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JPH0323634B2 - - Google Patents
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JPH0323634B2 - - Google Patents

Info

Publication number
JPH0323634B2
JPH0323634B2 JP59210996A JP21099684A JPH0323634B2 JP H0323634 B2 JPH0323634 B2 JP H0323634B2 JP 59210996 A JP59210996 A JP 59210996A JP 21099684 A JP21099684 A JP 21099684A JP H0323634 B2 JPH0323634 B2 JP H0323634B2
Authority
JP
Japan
Prior art keywords
bath
copper plating
dipyridyl
chemical copper
tensile strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59210996A
Other languages
Japanese (ja)
Other versions
JPS6187876A (en
Inventor
Akemi Kinoshita
Ken Araki
Hidemi Nawafune
Shozo Mizumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Uemera Kogyo Co Ltd
Original Assignee
Uemera Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uemera Kogyo Co Ltd filed Critical Uemera Kogyo Co Ltd
Priority to JP21099684A priority Critical patent/JPS6187876A/en
Publication of JPS6187876A publication Critical patent/JPS6187876A/en
Publication of JPH0323634B2 publication Critical patent/JPH0323634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

産業上の利用分野 本発明は、伸び及び引張強さといつた機械的性
質が高く、特に熱処理によりこれらの機械的性質
が向上する化学銅めつき皮膜を与える化学銅めつ
き浴に関する。 従来の技術及びその問題点 従来より、フルアデイテイブ法によるプリント
配線基板の製造においては、接着剤付積層板に化
学銅めつき皮膜による回路を形成した後、化学銅
めつき皮膜と接着剤付積層板との密着性を向上さ
せる目的で熱処理(通常約150℃)することが行
なわれている。このようなフルアデイテイブ法に
よるプリント配線基板の製造に用いる化学銅めつ
き浴としては、従来より種々の浴が提案されてい
るが、従来の化学銅めつき浴から得られる化学銅
めつき皮膜は、上述した熱処理により銅皮膜の伸
びは向上するものの、引張強さが低下する問題が
あり、このためこの化学銅めつき皮膜により回路
を形成したフルアデイテイブ法によるプリント配
線基板の品質は十分満足し得ないものであつた。 発明の概要 本発明者らは上記事情に鑑み、良好な機械的性
質を与え、特に熱処理により機械的性質の低下し
ない化学銅めつき皮膜を形成できる化学銅めつき
浴につき鋭意研究を行なつた結果、銅イオンと、
この銅イオンを錯化する錯化剤と、還元剤とを含
有する化学銅めつき浴において、錯化剤としてエ
チレンジアミンテトラ酢酸又はその塩を用いると
共に、この浴に更にエチレンジアミンとα,α′−
ジピリジルとを添加した浴が上記目的を達成する
ことを知見した。 即ち、このエチレンジアミンテトラ酢酸又はそ
の塩(以下、EDTA類という)を錯化剤としエ
チレンジアミンとα,α′−ジピリジルとを添加し
た化学銅めつき浴から得られるめつき皮膜は、伸
び及び引張強さといつた機械的性質が良好である
上、外観が優れ、しかもこのめつき皮膜を熱処理
した場合、伸びと共に引張強さが向上するもので
あつた。上述したように、従来の化学銅めつき浴
からのめつき皮膜は、熱処理によつて伸びは向上
するものの引張強さは低下するものであり、従来
は化学銅めつき皮膜の引張強さは熱処理により低
下するものと考えられていたにもかかわらず、
EDTA類を錯化剤とし、エチレンジアミン及び
α,α′−ジピリジルを添加した化学銅めつき浴か
らのめつき皮膜は、意外にも熱処理により伸びが
向上する上、引張強さも向上するという新知見を
得たものである。更に、α,α′−ジピリジルをエ
チレンジアミンと併用した場合、α,α′−ジピリ
ジルの使用濃度範囲が広がることを知見した。即
ち、α,α′−ジピリジルは従来化学銅めつき浴中
に0.00025モル/以上添加すると析出速度が低
下する上、めつき皮膜に亜酸化銅の膜が生じてそ
の物性が著しく低下するという問題があり、この
ためα,α′−ジピリジルは通常0.00015〜0.00025
モル/の濃度範囲で使用していたもので、使用
濃度範囲が狭いという問題があつた。ところが、
α,α′−ジピリジルをエチレンジアミンと併用す
るとその使用濃度範囲の上限が上昇し、例えば
0.025モル/程度でも支障なく使用することが
できるという予想外の事実を見い出し、本発明を
なすに至つたものである。 以下、本発明につき更に詳しく説明する。 発明の構成 本発明に係る化学銅めつき浴は、銅イオンと、
銅イオンを錯化する錯化剤として銅イオンと等モ
ル以上の量のエチレンジアミンテトラ酢酸又はそ
の塩と、ホルムアルデヒド還元剤と、エチレンジ
アミンと、α,α′−ジピリジルとを含有してなる
ものである。 ここで、銅イオンは2価の銅イオンを与える硫
酸銅等により供給され、銅イオンの濃度は0.01〜
1モル/、特に0.02〜0.5モル/であること
が好ましい。 また、銅の錯化剤としては、上述したようにエ
チレンジアミンテトラ酢酸又はその塩を使用する
もので、その濃度は銅イオンと等モル又はそれ以
上である。 更に、本発明において、還元剤としてはホルム
アルデヒドで代表されるホルムアルデヒド類を使
用するもので、その濃度は0.02〜1モル/、特
に0.05〜0.5モル/とすることが好ましい。 本発明の化学銅めつき浴には、上記成分に加え
て更にエチレンジアミンを加える。この場合、エ
チレンジアミンはそれ単独では前記銅イオンの錯
化剤になり得るものであるが、上述した銅イオン
の錯化剤、即ちEDTA類の存在下においては実
質的に銅イオンの錯化剤として作用しないもので
ある。 ここで、添加剤として用いるエチレンジアミン
の使用量は特に制限されないが、0.001〜0.5モ
ル/、特に0.005〜0.1モル/とすることが好
ましい。この場合、エチレンジアミンは、還元剤
(ホルムアルデヒド)1モルに対し0.002〜2モル
となるように添加することができ、還元剤(ホル
ムアルデヒド)1モルに対し0.1モルより少ない
使用量でも十分その効果を有する。 本発明の化学銅めつき浴には、更にα,α′−ジ
ピリジルを添加するもので、上述したように、
EDTA類を錯化剤とする化学銅めつき浴にエチ
レンジアミンとα,α′−ジピリジルとを併用して
添加することにより、初めて熱処理により引張強
さが向上する化学銅めつき皮膜が得られ、しかも
α,α′−ジピリジルの使用濃度範囲を広げること
ができたものである。これに対し、α,α′−ジピ
リジルと同様に従来から化学銅めつき浴の安定剤
として知られたシアン類をエチレンジアミンと併
用しても熱処理による化学銅めつき皮膜の引張強
さの増大という本発明の目的は達成されない。こ
の場合、α,α′−ジピリジルの使用量は必ずしも
制限されないが、0.00001〜0.025モル/、特に
0.00005〜0.01モル/とすることが好ましい。 本発明の化学銅めつき浴は、以上述べた銅イオ
ン、EDTA類、ホルムアルデヒド類、更にエチ
レンジアミン及びα,α′−ジピリジルを必須成分
とするものであるが、更に必要に応じて種々の成
分、例えばホルマリンと付加生成物を形成する化
合物やシアン類、フエロシアン類等の安定剤など
を添加することもできる。 なお、本発明化学銅めつき浴はアルカリ性、特
にpH11〜13.5とすることが好ましい。 本発明に係る化学銅めつき浴の使用方法は通常
の化学銅めつき浴の場合と同様であり、被めつき
物を常法により前処理した後、浴中に浸漬するも
のであるが、めつき温度は室温〜80℃の温度、特
に45〜75℃とすることが好適である。また、めつ
き時間は必要とする膜厚、めつき浴の析出速度等
により適宜設定される。なお、本発明の化学銅め
つき浴の析出速度は、浴組成、めつき温度などに
より種々コントロールすることができるが、一般
的には1〜6μm/hの範囲でコントロールする
ことが好ましい。 本発明めつき浴でめつきされ得る被めつき物に
は特に制限はないが、常法により前処理されたプ
リント配線板製作用の基板、プラスチツク成形
品、セラミツクなどを好適にめつきすることがで
き、特にフルアデイテイブ法によるプリント配線
基板の回路形成、その他熱処理として熱処理を行
なう部品のめつきに有効に用いられる。 この場合、本発明めつき浴でめつきされた部品
は後処理として熱処理を行なうことが好ましく、
これにより化学銅めつき皮膜の伸び及び引張強さ
を析出したままの状態よりも向上させることがで
きる。なお、熱処理条件は必ずしも制限されない
が、熱処理温度は50〜900℃、特に100〜300℃と
することができ、熱処理時間は熱処理温度等によ
つて相違し、数分〜24時間以上、特に0.5〜3時
間とすることができ、例えば50℃の場合であれば
24時間以上、600℃の場合であれば数分程度とす
ることができる。なお、雰囲気も制限はなく、例
えば通常の大気雰囲気(酸化雰囲気)のほか、還
元雰囲気、不活性ガス雰囲気、真空雰囲気等、い
ずれの雰囲気を採用することもできる。 発明の効果 以上説明したように、本発明の化学銅めつき浴
によれば、伸び及び引張強さといつた機械的性質
に優れ、外観も良好である上、熱処理により伸び
及び引張強さを向上する化学銅めつき皮膜を得る
ことができる。また、α,α′−ジピリジルの管理
濃度を広げることができる。 以下、実施例と比較例を示し、本発明を具体的
に説明するが、本発明は下記の実施例に制限され
るものではない。 実施例、比較例 下記組成の化学銅めつき浴を製造し、下記めつ
き条件において常法による脱脂及びパラジウムイ
オンを含んだ酸活性触媒液で触媒化したステンレ
ス鋼板(5×10cm)をめつきし、めつきサンプル
を作成した。なお、めつき膜厚は30μmであつ
た。
INDUSTRIAL APPLICATION FIELD OF THE INVENTION The present invention relates to a chemical copper plating bath that provides a chemical copper plating film with high mechanical properties such as elongation and tensile strength, and in particular those mechanical properties are improved by heat treatment. Conventional technology and its problems Traditionally, in the production of printed wiring boards using the full additive method, after forming a circuit with a chemical copper plating film on an adhesive-coated laminate, the chemical copper plating film and the adhesive-coated laminate are formed. Heat treatment (usually at about 150°C) is carried out to improve the adhesion with other materials. Various baths have been proposed as chemical copper plating baths used in the production of printed wiring boards by such fully additive methods, but the chemical copper plating film obtained from the conventional chemical copper plating baths is Although the above-mentioned heat treatment improves the elongation of the copper film, there is a problem that the tensile strength decreases, and for this reason, the quality of printed wiring boards produced by the fully additive method in which circuits are formed using this chemical copper plating film cannot be fully satisfied. It was hot. SUMMARY OF THE INVENTION In view of the above circumstances, the present inventors have conducted intensive research on a chemical copper plating bath that can form a chemical copper plating film that provides good mechanical properties and does not deteriorate in mechanical properties, especially through heat treatment. As a result, copper ions and
In a chemical copper plating bath containing a complexing agent for complexing copper ions and a reducing agent, ethylenediaminetetraacetic acid or its salt is used as the complexing agent, and ethylenediamine and α,α′-
It has been found that a bath to which dipyridyl is added achieves the above objective. That is, the plated film obtained from a chemical copper plating bath in which ethylenediaminetetraacetic acid or its salt (hereinafter referred to as EDTA) is used as a complexing agent and ethylenediamine and α,α'-dipyridyl are added has low elongation and tensile strength. Not only did it have good mechanical properties, but it also had an excellent appearance.Moreover, when this plated film was heat treated, its tensile strength and elongation improved. As mentioned above, the elongation of plating films from conventional chemical copper plating baths improves through heat treatment, but the tensile strength decreases; Although it was thought that heat treatment would reduce the
A new finding that the elongation and tensile strength of plating films made from chemical copper plating baths using EDTA as a complexing agent and adding ethylenediamine and α,α'-dipyridyl are unexpectedly improved by heat treatment. This is what I got. Furthermore, it has been found that when α,α'-dipyridyl is used in combination with ethylenediamine, the concentration range in which α,α'-dipyridyl can be used is expanded. In other words, when α,α'-dipyridyl is added to conventional chemical copper plating baths in an amount of 0.00025 mol or more, the precipitation rate decreases, and a film of cuprous oxide is formed on the plating film, which significantly deteriorates its physical properties. Therefore, α,α′-dipyridyl is usually 0.00015 to 0.00025
The problem was that the range of concentration used was narrow, as it was used in a concentration range of mol/molar. However,
When α,α′-dipyridyl is used in combination with ethylenediamine, the upper limit of its usage concentration range increases, e.g.
The present invention was made based on the unexpected discovery that it can be used without any problem even at a concentration of about 0.025 mol/mol. The present invention will be explained in more detail below. Structure of the Invention The chemical copper plating bath according to the present invention includes copper ions,
As a complexing agent for complexing copper ions, it contains ethylenediaminetetraacetic acid or its salt in an amount equal to or more than the copper ion, a formaldehyde reducing agent, ethylenediamine, and α,α′-dipyridyl. . Here, copper ions are supplied by copper sulfate, etc., which give divalent copper ions, and the concentration of copper ions is from 0.01 to
It is preferably 1 mol/, particularly 0.02 to 0.5 mol/. Further, as the copper complexing agent, ethylenediaminetetraacetic acid or its salt is used as described above, and its concentration is equimolar to or higher than that of copper ions. Further, in the present invention, formaldehydes such as formaldehyde are used as the reducing agent, and the concentration thereof is preferably 0.02 to 1 mol/, particularly 0.05 to 0.5 mol/. In addition to the above components, ethylenediamine is added to the chemical copper plating bath of the present invention. In this case, ethylenediamine alone can act as a complexing agent for the copper ions, but in the presence of the above-mentioned copper ion complexing agents, that is, EDTA, it essentially acts as a copper ion complexing agent. It doesn't work. Here, the amount of ethylenediamine used as an additive is not particularly limited, but it is preferably 0.001 to 0.5 mol/, particularly 0.005 to 0.1 mol/. In this case, ethylenediamine can be added in an amount of 0.002 to 2 mol per 1 mol of the reducing agent (formaldehyde), and even if the amount used is less than 0.1 mol per 1 mol of the reducing agent (formaldehyde), the effect is sufficient. . The chemical copper plating bath of the present invention further contains α,α′-dipyridyl, and as mentioned above,
By adding ethylenediamine and α,α'-dipyridyl together to a chemical copper plating bath using EDTA as a complexing agent, a chemical copper plating film whose tensile strength improves through heat treatment can be obtained for the first time. Furthermore, the range of concentrations in which α,α'-dipyridyl can be used can be expanded. On the other hand, even when cyanogens, which are conventionally known as stabilizers for chemical copper plating baths like α,α'-dipyridyl, are used in combination with ethylenediamine, the tensile strength of chemical copper plating films due to heat treatment increases. The purpose of the invention is not achieved. In this case, the amount of α,α′-dipyridyl used is not necessarily limited, but is 0.00001 to 0.025 mol/particularly
The amount is preferably 0.00005 to 0.01 mol/. The chemical copper plating bath of the present invention contains the above-mentioned copper ions, EDTAs, formaldehydes, ethylenediamine and α,α'-dipyridyl as essential components, and further contains various other components as necessary. For example, compounds that form addition products with formalin, stabilizers such as cyanides, ferrocyans, and the like may be added. The chemical copper plating bath of the present invention is preferably alkaline, particularly at pH 11 to 13.5. The method of using the chemical copper plating bath according to the present invention is the same as that of a normal chemical copper plating bath, in which the object to be plated is pretreated by a conventional method and then immersed in the bath. The plating temperature is preferably room temperature to 80°C, particularly 45 to 75°C. Further, the plating time is appropriately set depending on the required film thickness, the deposition rate of the plating bath, etc. The deposition rate of the chemical copper plating bath of the present invention can be controlled in various ways by changing the bath composition, plating temperature, etc., but it is generally preferable to control it within the range of 1 to 6 μm/h. There are no particular restrictions on the objects that can be plated using the plating bath of the present invention, but substrates for producing printed wiring boards, plastic molded products, ceramics, etc. that have been pretreated by conventional methods can be suitably plated. It is particularly effective for forming circuits on printed wiring boards using the full additive method, and for plating parts that require heat treatment. In this case, it is preferable that the parts plated with the plating bath of the present invention be subjected to heat treatment as a post-treatment.
This makes it possible to improve the elongation and tensile strength of the chemical copper plating film compared to the state in which it is deposited. Note that the heat treatment conditions are not necessarily limited, but the heat treatment temperature can be 50 to 900°C, especially 100 to 300°C, and the heat treatment time varies depending on the heat treatment temperature, etc., and is preferably 0.5 to 24 hours or more. ~3 hours, for example at 50℃
If the temperature is 600°C for 24 hours or more, it can be about a few minutes. Note that the atmosphere is not limited either, and any atmosphere such as a normal atmospheric atmosphere (oxidizing atmosphere), a reducing atmosphere, an inert gas atmosphere, a vacuum atmosphere, etc. can be adopted. Effects of the Invention As explained above, the chemical copper plating bath of the present invention has excellent mechanical properties such as elongation and tensile strength, has a good appearance, and has improved elongation and tensile strength through heat treatment. A chemical copper plating film can be obtained. Furthermore, the controlled concentration of α,α'-dipyridyl can be expanded. EXAMPLES Hereinafter, the present invention will be specifically explained by showing examples and comparative examples, but the present invention is not limited to the following examples. Examples and Comparative Examples A chemical copper plating bath with the following composition was manufactured, and a stainless steel plate (5 x 10 cm) degreased by a conventional method and catalyzed with an acid-activated catalyst solution containing palladium ions was plated under the following plating conditions. Then, a plating sample was created. Note that the plating film thickness was 30 μm.

【表】 次に、上記めつきサンプルの銅めつき箔の伸び
及び引張強さを測定し、第1表に示す結果を得
た。また、各めつきサンプルを定温乾燥機に入
れ、160℃で所定時間熱処理した後、伸び及び引
張強さを測定した。第1図に実施例の浴を用いて
得られためつきサンプルの結果、第2図に比較例
の浴を用いて得られためつきサンプルの結果を示
す。更に、各めつきサンプルを種々の温度で3時
間熱処理した後、伸び及び引張強さを測定した。
第3図に実施例の浴からのめつきサンプルの結
果、第4図に比較例の浴からのめつきサンプルの
結果を示す。なお、図面においてEは伸び、
UTSは引張強さを表わす。 ここで、伸び及び引張強さは、それぞれ島津引
張試験機MP100を用いて測定した。
[Table] Next, the elongation and tensile strength of the copper-plated foil of the above-mentioned plated sample were measured, and the results shown in Table 1 were obtained. Further, each plated sample was placed in a constant temperature dryer and heat treated at 160°C for a predetermined time, and then elongation and tensile strength were measured. FIG. 1 shows the results of a flash sample obtained using the bath of the example, and FIG. 2 shows the results of a flash sample obtained using the bath of the comparative example. Furthermore, after each plated sample was heat treated at various temperatures for 3 hours, the elongation and tensile strength were measured.
FIG. 3 shows the results of the plating samples from the bath of the example, and FIG. 4 shows the results of the plating sample from the bath of the comparative example. In addition, in the drawing, E is elongated,
UTS stands for tensile strength. Here, elongation and tensile strength were each measured using a Shimadzu tensile tester MP100.

【表】 第1表及び第1図〜第4図の結果より本発明浴
から得られためつき皮膜は熱処理により伸び及び
引張強さがいずれも増大するものであることが認
められた。 実施例、比較例 下記組成の化学銅めつき浴を製造し、実施例、
比較例と同様にしてめつきを行なつた。
[Table] From the results shown in Table 1 and FIGS. 1 to 4, it was found that the elongation and tensile strength of the fried film obtained from the bath of the present invention were both increased by heat treatment. Examples and Comparative Examples A chemical copper plating bath having the following composition was manufactured, and Examples and Comparative Examples were prepared.
Plating was carried out in the same manner as in the comparative example.

【表】 上記浴でα,α′−ジピリジルの量を変えてめつ
きを行なつた場合の析出速度を第5図に示す。な
お、図中Aは実施例浴、Bは比較例浴のうちエチ
レンジアミン無添加浴の析出速度である。 第5図の結果より、錯化剤にEDTA・4Naを
使用しているが、エチレンジアミンを添加しない
比較例浴Bは、α,α′−ジピリジル量が0.25ミリ
モル/(0.00025モル/)を越えると析出速
度が著しく低下し、めつきもむらづきするもので
あつたが、EDTA・4Na錯化剤にエチレンジア
ミンを併用した実施例浴Aは、α,α′−ジピリジ
ル量を多くしても析出速度の低下度合は少なく、
α,α′−ジピリジル量は比較例浴Bの約10倍の許
容範囲があることが認められた。 なお、錯化剤としてEDTA・4Naを用いず、
その代りにエチレンジアミンを用いた比較例浴
は、60℃のめつき温度ではめつきが析出しないも
のであつた。この場合、90℃にめつき温度を上げ
ると析出が可能となつたが、エチレンジアミンの
臭気が著しく、実用性のないものであつた。
[Table] Figure 5 shows the deposition rate when plating was carried out in the above bath with varying amounts of α,α'-dipyridyl. In the figure, A indicates the precipitation rate of the example bath, and B indicates the precipitation rate of the ethylenediamine-free bath among the comparative baths. From the results shown in Figure 5, in Comparative Example Bath B, which uses EDTA/4Na as a complexing agent but does not add ethylenediamine, when the amount of α,α'-dipyridyl exceeds 0.25 mmol/(0.00025 mol/), The precipitation rate was significantly reduced and the plating was uneven, but in Example Bath A, which used ethylenediamine in combination with the EDTA/4Na complexing agent, the precipitation rate remained constant even when the amount of α,α'-dipyridyl was increased. The degree of decrease in
It was found that the amount of α,α'-dipyridyl had an allowable range of about 10 times that of Comparative Example Bath B. In addition, without using EDTA/4Na as a complexing agent,
A comparative example bath in which ethylenediamine was used instead did not cause plating to precipitate at a plating temperature of 60°C. In this case, precipitation was possible by raising the plating temperature to 90°C, but the odor of ethylenediamine was so pronounced that it was impractical.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明浴から得られためつき皮膜を
160℃で所定時間熱処理した後の伸びと引張強さ
の変化を示すグラフ、第2図は比較浴から得られ
ためつき皮膜を160℃で所定時間熱処理した後の
伸びと引張強さの変化を示すグラフ、第3図は本
発明浴から得られためつき皮膜を種々の温度で3
時間熱処理した後の伸びと引張強さを示すグラ
フ、第4図は比較浴から得られためつき皮膜を
種々の温度で3時間熱処理した後の伸びと引張強
さを示すグラフ、第5図はエチレンジアミン添加
浴と無添加浴におけるα,α′−ジピリジル添加量
と析出速度との関係を示すグラフである。
Figure 1 shows the fritted film obtained from the bath of the present invention.
A graph showing the changes in elongation and tensile strength after heat treatment at 160℃ for a predetermined time. Figure 2 shows the changes in elongation and tensile strength after heat treatment at 160℃ for a predetermined time on a damped film obtained from a comparison bath. The graph shown in FIG.
Figure 4 is a graph showing the elongation and tensile strength after heat treatment for 3 hours. Figure 4 is a graph showing the elongation and tensile strength after heat treatment of the tamped films obtained from the comparative baths at various temperatures for 3 hours. Figure 5 is a graph showing the elongation and tensile strength after heat treatment for 3 hours at various temperatures. 2 is a graph showing the relationship between the amount of α,α'-dipyridyl added and the precipitation rate in a bath with and without ethylenediamine.

Claims (1)

【特許請求の範囲】[Claims] 1 銅イオンと、銅イオンを錯化する錯化剤とし
て銅イオンと等モル以上の量のエチレンジアミン
テトラ酢酸又はその塩と、ホルムアルデヒド還元
剤と、エチレンジアミンと、α,α′−ジピリジル
とを含有してなることを特徴とする化学銅めつき
浴。
1 Contains copper ions, ethylenediaminetetraacetic acid or its salt in an amount equal to or more than the equimolar amount of copper ions, a formaldehyde reducing agent, ethylenediamine, and α,α′-dipyridyl as a complexing agent for copper ions. A chemical copper plating bath that is characterized by
JP21099684A 1984-10-08 1984-10-08 chemical copper plating bath Granted JPS6187876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21099684A JPS6187876A (en) 1984-10-08 1984-10-08 chemical copper plating bath

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21099684A JPS6187876A (en) 1984-10-08 1984-10-08 chemical copper plating bath

Publications (2)

Publication Number Publication Date
JPS6187876A JPS6187876A (en) 1986-05-06
JPH0323634B2 true JPH0323634B2 (en) 1991-03-29

Family

ID=16598597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21099684A Granted JPS6187876A (en) 1984-10-08 1984-10-08 chemical copper plating bath

Country Status (1)

Country Link
JP (1) JPS6187876A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610666B2 (en) * 1973-05-15 1981-03-10

Also Published As

Publication number Publication date
JPS6187876A (en) 1986-05-06

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