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JPH0332732B2 - - Google Patents
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JPH0332732B2 - - Google Patents

Info

Publication number
JPH0332732B2
JPH0332732B2 JP58011396A JP1139683A JPH0332732B2 JP H0332732 B2 JPH0332732 B2 JP H0332732B2 JP 58011396 A JP58011396 A JP 58011396A JP 1139683 A JP1139683 A JP 1139683A JP H0332732 B2 JPH0332732 B2 JP H0332732B2
Authority
JP
Japan
Prior art keywords
hole
light
printed board
detection device
light shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58011396A
Other languages
Japanese (ja)
Other versions
JPS59150329A (en
Inventor
Moritoshi Ando
Kikuo Mita
Giichi Kakigi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1139683A priority Critical patent/JPS59150329A/en
Priority to US06/554,543 priority patent/US4560273A/en
Priority to EP83307291A priority patent/EP0111404B1/en
Priority to DE8383307291T priority patent/DE3377527D1/en
Publication of JPS59150329A publication Critical patent/JPS59150329A/en
Publication of JPH0332732B2 publication Critical patent/JPH0332732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】 (イ) 発明の技術分野 本発明はプリント板に形成されたスルホールの
ボイド又は欠陥を検査するスルーホール検知装置
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a through-hole detection device for inspecting voids or defects in through-holes formed on a printed circuit board.

(ロ) 技術の背景 プリント板の表面と裏面の導電部を相互に電気
的に接続するためプリント板にスルーホールを設
けてこのスルーホールの内面を銅等の導電層によ
つて被覆することによつてスルーホール処理を行
なう。このようにしてスルーホール処理がなされ
たスルーホールは信頼性の面からボイド又は欠陥
は絶対に避けなければならない。
(b) Background of the technology In order to electrically connect the conductive parts on the front and back sides of a printed board, a through hole is provided in the printed board and the inner surface of the through hole is covered with a conductive layer such as copper. Then, through-hole processing is performed. From the viewpoint of reliability, voids or defects must be absolutely avoided in the through-holes processed in this manner.

(ハ) 従来技術と問題点 従来スルーホールは幅又は径が約1mm厚さが約
1mmの大きさであつたためにスルーホールの内壁
のボイド等を検査するのに目視検査が行なわれて
いた。しかしながら半導体装置の集積度向上技術
と相俟つてスルーホールの幅又は径は徐々に小さ
く変化せしめられ約0.2mmと小さくなつた。一方
スルーホールの厚さは約3mmと増加せしめられス
ルーホール形状が細長くなり目視検査は実質的に
不可能となつた。そこで第1図に示されるような
装置を用いて光学的に漏光を検知する方法が行な
われるようになつた。第1図によればプリント板
1にスルーホール2が設られており該スルーホー
ル2の内壁に導電層3が被覆されている。該導電
層3にはスルーホールボイド又は欠陥を4が形成
されている。光源(図示せず)から発せられた光
5はスルーホール開口部に設けられた遮光マスク
6以外を通過しプリント板内に入る。この時1部
の光7は該スルーホールボイド又は欠陥を4から
スルーホール内へ漏れ、レンズ8を介してCCD
などの検知器9によつて検知される。光検知器9
によつて検知されるものは第2図に示すように導
電層3内の円形の光7a(漏光)である。第1図
に示したようなスルーホールボイド検査装置は光
源と遮光マスクが分離しているため光源とマスク
それぞれにホルダーが必要でありまた相互の位置
調整が必要であつた。又従来の装置はプリント板
の両側に光学系が必要であり空間的にも不都合で
あつた。
(c) Prior Art and Problems Conventionally, a through hole has a width or diameter of about 1 mm and a thickness of about 1 mm, so a visual inspection was performed to inspect the inner wall of the through hole for voids, etc. However, as technology improves the degree of integration of semiconductor devices, the width or diameter of the through hole has been gradually reduced to about 0.2 mm. On the other hand, the thickness of the through hole was increased to about 3 mm, and the shape of the through hole became elongated, making visual inspection virtually impossible. Therefore, a method of optically detecting light leakage using a device as shown in FIG. 1 has come into use. As shown in FIG. 1, a printed circuit board 1 is provided with a through hole 2, and the inner wall of the through hole 2 is coated with a conductive layer 3. Through-hole voids or defects 4 are formed in the conductive layer 3 . Light 5 emitted from a light source (not shown) passes through a portion other than the light-shielding mask 6 provided at the through-hole opening and enters the printed board. At this time, a part of the light 7 leaks through the through hole void or defect 4 into the through hole and passes through the lens 8 to the CCD.
It is detected by a detector 9 such as. Photodetector 9
What is detected by this is circular light 7a (light leakage) within the conductive layer 3, as shown in FIG. Since the through-hole void inspection apparatus shown in FIG. 1 has a light source and a light-shielding mask separated, a holder is required for each of the light source and the mask, and it is also necessary to adjust their positions. Furthermore, the conventional device required optical systems on both sides of the printed board, which was inconvenient in terms of space.

(ニ) 発明の目的 上記欠点を鑑み本発明の目的は光学系の調整が
容易なスルーホール検知装置を提供することであ
る。
(d) Object of the Invention In view of the above drawbacks, an object of the present invention is to provide a through-hole detection device whose optical system can be easily adjusted.

本発明の他の目的は装置全体が占める空間を小
さくせしめたスルーホール検知装置を提供するこ
とである。
Another object of the present invention is to provide a through-hole detection device in which the space occupied by the entire device is reduced.

(ホ) 発明の構成 本発明の目的はプリント板に形成されたスルー
ホールのボイド又は欠陥を検査するスリーホール
検査装置において;少なくとも2つの照明手段
と、該照明手段から発せられた光を該スルーホー
ルの開口部に入らぬように遮光せしめる遮光手段
と、該照明手段から発せられた光が該ボイド又は
欠陥から漏れた光を検知する光検知装置とを具備
し且つ該照明手段、該遮光手段及び光検知装置が
該プリント板に対して同一側に配設せしめられて
おり、前記遮光手段が前記プリント板表面上を回
転する円筒型回転体を有することによつて該プリ
ント板を連続的に水平移動可能にせしめたことを
特徴とするスルーホール検知装置によつて達成さ
れる。
(E) Structure of the Invention An object of the present invention is to provide a three-hole inspection device for inspecting voids or defects in through-holes formed in a printed board; The illumination means and the light shielding means are provided with a light shielding means for shielding light from entering the opening of the hole, and a light detection device for detecting light emitted from the illumination means and light leaking from the void or defect. and a light detection device are disposed on the same side with respect to the printed board, and the light shielding means has a cylindrical rotating body that rotates on the surface of the printed board, so that the printed board is continuously This is achieved by a through-hole detection device characterized by being horizontally movable.

(ヘ) 発明の実施例 以下本発明の実施例を図面に基づいて説明す
る。第3図は本発明に係る実施例を説明するため
の概略断面図である。
(F) Embodiments of the invention Examples of the invention will be described below based on the drawings. FIG. 3 is a schematic sectional view for explaining an embodiment according to the present invention.

第3図において、2つの照明灯15がプリント
板11に形成されたスルーホール12の側面を照
明するように配設されており、又スルーホール1
2開口部近傍には、2組の遮光板16a及び遮光
用ロール16bが接続されて対向するように配設
されている。これら遮光板16a及び遮光ロール
16bがスルーホール開口付近に設けられ且つ該
ロール16bがプリント板上を移動するようにな
つているため照明灯15の光が開口部に入らない
ようになつている。またスルーホール12を構成
する導電層にボイド又は欠陥14からスルーホー
ル内へ漏れた光を検知する例えばテレビカメラ
CCD等の光検知装置19がロール16bのほヾ
中央上方部に設けられている。
In FIG. 3, two illumination lights 15 are arranged to illuminate the sides of a through hole 12 formed in a printed board 11, and two illumination lights 15 are arranged to illuminate the side surfaces of a through hole 12 formed in a printed board 11.
Near the two openings, two sets of light shielding plates 16a and light shielding rolls 16b are arranged so as to be connected and face each other. The light-shielding plate 16a and the light-shielding roll 16b are provided near the through-hole opening, and the roll 16b moves on the printed board, so that the light from the illumination lamp 15 does not enter the opening. Also, for example, a television camera detects light leaking into the through hole from voids or defects 14 in the conductive layer constituting the through hole 12.
A light detection device 19 such as a CCD is provided at the upper center of the roll 16b.

上記本発明のスルーホール検査装置を用いてス
ルーホールを検査する方法を以下説明する。
A method for inspecting through holes using the above-mentioned through hole inspection apparatus of the present invention will be described below.

移動ステージ10上にスルホール12を有する
プリント板11を載置し、該スルーホールの開口
付近に本装置を移動させる。照明灯15をつける
スルーホール12を側面から照明する。スルーホ
ールを構成する導電層に欠陥14があれば照明灯
15から出た発はその欠陥14からスルーホール
12内へ漏れ、光学的に該漏光を検知すべく配設
されている光検装置によつて検知される。照明灯
15から出た光をスルーホールの開口部から入ら
ないように遮光する装置で且つプリント板と接す
る部分に用いる遮光手段は、プリント板上で移動
しやすくしかもプリント板を損傷しないためにも
ロールであることが好ましくはその材質はゴム、
等が好ましい。またスルーホール12をはさんで
対向的に位置されたロールの間隙はスルーホール
の内径に応じて予め適宜セツトされているのが好
ましい。
A printed circuit board 11 having a through hole 12 is placed on a moving stage 10, and the apparatus is moved near the opening of the through hole. A through hole 12 in which a lighting lamp 15 is attached is illuminated from the side. If there is a defect 14 in the conductive layer constituting the through hole, the light emitted from the illumination lamp 15 leaks from the defect 14 into the through hole 12, and is detected by an optical inspection device installed to optically detect the leakage of light. It is then detected. The light shielding device is a device that blocks the light emitted from the illumination lamp 15 from entering through the opening of the through hole, and the light shielding means used in the part that comes into contact with the printed board is designed so that it is easy to move on the printed board and does not damage the printed board. The roll is preferably made of rubber,
etc. are preferred. Further, it is preferable that the gap between the rolls placed opposite to each other across the through hole 12 is set appropriately in advance according to the inner diameter of the through hole.

(ト) 発明の効果 以上説明したように本発明に係る装置はプリン
ト板に対して同一側に配設されているために両側
配置を必要とする従来装置に比して利用空間が小
さく、各装置の調節も容易に行なうことが可能と
なる。
(G) Effects of the Invention As explained above, since the device according to the present invention is arranged on the same side of the printed board, the usable space is smaller compared to the conventional device which requires installation on both sides. It also becomes possible to easily adjust the device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は従来技術を説明するための
概略断面図及び平面図であり、第3図は本発明の
1つの実施例を説明するための概略断面図であ
る。 1,11……プリント板、2,12……スルー
ホール、3,13……導電層、4,14……ボイ
ド又は欠陥、5……光、6……スルーホール遮蔽
用遮光マスク、7,7a……漏光、8,18……
レンズ、9……光検知器、10……移動ステー
ジ、15……ボイド又は欠陥検知用照明灯、16
a……遮光板、16b……遮光ロール、19……
光検知装置。
1 and 2 are a schematic sectional view and a plan view for explaining the prior art, and FIG. 3 is a schematic sectional view for explaining one embodiment of the present invention. 1, 11... Printed board, 2, 12... Through hole, 3, 13... Conductive layer, 4, 14... Void or defect, 5... Light, 6... Light shielding mask for shielding through hole, 7, 7a...Light leakage, 8,18...
Lens, 9...Photodetector, 10...Movement stage, 15...Illumination lamp for void or defect detection, 16
a... Light shielding plate, 16b... Light shielding roll, 19...
Light detection device.

Claims (1)

【特許請求の範囲】[Claims] 1 プリント板に形成されたスルーホールのボイ
ド又は欠陥を検査するスルーホール検査装置にお
いて、少なくとも2つの照明手段と、該照明手段
から発せられた光を該スルーホールの開口部に入
らぬように遮光せしめる遮光手段と、該照明手段
から発せられた光が該ボイド又は欠陥から漏れた
光を検知する光検知装置とを具備し且つ該照明手
段、該遮光手段及び光検知装置が該プリント板に
対して同一側に配設せしめられており前記遮光手
段が前記プリント板表面上を回転する円筒型回転
体を有することによつて該プリント板を連続的に
水平移動可能にせしめたことを特徴とするスルー
ホール検知装置。
1. A through-hole inspection device for inspecting voids or defects in through-holes formed on a printed circuit board, including at least two illumination means and a light shielding device to prevent light emitted from the illumination means from entering the opening of the through-hole. and a light detection device that detects light emitted from the illumination means leaking from the void or defect, and the illumination means, the light shielding means, and the light detection device are configured to The light shielding means includes a cylindrical rotating body that rotates on the surface of the printed board, so that the printed board can be continuously moved horizontally. Through-hole detection device.
JP1139683A 1982-11-30 1983-01-28 Through-hole inspecting apparatus Granted JPS59150329A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1139683A JPS59150329A (en) 1983-01-28 1983-01-28 Through-hole inspecting apparatus
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1139683A JPS59150329A (en) 1983-01-28 1983-01-28 Through-hole inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS59150329A JPS59150329A (en) 1984-08-28
JPH0332732B2 true JPH0332732B2 (en) 1991-05-14

Family

ID=11776847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1139683A Granted JPS59150329A (en) 1982-11-30 1983-01-28 Through-hole inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS59150329A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920840A (en) * 1982-07-28 1984-02-02 Fujitsu Ltd Defect checking device

Also Published As

Publication number Publication date
JPS59150329A (en) 1984-08-28

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