JPH0338344B2 - - Google Patents
Info
- Publication number
- JPH0338344B2 JPH0338344B2 JP4141487A JP4141487A JPH0338344B2 JP H0338344 B2 JPH0338344 B2 JP H0338344B2 JP 4141487 A JP4141487 A JP 4141487A JP 4141487 A JP4141487 A JP 4141487A JP H0338344 B2 JPH0338344 B2 JP H0338344B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- design
- lines
- dots
- punching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 50
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 238000004080 punching Methods 0.000 claims description 15
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Description
【発明の詳細な説明】
本発明は金属のエツチング、特にハーフエツチ
ングによる図案形成と打抜きを同時に行うエツチ
ング方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to etching of metal, particularly to an etching method for simultaneously forming a pattern by half etching and punching.
従来のエツチングにおいては、金属板表面上に
打抜き部だけでなく図案も実線で描くため、ハー
フエツチングによる図案形成と打抜きとを同時に
行う場合、片面エツチングでは第1図のようにハ
ーフエツチングとはならず、すべて打抜きとなつ
てしまう。また金属板表裏両面から打抜き部を形
成する両面エツチングでは、第2図に示したよう
に打抜きと表裏何れか一方へのハーフエツチング
による図案形成の場合、第3図に示したように打
抜きのみによる打抜き部と図案形成の場合、第4
図に示したように打抜きと表裏で図案が重ならな
いようにした両面ハーフエツチングによる場合の
三通りが考えられる。ところが、両面エツチング
で打抜きと図案形成を同時に行うと、表裏で図案
の重なつた部分が貫通してしまい、何れか一方か
ら見た図案のみが良好に認識されるだけで、他方
の面の図案は非常に粗悪なものとなつてしまう。
これを避けるためには表裏の図案が重ならないよ
うにしなければならず、製作可能な図案が極端に
制限されてしまうのである。 In conventional etching, not only the punched parts but also the design are drawn with solid lines on the surface of the metal plate, so when half-etching is used to form the design and punch out at the same time, single-sided etching is not half-etching as shown in Figure 1. It all ends up being punched out. In addition, in double-sided etching in which punched parts are formed from both the front and back sides of a metal plate, when a pattern is formed by punching and half-etching on either the front or back side as shown in Figure 2, the design is formed by punching alone as shown in Figure 3. In the case of punching and pattern formation, the fourth
As shown in the figure, three methods are possible: punching and half-etching on both sides so that the designs do not overlap on the front and back sides. However, when punching and pattern formation are performed at the same time in double-sided etching, the overlapping parts of the designs on the front and back sides pass through, and only the design seen from one side is well recognized, while the design on the other side is becomes extremely poor quality.
In order to avoid this, it is necessary to prevent the designs on the front and back sides from overlapping, which severely limits the designs that can be produced.
本発明は、これら従来技術の欠点に鑑み、片面
エツチングではハーフエツチングによる金属板表
面への図案の形成と打抜き、また両面エツチング
では金属板両面への良好な図案形成と打抜きを同
時に行う技術を提供することを目的とするもので
ある。 In view of these drawbacks of the conventional techniques, the present invention provides a technique for simultaneously forming and punching a design on the surface of a metal plate using half-etching in single-sided etching, and simultaneously forming and punching a good design on both sides of the metal plate in double-sided etching. The purpose is to
即ち、本発明はフオトマスク作成時において、
ハーフエツチングにより図案を形成しようする図
案部分に感光フイルムとレンズの間もしくはレン
ズと原図の間に細かいメツシユを介し、細かいメ
ツシユを掛けることにより、ハーフエツチングに
より図案を形成する図案部分が打ち抜き部より小
さい多数の点または線で形成されたフオトマスク
を作成し、該フオトマスクを、予めフオトレジス
トを塗布してある金属板に合わせ、露光し、現像
することにより、金属板上に多数の点または線で
図案を描き、上記方法により打ち抜き部とハーフ
エツチング部の該点または線に大小をつけてエツ
チングを行い、エツチング面積に依るエツチング
速度の差を利用してハーフエツチングによる良好
な図案形成と打抜きを同時に行うものである。 That is, in the present invention, when creating a photomask,
By placing a fine mesh between the photosensitive film and the lens or between the lens and the original pattern on the part of the design to be formed by half etching, the part of the design to be formed by half etching is smaller than the punched part. By creating a photomask formed of many dots or lines, aligning the photomask with a metal plate coated with photoresist in advance, exposing it to light, and developing it, a pattern is created with many dots or lines on the metal plate. is drawn and etched using the method described above by varying the size of the point or line in the punched part and half-etched part, and by using the difference in etching speed depending on the etching area, a good pattern is formed by half-etching and punched out at the same time. It is something.
以下図面に基づいて本発明の実施例を説明す
る。 Embodiments of the present invention will be described below based on the drawings.
第5図はハーフエツチングによる図案形成部を
打ち抜き部以上の大きさの点または打ち抜き部以
上の太さの線により描くことによる従来の方法に
て両面エツチングにより打抜き部Cと同時に金属
板表裏両面に図案A及びBを形成した時の断面図
である。従来の方法では図案の微細な部分を除い
て表裏で図案の重なつた部分ではハーフエツチン
グ部と打抜き部のエツチング速度がほぼ等しいた
めに貫通してしまい、表裏共にハーフエツチング
時とは視覚的に異なつた図案となつてしまう。そ
こで本発明では、金属板表裏両面全体に図案形成
を行う場合であつても、その図案の位置が表裏で
重なり、更にその部分が打抜きを目的としない部
位であるとき、その重なる部分の表裏両方もしく
は一方の図案を点又は線で描くことにより、エツ
チング後も表裏独立した良好な図案形成を可能と
するものである。 Figure 5 shows the pattern forming area by half etching, which is drawn on both the front and back sides of the metal plate at the same time as the punching area C by double-sided etching using the conventional method of drawing a pattern forming area with a dot larger than the punching area or a line with a thickness larger than the punching area. It is a sectional view when designs A and B are formed. In the conventional method, the etching speed of the half-etched part and the punched part is almost the same in areas where the designs overlap on the front and back sides, except for minute parts of the design, so the etching speeds are almost the same, so the etching is visually different from half-etching on both the front and back sides. It becomes a different design. Therefore, in the present invention, even when a design is formed on the entire front and back sides of a metal plate, if the positions of the designs overlap on the front and back, and furthermore, that part is not intended for punching, both the front and back of the overlapping part Alternatively, by drawing one of the designs with dots or lines, it is possible to form a good design that is independent on the front and back sides even after etching.
第6図、第7図及び第8図は、ハーフエツチン
グにより図案を形成する部分を打ち抜き部より小
さい多数の点または線で作成する本発明の実施例
を示すエツチングされた金属板の断面図である。
本発明では、打抜き部以外の図案を点または線で
描くため、第6図に示したように片面エツチング
ではその点または線の大小に依存するエツチング
速度の差によつて、ハーフエツチングによる金属
板表面への図案形成と打抜き部Cの形成とを同時
に行うことができる。エツチング初期では図案等
を形成する線又は点の大きさによるエツチング速
度の差はあまり無いが、エツチングが進行するに
つれ、線又は点の大きさが小さいほどエツチング
されていく溝内でのエツチング液の交換率が低下
し、線又は点の大きさが大きいものと比較してエ
ツチング速度が遅くなるからである。また、両面
エツチングの場合でも同様に図案を打抜き部より
小さい点または線で描くことにより、第7図に示
したように金属板の表裏で図案が重なる部分があ
つても貫通することはなく、図案AとBは各々の
面で独立して形成されるため、視覚的にも良好で
あり、さらに両面の図案の選定にほとんど制限を
与えないのである。第8図は第7図と同様両面エ
ツチングの実施例であるが、表裏で図案が重なる
部分で、表裏各々の図案を構成する各々の点また
は線が表裏の位置において重ならないようにした
ものである。この方法は、特に板厚の薄い場合に
オーバーエツチング等による貫通の危険性を低下
させることができる。 6, 7, and 8 are cross-sectional views of an etched metal plate showing an embodiment of the present invention in which a part forming a design is created by half etching with a large number of dots or lines smaller than the punched part. be.
In the present invention, since the design other than the punched part is drawn using dots or lines, in single-sided etching, the difference in etching speed depending on the size of the dots or lines as shown in FIG. Formation of the design on the surface and formation of the punched portion C can be performed at the same time. At the initial stage of etching, there is not much difference in the etching speed depending on the size of the lines or dots that form the design, but as etching progresses, the smaller the size of the lines or dots, the more the etching solution increases in the grooves being etched. This is because the exchange rate is lowered and the etching rate is slower than when the lines or dots are large in size. In addition, even in the case of double-sided etching, by drawing the design with dots or lines smaller than the punched part, even if there is a part where the design overlaps on the front and back of the metal plate as shown in Figure 7, it will not penetrate through. Since designs A and B are formed independently on each side, they are visually pleasing, and there are almost no restrictions on the selection of designs on both sides. Figure 8 is an example of double-sided etching similar to Figure 7, but in the area where the designs overlap on the front and back sides, the points or lines that make up each design on the front and back sides are made so that they do not overlap at the positions on the front and back sides. be. This method can reduce the risk of penetration due to overetching, especially when the plate thickness is thin.
図案を構成する点や径や線の幅は、板厚の2分
の1以下が適当であるが、細かい程認識される図
案の形状は良好である。また、本発明のエツチン
グ方法は、エツチングできるものならば、金属に
限らずガラス、プラスチツク等の非金属にも適応
できる。 The width of the points, diameters, and lines constituting the design is preferably one-half or less of the board thickness, but the finer the shape, the better the shape of the design will be recognized. Furthermore, the etching method of the present invention is applicable not only to metals but also to non-metals such as glass and plastics as long as they can be etched.
以上詳述した如く、本発明のエツチング方法は
図案形成と打抜きを同時に行うことを可能にした
ものであり通常のエツチング工程による処理のみ
で従来のエツチング方法に比べ、片面両面を問わ
ず自在な図案の形成を達成することができるもの
である。 As described in detail above, the etching method of the present invention makes it possible to perform pattern formation and punching at the same time, and allows for the creation of designs on either one or both sides, compared to conventional etching methods, using only a normal etching process. It is possible to achieve the formation of
第1〜5図は従来のエツチング方法による金属
板の断面図。第6〜8図は本発明のエツチング方
法による金属板の断面図。
1……金属板、2……フオトレジスト、3……
図案を構成する点または線、A……図案A、B…
…図案B、C……打抜き部。
1 to 5 are cross-sectional views of metal plates processed by conventional etching methods. 6 to 8 are cross-sectional views of metal plates processed by the etching method of the present invention. 1...Metal plate, 2...Photoresist, 3...
Points or lines that make up the design, A...Design A, B...
...Design B, C...Punching part.
Claims (1)
ングにより図案を形成する部分を打ち抜き部より
小さい多数の点または線で作成し、該フオトマス
クを、予めフオトレジストを塗布してある金属板
に合わせ、露光し、現像することにより、金属板
上に多数の点または線で図案を描き、上記方法に
より打ち抜き部とハーフエツチング部の該点また
は線に大小をつけてエツチングを行い、ハーフエ
ツチングによる図案形成と打抜きを同時に行うこ
とを特徴とするエツチング方法。 2 前記エツチングが片面エツチングであること
を特徴とする特許請求の範囲第1項に記載のエツ
チング方法。 3 前記エツチングが両面エツチングであること
を特徴とする特許請求の範囲第1項に記載のエツ
チング方法。[Scope of Claims] 1. When creating a photomask, the part where the design will be formed is created by half-etching using a large number of dots or lines smaller than the punched part, and the photomask is aligned with a metal plate that has been coated with photoresist in advance. By exposing and developing, a design is drawn with many dots or lines on a metal plate, and the above-mentioned method is used to etch the dots or lines in the punched portion and half-etched portion with different sizes, thereby creating a half-etched design. An etching method characterized by performing forming and punching at the same time. 2. The etching method according to claim 1, wherein the etching is one-sided etching. 3. The etching method according to claim 1, wherein the etching is double-sided etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4141487A JPS63210284A (en) | 1987-02-26 | 1987-02-26 | Etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4141487A JPS63210284A (en) | 1987-02-26 | 1987-02-26 | Etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63210284A JPS63210284A (en) | 1988-08-31 |
| JPH0338344B2 true JPH0338344B2 (en) | 1991-06-10 |
Family
ID=12607700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4141487A Granted JPS63210284A (en) | 1987-02-26 | 1987-02-26 | Etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63210284A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6413437B1 (en) * | 1998-06-08 | 2002-07-02 | Texas Instruments Incorporated | Fine featured photo-resist artwork design for chemical milling |
| JP4574868B2 (en) * | 2001-01-12 | 2010-11-04 | ローム株式会社 | Semiconductor device |
-
1987
- 1987-02-26 JP JP4141487A patent/JPS63210284A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63210284A (en) | 1988-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |