JPH0317206B2 - - Google Patents
Info
- Publication number
- JPH0317206B2 JPH0317206B2 JP59098487A JP9848784A JPH0317206B2 JP H0317206 B2 JPH0317206 B2 JP H0317206B2 JP 59098487 A JP59098487 A JP 59098487A JP 9848784 A JP9848784 A JP 9848784A JP H0317206 B2 JPH0317206 B2 JP H0317206B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- sheets
- ceramic green
- laminated
- green sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Laminated Bodies (AREA)
- Ceramic Capacitors (AREA)
- Coils Or Transformers For Communication (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
〔発明の属する技術分野〕
本発明は積層型のチツプ電子部品として用いら
れる積層セラミツクコンデンサや積層チツプイン
ダクタ等の電子部品の製造方法に関する。
〔従来技術〕
この種の製造方法の一例を、積層セラミツクコ
ンデンサの例をとつて第1図により説明する。
まず、誘電体と有機結合剤、可塑剤とを含む泥
漿を、第1図aに示すようにドクターブレイド1
1によりキヤリアシート12上に成膜し、乾燥機
13により乾燥してキヤリア付グリーンシート1
4を作成する。その後、第1図bに示すように、
キヤリア付グリーンシート14からグリーンシー
ト15を剥離し、抜き装置16で後述する積層金
型より一回り大きい形状に打ち抜きケース17に
ストツクする。次に、目合せマーカを含む内部電
極パターンを印刷し乾燥する。更に、内部電極パ
ターンが設計位置にあるよう、目合せマーカを基
準位置に合せ、第1図cに示すように、打ち抜き
金型18内に積層してゆく。そして、第1図dに
示すように、設定枚数の積層終了後、熱プレス機
19によりプレスを行い、定形状に切断、焼成す
る。最後に、外部電極を形成する。
この場合、内部電極を印刷したシートは同一形
状のものを規定枚数だけ準備し、一枚ずつこの内
部電極印刷シートを目合せし、打抜き、金型への
積層を行う。しかも内部電極印刷シートは、コン
デンサ内で有効内部電極が交互に外部電極に短絡
する様積層する為、交互に向きを変えなければな
らない。
従来のこの方法で積層した生チツプの切断面を
観察すると、内部電極のズレが切りしろ(約1
mm)の半分の0.5mm程度有り、ズレのバラツキが
非常に大きい。これは積層枚数が多いほど顕著で
ある。そしてこの積層ズレは積層セラミツクコン
デンサに於いて、内部電極部と切りしろ(内部電
極のない部分)との密度差の大きい部位に位置す
る為、電圧印加時対向電極もしくは対向の外部電
極とのシヨートとなつて現われ、信頼性は大きく
低下する。この積層ズレは目合せマーカの印刷精
度、そして目合せ精度に起因するところが大であ
り、両者の精度向上が印刷にじみ等により阻害さ
れ非常に困難である。
〔発明の目的〕
本発明はこの欠点を除去し、積層ズレの度合を
小さくした信頼性の高い積層セラミツク部品を提
供しようとするものである。
〔発明の構成〕
本発明は、セラミツクシートの打抜き−内部電
極の印刷、乾燥−積層の一連の工程をセラミツク
シートを吸着パツドに吸着させたまま行い、印刷
精度、マーカの位置合せによる積層ズレをなくし
た方法である。
すなわち、本発明では積層ズレの誤差として
(印刷精度+積層精度)の2項目を考えればよく、
〔従来はこれに(マーカー印刷精度+マーカー位
置合せ精度)をプラスして考慮しなければならな
い。〕積層ズレの要因を減らし、その度合いを極
端に小さくすることができる。
〔実施例〕
次に、第2図を参照して本発明の実施例を説明
する。
誘電体磁気素材としては、Pb(Nb1/2、Fe1/2)
(W1/3)O3を組成とする複合ペロブスカイト系
誘電体材料を使用した。この材料を混合、予焼、
湿式粉砕してポリビニルブチラールの有機結合剤
と溶剤とから泥漿を作成する。次に、第2図aに
示すように、キヤリアフイルム22上に30μのグ
リーンシートを有するキヤリア付グリーンシート
24をドクターブレイド21により作成する。2
3は乾燥機である。
このキヤリア付グリーンシート24は、第2図
bに示す工程でグリーンシート25が剥離され、
抜き装置26で100×120mm形状に打ち抜きながら
保持手段としての吸着パツド30に吸着させる。
そして、第2図cに示すように、吸着パツド30
への吸着状態のままで印刷機31によりスクリー
ン32を通してシート25′に内部電極パターン
の印刷が行われる。次に、第2図dに示すよう
に、熱風ドライヤ33により乾燥を行う。勿論、
この工程も吸着パツド30で吸着したままで行わ
れる。
第2図eでは乾燥終了後のシート25′が吸着
パツド30で打ち抜き金型28へ積層される。そ
して、所定枚数だけ積層されると、熱プレス機2
9により熱圧着が行われる。
この場合の内部電極印刷シート枚数は61枚であ
り、内部電極ペーストはAg粉及びPd粉と有機結
合剤、可塑剤とを混練したものである。この積層
体を12×16mmに外周刃切断機で切断し、脱バイン
ダー、焼成し、外部Ag電極の塗布、焼付けを行
い、積層セラミツクコンデンサの信頼性試験を行
つた。この結果を第1表に示す。なお、抜き装置
26のカツターの熱防御の為、冷却管34を取り
付けた。印刷機31はスクリーン印刷でナイロン
メツシユ#200を使用し、塗布コータとしてはグ
ラビアコータの改造タイプを使用した。
[Technical field to which the invention pertains] The present invention relates to a method for manufacturing electronic components such as multilayer ceramic capacitors and multilayer chip inductors used as multilayer chip electronic components. [Prior Art] An example of this type of manufacturing method will be described with reference to FIG. 1, using a multilayer ceramic capacitor as an example. First, a slurry containing a dielectric material, an organic binder, and a plasticizer is applied to a doctor blade 1 as shown in FIG. 1a.
A film is formed on the carrier sheet 12 by 1 and dried by the dryer 13 to form a green sheet 1 with a carrier.
Create 4. Then, as shown in Figure 1b,
The green sheet 15 is peeled off from the carrier-attached green sheet 14, and is stocked in a punching case 17 by a punching device 16 into a shape that is slightly larger than a laminated mold, which will be described later. Next, an internal electrode pattern including alignment markers is printed and dried. Furthermore, the alignment marker is aligned with the reference position so that the internal electrode pattern is at the designed position, and the sheets are stacked in the punching die 18 as shown in FIG. 1c. Then, as shown in FIG. 1d, after the set number of sheets have been laminated, pressing is performed using a hot press machine 19, and the sheets are cut into a regular shape and fired. Finally, external electrodes are formed. In this case, a prescribed number of sheets with the same shape are prepared with internal electrodes printed thereon, and the internal electrode printed sheets are aligned one by one, punched out, and laminated into a mold. Moreover, the internal electrode printed sheets must be alternately oriented in order to stack them in such a way that the effective internal electrodes alternately short-circuit to the external electrodes within the capacitor. When observing the cut surface of raw chips laminated using this conventional method, it is found that the internal electrodes are misaligned by the cutting margin (approximately 1
mm), which is about 0.5mm, and the deviation is extremely variable. This becomes more noticeable as the number of laminated sheets increases. In a multilayer ceramic capacitor, this lamination misalignment is located at a location where there is a large density difference between the internal electrode portion and the cut margin (portion without internal electrodes). This will result in a significant drop in reliability. This lamination misalignment is largely due to the printing accuracy of the alignment marker and the alignment accuracy, and it is extremely difficult to improve the accuracy of both because printing blur and the like hinder the improvement. [Object of the Invention] The present invention aims to eliminate this drawback and provide a highly reliable laminated ceramic component in which the degree of lamination misalignment is reduced. [Structure of the Invention] The present invention performs a series of steps of punching a ceramic sheet, printing internal electrodes, drying, and laminating the ceramic sheet while the ceramic sheet is adsorbed to a suction pad, thereby improving printing accuracy and reducing lamination misalignment due to marker alignment. This is the method I lost. In other words, in the present invention, it is sufficient to consider two items (printing accuracy + lamination accuracy) as errors in lamination misalignment.
[Conventionally, (marker printing accuracy + marker positioning accuracy) must be taken into consideration. ] The causes of lamination misalignment can be reduced and the degree of misalignment can be made extremely small. [Example] Next, an example of the present invention will be described with reference to FIG. As a dielectric magnetic material, Pb (Nb1/2, Fe1/2)
A composite perovskite dielectric material having a composition of (W1/3)O 3 was used. Mix this material, pre-fire,
A slurry is created from the polyvinyl butyral organic binder and solvent by wet grinding. Next, as shown in FIG. 2a, a carrier-attached green sheet 24 having a 30 μm green sheet on the carrier film 22 is prepared using a doctor blade 21. 2
3 is a dryer. This carrier-equipped green sheet 24 is obtained by peeling off the green sheet 25 in the process shown in FIG. 2b.
While punching out a shape of 100 x 120 mm using the punching device 26, it is sucked onto a suction pad 30 as a holding means.
Then, as shown in FIG. 2c, the suction pad 30
An internal electrode pattern is printed on the sheet 25' through the screen 32 by the printing machine 31 while the sheet 25' remains attracted to the sheet 25'. Next, as shown in FIG. 2d, drying is performed using a hot air dryer 33. Of course,
This step is also carried out while being adsorbed by the suction pad 30. In FIG. 2e, the sheet 25' after drying is laminated onto the punching die 28 using a suction pad 30. When a predetermined number of sheets are laminated, the heat press machine 2
Thermocompression bonding is performed in step 9. In this case, the number of internal electrode printed sheets was 61, and the internal electrode paste was a mixture of Ag powder, Pd powder, an organic binder, and a plasticizer. This laminate was cut into 12 x 16 mm pieces using a peripheral blade cutter, the binder was removed, the material was fired, an external Ag electrode was applied and baked, and the reliability of the multilayer ceramic capacitor was tested. The results are shown in Table 1. Note that a cooling pipe 34 was attached to protect the cutter of the extraction device 26 from heat. The printing machine 31 used screen printing using nylon mesh #200, and the coater used was a modified type of gravure coater.
従来方法では、工程が単一で、連続工程ではな
く、内部電極印刷シートがストツクヤードに保管
されていたため位置決めに熟練を要していたが、
本発明方法のようにすれば、生産性が大幅に向上
できる。また、シートの積層ズレの度合を小さく
して高信頼性の積層セラミツク部品を提供でき
る。
In the conventional method, the process was a single process, not a continuous process, and the internal electrode printed sheets were stored in a stockyard, so positioning required skill.
By using the method of the present invention, productivity can be greatly improved. Furthermore, it is possible to provide a highly reliable laminated ceramic component by reducing the degree of sheet lamination misalignment.
第1図a〜dは従来の製造方法の工程を示す図
で、第2図a〜fは本発明方法の工程を示した図
である。
図中、11,21はドクターブレイド、12,
22はキヤリアシート、13,23は乾燥機、1
4,24はキヤリア付グリーンシート、15,2
5はグリーンシート、16,26は抜き装置、1
8,28は打ち抜き金型、19,29は熱プレス
機、30は吸着パツド、31は印刷機、32はス
クリーン、33は熱風ドライヤ。
1A to 1D are diagrams showing the steps of the conventional manufacturing method, and FIGS. 2A to 2F are diagrams showing the steps of the method of the present invention. In the figure, 11, 21 are doctor blades, 12,
22 is a carrier sheet, 13 and 23 are dryers, 1
4, 24 is a green sheet with carrier, 15, 2
5 is a green sheet, 16 and 26 are punching devices, 1
8 and 28 are punching molds, 19 and 29 are hot press machines, 30 is a suction pad, 31 is a printing machine, 32 is a screen, and 33 is a hot air dryer.
Claims (1)
電極を印刷し積層するセラミツク部品の製造方法
に於いて、 () 有機フイルムのキヤリア膜にセラミツクス
グリーンシートを連続して成膜する工程と、 () この後、前記セラミツクスグリーンシート
を前記キヤリア膜から剥離して所望の寸法に打
ち抜く工程と、 () 前記工程()で保持手段に前記打ち抜か
れたセラミツクスグリーンシートを保持させた
状態で、シート背面にスクリーンを介して導電
性内部電極を印刷する工程と、 () 引き続き前記保持手段に保持させたままで
シートを乾燥させる工程と、 () この後、金型に前記工程()で得られた
シートを挿入する工程と、 () 以下、前記工程()〜()をくり返
し、シートを積層する工程と、 () 前記工程()で積層されたシートを熱圧
着する工程とを含み、前記工程()〜前記工
程()の順に積層セラミツクコンデンサを製
造することを特徴とする積層セラミツクコンデ
ンサの製造方法。[Claims] 1. A method for manufacturing ceramic parts in which internal electrodes are printed and laminated on ceramic green sheets, including () a step of continuously forming ceramic green sheets on a carrier film of an organic film; () After this, a step of peeling the ceramic green sheet from the carrier film and punching it into a desired size; () with the holding means holding the punched ceramic green sheet in the step (); , printing conductive internal electrodes on the back surface of the sheet through a screen; () drying the sheet while it is held in the holding means; () Thereafter, the steps () to () are repeated to stack the sheets; () The sheets stacked in the step () are bonded by thermocompression; A method for manufacturing a multilayer ceramic capacitor, characterized in that the multilayer ceramic capacitor is manufactured in the order of steps () to ().
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848784A JPS60244014A (en) | 1984-05-18 | 1984-05-18 | Method of producing laminated ceramic part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848784A JPS60244014A (en) | 1984-05-18 | 1984-05-18 | Method of producing laminated ceramic part |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60244014A JPS60244014A (en) | 1985-12-03 |
| JPH0317206B2 true JPH0317206B2 (en) | 1991-03-07 |
Family
ID=14221008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9848784A Granted JPS60244014A (en) | 1984-05-18 | 1984-05-18 | Method of producing laminated ceramic part |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60244014A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102667167A (en) * | 2010-02-02 | 2012-09-12 | 三菱重工业株式会社 | Centrifugal pump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920009170B1 (en) * | 1988-03-07 | 1992-10-14 | 마쓰시다 덴기 산교 가부시기가이샤 | Manufacturing method of laminated ceramic electronic parts |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60189211A (en) * | 1984-03-07 | 1985-09-26 | 太陽誘電株式会社 | Method and device for machining crude sheet for laminated porcelain condenser |
-
1984
- 1984-05-18 JP JP9848784A patent/JPS60244014A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102667167A (en) * | 2010-02-02 | 2012-09-12 | 三菱重工业株式会社 | Centrifugal pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60244014A (en) | 1985-12-03 |
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