JPH031645B2 - - Google Patents
Info
- Publication number
- JPH031645B2 JPH031645B2 JP56130443A JP13044381A JPH031645B2 JP H031645 B2 JPH031645 B2 JP H031645B2 JP 56130443 A JP56130443 A JP 56130443A JP 13044381 A JP13044381 A JP 13044381A JP H031645 B2 JPH031645 B2 JP H031645B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- film
- refractive index
- filter
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2201/00—Constructional elements; Accessories therefor
- E05Y2201/20—Brakes; Disengaging means; Holders; Stops; Valves; Accessories therefor
- E05Y2201/21—Brakes
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2201/00—Constructional elements; Accessories therefor
- E05Y2201/20—Brakes; Disengaging means; Holders; Stops; Valves; Accessories therefor
- E05Y2201/252—Type of friction
- E05Y2201/254—Fluid or viscous friction
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2201/00—Constructional elements; Accessories therefor
- E05Y2201/20—Brakes; Disengaging means; Holders; Stops; Valves; Accessories therefor
- E05Y2201/262—Type of motion, e.g. braking
- E05Y2201/266—Type of motion, e.g. braking rotary
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2900/00—Application of doors, windows, wings or fittings thereof
- E05Y2900/30—Application of doors, windows, wings or fittings thereof for domestic appliances
- E05Y2900/31—Application of doors, windows, wings or fittings thereof for domestic appliances for refrigerators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
Description
【発明の詳細な説明】
本発明は光学干渉フイルターに係る。更に詳し
くは、本発明は温度変化に伴う中心波長の変化が
小さな干渉フイルターに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical interference filter. More specifically, the present invention relates to an interference filter whose center wavelength changes little with temperature changes.
従来の光学干渉フイルターは珪素、ゲルマニウ
ム、石英、サフアイヤまたはガラム等からなる基
板と、該基板の片面上にゲルマニウム、酸化珪素
（SiO）、硫化亜鉛等の屈折率を異にする複数の材
料を蒸着することにより形成される多層膜とから
構成されていた。 Conventional optical interference filters have a substrate made of silicon, germanium, quartz, sapphire, or gallium, and multiple materials with different refractive indexes such as germanium, silicon oxide (SiO), and zinc sulfide are deposited on one side of the substrate. It consisted of a multilayer film formed by
しかしながら、このような従来の光学干渉フイ
ルターの透過率、中心波長並びにバンドの半値幅
は温度に依存して変化することが知られている。
このような干渉フイルターの分光特性の温度依存
性は波長の選択性を著しく害し、大きな測定誤差
の原因となり、特に精密測定に使用する場合には
致命的欠点となる。 However, it is known that the transmittance, center wavelength, and half-width of the band of such conventional optical interference filters change depending on the temperature.
Such temperature dependence of the spectral characteristics of an interference filter significantly impairs wavelength selectivity and causes large measurement errors, which is a fatal drawback especially when used for precision measurements.
実開昭55−105405号公報の開示する光学干渉フ
イルターは、従来の干渉フイルターの特に透過率
の温度依存性に着目し、その変化を単層膜の分光
特性を利用することにより補償している。 The optical interference filter disclosed in Japanese Utility Model Application Publication No. 55-105405 focuses on the temperature dependence of the transmittance of conventional interference filters, and compensates for this change by utilizing the spectral characteristics of a single layer film. .
更に詳しく検討すると、実開昭55−105405号公
報の開示する技術では前記単層膜の膜厚を調整し
て、前記多層膜の低温条件下における中心波長と
該単層膜の高温条件下における中心波長とをほぼ
一致させることにより透過率の温度依存性を解消
している。 Examining it in more detail, the technique disclosed in Japanese Utility Model Application Publication No. 55-105405 adjusts the thickness of the single layer film to make the central wavelength of the multilayer film under low temperature conditions and the single layer film under high temperature conditions The temperature dependence of the transmittance is eliminated by making the center wavelength almost coincident with the center wavelength.
しかしながら、該考案の技術では依然として温
度変化に基く中心波長のズレの問題、バンド半値
幅の変化の問題の解決策とはなつていない。更
に、該考案の技術では温度変化に伴う透過率の変
化は補償されたが、一方でこの透過率の変化を補
償するために透過率を犠性にしていることがわか
る。 However, the technique of this invention still does not provide a solution to the problem of center wavelength shift and change of band half-width due to temperature change. Furthermore, it can be seen that although the technique of the invention compensates for the change in transmittance due to temperature change, on the other hand, the transmittance is sacrificed in order to compensate for this change in transmittance.
現在のところ、温度変化に伴う中心波長のズレ
並びにバンド半値幅の変化の問題を解決した光学
干渉フイルターは知られていない。 At present, no optical interference filter is known that solves the problems of center wavelength shift and band half-width change due to temperature changes.
また、温度変化に伴う透過率変化、中心波長の
ズレ、バンド半値幅の変化のうち特に顕著なもの
は中心波長のズレである。 Further, among the transmittance change, shift in center wavelength, and change in band half-width due to temperature change, the shift in center wavelength is particularly noticeable.
本発明の目的は中心波長位置の温度依存性を小
さくした干渉フイルターを提供することにある。 An object of the present invention is to provide an interference filter in which the temperature dependence of the center wavelength position is reduced.
本発明の前記目的は、屈折率の温度変化が正で
ある第１群の膜物質からなる層と屈折率の温度変
化が負である第２群の膜物質からなる層とを各々
少なくとも１種類含み、かつ第１群の膜物質およ
び第２膜の膜物質のうちで屈折率の温度変化の小
さな膜物質からなるスペーサー層を含む多層膜に
より構成することによつて達成することができ
る。 The object of the present invention is to provide at least one type of each of a layer made of a first group film material whose refractive index changes with temperature is positive and a layer made of a second group film substance whose refractive index changes with temperature is negative. This can be achieved by forming a multilayer film including a spacer layer made of a film material whose refractive index changes with temperature among the film materials of the first group and the film material of the second film group.
干渉フイルターの分光特性の温度変化は該フイ
ルター構成膜の膜厚変化と屈折率変化とが原因と
なつて生ずるが、このような現象を抑制すること
は一般には困難である。 Temperature changes in the spectral characteristics of an interference filter occur due to changes in the film thickness and refractive index of the films constituting the filter, but it is generally difficult to suppress such phenomena.
しかしながら、膜厚が温度に比例して増大する
のに対して、屈折率は膜を構成する物質に依存し
て温度増加に伴つて増加したり減少したりするの
で、このような特徴を有効に利用することにより
従来の干渉フイルターの有する前記諸欠点を改善
することが可能となる。 However, while the film thickness increases in proportion to the temperature, the refractive index increases or decreases with increasing temperature depending on the material that makes up the film. By utilizing this, it becomes possible to improve the above-mentioned drawbacks of conventional interference filters.
屈折率の温度変化が正である物質としては
ZnS、SiO、ZnSe、Ge等が知られており、一方
屈折率の温度変化が負である物質としては
PbTe、PbSe、MgF2、CaF2、LaF3等が知られ
ている。 As a substance whose refractive index changes positively with temperature,
ZnS, SiO, ZnSe, Ge, etc. are known; on the other hand, materials whose refractive index changes with temperature are negative.
PbTe, PbSe, MgF 2 , CaF 2 , LaF 3 and the like are known.
また、フイルターの基板としては従来公知の例
えば珪素、ゲルマニウム、石英、サフアイヤ、ガ
ラス等を使用する。 Further, as the substrate of the filter, conventionally known materials such as silicon, germanium, quartz, sapphire, glass, etc. are used.
このようにして、フイルターの膜構成並びに膜
材料を適当に選んで組合せることにより、使用液
長域におけるフイルターの分光特性の温度変化を
小さくすることが可能となる。 In this way, by appropriately selecting and combining the membrane structure and membrane materials of the filter, it is possible to reduce the temperature change in the spectral characteristics of the filter in the length range of the liquid used.
以下実施例により、本発明を更に具体的に説明
する。しかしながら、これら実施例は単に例示で
あつて、何等本発明を限定するものではない。 The present invention will be explained in more detail below with reference to Examples. However, these Examples are merely illustrative and do not limit the present invention in any way.
実施例 １
本実施例では、屈折率の温度変化が正の物質と
してZnSを、一方負の物質としてPbTeを使用し
たバンドパスフイルターを例示する。Example 1 In this example, a bandpass filter using ZnS as a material whose refractive index changes with temperature is positive and PbTe as a material with a negative temperature change is exemplified.
一般に、バンドパスフイルターはスペーサー層
を少なくとも１層有するが、これがバンドパスフ
イルターの分光特性の温度依存性に大きな影響を
与えている。 Generally, a bandpass filter has at least one spacer layer, which has a large influence on the temperature dependence of the spectral characteristics of the bandpass filter.
前記ZnSおよびPbteの屈折率の温度変化率を比
較するとZnSの方がPbteより小さい。そこで、該
スペーサー層を屈折率の温度変化率の小さなZnS
によつて構成する。これによつてバンドパスフイ
ルターの中心波長の温度変化を小さくすることが
できる。 Comparing the temperature change rate of the refractive index of ZnS and Pbte, ZnS is smaller than Pbte. Therefore, the spacer layer is made of Zn, which has a small temperature change rate of refractive index.
Consisting of: This makes it possible to reduce temperature changes in the center wavelength of the bandpass filter.
本実施例の膜構成は第１図に示したように、
PbTeとZnSの交互層１〜３および５〜７と、屈
折率の温度変化率の小さなZnSにより構成された
スペーサー層４とからなる多層膜および基板（サ
フアイヤ）８からなる。これら蒸着膜各々の膜厚
はバンドパスフイルターの中心波長をγ0としたと
き、スペーサー層４のみを光学的膜厚（屈折率×
厚さ＝nd）をγ0／２となるようにし、他の１〜
３および５〜７層をγ0／４となるようにした。 The membrane structure of this example is as shown in Fig. 1.
It consists of a multilayer film consisting of alternating layers 1 to 3 and 5 to 7 of PbTe and ZnS, and a spacer layer 4 made of ZnS, which has a small rate of change in refractive index with temperature, and a substrate (saphire) 8. The film thickness of each of these deposited films is determined by the optical film thickness (refractive index ×
Thickness = nd) is set to γ 0 /2, and the other 1 to
The thickness of layers 3 and 5 to 7 was set to γ 0 /4.
このような膜構成を有するフイルターの分光特
性の温度変化を第２図に、そしてこのフイルター
の温度と中心波長の変化率との関係を第３図に示
した。 FIG. 2 shows the temperature change in the spectral characteristics of a filter having such a film configuration, and FIG. 3 shows the relationship between the temperature of this filter and the rate of change of the center wavelength.
一方、比較のために、第４図に示すような膜構
成を有するバンドパスフイルター、即ち屈折率の
温度変化が負のPbTeと正のZnSとの交互層１〜
４および６〜９と屈折率の温度変化率が大きい
PbTeからなるスペーサー層５と基板１０とから
なるフイルターの分光特性の温度変化を第５図に
示した。 On the other hand, for comparison, a bandpass filter having a film configuration as shown in FIG.
4 and 6 to 9, the rate of change in refractive index with temperature is large.
FIG. 5 shows temperature changes in the spectral characteristics of a filter consisting of a spacer layer 5 made of PbTe and a substrate 10.
第３図と第５図との比較から明らかな如く、本
発明の膜構成を有するバンドパスフイルターは比
較例のフイルターよりも著しく小さな中心波長の
温度変化率を示すことがわかる。 As is clear from the comparison between FIG. 3 and FIG. 5, it can be seen that the bandpass filter having the film structure of the present invention exhibits a significantly smaller temperature change rate of the center wavelength than the filter of the comparative example.
また、第２図の本発明の干渉フイルターの分光
特性の温度変化から明らかな如く、フイルター温
度がかなり変化しても透過率は殆ど変化せず、か
つバンド半値幅の変化も小さいことがわかる。 Further, as is clear from the temperature change in the spectral characteristics of the interference filter of the present invention shown in FIG. 2, it can be seen that even if the filter temperature changes considerably, the transmittance hardly changes and the change in the band half width is also small.
従つて、かかる膜構成を有する本発明の干渉フ
イルターは極めて優れた分光特性を有するもので
あることが理解されよう。 Therefore, it will be understood that the interference filter of the present invention having such a film configuration has extremely excellent spectral characteristics.
実施例 ２
本実施例では、スペーサー層の構成材料とし
て、ZnS以外の屈折率の温度変化率の小さな物質
を使用した例を示す。Example 2 This example shows an example in which a material other than ZnS whose refractive index has a small rate of change with temperature is used as a constituent material of the spacer layer.
実施例１の膜構成において、スペーサー層４の
みをSiOにより構成した。詳しい膜構成は第６図
に示す通りであり、スペーサー層４をSiOとした
他は実施例１と同様である。このような膜構成の
フイルターも実施例１のフイルターと同様の分光
特性の温度依存性を示した。 In the film structure of Example 1, only the spacer layer 4 was made of SiO. The detailed film structure is as shown in FIG. 6, and is the same as in Example 1 except that the spacer layer 4 is made of SiO. The filter with such a membrane structure also showed the same temperature dependence of spectral characteristics as the filter of Example 1.
以上の実施例においては、最も簡単な膜構成を
有するフアブリー・ペロータイプの干渉フイルタ
ーについて記載したが、スペーサー層を２つ以上
有する更に複雑なバンドパスフイルターについて
も同様に応用することができる。 In the above embodiments, a Fabry-Perot type interference filter having the simplest membrane structure has been described, but the invention can be similarly applied to a more complicated bandpass filter having two or more spacer layers.
かくして、本発明によれば干渉フイルターの温
度変化に伴う中心波長の温度変化を小さくするこ
とができる。従つて、本発明の干渉フイルターを
使用することにより各種光学的測定機器の測定精
度を著しく向上させることが可能となる。また、
屈折率の温度変化の小さな膜物質からなるスペー
サー層を、屈折率の温度変化が正である第１群の
膜物質の層および屈折率の温度変化が負である第
２群の膜物質の層のうちで屈折率の温度変化の小
さな膜物質から構成しているので、新たな構成物
質を用いる必要がなく、コストを低くでき、製造
する段階においても、少ない工程で製造すること
ができる。 Thus, according to the present invention, it is possible to reduce the temperature change in the center wavelength caused by the temperature change of the interference filter. Therefore, by using the interference filter of the present invention, it is possible to significantly improve the measurement accuracy of various optical measurement instruments. Also,
A spacer layer made of a film material with a small temperature change in refractive index, a layer of a first group of film materials whose refractive index changes with temperature is positive, and a layer of a second group film material with a negative temperature change in refractive index. Since it is composed of a film material whose refractive index changes little with temperature, there is no need to use new constituent materials, and the cost can be reduced, and the manufacturing process can be performed with fewer steps.
第１図は本発明のバンドパスフイルターの膜構
成を示す模式図であり；第２図は第１図に示した
膜構成を有するフイルターの分光特性の温度変化
を示す図であり；第３図は第１図に示した膜構成
を有するフイルターの温度と中心波長の変化率と
の関係を示すグラフであり；第４図は本発明の比
較例としてのフイルターの膜構成を示す模式図で
あり；第５図は第４図に示した膜構成を有するフ
イルターの温度と中心波長の変化率との関係を示
すグラフであり；第６図は本発明の他の実施例を
膜構成を示す模式図である。
FIG. 1 is a schematic diagram showing the film structure of the bandpass filter of the present invention; FIG. 2 is a diagram showing temperature changes in the spectral characteristics of the filter having the film structure shown in FIG. 1; FIG. is a graph showing the relationship between the temperature and the rate of change of the center wavelength of a filter having the film structure shown in FIG. 1; FIG. 4 is a schematic diagram showing the film structure of a filter as a comparative example of the present invention. ; FIG. 5 is a graph showing the relationship between temperature and center wavelength change rate of a filter having the film structure shown in FIG. 4; FIG. 6 is a schematic diagram showing the film structure of another embodiment of the present invention. It is a diagram.
Claims (1)
からなる層と屈折率の温度変化が負である第２群
の膜物質からなる層とを各々少なくとも１種類含
み、かつ第１群の膜物質および第２群の膜物質の
うちで屈折率の温度変化の小さな膜物質からなる
スペーサー層を含む多層膜により構成され、温度
変化に伴う中心波長位置のずれを小さくするよう
にしたことを特徴とする干渉フイルター。 ２ 前記屈折率の温度変化が正である物質が
ZnS、SiO、ZnSe、およびGeからなる群から選
ばれる特許請求の範囲第１項記載の干渉フイルタ
ー。 ３ 前記屈折率の温度変化が負である物質が
PbTe、PbSe、CaF2、BaFa、LaF3、および
MgF2からなる群から選ばれる特許請求の範囲第
１項記載の干渉フイルター。[Scope of Claims] 1. At least one layer each consisting of a first group film substance whose refractive index changes with temperature is positive and a layer consisting of a second group film substance whose refractive index changes with temperature is negative. It is composed of a multilayer film including a spacer layer made of a film material whose refractive index changes with small temperature among the film materials of the first group and the film material of the second group. An interference filter characterized by being made smaller. 2 The substance whose refractive index changes with temperature is positive
The interference filter according to claim 1, which is selected from the group consisting of ZnS, SiO, ZnSe, and Ge. 3 The substance whose refractive index changes with temperature is negative
PbTe, PbSe, CaF2 , BaFa, LaF3 , and
2. An interference filter according to claim 1, which is selected from the group consisting of MgF2 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13044381A JPS5831307A (en) | 1981-08-20 | 1981-08-20 | interference filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13044381A JPS5831307A (en) | 1981-08-20 | 1981-08-20 | interference filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5831307A JPS5831307A (en) | 1983-02-24 |
| JPH031645B2 true JPH031645B2 (en) | 1991-01-11 |
Family
ID=15034361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13044381A Granted JPS5831307A (en) | 1981-08-20 | 1981-08-20 | interference filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5831307A (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60262101A (en) * | 1984-06-09 | 1985-12-25 | Horiba Ltd | Multi-layered film interference filter for moisture meter |
| JPS619604A (en) * | 1984-06-23 | 1986-01-17 | Koshin Kogaku:Kk | Multi-layered dielectric film filter |
| JPH0690085B2 (en) * | 1985-07-22 | 1994-11-14 | 有限会社光伸光学 | Interference filter spectroscope |
| JPH0330329Y2 (en) * | 1985-12-20 | 1991-06-27 | ||
| JP2782559B2 (en) * | 1990-12-18 | 1998-08-06 | 旭光学工業株式会社 | Replacement for decoration |
| US5193025A (en) * | 1992-01-21 | 1993-03-09 | Hughes Aircraft Company | Optical viewing and near infrared tracking system for a portable missle launcher |
| US5785756A (en) * | 1997-03-06 | 1998-07-28 | Northrop Grumman Corporation | Process for fabricating structurally robust optical coatings |
| EP2428154A4 (en) | 2009-05-07 | 2012-12-26 | Konica Minolta Opto Inc | Optical characteristic measuring probe |
| EP2802046B1 (en) * | 2013-05-08 | 2022-11-23 | Camlin Technologies (Switzerland) Limited | Light guiding for vertical external cavity surface emitting laser |
| GB2530099B (en) * | 2014-09-15 | 2019-01-02 | Schlumberger Holdings | Temperature invariant infrared filter |
| GB2530486B (en) | 2014-09-15 | 2017-08-02 | Schlumberger Holdings | Active surface cleaning for a sensor |
| GB2530095B (en) | 2014-09-15 | 2017-07-12 | Schlumberger Holdings | Mid-infrared sensor |
| GB2530098B (en) | 2014-09-15 | 2017-02-22 | Schlumberger Holdings | Mid-infrared acid sensor |
| GB2530485B (en) | 2014-09-15 | 2017-02-22 | Schlumberger Holdings | Mid-infrared carbon dioxide sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK143620A (en) * | 1974-06-20 | |||
| JPS6042445B2 (en) * | 1977-10-05 | 1985-09-21 | キヤノン株式会社 | Multilayer thin film optical system |
-
1981
- 1981-08-20 JP JP13044381A patent/JPS5831307A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5831307A (en) | 1983-02-24 |
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