JPH0577746B2 - - Google Patents

Description

[Detailed description of the invention]

[Objective of the Invention] (Industrial Application Field) The present invention relates to a vacuum deposition apparatus for forming a metal thin film on the surface of an optical disk such as a laser disk (LD) or a compact disk (CD). The present invention relates to a vacuum evaporation apparatus that allows disks that have been vapor-deposited to be quickly taken out from a multifaceted disk holder that is mounted on a turntable. (Prior Art) Currently, recording tapes, video tapes, video discs, etc. are commercially available as information recording media and are in widespread use.In recent years, optical discs that can record and play back using laser light have been developed as high-density information recording media. It is attracting attention as Since optical discs are being used not only for image and audio information but also as data memory media for computers, there is a demand for high-quality optical discs that are error-free during recording and playback. For this reason, attention has been paid to a vacuum evaporation apparatus for uniformly forming a thin metal film that serves as a reflective film for laser light on the surface of an optical disk. FIG. 3 shows a schematic plan view of a conventionally used vacuum evaporation apparatus. That is, this vacuum evaporation apparatus has first and second turntables 3 on the rail 2a of the vacuum chamber 4 provided in the center of the pedestal 1 and on the rail 2b provided on the pedestal 1.
a and 3b are arranged so that they can move freely. In addition, attachment/detachment devices 5a and 5b for attaching and detaching disks to and from each disk holder provided on the turntables 3a and 3b are arranged parallel to the pedestal 1 with the vacuum chamber 4 in between. A plurality of disk holders 6 are supported on each of the turntables 3a, 3b so as to be rotatable (rotatable) around a support shaft 7 thereof. Each disk holder 6 has a polyhedral shape (three sides, for example) so that a plurality of disks D can be attached to the sides. As shown in the vertical cross-sectional view of FIG. 4, the turntables 3a and 3b are ring-shaped members supported by bearings 9 and guide rollers 10 on a cart 8 running on a rail 2a, and are formed on the outer periphery of the ring-shaped members. The portion of the gear 11 that has been rotated meshes with a drive gear 13 that is rotated by a motor 12. turntable 3a,
A shaft hole 17 through which the support shaft 7 passes is formed in 3b. A rotating gear 14 is fixed to the support shaft 7, and this rotating gear 14 meshes with a holder drive gear 15 that is integrally provided on the turntables 3a and 3b. Further, a joint 16 for connecting the support shaft 7 and the disk holder 6 is provided between the rotation gear 14 of the support shaft 7 and the disk holder 6. In a vacuum evaporation apparatus having such a configuration, while one turntable 3a is carried into the vacuum chamber 4 from the pedestal on which the desorption device 5a is placed and the evaporation work is performed, the other turntable 3a is By attaching and detaching the disk to and from the table 3b, work can be performed continuously.
That is, in the vacuum chamber 4, when the drive gear 13 inside the vacuum chamber 4 is rotated by the motor 12 provided outside, the turntable 3a, which is meshed with the drive gear 13 at the gear 11 on the outer periphery, rotates. When the turntable 3a rotates, the holder drive gear 15 integrally formed with the turntable 3a rotates.
Since the rotation gear 14 fixed to the support shaft 7 is rotated, the disk holder 6 revolves while rotating. As a result, no matter what position the holder is in,
Further, regardless of which surface of each holder the disks are adhered to, they come into contact with the vapor in the vacuum chamber evenly, and a uniform vapor deposition chamber is formed on each disk. Now, if the vapor deposition work on the disk on the turntable 3a is completed earlier than on the disk on the turntable 3a, by running the trolley 8 along the rail, the vacuum chamber 4 along with the turntable 3b can be
The disks D attached to each disk holder 6 are sequentially removed from the disk holder 6 by a disk detacher 5b arranged parallel to the side of the pedestal 1. That is, first, the disk D-1a is mounted on, for example, the first surface (pole position) on the preset reference disk holder 6a.
When the turntable 3b is rotated, the disk D-1b mounted on the first surface of the adjacent disk holder 6b is removed. In this way, while rotating the turntable 3b, the disks D-1a to D-1n on the first surface of the adjacent disk holders 6a to 6n (n=8 in the figure) are removed one after another, and the turntable 3b When the disk rotates once, all the disks D-1a to D-1n mounted on the first surface of each disk holder 6a to 6n are removed, and the second surface of the reference disk holder 6a faces the disk attachment/detachment device 5b. come to a position. Thereafter, by rotating the turntable 3b in the same manner, the disks D-2a to D-2n mounted on the second surface of each disk holder and the disks D-3a to D- mounted on the third surface of each disk holder are rotated. 3n were removed one by one. (Problems to be Solved by the Invention) Incidentally, it is necessary to perform the work of taking out the disks from each disk holder in a certain order as described above. In other words, since each disk to be vapor-deposited has a number indicating the production lot etc. in advance, the disks may be taken out and packaged in that number order or sent to the next process, or multiple types of disks may be processed in one vacuum vapor-deposition operation. When vapor deposition is performed, if the disks are not removed in the order in which they are installed in the holder, problems will occur in which the numbers will be mixed up and disks of different types will be mixed together. Therefore, in this type of vacuum evaporation equipment,
As mentioned above, the disk was always removed from the first surface of the predetermined reference disk holder 6a. However, in the conventional vacuum evaporation apparatus, the turntables 3a and 3b are appropriately stopped after performing the evaporation work for a certain period of time, so that when the evaporation work is completed, the first surface of the reference disk holder 6a is It does not necessarily have to be located near the attachment/detachment devices 5a and 5b. Therefore, conventionally, in order to place the first surface of the reference disk holder 6a at the disk detachment position after the completion of the vapor deposition work, the turntables 3a and 3b are revolved and the reference disk holder 6a is rotated, and the first surface of the reference disk holder 6a is rotated. It was necessary to move it to the position of the disk attachment/detachment devices 5a and 5b. However, in this case, since a polyhedral disk holder is used, it is necessary to rotate the turntable once in order to make the next surface of the disk holder face the attachment/detachment device as described above. One side is disk attachment/detachment device 5
a, 5b, the first surface of the reference disk holder 6a then reaches the attachment/detachment device 5.
In order to face the disks 3a and 5b, it was necessary to rotate the turntables 3a and 3b by the maximum number of disk holder surfaces. Therefore, it takes a lot of time to attach and detach the disks, and the cycle time of the vapor deposition operation cannot be shortened, resulting in extremely poor work efficiency. The present invention has been proposed in order to solve the problems of the prior art as described above, and its purpose is to ensure that the throat surface of the reference disk holder, which is used for first disk attachment/detachment upon completion of vapor deposition work, faces the disk attachment/detachment device. If the sensor detects that a surface other than the first surface that can be attached or detached is facing the disk detacher, the push-up device separates the disk holder from the turntable. An object of the present invention is to provide a vacuum evaporation device that can rotate on its own axis and quickly bring the first surface of a disk to face a disk removal point without rotating a turntable. [Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention includes a turntable, and a device on the turntable that is arranged equidistantly on the circumference with the turntable rotation center as an axis. A plurality of disk holders arranged at intervals, and a disk attachment/detachment device placed on the side of the turntable for attaching and detaching the disks on the disk holders, each of the disk holders being rotatably supported with respect to the turntable. In the vacuum evaporation apparatus, a sensor detection plate is disposed on the disk device surface of at least the first surface of each disk holder. Sensors are arranged on the sides of the turntable at equal intervals on the front and front sides in the rotational direction of the turntable with the disc attachment/detachment device in between, and these detachment devices and a plurality of front and rear sensors When the front side of the holder where the disk is mounted faces the attachment/detachment device, the front and rear disk mounting surfaces thereof are positioned to face the front and rear sensors, respectively, and between each disk holder and the turntable, Each time the turntable rotates by the distance between the attachment/detachment device and each sensor, the disk holder is rotated by one disk mounting surface around its spindle, and the power transmission is made to face the next disk device surface to the desorption device. means are provided, further responsive to the plurality of sensor detection signals,
a power disconnection means for disconnecting the disk holder facing the detachment device from the turntable; and a power disconnection means for disconnecting the disk holder from the turntable;
The present invention is characterized in that it is provided with a rotation drive means for rotating the turntable to a position where its first surface faces the attachment/detachment device. (Function) In the vacuum evaporation apparatus of the present invention having the above-mentioned configuration, sensors are disposed on the stand near the disk attachment/detachment device at the front and near side in the rotational direction of the turntable, and the sensors detect the position of the disk holder. It is detected whether the first surface faces the disk attachment/detachment device. If this detection result indicates that the reference disk holder's surface other than the first side faces the attachment/detachment device, the push-up device separates the reference disk holder from the turntable and rotates the reference disk holder until the first surface faces the attachment/detachment device. By moving the disk, the disk can be attached to and detached from the first surface of the reference disk holder. (Example) Hereinafter, an example of the present invention will be specifically described with reference to FIGS. 1 and 2. Note that the same members as those of the conventional type shown in FIGS. 3 and 4 are given the same reference numerals, and explanations thereof will be omitted. *Configuration of the embodiment In this embodiment, as shown in FIGS. 1A to 1C, the first
A sensor detection plate 20 is attached on the surface. On the other hand, sensors A and B for detecting the sensor detection plate 20 are arranged on the pedestal 1 near the disk attachment/detachment devices 5a and 5b, which are arranged parallel to the pedestal 1, on the front and near side in the rotational direction of the turntable. There is. In this case, the two sensors A and B are connected to the detachment device and each sensor when the disk mounting surface with the disk holder faces the detachment device.
The front and rear disk mounting surfaces are positioned to face the front and rear sensors, respectively. Between each disk holder and the turntable, each time the turntable rotates by the distance between the attachment/detachment device and each sensor, the disk holder is rotated by one disk mounting surface around its spindle; The attachment/detachment device is provided with power transmission means for causing the next disk attachment surface to face the disk attachment/detachment device. In this embodiment, this power transmission means includes a motor 12, a drive gear 1, and the like as explained in the prior art section.
3. It is equipped with a rotation gear 14 and a holder drive gear 15. The power transmission means includes a power separation means for separating the disk holder facing the detachment device from the turntable in response to the plurality of sensor detection signals, and a power separation means for separating the disk holder separated from the turntable from the first surface thereof. Rotary drive means is provided for rotating the turntable to a position facing the attachment/detachment device. In this embodiment, this power disconnection means is a push-up device 30 described below.
a, 30b, and the rotation drive means is realized by a motor 32. Signals from these sensors A and B are input to a control circuit (not shown) for the push-up devices 30a and 30b provided on the pedestal 1. That is, as shown in FIG. 2A, the push-up devices 30a, 30b are provided below the turntable in front of the attachment/detachment devices 5a, 5b, and push up the support shaft 7 of the disk holder stopped at that position from below. A cylinder 31 is provided to release the engagement between the rotation gear 14 fixed to the shaft 7 and the holder drive gear 15 on the turntable side. A motor 32 is provided on the cylinder 31 for rotating the spindle 7 of the disk holder 6 by a predetermined angle when the cylinder 31 is pushing up. Furthermore, a position correction device 21 is provided near the push-up devices 30a, 30b to stop the motor 1 with the first surface of the reference disk holder 6a accurately facing the disk attachment/detachment devices 5a, 5b. This position correction device 21 includes, for example,
It uses a photo sensor, and consists of a hole 18 provided on the periphery of the turntables 3a and 3b in accordance with the position of each disk holder, and an issuer 22 and a photoreceptor 23 that detect the position of this hole 18. When light from the issuer 22 passes through the hole 18 and is detected by the photoreceptor 23, the rotation of the motor is stopped and the rotation of the turntables 3a and 3b is stopped. The push-up devices 30a, 30b are controlled by the signals from the sensors A, B and the position correction device 21, and drive the motor 32 in accordance with the detection signal, so that the first surface is the attachment/detachment device 5a. ，
The disk holder 6 is rotated until it faces the disk holder 5b. *Operation of the embodiment In the vacuum evaporation apparatus of this embodiment having the above-described configuration, after completion of the evaporation work, for example, the turntable 3a is taken out from the vacuum chamber 4, and the reference disk holder 6a is stopped in front of the detachment device 5a. Rotation of the turntable 3a is stopped at the position shown in FIG.
In this case, it does not matter which surface of the reference disk holder 6a faces the attachment/detachment device 5a. In this state, the two sensors A and B arranged on both sides of the attachment/detachment device 5a detect the sensor detection plate 20 provided on the first surface of each disk holder 6n and 6b located in front of each sensor A and B. However, sensors A and B
Based on the detection results of these sensors, it is determined which surface of the reference disk holder 6a faces the attachment/detachment device 5a. As shown in FIG. 1A, the reference disk holder 6
If the first surface of a is facing the attachment/detachment device 5a,
Since the third surface of the disk holder 6n is located at a position facing sensor A, the signal of sensor A is turned off, and the second surface of the disk holder 6b is located at a position facing sensor B. Therefore, the signal of sensor B is turned off. Next, as shown in FIG. 1B, when the third surface of the reference disk holder 6a is facing the attachment/detachment device 5a, the sensor A is turned off because the second surface of the disk holder 6n is facing it. Since the first surface of the disk holder 6b is facing the sensor B, the sensor B is turned on. Furthermore, as shown in FIG. 1C, the reference disk holder 6
When the second surface of A is facing the attachment/detachment device 5a, sensor A is turned on because it is facing the first surface of the disk holder 6n, and sensor B is turned on because it is facing the third surface of the disk holder 6b. I'm here,
It turns off. This point is summarized in the table below.

[Table] In this way, each disk holder 6n, 6b is
By detecting the detection plate 20 provided on the first surface of the disc holder 6a, it is possible to determine which surface of the reference disk holder 6a, which is stopped in front of the attachment/detachment device 5a, faces the desorption device 5a. Become. After detecting which surface of the reference disk holder 6a, which is stopped in front of the attachment/detachment device 5a, faces the desorption/detachment device 5a in this way and the position of the support shaft 7 by the position correction device 21, the push-up device 30a is activated to separate the disk holder 6a from the turntable 3a and rotate it until its first surface faces the attachment/detachment device 5a. That is, when both the sensors A and B are off, the first surface of the disk holder 6a faces the attachment/detachment device 5a, so the disk can be attached or detached without operating the push-up devices 30a, 30b. on the other hand,
When only sensor B is on, disk holder 6
Since the third surface of a faces the detachment device 5a,
First, drive the motor 12 to rotate the gear 11,
When the position detection device 21 is activated, the motor 12
is stopped, the support shaft 7 and the shaft of the motor 32 are made engageable, and then the cylinder 31 of the thrusting device 30 is stopped.
, the shaft of the motor 32 pushes up the support shaft 7 of the disk holder 6a, and the rotating gear 14 is separated from the turntable 3a.
By rotating the disk holder 6a,
Rotate 3 rotations (1/3 rotation if the motor is reversible). Furthermore, when only the sensor A is on, the second surface of the disk holder 6a faces the attachment/detachment device 5a, so the pushing up device 30a is removed as described above.
is activated to rotate the disk holder 6a by 1/3 of a rotation, so that the first surface faces the detachment/detachment device 5a, and then the disk is removed from the first surface. [Effects of the Invention] As described above, according to the present invention, a sensor detection plate is disposed on the first surface of each disk holder, and a sensor detection plate is provided on the front side and on the near side in the rotation direction of the turntable of the disk holder. By simply providing a sensor that detects the sensor detection plate of the disk holder that is stopped in front of the attachment/detachment device, it is possible to easily determine which side of the disk holder that is stopped in front of the attachment/detachment device faces the device. . Then, the push-up device is controlled based on the determination result, and the disk holder is separated from the turntable and rotated so that the first surface faces the attachment/detachment device, thereby allowing the turntable to rotate without causing the turntable to revolve again. The disk can be attached and detached from the same position. As a result, according to the present invention, it becomes possible to mount and remove the disks from the holder in an orderly manner and quickly, and it is possible to provide vacuum evaporation with high working efficiency.

[Brief explanation of the drawing]

1A to 1C are plan views showing the relationship between each sensor and desorption device of the present invention and the surface of the disk holder, and FIG. 2A is a longitudinal section showing the left half of an embodiment of the vacuum evaporation device of the present invention. FIG. 2B is a sectional view of a main part of the position correction device. FIG. 3 is a plan view showing the configuration of a conventional vacuum evaporation apparatus, and FIG. 4 is a longitudinal sectional view showing the left half thereof. D...Disk, 1...Fixed stand, 2a, 2b...
...Rail, 3a, 3b...Turntable, 4...
...Vacuum chamber, 5a, 5b...Disk attachment/detachment device, 6
a, 6b...Disc holder, 7...Spindle, 8
...Dolly, 9...Bearing, 10...Guide roller,
11...Gear, 12...Motor, 13...Drive gear, 14...Rotation gear, 15...Holder drive gear, 16...Coupling, A, B...Sensor, 20
...Sensor detection plate, 21 ...Position correction device, 3
0a, 30b...Pushing device, 31...Cylinder, 32...Motor.

Claims (1)

[Claims] 1. A turntable, a plurality of disk holders arranged on the turntable at equal intervals on a circumference centered around the rotation center of the turntable, and a plurality of disk holders arranged on the side of the turntable. a disk attachment/detachment device for attaching/detaching the disk on the disk holder; each disk holder has a spindle rotatably supported on the turntable; and a spindle around the spindle from at least the first to third surfaces. In a vacuum evaporation apparatus having a disk mounting surface, a sensor detection plate is disposed on the disk device surface of at least the first surface of each disk holder, and a sensor detection plate is disposed on the side of the turntable with a turntable sandwiching the disk mounting surface. Sensors are arranged at equal intervals on the front and front sides in the table rotation direction, and these attachment/detachment devices and multiple sensors in the front and back are used to The disk mounting surface is arranged in a positional relationship opposite to the front and rear sensors, and between each disk holder and the turntable, each time the turntable rotates by the distance between the attachment/detachment device and each sensor, the disk holder is installed. A power transmission means is provided for rotating the disk mounting surface by one surface at a time about the spindle, and causing the next disk device surface to face the mounting/demounting device, and further, in response to the plurality of sensor detection signals,
a power disconnection means for disconnecting the disk holder facing the detachment device from the turntable; and a power disconnection means for disconnecting the disk holder from the turntable;
1. A vacuum evaporation apparatus comprising a rotational drive means for rotating the turntable to a position where its first surface faces a desorption device.