JPH032949B2 - - Google Patents

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a vacuum evaporation method for forming a metal thin film on the surface of an optical disk such as a laser disk (LD) or a compact disk (CD). The present invention relates to an apparatus, and in particular to a vacuum evaporation apparatus that allows disks that have been vapor-deposited to be quickly taken out from a multifaceted disk holder mounted on a turntable.

(Prior Art) Currently, recording tapes, video tapes, video disks, etc. are commercially available as information recording media, and in recent years, optical disks that can record and play back using laser light have been developed to record high-density information. It is attracting attention as a medium. Optical disks are being used not only for image and audio information but also as computer data memory media.
There is a demand for high-quality optical discs that are error-free during playback. For this reason, attention has been paid to a vacuum evaporation apparatus for uniformly forming a thin metal film that serves as a reflective film for laser light on the surface of an optical disk.

FIG. 3 shows a schematic plan view of a conventionally used vacuum evaporation apparatus.

That is, this vacuum evaporation apparatus has first and second turntables 3 on the rail 2a of the vacuum chamber 4 provided in the center of the pedestal 1 and on the rail 2b provided on the pedestal 1.
a and 3b are arranged so that they can move freely. Furthermore, in parallel to the pedestal 1 with the vacuum chamber 4 in between, attachment/detachment devices 5a and 5b for attaching and detaching disks to and from the respective disk holders provided on the turntables 3a and 3b are arranged. A plurality of disk holders 6 are supported on each of the turntables 3a and 3b so as to be rotatable (rotatable) around a support shaft 7 thereof. Each disk holder 6 has a polyhedral shape (three sides, for example) so that a plurality of disks D can be attached to the sides.

As shown in the vertical cross-sectional view of FIG. 4, the turntables 3a and 3b are ring-shaped members supported by bearings 9 and guide rollers 10 on a cart 8 running on a rail 2a, and are formed on the outer periphery of the ring-shaped members. The portion of the gear 11 that has been rotated meshes with a drive gear 13 that is rotated by a motor 12. turntable 3a,
A shaft hole 17 through which the support shaft 7 passes is formed in 3b. A rotating gear 14 is fixed to the support shaft 7, and this rotating gear 14 meshes with a holder drive gear 15 that is integrally provided on the turntables 3a and 3b. Further, a joint 16 for connecting the support shaft 7 and the disk holder 6 is provided between the rotation gear 14 of the support shaft 7 and the disk holder 6.

In a vacuum evaporation apparatus having such a configuration, while one turntable 3a is carried into the vacuum chamber 4 from the pedestal on which the desorption device 5a is placed and the evaporation work is performed, the other turntable 3a is By attaching and detaching the disk to and from the table 3b, work can be performed continuously.
That is, in the vacuum chamber 4, when the drive gear 13 inside the vacuum chamber 4 is rotated by the motor 12 provided outside, the turntable 3a, which is meshed with the drive gear 13 at the gear 11 on the outer periphery, rotates. When the turntable 3a rotates, the holder drive gear 15 integrally formed with the turntable 3a rotates.
Since the rotation gear 14 fixed to the support shaft 7 is rotated, the disk holder 6 revolves while rotating. As a result, no matter what position the holder is in,
Further, no matter which side of each holder the disks are mounted on, they will come into contact with the vapor in the vacuum chamber evenly, and a uniform vapor deposition layer will be formed on each disk.

Now, if the vapor deposition work on the disk on the turntable 3a is completed earlier than on the disk on the turntable 3a, by running the trolley 8 along the rail, the vacuum chamber 4 along with the turntable 3b can be
The disks D attached to each disk holder 6 are sequentially removed from the disk holder 6 by a disk detacher 5b arranged parallel to the side of the pedestal 1. That is, first, the disk D-1a is mounted on, for example, the first surface (pole position) on the preset reference disk holder 6a.
is removed using the attachment/detachment device 5b, and then, while rotating the turntable 3b, the mount D-1b mounted on the first surface of the adjacent disk holder 6b is taken out. While rotating the turntable 3b in this manner, the first
When the disks D-1a to D-1n on the surface are removed, when the turntable 3b rotates once, all the disks D-1a to D-1n mounted on the first surface of each disk holder 6a to 6n are removed. It is removed, and the second surface of the reference disk holder 6a comes to a position facing the disk attachment/detachment device 5b. Thereafter, by rotating the turntable 3b in the same manner, the disks D-2a to D-2n mounted on the second surface of each disk holder and the disks D-3a to D- mounted on the third surface of each disk holder are rotated. 3n was removed one by one.

(Problems to be Solved by the Invention) Incidentally, it is necessary to perform the work of taking out the disks from each disk holder in a certain order as described above. In other words, since each disk to be vapor-deposited has a number indicating the manufacturing lot etc. in advance, it is possible to take out the disks in that number order and package them or send them to the next process, or to process multiple types of disks in a single vacuum-deposition operation. When performing vapor deposition, if the disks are not removed in the order in which they are attached to the holder, problems will occur in which the numbers will be mixed up and disks of different types will be mixed together.

Therefore, in this type of vacuum evaporation equipment,
As mentioned above, the disk was always removed from the first surface of the predetermined reference disk holder 6a.

However, in the conventional vacuum evaporation apparatus, the turntables 3a and 3b are appropriately stopped after performing the evaporation work for a certain period of time, so that when the evaporation work is completed, the first surface of the reference disk holder 6a is It is not necessarily located near the attachment/detachment devices 5a, 5b. Therefore, conventionally, in order to place the first surface of the reference disk holder 6a at the disk detachment position after the completion of the vapor deposition work, the turntables 3a and 3b are revolved and the reference disk holder 6a is rotated, and the first surface of the reference disk holder 6a is rotated. It was necessary to move it to the position of the disk attachment/detachment devices 5a and 5b.

However, in this case, since a multifaceted disk holder is used, it is necessary to rotate the turntable once to make the next side of the disk holder face the attachment/detachment device as described above. The first side is the disk attachment/detachment device 5
When the first surface of the reference disk holder 6a is passed through the position facing 5a and 5b, the turntables 3a and 3b must be rotated at most by the number of surfaces of the disk holder. It was necessary to do so. Therefore, it takes a lot of time to attach and detach the disks, and the cycle time of the vapor deposition operation cannot be shortened, resulting in extremely poor work efficiency.

The bearing was proposed to solve the problems of the prior art as described above, and its purpose was to connect the first surface of the reference disk holder, which is the first disk to be attached and detached when the vapor deposition process is completed, to the disk attachment and detachment device. To provide a vacuum evaporation device capable of improving the efficiency of evaporation work by making it possible to quickly perform disk attachment/detachment work by always stopping turntables at opposing positions on the front side in the rotational direction.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the vacuum evaporation apparatus of the present invention provides a first surface of a reference disk holder to which a disk is first attached and detached upon completion of vapor deposition work. The present invention is characterized in that a turntable rotation control device is provided for stopping the turntable on the front side in the rotational direction of the turntable at a position facing the disk attachment/detachment device.

(Function) In the vacuum evaporation apparatus of the present invention having the above configuration, the first surface of the reference disk holder is rotated by the rotation control device of the turntable when the evaporation work is completed.
Since the turntable is stopped immediately in front of the disk attachment/detachment device, there is no need to rotate the turntable many times until the first surface of the reference disk holder faces the disk attachment/detachment device. This allows you to attach and detach the disk.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to FIGS. 1 and 2. Note that the same members as those of the conventional type shown in FIGS. 3 and 4 are given the same reference numerals, and explanations thereof will be omitted.

1st Example* Configuration of Example In FIG.
A rotation control device 20 for stopping the rotation speed of the turntable when the rotation speed detected by the detection means reaches a predetermined rotation speed P set in advance, is provided. ing.

That is, the predetermined rotational speed P of the revolution of the turntables 3a and 3b controlled by the rotation control device 20 is as follows when an N-hedral disk holder is used.
It is given by the following equation.

P=(N×α)−β (However, 0<β<1) P: Revolution number N: Number of surfaces α: Integer (determined from vapor deposition time) * Effect of the example The above configuration In the vacuum evaporation apparatus of this embodiment, the rotational speed of the turntables 3a and 3b is detected by the turntable rotation control device 20 disposed in the vacuum chamber 4. Then, the rotational speeds of the turntables 3a and 3b are controlled so that the rotational speed P of the turntables 3a and 3b becomes a value that satisfies the above equation when the vapor deposition work is completed.

That is, when P=(N×α)−β, when the turntables 3a and 3b rotate (N×α) times,
The first surface of the reference disk holder 6a should be placed at a position facing the disk attachment/detachment devices 5a, 5b, but in reality, the turntables 3a, 3b are Even if the turntables 3a and 3b are rotated twice, due to the inertia of the rotational force, the disk attachment/detachment devices 5a and 5b
If the reference disk holder 6a passes even slightly past the position facing the disk attachment/detachment devices 5a, 5b, the first surface of the reference disk holder 6a may not be able to stop accurately at the position facing the disk desorption devices 5a, 5b. In order to place it in a position facing the
Turntables 3a and 3b must be rotated N times. Therefore, in the turntable rotation control device 20 of the present invention, the number of rotations of the turntables 3a, 3b is controlled to be at most one rotation less than (N×α) times. to stop.

When the turntables 3a and 3b are stopped in this way when the vapor deposition work is completed, the first surface of the reference disk holder 6a to which a disk is first attached and detached is located in the direction of rotation of the turntable at a position facing the disk attachment and detachment devices 5a and 5b. It will be located on the front side. In this state, turntables 3a and 3b
is moved from the vacuum chamber 4 to a position facing the guide rollers 5a, 5b, the motor 12 is rotated, and the turntables 3a, 3b are rotated within one rotation. At this time, for example, using a position correction device 21 such as a photo sensor shown in FIG.
, and the rotation of turntables 3a and 3b is stopped. This position correction device 21 includes a hole 18 made in the peripheral edge of the turntables 3a and 3b by the number of spindles 7 corresponding to the positions of the respective disk holders, and a light emitter 2 for detecting the position of the hole 18.
When the light from the light emitting body 22 passes through the hole 18 and is detected by the light receptor 23, the rotation of the motor is stopped, and the rotation of the turntables 3a and 3b is stopped. This is to stop the

In this way, when the vapor deposition work is completed, the first surface of the reference disk holder can be immediately stopped on the front side in the rotational direction of the turntable at a position facing the disk attachment/detachment device, so that after the turntable is taken out from the vacuum chamber, Since the disk can be immediately attached and detached, it is possible to improve the efficiency of the vapor deposition operation.

Second embodiment* Configuration of the embodiment In FIG. 2, turntables 3a and 3b are
A sensor detection plate 30 is disposed on the first surface of the reference disk holder 6a provided in the reference disk holder 6a. On the other hand, on the pedestal 1 on the side of the disk attachment/detachment devices 5a, 5b, a reflective sensor 31 is disposed on the front side in the rotational direction of the turntables 3a, 3b in order to detect the sensor detection plate 30, as an example. There is. The signal from this sensor 31 is connected to the control device 20 for the motor that rotates the turntables 3a and 3b, and when the sensor 31 detects the detection plate 30, it issues a control signal to stop the motor.

* Effect of the embodiment In the vacuum evaporation apparatus of the second embodiment having the above-described configuration, after the evaporation work is completed, the turntables 3a and 3b are taken out from the vacuum chamber 4, and the turntables 3a and 3b are moved using the cart 8. Move it to the attachment/detachment position. Then, the sensor 31 is activated to detect the sensor detection plate 3 provided on the first surface of the reference disk holder 6a.
When the sensor 31 detects 0, the rotation of the turntables 3a and 3b is stopped. Then, the first surface of the reference disk holder 6a stops slightly in front of the disk attachment/detachment devices 5a, 5b. Therefore, the turntables 3a and 3b are slightly rotated manually or by the position correcting device 21 so that the first surface of the reference disk holder 6a faces the attachment/detachment devices 5a, 5b. Disk D-1 attached to the first surface of the disk holder 6a
Attach and detach a.

In this way, when the vapor deposition work is completed, the first surface of the reference disk holder 6a is immediately attached to the disk attachment device 5.
The turntable can be stopped on the front side in the direction of rotation, facing the positions a and 5b, and the disk can be attached and detached immediately after the turntable is removed from the vacuum chamber, making it possible to improve the efficiency of vapor deposition work. It can be done.

[Effects of the Invention] As described above, according to the present invention, the position of the first surface of the reference disk holder from which a disk is first attached or detached when the vapor deposition work is completed is detected by the rotation control of the turntable or the sensor, and By simply installing a control device that stops one side of the turntable on the front side in the rotational direction of the turntable at a position facing the disk attachment/detachment device, it is possible to quickly attach and detach the disk upon completion of the evaporation process, and the evaporation process is improved. It is possible to provide a vacuum evaporation apparatus that makes it possible to improve efficiency.

[Brief explanation of the drawing]

FIG. 1A is a plan view showing a first embodiment of a vacuum evaporation apparatus according to the present invention, FIG. 1B is a sectional view of a main part of a position correction device used in the embodiment of FIG. FIG. 3 is a plan view showing the configuration of a conventional vacuum evaporation device; FIG. 4 is a vertical sectional view showing the left half of the conventional vacuum evaporation device. . D... Disk, 1... Frame, 2a, 2b...
Rail, 3a, 3b... Turntable, 4...
Vacuum chamber, 5a, 5b... Disk attachment/detachment device, 6...
...Disk holder, 7...Spindle, 8...Dolly,
9... Bearing, 10... Guide roller, 11... Gear, 12... Motor, 13... Drive gear, 14...
...Rotation gear, 15...Holder drive gear, 16...
...Joint, 20...Turntable rotation control device, 21...Position correction device, 30...Sensor detection plate, 31...Sensor.

Claims (1)

[Claims] 1. A plurality of disks are mounted on the side surfaces of a multifaceted disk holder, and a plurality of the disk holders are rotatably mounted on the same turntable,
In a vacuum evaporation apparatus, the turntable is transported into a vacuum chamber to perform the evaporation operation, and when the evaporation operation is completed, the turntable is taken out from the vacuum chamber, and the disk is detached from the disk holder by a disk detachment device. A vacuum characterized in that it is provided with a turntable rotation control device that stops the first surface of the reference disk holder, which performs the first disk attachment/detachment upon completion, on the front side in the turntable rotation direction at a position facing the disk attachment/detachment device. Vapor deposition equipment. 2. The turntable rotation control device includes a turntable rotation speed detection means and a turntable rotation speed detected by the rotation speed detection means, P,
When the number of surfaces of the multifaceted disk holder is N, and the integer determined from the deposition time is α, P = (N × α)
2. The vacuum evaporation apparatus according to claim 1, wherein the rotation of the turntable is stopped when -β (0<β<1). 3. The turntable rotation control device includes a sensor detection plate disposed on the first surface of the reference disk holder, and a sensor configured to detect the sensor detection plate on the front side of the disk attachment/detachment device in the turntable rotation direction. The vacuum evaporation apparatus according to claim 1, wherein rotation of the turntable is stopped when the sensor detects the sensor detection plate.