発明と同様に第１及び第２の干渉部材に電
極を設け、これを第９図に示すように、第２の干
渉部材の側壁を前後（Ｘ軸方向）左右（Ｙ軸方
向）に４つに分割し、左前、左後、右前、右後と
して、夫々スイツチS1，S2，S3，S4とし、また天
板２０ｂの電極２３は左上、右上として夫々スイ
ツチS5，S6として構成している。そして第２の干
渉部材１７の電極がどの位置に接触したかによつ
て、いずれかのスイツチ（接触個所が前、後、左
右端のときは２つ）が作動して試料台１２をどち
らの方向に移動することができるかを表示する。
これは例えば第８図に表すように、操作盤の夫々
の方向の移動スイツチ３０を移動可能な方向のみ
点灯すると共にその点灯したスイツチのみを作動
できるようにしている。 Next, an embodiment of the third invention of the present application will be described. 8th
Figures 10 to 10 show an embodiment of the third invention of the present application, and in this embodiment, the structure of the sample moving device and the provision of the first and second interference members are similar to the first embodiment described above. Since it is similar to the embodiment of the invention, detailed description thereof will be omitted. In addition to the configuration of the first invention described above, the present invention is provided with a movement direction display device that indicates in which direction the sample can be moved. In this moving direction display device, electrodes are provided on the first and second interference members similarly to the second invention described above, and as shown in FIG. Direction) It is divided into four parts on the left and right (Y-axis direction), and the switches S 1 , S 2 , S 3 , and S 4 are used as the front left, rear left, front right, and rear right, respectively, and the electrode 23 on the top plate 20b is on the upper left. , are configured as switches S 5 and S 6 at the upper right, respectively. Depending on where the electrode of the second interference member 17 comes into contact, one of the switches (two switches when the contact point is at the front, rear, left or right end) is activated to move the sample stage 12 to either direction. Display the direction in which you can move.
For example, as shown in FIG. 8, the movable switches 30 in each direction of the operation panel are lit only in the movable directions, and only the lit switches can be operated.
このような操作盤を実現するためには、第１０
図に示すような回路構成とすればよい。図におい
て、Ｍは試料台１２を各方向に移動するモータ
を、またRS1…RS6は、スイツチS1…S6の作動に
よりオフ状態となるスイツチを、PBは操作盤の
移動スイツチ３０を、またＬは各々の移動スイツ
チのライトを、更にLSはＺ方向の下限に設けら
れたリミツトスイツチを示している。この回路に
よれば、例えば、スイツチS1が作動すれば、左、
前、上、右回転、下、左回転の移動は禁止され、
操作スイツチのライトは右、後、だけ点灯する他
これらの操作スイツチのみ操作できることとな
る。 In order to realize such a control panel, the 10th
A circuit configuration as shown in the figure may be used. In the figure, M is the motor that moves the sample stage 12 in each direction, RS 1 ... RS 6 are the switches that are turned off by the operation of switches S 1 ... S 6 , and PB is the movable switch 30 on the operation panel. , L indicates the light of each moving switch, and LS indicates a limit switch provided at the lower limit in the Z direction. According to this circuit, for example, if switch S 1 is activated, the left
Forward, up, right rotation, down, and left rotation movements are prohibited;
Only the right and rear operation switch lights will light up, and only these operation switches can be operated.
従つて本実施例によれば、観察者は、操作盤の
点灯した操作ボタンをみて試料の移動可能方向を
認識することができる他、誤つて点灯していない
操作スイツチを押しても試料は移動しないから、
極めて容易に試料を移動させることができる。 Therefore, according to this embodiment, the observer can recognize the directions in which the specimen can be moved by looking at the illuminated operation buttons on the operation panel, and the specimen will not move even if he accidentally presses an unlit operation switch. from,
Samples can be moved very easily.
以上説明したように、本出願の各発明によれ
ば、試料が対物レンズに干渉することを有効に防
止しているから、試料及び試料台の移動が容易に
なる他第２発明にあつては試料の対物レンズへの
最近接個所が、また第３発明にあつては試料及び
試料台の移動可能方向を知ることができるから、
更に容易に試料の移動を行なうことができるとい
う効果を奏する。
As explained above, according to each of the inventions of the present application, since the sample is effectively prevented from interfering with the objective lens, the movement of the sample and the sample stage is facilitated. Since it is possible to know the closest point of the sample to the objective lens, and in the case of the third invention, the movable direction of the sample and sample stage,
Furthermore, there is an effect that the sample can be moved more easily.
第１図は本願の第１発明に係る試料移動装置の
実施例を示す一部断面図、第２図は第１図に示し
た試料移動装置の対物レンズ及び試料台を示す第
１図中−線断面図、第３図は第１図に示した
試料移動装置の第１及び第２の干渉部材を示す第
１図中−線断面図、第４図乃至第６図は本願
の第２発明に係る試料移動装置の実施例に用いら
れる第１及び第２の干渉部材の電極を示す図、第
７図は本願の第２発明に係る試料移動装置の表示
盤を示す図、第８図は本願の第３発明に係る試料
移動装置の実施例に用いられる操作盤を示す図、
第９図は本願の第３発明の実施例の第１の干渉部
材の電極分割を示す図、第１０図は第８図に示し
た操作盤を作動させる回路を示す回路図、第１１
図は従来の試料移動装置を示す斜視図である。
１０……試料、１１……対物レンズ、１２……
試料台、１３……試料移動装置、１６……第１の
干渉部材、１７……第２の干渉部材。
FIG. 1 is a partial sectional view showing an embodiment of a sample moving device according to the first invention of the present application, and FIG. 2 is a partial cross-sectional view showing an objective lens and a sample stage of the sample moving device shown in FIG. 1. 3 is a sectional view taken along the line in FIG. 1 showing the first and second interference members of the sample moving device shown in FIG. 1, and FIGS. FIG. 7 is a diagram showing the display panel of the sample moving device according to the second invention of the present application, and FIG. A diagram showing an operation panel used in an embodiment of a sample moving device according to the third invention of the present application,
FIG. 9 is a diagram showing electrode division of the first interference member of the embodiment of the third invention of the present application, FIG. 10 is a circuit diagram showing a circuit for operating the operation panel shown in FIG. 8, and FIG.
The figure is a perspective view showing a conventional sample moving device. 10... Sample, 11... Objective lens, 12...
Sample stage, 13... sample moving device, 16... first interference member, 17... second interference member.
Claims (1)
する試料台と、この試料台を直交する３方向に移
動しうる移動装置と、対物レンズの光軸に対して
垂直な回転軸で回転させる傾斜装置と、対物レン
ズの内部と略同一の内部形状を有する第１の干渉
部材と、上記試料を載置した試料台と略同一形状
を有し第１の干渉部材内を試料と対物レンズとの
位置関係で移動して試料と対物レンズとの干渉を
防止する第２の干渉部材とからなることを特徴と
する電子顕微鏡の試料移動装置。 ２ 電子顕微鏡の対物レンズの内部に試料を載置
する試料台と、この試料台を直交する３方向に移
動しうる移動装置と、対物レンズの光軸に対して
垂直な回転軸で回転させる傾斜装置と、対物レン
ズの内部と略同一の内部形状を有する第１の干渉
部材と、上記試料を載置した試料台と略同一形状
を有し第１の干渉部材内を試料と対物レンズとの
位置関係で移動して試料と対物レンズとの干渉を
防止する第２の干渉部材と、第２の干渉部材が第
１の干渉部材のどの部位に当接しているかを表示
する干渉位置表示装置とからなることを特徴とす
る電子顕微鏡の試料移動装置。 ３ 電子顕微鏡の対物レンズの内部に試料を載置
する試料台と、この試料台を直交する３方向に移
動しうる移動装置と、対物レンズの光軸に対して
垂直な回転軸で回転させる傾斜装置と、対物レン
ズの内部と略同一の内部形状を有する第１の干渉
部材と、上記試料を載置した試料台と略同一形状
を有し第１の干渉部材内を試料と対物レンズとの
位置関係で移動して試料と対物レンズとの干渉を
防止する第２の干渉部材と、試料をどの方向に移
動可能かを表示する移動方向表示装置とからなる
ことを特徴とする電子顕微鏡の試料移動装置。[Scope of Claims] 1. A sample stage for placing a sample inside the objective lens of an electron microscope, a moving device capable of moving the sample stage in three orthogonal directions, and a movement device perpendicular to the optical axis of the objective lens. a tilting device rotated by a rotation axis; a first interference member having an internal shape substantially the same as the inside of the objective lens; and a first interference member having an internal shape substantially the same as the sample stage on which the sample is placed. A sample moving device for an electron microscope, comprising a second interference member that moves in a positional relationship between the sample and the objective lens to prevent interference between the sample and the objective lens. 2. A sample stage for placing a sample inside the objective lens of an electron microscope, a moving device that can move this sample stage in three orthogonal directions, and a tilting device that rotates the sample stage about a rotation axis perpendicular to the optical axis of the objective lens. an apparatus, a first interference member having an internal shape substantially the same as the inside of the objective lens, and a first interference member having substantially the same shape as the sample table on which the sample is placed, and an interface between the sample and the objective lens. a second interference member that moves in a positional relationship to prevent interference between the sample and the objective lens; and an interference position display device that displays which part of the first interference member the second interference member is in contact with. A sample moving device for an electron microscope, characterized by comprising: 3. A sample stage for placing a sample inside the objective lens of an electron microscope, a moving device that can move this sample stage in three orthogonal directions, and a tilting device that rotates the sample stage about a rotation axis perpendicular to the optical axis of the objective lens. an apparatus, a first interference member having an internal shape substantially the same as the inside of the objective lens, and a first interference member having substantially the same shape as the sample table on which the sample is placed, and an interface between the sample and the objective lens. A specimen for an electron microscope, comprising a second interference member that moves in a positional relationship to prevent interference between the specimen and an objective lens, and a movement direction display device that displays in which direction the specimen can be moved. Mobile device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60116624A JPS61277143A (en) | 1985-05-31 | 1985-05-31 | Sample transfer device of electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60116624A JPS61277143A (en) | 1985-05-31 | 1985-05-31 | Sample transfer device of electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61277143A JPS61277143A (en) | 1986-12-08 |
| JPH0256773B2 true JPH0256773B2 (en) | 1990-12-03 |
Family
ID=14691797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60116624A Granted JPS61277143A (en) | 1985-05-31 | 1985-05-31 | Sample transfer device of electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61277143A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2869977B2 (en) * | 1988-09-06 | 1999-03-10 | 日本電気株式会社 | Jig for cross section observation of semiconductor integrated circuit |
| JP2006040761A (en) * | 2004-07-28 | 2006-02-09 | Hitachi High-Technologies Corp | Charged particle beam equipment |
| JP5114338B2 (en) * | 2008-08-08 | 2013-01-09 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
-
1985
- 1985-05-31 JP JP60116624A patent/JPS61277143A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61277143A (en) | 1986-12-08 |
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