JPH0326117B2 - - Google Patents
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- Publication number
- JPH0326117B2 JPH0326117B2 JP60187282A JP18728285A JPH0326117B2 JP H0326117 B2 JPH0326117 B2 JP H0326117B2 JP 60187282 A JP60187282 A JP 60187282A JP 18728285 A JP18728285 A JP 18728285A JP H0326117 B2 JPH0326117 B2 JP H0326117B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- substrate
- speed air
- duct
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Cleaning In General (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はプリント基板等の製造ラインに設置
する基板清掃装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a board cleaning device installed in a production line for printed circuit boards and the like.
プリント基板製造ラインで印刷工程のところで
基板上に塵埃があつて、スクリーン印刷膜に塵埃
が付着すると、凡ての製品に塵埃を一しよに印刷
してしまい、プリント配線間の絶縁不良が起き、
不良品が多く発生し歩留りが悪くなる。
If dust gets on the board during the printing process in the printed circuit board manufacturing line and dust adheres to the screen printing film, the dust will be printed all over the product, causing poor insulation between printed wiring. ,
Many defective products occur, resulting in poor yield.
そこで基板上の塵埃を除く必要が生ずる。従来
のやり方で簡単なものでは第4図に示す如く、粘
着テープをローラ状にした粘着剤付ローラ50を
基板10上に圧接して基板10上の塵埃52を除
去しようとするものがある。図で51は基板10
の送りローラ、矢印Rは基板の移動方向、矢印u
は各ローラの回転方向を示している。この方法で
は初めは効果があるが、繰返し使用されている
と、すぐに粘着性が失われ、逆に基板上へ塵埃を
付着させることになり、ローラ50の交換を頻繁
に行なわなければならず、保守に難点があつた。 Therefore, it becomes necessary to remove dust on the substrate. A simple conventional method, as shown in FIG. 4, involves pressing an adhesive roller 50 made of adhesive tape onto the substrate 10 to remove dust 52 on the substrate 10. In the figure, 51 is the substrate 10
, the arrow R is the direction of board movement, and the arrow U is the feed roller.
indicates the rotation direction of each roller. This method is effective at first, but when used repeatedly, it quickly loses its adhesion and conversely causes dust to adhere to the substrate, requiring frequent replacement of the rollers 50. , there were difficulties in maintenance.
次に第5図は従来の技術の別な装置60の側断
面図、第6図は第5図に示す装置をX方向からみ
た端面説明図であつて、Rは基板10の進入方
向、Dは出口方向であり、第5図は第6図の上半
分の基板の清掃部分を示すY−Y方向矢視図に相
当する。 Next, FIG. 5 is a side sectional view of another conventional device 60, and FIG. 6 is an explanatory end view of the device shown in FIG. is the exit direction, and FIG. 5 corresponds to the Y-Y direction arrow view showing the cleaning portion of the substrate in the upper half of FIG. 6.
図で61は外板ケーシング、62は除電及び剥
離用ブラシ、63,…は基板送りローラ、64は
イオン発生装置であつて、針状電極よりなり、イ
オンを発生させて基板10の表面にイオン風を当
て基板表面の静電力で付着している塵埃を中和さ
せ、剥離しやすい状態にして除電及び剥離用ブラ
シ62にて塵埃を剥離させ、パンカールーバ型吹
出ノズル68から矢印aで示す如く清浄空気を吹
き出し、乱流空間に塵埃を浮遊させ、その空気は
矢印a′で示す如くプレフイルタ67で大きい塵埃
をとり、送風機65によつて、HEPAフイルタ
66を経て再び循還させる。第5図で点線で示す
ルーバ68は反対側にあるルーバを示している。
図に示す例では基板の移動空間を仕切パネル7
0,71によつて順次A、B、Cの3室に分け、
下流側に向うに従つて空間の清浄度を上げると共
に、各室においても、イオン発生装置64によつ
て、くりかえし基板表面にイオン風を当て塵埃の
剥離及び基板表面の静電気の除電を行ない、基板
表面を清掃する。尚68はローラ、ブラシの駆動
装置部を示す。 In the figure, 61 is an outer plate casing, 62 is a brush for static elimination and peeling, 63, . Air is applied to neutralize the adhering dust by electrostatic force on the surface of the substrate, making it easy to peel off, and removing the dust with a static eliminating and peeling brush 62, and cleaning from a panker louver type blowing nozzle 68 as shown by arrow a. Air is blown out to suspend dust in the turbulent space, large dust is removed by a pre-filter 67 as shown by arrow a', and the air is circulated again via a HEPA filter 66 by a blower 65. The louver 68 shown in dotted lines in FIG. 5 indicates the louver on the opposite side.
In the example shown in the figure, the board movement space is divided by a partition panel 7.
Divide into 3 rooms A, B, C sequentially by 0,71,
The cleanliness of the space increases as you move toward the downstream side, and in each room, the ion generator 64 repeatedly applies ion wind to the substrate surface to remove dust and eliminate static electricity on the substrate surface. Clean surfaces. Reference numeral 68 indicates a drive unit for the rollers and brushes.
このような従来の装置では次のような欠点があ
つた。 Such conventional devices have the following drawbacks.
(1) 基板表面に静電気力で付着している塵埃には
有効であるが、水分、油分を持つ粘着性の強い
塵埃は清掃できない。(1) Although it is effective for cleaning dust that adheres to the substrate surface due to electrostatic force, it cannot clean sticky dust that contains moisture and oil.
(2) 空間が乱流域のため再付着が起き易い。(2) Because the space is a turbulent region, reattachment is likely to occur.
(3) 基板の移動方向のコンベア機長が長くなり、
大きな設置スペースを必要とする。(3) The length of the conveyor in the direction of substrate movement becomes longer.
Requires large installation space.
この発明においてはノズルから吹き出す高速清
浄気流で塵埃を吹きとばし、その際汚染されてい
る外気が侵入しないようにその周辺に微風速の清
浄空気を吹き出すようにし、プリント基板製造ラ
インにおける印刷前の工程において、洗浄乾燥工
程でとれなかつた塵埃及び再付着した塵埃を少な
いスペースで完全にとり除き、さらに再付着させ
ないで印刷工程へ供給し、基板の製品の品質向上
及び歩留りの向上を図つている。
In this invention, dust is blown away by a high-speed clean air stream blown out from a nozzle, and clean air is blown out at a slight speed around the nozzle to prevent contaminated outside air from entering. In this method, the dust that cannot be removed in the cleaning and drying process and the dust that has re-adhered are completely removed in a small space, and the dust is supplied to the printing process without re-adhering, thereby improving the quality and yield of substrate products.
第1図、第2図、第3図はこの発明の一実施例
40を示し、第1図は側方からみた説明図、第2図
ば第1図のY−Y方向矢視図、第3図は第2図の
上半分の基板の洗浄と送り部分の拡大図である。
Figures 1, 2, and 3 are examples of this invention.
40, Figure 1 is an explanatory view seen from the side, Figure 2 is a Y-Y direction arrow view of Figure 1, and Figure 3 is an enlarged view of the upper half of Figure 2, cleaning and feeding the substrate. It is a diagram.
図において41はケーシング筐体、42は基板
10が入つて来たことを検知するビームスイツ
チ、43は筐体移動用キヤスター、44はレベル
アジヤスター、45は操作盤、配電盤等を示す。
Rは基板の移動方向を示している。基板10がケ
ーシング41に入つてくると、ビームスイツチ4
2が検知し、可変速モータ46が作動し、清掃ロ
ーラ11及び除電及び送りローラ15,…を矢印
uで示す方向に駆動する。16はローラ15の軸
を示す。12は清掃ローラ11の軸、13は軸の
まわりのスポンジ状ゴム質部分、14は外周の不
織布部分を示す。この清掃ローラ11は送りロー
ラ15の約1.5倍の円周接線速度で回転し、基板
の速度の相対速度をもち、基板表面をこすり基板
表面の塵埃を剥離させる。この清掃ローラの軸1
2のまわりは前述の如く発泡したスポンジ状の弾
力あるゴム質で囲まれ、外周は不織布であるから
やわらかく基板をこすり基板にキズをつけること
はない。 In the figure, 41 is a casing housing, 42 is a beam switch that detects the arrival of the board 10, 43 is a caster for moving the housing, 44 is a level adjuster, and 45 is an operation panel, a power distribution board, etc.
R indicates the direction of movement of the substrate. When the board 10 enters the casing 41, the beam switch 4
2 is detected, the variable speed motor 46 is activated, and drives the cleaning roller 11 and the neutralizing and feeding rollers 15, . . . in the direction shown by the arrow u. 16 indicates the axis of the roller 15. 12 is the shaft of the cleaning roller 11, 13 is a spongy rubbery part around the shaft, and 14 is a nonwoven fabric part on the outer periphery. The cleaning roller 11 rotates at a circumferential tangential speed approximately 1.5 times that of the feed roller 15, has a relative speed to the speed of the substrate, and scrapes the surface of the substrate to remove dust from the surface of the substrate. Axis 1 of this cleaning roller
2 is surrounded by a foamed sponge-like elastic rubber material as described above, and the outer periphery is made of non-woven fabric, so it rubs the substrate softly and does not scratch the substrate.
そして基板10の進行方向のこの清掃ロール1
1より前方に高速吹き出しノズル1が約45゜後方
に傾いて設けられ、約80m/secの高速気流が基
板表面に吹き付けられ、基板上の塵埃を吹きとば
し後方に逃げる。(尚第1図〜第3図に示す実施
例では基板の片面のみを清掃する装置の例が示さ
れている。)この高速気流はターボブロワー30
からダクト31を経て矢印a1で示す如く上方のプ
レナムチヤンバー5に入り、プレフイルター4、
HEPAフイルター3を介してプレナムダクト2
に入り、ノズル1から吹き出される。30′はタ
ーボブロツク30の駆動モータを示す。 This cleaning roll 1 in the advancing direction of the substrate 10
A high-speed blowout nozzle 1 is installed in front of the nozzle 1 tilted backward at about 45 degrees, and a high-speed airflow of about 80 m/sec is blown onto the surface of the substrate, blowing away dust on the substrate and escaping to the rear. (The embodiments shown in FIGS. 1 to 3 show examples of devices that clean only one side of the substrate.) This high-speed airflow is carried out by a turbo blower 30.
From there, it passes through the duct 31 and enters the upper plenum chamber 5 as shown by arrow a1 , and then enters the prefilter 4,
Plenum duct 2 through HEPA filter 3
and is blown out from nozzle 1. 30' indicates a drive motor for the turbo block 30.
次に汚染外気の侵入を防ぐために、シロツコフ
アン32からの微風速空気はダクト33を経て矢
印a2で示す如く上方のプレナムチヤンバー5′に
入り、プレフイルター4′、HEPAフイルター
3′を介して吸気ダクト21及び23に入り、
夫々有孔板22,24から約0.5m/secの微風速
の清浄空気が吹き出される。32′はシロツコフ
アンの駆動モータ、又6はプレナムチヤンバー
5,5′間の仕切りである。 Next, in order to prevent contaminated outside air from entering, the air from the Sirotskov fan 32 passes through a duct 33, enters the upper plenum chamber 5' as shown by arrow a2 , and passes through a prefilter 4' and a HEPA filter 3'. enters the intake ducts 21 and 23;
Clean air is blown out from the perforated plates 22 and 24 at a slight wind speed of about 0.5 m/sec. 32' is a drive motor for the Sirotskov fan, and 6 is a partition between the plenum chambers 5, 5'.
これらの高速及び微風速で吹き出された空気の
一部は吸引ダクト25又は28に吸われる。矢印
fで示す如く吸引ダクト25に吸込口26から吸
引された空気は左右のダクトホース34,35に
よつて、又吸引ダクト28に吸引孔29から吸引
された空気はダクトホース36,37によつて、
夫々集合チヤンバー38に導かれ、シロツコフア
ン32に戻る。又空気の残部は矢印fで示す如く
有孔板27から下方のケーシング41内にゆきタ
ーボブロワ30にゆく。ケーシング41には外気
と連通する有孔板部分47を設け、冷却も兼ねて
外気を取り入れている。(尚基板は一定間隔で送
られてくるので、ノズルの下に丁度基板がない時
は、高速空気はそのまゝ下部の吸引ダクト28に
吸いこまれる。)
清掃ローラ11は中実でコンベア巾全体に亘つ
ているが、除電及び送りローラ15,…は9mm巾
程度で弾力のあるゴムでできており、軸方向に約
70mmのピツチで設けられる。5〜10KΩ程度の電
気抵抗の導電性であるから基板上の静電気を十分
アースできる。高速気流でこのローラをも清掃で
きる。又凡て導電性であるので、除電する機会が
多く静電気を逃がすのに好都合である。除電及び
送りローラ、清掃ローラは十分弾力があるので、
基板の厚みが変化しても0.5〜2mm位の変化は十
分カバーでき、又ローラも70mmピツチで並んでい
るので、150mm平方〜610mm平方位まで基板の大き
さが変化してもカバーできる。 A part of the air blown out at high speed and low wind speed is sucked into the suction duct 25 or 28. As shown by the arrow f, the air sucked into the suction duct 25 from the suction port 26 is passed through the left and right duct hoses 34 and 35, and the air sucked into the suction duct 28 from the suction hole 29 is passed through the duct hoses 36 and 37. Then,
They are each guided to a gathering chamber 38 and return to the Sirotskov fan 32. The remainder of the air flows from the perforated plate 27 into the lower casing 41 and to the turbo blower 30 as shown by arrow f. The casing 41 is provided with a perforated plate portion 47 that communicates with the outside air, and the outside air is taken in for cooling as well. (Since the substrates are sent at regular intervals, if there is no substrate under the nozzle, the high-speed air is directly sucked into the suction duct 28 at the bottom.) The cleaning roller 11 is solid and covers the entire width of the conveyor. However, the static neutralization and feed rollers 15,... are made of elastic rubber with a width of about 9 mm, and are approximately 9 mm wide in the axial direction.
Installed with a pitch of 70mm. Since it is conductive with an electrical resistance of about 5 to 10KΩ, it can sufficiently ground static electricity on the board. This roller can also be cleaned with high-speed airflow. Furthermore, since they are all conductive, there are many opportunities for static electricity to be eliminated, which is convenient for dissipating static electricity. The static eliminating roller, feed roller, and cleaning roller have sufficient elasticity, so
Even if the thickness of the board changes, it can sufficiently cover changes of about 0.5 to 2 mm, and since the rollers are arranged at a pitch of 70 mm, it can cover even if the size of the board changes from 150 mm square to about 610 mm square.
基板がある一定間隔(例えば6秒間隔)で送ら
れてこない場合、例えば5分間程度の他のライン
の故障等で基板が送られてこない場合、オフデイ
レータイマーを組みこむことにより、例えば10秒
以上送られてこない場合は自動運転休止とするよ
うにすることにより、自動運転も可能である。清
掃ローラは長時間使用すると汚れてくるので、ワ
ンタツチで交換できるようにすることは勿論であ
る。 If the board is not sent at a certain interval (for example, every 6 seconds), or if the board is not sent due to a failure in another line for about 5 minutes, for example, by incorporating an off-delay timer, it is possible to Automatic operation is also possible by suspending automatic operation if no data is sent for more than a second. Since the cleaning roller becomes dirty when used for a long time, it is of course possible to replace it with one touch.
第7図はこの発明を基板10の両面清掃に応用
した装道80の概念的説明図を示す。81はケー
シング、90はビームスイツチ、11は清掃ロー
ル、15は送りロールを示し、Rは基板の移動
向、Uはロールの回転方向である。高速空気はプ
レナムダクト84,84から高速吹き出しノズル
85,85から吹き出す。微風速空気は給気ダク
ト82,86から有孔板83,87を経て吹き出
し、空気は吸引ダクト88に孔89から吸引され
る。このように上下対称に構成すればよい。 FIG. 7 shows a conceptual explanatory diagram of a path 80 in which the present invention is applied to cleaning both sides of the substrate 10. 81 is a casing, 90 is a beam switch, 11 is a cleaning roll, 15 is a feed roll, R is the movement direction of the substrate, and U is the rotation direction of the roll. High-speed air is blown out from plenum ducts 84, 84 through high-speed blowout nozzles 85, 85. The light air is blown out from the air supply ducts 82 and 86 through the perforated plates 83 and 87, and the air is sucked into the suction duct 88 through the holes 89. In this way, it may be configured vertically symmetrically.
(1) 湿気のある粘着力の強い塵埃をも完全清掃で
きる。
(1) Can completely clean even moist and sticky dust.
(2) 剥離した塵埃が基板に再付着しない。(2) Removed dust will not re-adhere to the board.
(3) コンベア長さが短くでき、(従来のものの約
1/2)省スペース化になる。(3) The length of the conveyor can be shortened (approximately 1/2 of the conventional one), saving space.
(4) ローラの保守期間が大巾に伸びる。(4) The maintenance period for rollers will be significantly extended.
第1図はこの発明の実施例の側面説明図、第2
図は第1図のY−Y矢視図、第3図は第2図の部
分拡大図、第4図は従来の例の説明図、第5図は
別な従来の例の説明図、第6図は第5図のX方向
矢視図、第7図はこの発明の第2実施例の概念説
明図である。
符号の説明、1……高速吹き出しノズル、2…
…プレナムダクト、3……HEPAフイルター、
4……プレフイルター、5……プレナムチヤンバ
ー、6……仕切り、11……清掃ローラ、12…
…軸、13……ゴム部分、14……不織布、15
……ローラ、16……軸、21……給気ダクト、
22……有孔板、23……給気ダクト、24……
有孔板、25……吸引ダクト、26……吸引孔、
27……有孔板、28……吸引ダクト、29……
孔、30……ターボブロワ、30′……モータ、
31……ダクト、32……シロツコフアン、3
2′……モータ、33……ダクト、34,35,
36,37……ダクトホース、38……集合チヤ
ンバー、41……ケーシング筐体、42……ビー
ムスイツチ、43……キヤスター、44……レベ
ルアジヤスター、45……配電盤、操作盤、46
……モータ、47……外気取入有孔板、50……
粘着剤付ローラ、50……送りローラ、61……
ケーシング、62……ブラシ、63……送りロー
ラ、64……イオン発生装置、65……送風機、
66……HEPAフイルタ、67……プレフイル
タ、68……吹き出しノズル、69……ローラ駆
動装置、70,71……仕切パネル、81……ケ
ーシング、82……給気ダクト、83……有孔
板、84……プレナムダクト、85……高速吹き
出しノズル、86……給気ダクト、87……有孔
板、88……吸気ダクト、89……吸引孔、90
……ビームスイツチ。
Fig. 1 is a side explanatory view of an embodiment of this invention;
3 is a partially enlarged view of FIG. 2, FIG. 4 is an explanatory diagram of a conventional example, FIG. 5 is an explanatory diagram of another conventional example, 6 is a view taken in the X direction of FIG. 5, and FIG. 7 is a conceptual explanatory diagram of a second embodiment of the present invention. Explanation of symbols, 1...High speed blowing nozzle, 2...
...Plenum duct, 3...HEPA filter,
4... Prefilter, 5... Plenum chamber, 6... Partition, 11... Cleaning roller, 12...
...Shaft, 13...Rubber part, 14...Nonwoven fabric, 15
...roller, 16...shaft, 21...air supply duct,
22... Perforated plate, 23... Air supply duct, 24...
Perforated plate, 25... Suction duct, 26... Suction hole,
27... Perforated plate, 28... Suction duct, 29...
Hole, 30...turbo blower, 30'...motor,
31...Duct, 32...Shirotskovan, 3
2'... Motor, 33... Duct, 34, 35,
36, 37... Duct hose, 38... Collective chamber, 41... Casing housing, 42... Beam switch, 43... Caster, 44... Level adjuster, 45... Switchboard, operation panel, 46
...Motor, 47...Outside air intake perforated plate, 50...
Adhesive roller, 50...Feed roller, 61...
Casing, 62...Brush, 63...Feed roller, 64...Ion generator, 65...Blower,
66...HEPA filter, 67...Prefilter, 68...Blowout nozzle, 69...Roller drive device, 70, 71...Partition panel, 81...Casing, 82...Air supply duct, 83...Perforated plate , 84...Plenum duct, 85...High speed blowing nozzle, 86...Air supply duct, 87...Perforated plate, 88...Intake duct, 89...Suction hole, 90
...beam switch.
Claims (1)
掃装置において、高速空気用送風機に高性能フイ
ルターを介して連通し、基板移動方向に対して斜
め後方吹出角度をもつ高速空気吹出ノズルと、高
速空気吹出部の周辺にあつて、低速空気用送風機
に高性能フイルターを介して連通している低速空
気吹出用の有孔板と、吹き出された空気の一部を
上記低速空気用送風機に戻す吸引ダクト及びダク
トホースと、残りの空気を上記高速空気用送風機
に戻すための吸込用有孔板とを備えていることを
特徴とする基板清掃装置。1. A board cleaning device installed in a manufacturing line for printed circuit boards, etc., includes a high-speed air blowing nozzle that communicates with a high-speed air blower through a high-performance filter and has a blowing angle diagonally backward with respect to the board movement direction, and a high-speed air blowing section. A perforated plate for blowing out low-speed air that communicates with the blower for low-speed air via a high-performance filter, and a suction duct and duct that return a part of the blown air to the blower for low-speed air. A substrate cleaning device comprising a hose and a suction perforated plate for returning remaining air to the high-speed air blower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18728285A JPS6249984A (en) | 1985-08-28 | 1985-08-28 | Board cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18728285A JPS6249984A (en) | 1985-08-28 | 1985-08-28 | Board cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6249984A JPS6249984A (en) | 1987-03-04 |
| JPH0326117B2 true JPH0326117B2 (en) | 1991-04-09 |
Family
ID=16203267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18728285A Granted JPS6249984A (en) | 1985-08-28 | 1985-08-28 | Board cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6249984A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009200286A (en) * | 2008-02-22 | 2009-09-03 | Shinko Electric Ind Co Ltd | Forming method of insulating layer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106638U (en) * | 1980-12-23 | 1982-07-01 | ||
| JPS6071836A (en) * | 1983-09-29 | 1985-04-23 | Hitachi Plant Eng & Constr Co Ltd | Air shower device |
-
1985
- 1985-08-28 JP JP18728285A patent/JPS6249984A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6249984A (en) | 1987-03-04 |
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