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JPH0327509B2 - - Google Patents
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JPH0327509B2 - - Google Patents

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Publication number
JPH0327509B2
JPH0327509B2 JP60252028A JP25202885A JPH0327509B2 JP H0327509 B2 JPH0327509 B2 JP H0327509B2 JP 60252028 A JP60252028 A JP 60252028A JP 25202885 A JP25202885 A JP 25202885A JP H0327509 B2 JPH0327509 B2 JP H0327509B2
Authority
JP
Japan
Prior art keywords
ceo
composition
firing temperature
porcelain
cao
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60252028A
Other languages
Japanese (ja)
Other versions
JPS62113759A (en
Inventor
Migiwa Ando
Yukiaki Ito
Fumio Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP60252028A priority Critical patent/JPS62113759A/en
Publication of JPS62113759A publication Critical patent/JPS62113759A/en
Publication of JPH0327509B2 publication Critical patent/JPH0327509B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】[Detailed description of the invention]

産業上の利用分野 本発明はマイクロ波誘電体共振器、マイクロ波
集積回路基板、パツケージ、マイクロ波導波線路
等の電気通信分野及びマイクロ波透過窓の如き高
エネルギ物理分野において使用されるアルミナ磁
器組成物に関する。 従来の技術 近年通信網の発達に伴ない、使用周波数領域が
拡大し、高周波に及んでいる。これと関連して誘
電体磁器は高周波領域に於て、誘電体共振器やマ
イクロ波集積回路基板、各種マイクロ波回路のイ
ンピーダンス整合等に応用されている。 ところでアルミナ磁器は高周波Q値が7000前後
で高いが共振周波数の温度係数τが大きく、通信
分野で望まれている|τ|≦30ppm/℃を到底満
足することはできず、約−60ppm/℃であるの
で、誘電体材料としては使用が困難であつた。 この問題を解決するためにアルミナとは逆の温
度係数を有するチタン酸カルシウムを配合し焼結
したアルミナ磁器(特願昭59−32113、特願60−
189054)及びチタン酸ストロンチウムを配合し焼
結したアルミナ磁器(特願昭59−151589)が提案
されている。 発明が解決しようとする問題点 しかしながら上記提案のアルミナ磁器材料は、
温度係数(τ)の焼成温度依存性が非常に高く焼
成温度の僅かな変動によりτが大きく変化する。 そのため所定の温度係数を有するアルミナ磁器
を安定に製造する上で大きな障害となつていたの
でこの点を解決することが望まれていた。 問題点を解決するための手段 本発明は上記の問題点を解決するためになされ
たもので、 (A) Al2O3,CaO及びTiO2からなる三成分系磁器
組成の配合比がモル分率で表わした三成分組成
図(第1図)において、下記の各点を結ぶ直線
で囲まれた範囲内にあること。 Al2O3 CaO TiO2 点1 98 1 1 点2 96 2.5 1.5 点3 94 4 2 点4 94 3 3 点5 94 2 4 点6 96 1.5 2.5 (単位モル%) (B) Al2O3(モル%)に関連してCeO2(外重量%)
が二成分系グラフ(第2図)において、下記の
各点を結ぶ直線で囲まれた領域内にあること。
Industrial Application Field The present invention is an alumina porcelain composition used in the telecommunications field such as microwave dielectric resonators, microwave integrated circuit boards, packages, microwave waveguides, and high energy physics fields such as microwave transmission windows. relating to things. BACKGROUND ART With the development of communication networks in recent years, the frequency range in use has expanded to include high frequencies. In connection with this, dielectric ceramics are applied to dielectric resonators, microwave integrated circuit boards, impedance matching of various microwave circuits, etc. in the high frequency region. By the way, alumina porcelain has a high high-frequency Q value of around 7000, but the temperature coefficient τ of the resonance frequency is large, and it is impossible to satisfy |τ|≦30ppm/℃, which is desired in the communication field, and is approximately -60ppm/℃. Therefore, it was difficult to use it as a dielectric material. To solve this problem, alumina porcelain was created by blending and sintering calcium titanate, which has a temperature coefficient opposite to that of alumina.
189054) and alumina porcelain blended with strontium titanate and sintered (Japanese Patent Application No. 59-151589) have been proposed. Problems to be solved by the invention However, the alumina porcelain material proposed above has
The temperature coefficient (τ) has a very high dependence on the firing temperature, and a slight change in the firing temperature causes a large change in τ. This has been a major obstacle in the stable production of alumina porcelain having a predetermined temperature coefficient, and it has been desired to solve this problem. Means for Solving the Problems The present invention has been made to solve the above problems, and includes the following: (A) The compounding ratio of the ternary porcelain composition consisting of Al 2 O 3 , CaO and TiO 2 is In the ternary composition diagram (Figure 1) expressed as a ratio, it must be within the range surrounded by the straight line connecting each point below. Al 2 O 3 CaO TiO 2 points 1 98 1 1 point 2 96 2.5 1.5 points 3 94 4 2 points 4 94 3 3 points 5 94 2 4 points 6 96 1.5 2.5 (unit mol%) (B) Al 2 O 3 ( CeO2 (mol%) in relation to (external weight%)
is within the area surrounded by straight lines connecting the points below in the two-component graph (Figure 2).

【表】 の2条件を満足することを特徴とするアルミナ磁
器組成物である。 ここで第1図におけるAl2O3,CaO,TiO2の各
成分について説明する。 Al2O3−CaO−TiO2の組成は第1図において点
1よりAl2O3ががリツチ側になるとQ値は高くな
るがτが−30ppm/℃未満となり、線分3−4−
5よりもプアー側になると焼結不完全であつたり
Q値の4800未満となつたり、τが+30ppm/℃を
超えたりするのでいずれも実用に適さない。 又、線分1−2−3まは線分5−6−1よりも
CaOリツチまたはTiO2リツチ側ではいずれもτ
の絶対値が30ppm/℃より大きくなり実用に適さ
ない。 従つて本発明におけるAl2O3−CaO−TiO2の組
成は第1図の点1,2,3,4,5,6で囲まれ
た三角形の範囲が焼結体の共振周波数の温度係数
(τ)や、Q値、高周波での誘電体損失も少なく
好ましい範囲ではあるが、これのみでは共振周波
数の温度係数(τ)の焼成温度依存性を解決しな
ければ実用的なものを得ることができないことは
既述のとおりである。 本発明ではこの点を改良するために前記組成物
に対しCeO2を第2図に示す如き所定量を加える
ことにより問題点を解決することができたもので
ある。 即ち本発明ではAl2O3モル%を横軸にとりCeO2
の外重量%を縦軸にとつた場合、下表のの点21,
22,23及び24で囲まれた範囲内にあることを要件
とするものであり、Al2O3のモル%は第1図にお
ける94%〜98%(モル分率)の範囲内にある。こ
れに対するCeO2の外重量%は22−23のラインよ
り下にあるときはCeO2の量が不足し依然として、
共振周波数の温度特性(τ)は焼成温度に依存性
が強く、実用的なものとはならない。又、21〜24
のラインより上にあるときはCeO2の量は過剰と
なり、τの焼成温度依存性は良くなる反面τがマ
イナスへ移行する欠点を生ずる。 第3図はCeO2を添加しない従来のAl2O3−CaO
−TiO2系の磁器組成物の焼成温度とQ、τの関
係グラフであり、第4図は本発明のAl2O3−CaO
−TiO2−CeO2系の磁器組成物の焼成温度とQ、
τの関係グラフである。 これによれば従来の磁器組成物は、Q値がある
焼成温度をピークとし、低下し、τは焼成温度に
比例して上昇するが、両者を満足するものは結局
ある点の焼成温度に限られ、特性も不十分であ
る。これに対して本発明によるものはある点以上
の焼成温度ではQ値もτも高位でフラツトなの
で、誘電材料として好ましいものが得られやす
い。 実施例 本発明による磁器組成物と比較例による磁器組
成物とを以下に示す要領により製作した。 アルミナ(市販品 純度99.995%) 500 二酸化チタン(試薬特級) 所定量 炭酸カルシウム( 〃 ) 〃 酸化セリウム( 〃 ) 〃 脱イオン水 400ml ポリビニルアルコール 10g 以上を20mmφのアルミナ球石(純度99.99%)
1.0Kgと共にポリエチレン製ボールミルへ入れ50
時間(84RPM)混合する。 得られたスラリー冷凍乾燥した後、32メツシユ
の篩を通し素地粉末とした。 この素地粉末を用いて圧力1500Kg/cm2でサイズ
14.5φmm×9.5Lmmのテストピースを作成しこれを
所定の温度で焼成した。焼成品はサイズがほゞ
11.7φmm×7.6mmLとなつた。 次にこれをサイズ11φmm×7Lmmに鏡面加工し、
クロロセンと脱イオン水でそれぞれ10分間ずつ超
音波洗滌した後自然乾燥し、ついでシリカゲルを
入れたデシケータ中で15時間乾燥し供試試料とし
た。 測定条件 方法:誘電体円柱共振法 装置:横河ヒユーレツトパツカード(株)製8408B
ネツトワークアナライザ 周波数:7.0〜8.0GHz なお共振周波数の温度係数τは+20℃〜+85℃
の温度範囲で比誘電率の温度変化率τと熱膨張係
数αとを測定し、次式に基いて算出した値であ
る。 τ=−1/2τ−α なお本発明による実施例の磁器組成物は、第1
図の点1,2,3,4,5,6で囲まれた三角形
の範囲内にありかつ第2図の点21、22、23、24で
囲まれた範囲内にあるものの例であるが、比較例
の磁器組成物は第1図で前記範囲を外れ、かつ点
8,9,10,11,12,13で囲まれたもので、
CeO2を添加しないものか第2図の範囲を外れて
CeO2を添加したものとした。 具体的な組成と特性は以下に表示するとおりで
ある。但し、特性値は=10GHzで測定し、好ま
しい特性は以下の通りである。 誘電率10前後 共振周波数の温度係数|τ|30ppm/℃ 無負荷Q>4800 △τ=1の焼成温度範囲△τ℃30 である。 又備考欄の内、外は本発明の範囲の内、外を示
す。
This is an alumina porcelain composition characterized by satisfying the two conditions shown in [Table]. Here, each component of Al 2 O 3 , CaO, and TiO 2 in FIG. 1 will be explained. As for the composition of Al 2 O 3 -CaO-TiO 2 in Figure 1, as Al 2 O 3 becomes richer than point 1, the Q value increases, but τ becomes less than -30 ppm/°C, and line segment 3-4-
If it is poorer than 5, sintering is incomplete, the Q value is less than 4800, and τ exceeds +30 ppm/°C, so none of these are suitable for practical use. Also, line segment 1-2-3 or line segment 5-6-1
On the CaO rich or TiO 2 rich side, both τ
The absolute value of is greater than 30 ppm/℃, making it unsuitable for practical use. Therefore, in the composition of Al 2 O 3 -CaO-TiO 2 in the present invention, the triangular range surrounded by points 1, 2, 3, 4, 5, and 6 in Fig. 1 corresponds to the temperature coefficient of the resonant frequency of the sintered body. (τ), Q value, and dielectric loss at high frequency are all in a preferable range, but with this alone, it is difficult to obtain a practical product unless the firing temperature dependence of the temperature coefficient (τ) of the resonant frequency is resolved. As mentioned above, this is not possible. In the present invention, in order to improve this point, the problem can be solved by adding a predetermined amount of CeO 2 as shown in FIG. 2 to the composition. That is, in the present invention, 3 mol% of Al 2 O is taken as the horizontal axis and CeO 2
If the vertical axis is the external weight %, then point 21 in the table below,
22, 23, and 24, and the mole percent of Al 2 O 3 is within the range of 94% to 98% (mole fraction) in FIG. In contrast, when the external weight percent of CeO 2 is below the 22-23 line, the amount of CeO 2 is insufficient and still
The temperature characteristic (τ) of the resonance frequency is strongly dependent on the firing temperature and is not practical. Also, 21-24
When it is above the line, the amount of CeO 2 becomes excessive, and while the dependence of τ on the firing temperature improves, it has the disadvantage that τ shifts to a negative value. Figure 3 shows conventional Al 2 O 3 −CaO without adding CeO 2
FIG. 4 is a graph showing the relationship between the firing temperature and Q and τ of the -TiO 2 -based porcelain composition.
- Firing temperature and Q of TiO 2 - CeO 2 based porcelain composition,
This is a relationship graph of τ. According to this, in conventional porcelain compositions, the Q value peaks at a certain firing temperature and decreases, and the τ increases in proportion to the firing temperature, but those that satisfy both are ultimately limited to a certain firing temperature. The characteristics are insufficient. On the other hand, in the case of the material according to the present invention, both the Q value and τ are high and flat at a firing temperature above a certain point, so that it is easy to obtain a material preferable as a dielectric material. Examples A ceramic composition according to the present invention and a ceramic composition according to a comparative example were manufactured according to the procedure shown below. Alumina (commercially available, purity 99.995%) 500 Titanium dioxide (special grade reagent) Predetermined amount Calcium carbonate (〃)〃 Cerium oxide (〃)〃 Deionized water 400ml Polyvinyl alcohol 10g More than 20mmφ alumina coccule (purity 99.99%)
Put it into a polyethylene ball mill with 1.0Kg and 50
Mixing time (84RPM). The obtained slurry was freeze-dried and then passed through a 32-mesh sieve to obtain a base powder. Using this base powder, the size is measured at a pressure of 1500Kg/ cm2.
A test piece of 14.5φmm x 9.5Lmm was prepared and fired at a predetermined temperature. The size of the fired product is approximately
It became 11.7φmm x 7.6mmL. Next, mirror-finish this to size 11φmm x 7Lmm,
After ultrasonic washing with chlorocene and deionized water for 10 minutes each, the sample was air-dried, and then dried in a desiccator containing silica gel for 15 hours to prepare a test sample. Measurement conditions Method: Dielectric cylinder resonance method Equipment: 8408B manufactured by Yokogawa Heuretsu Card Co., Ltd.
Network analyzer Frequency: 7.0 to 8.0 GHz Temperature coefficient τ of resonance frequency is +20°C to +85°C
The temperature change rate τ of the relative dielectric constant and the thermal expansion coefficient α were measured in the temperature range of , and the value was calculated based on the following equation. τ=−1/2τ−α Note that the ceramic composition of the example according to the present invention is
This is an example of what is within the triangle area surrounded by points 1, 2, 3, 4, 5, and 6 in the figure, and within the area surrounded by points 21, 22, 23, and 24 in Figure 2. , the porcelain composition of the comparative example is outside the above range in FIG. 1 and is surrounded by points 8, 9, 10, 11, 12, and 13,
Does not contain CeO 2 or is outside the range shown in Figure 2.
CeO 2 was added. The specific composition and properties are as shown below. However, the characteristic values are measured at =10 GHz, and the preferable characteristics are as follows. Dielectric constant: around 10 Temperature coefficient of resonance frequency |τ|30ppm/℃ No-load Q>4800 Firing temperature range of △τ=1: △τ℃30. Also, the inside and outside of the remarks column indicates what is within and outside the scope of the present invention.

【表】【table】

【表】【table】

【表】 発明の効果 以上の比較試験から判るように本発明による
Al2O3−CaO−TiO2−Ce2Oからなる磁器組成物
は誘電率が10内外と優れ、共振周波数の温度係数
も−30〜+30の範囲内にあり、無負荷Qも5000内
外と大きく、特に、温度係数の焼成温度依存性が
非常に低く所定の温度係数を有する磁器を安定に
製造する上で極めて有利である。
[Table] Effects of the invention As can be seen from the above comparative tests, the present invention
The porcelain composition consisting of Al 2 O 3 −CaO − TiO 2 −Ce 2 O has an excellent dielectric constant of around 10, a temperature coefficient of resonance frequency within the range of −30 to +30, and an unloaded Q of around 5000. In particular, the dependence of the temperature coefficient on the firing temperature is extremely low, which is extremely advantageous for stably producing porcelain having a predetermined temperature coefficient.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の磁器組成物の成分Al2O3
CaO,TiC2の含有量を表わす三成分系組成図で
あり、第2図は本発明の磁器組成物中CeO2
Al2O3に対する添加比率を示すグラフである。又
第3図は従来の磁器組成物の、第4図は本発明の
磁器組成物の焼成温度とQ、τの関係グラフであ
る。
FIG. 1 shows the components of the porcelain composition of the present invention, Al 2 O 3 ,
This is a ternary composition diagram showing the content of CaO and TiC 2 , and Figure 2 shows the content of CeO 2 in the porcelain composition of the present invention.
It is a graph showing the addition ratio to Al 2 O 3 . Furthermore, FIG. 3 is a graph of the relationship between the firing temperature and Q and τ of the conventional porcelain composition, and FIG. 4 is a graph of the relationship between the firing temperature and Q and τ of the porcelain composition of the present invention.

Claims (1)

【特許請求の範囲】 1 (A) Al2O3,CaO及びTiO2からなる三成分系
磁器組成の配合比がモル分率で表わした三成分
組成図において、下記の各点を結ぶ直線で囲ま
れた内にあること。 【表】 (B) Al2O3(モル%)に対するCeO2の(外重量%)
が二成分系グラフにおいて、下記の各点を結ぶ
直線で囲まれた領域内にあること。 【表】 の2条件を満足することを特徴とするアルミナ磁
器組成物。
[Claims] 1 (A) In a ternary composition diagram in which the blending ratio of a ternary porcelain composition consisting of Al 2 O 3 , CaO and TiO 2 is expressed in mole fraction, a straight line connecting each point below Being surrounded. [Table] (B) CeO 2 (external weight %) relative to Al 2 O 3 (mol %)
is within the area surrounded by the straight line connecting each point below in the two-component graph. An alumina porcelain composition characterized by satisfying the two conditions in [Table].
JP60252028A 1985-11-12 1985-11-12 Alumina ceramic composition Granted JPS62113759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60252028A JPS62113759A (en) 1985-11-12 1985-11-12 Alumina ceramic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60252028A JPS62113759A (en) 1985-11-12 1985-11-12 Alumina ceramic composition

Publications (2)

Publication Number Publication Date
JPS62113759A JPS62113759A (en) 1987-05-25
JPH0327509B2 true JPH0327509B2 (en) 1991-04-16

Family

ID=17231580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60252028A Granted JPS62113759A (en) 1985-11-12 1985-11-12 Alumina ceramic composition

Country Status (1)

Country Link
JP (1) JPS62113759A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345555A (en) * 1989-07-11 1991-02-27 Nippon Cement Co Ltd Alumina porcelain composition

Also Published As

Publication number Publication date
JPS62113759A (en) 1987-05-25

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