JPH0340314B2 - - Google Patents
Info
- Publication number
- JPH0340314B2 JPH0340314B2 JP21947286A JP21947286A JPH0340314B2 JP H0340314 B2 JPH0340314 B2 JP H0340314B2 JP 21947286 A JP21947286 A JP 21947286A JP 21947286 A JP21947286 A JP 21947286A JP H0340314 B2 JPH0340314 B2 JP H0340314B2
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- argon
- catalyst tank
- pipe
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/14—Production of inert gas mixtures; Use of inert gases in general
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、例えばアルゴン精製装置などの如
く、不活性ガス中に含まれる酸素を水素と反応さ
せて水分の形で除去し、酸素を含まないガスを得
る不活性ガス精製装置の制御方法に関するもので
ある。Detailed Description of the Invention [Industrial Field of Application] The present invention is an argon purifier, for example, in which oxygen contained in an inert gas is removed in the form of water by reacting with hydrogen, and the oxygen-containing The present invention relates to a control method for an inert gas purification device that obtains gas with no waste.
従来、この種の不活性ガス精製装置の一例とし
て第２図の如きものが知られている。アルゴン精
製装置の一例を示す第２図において、粗アルゴン
圧縮機（図示省略）などからの粗アルゴンは管４
から送入され、管５から供給される水素ガスと混
合させたのち、パラジユウム触媒槽６にて粗アル
ゴン中の酸素と添加水素を2H2＋O2→2H2Oなる
Ｒ反応を行なわせ、管７を経て脱湿塔１３にて前
記反応時発生した水分をほぼ完全に除去したの
ち、管１４アルゴン精製装置（図示省略）などの
後続装置へ供給される。
Conventionally, as an example of this type of inert gas purification apparatus, one as shown in FIG. 2 has been known. In Fig. 2, which shows an example of an argon purification device, crude argon from a crude argon compressor (not shown) is supplied to pipe 4.
After mixing with the hydrogen gas supplied from the pipe 5, the oxygen in the crude argon and the added hydrogen are subjected to the R reaction of 2H 2 + O 2 → 2H 2 O in the palladium catalyst tank 6. After passing through 7 and a dehumidification tower 13 to almost completely remove the moisture generated during the reaction, the water is supplied to subsequent equipment such as a pipe 14 and an argon purification equipment (not shown).
前記したパラジユウム触媒槽６における反応
は、発熱反応であるからアルゴンガス中の酸素の
絶対量が多い場合は発熱量も多く、少ない場合は
発熱量も少ない。 The reaction in the palladium catalyst tank 6 described above is an exothermic reaction, so when the absolute amount of oxygen in the argon gas is large, the calorific value is large, and when the absolute amount of oxygen in the argon gas is small, the calorific value is small.
一方、パラジユウム触媒槽６における反応温度
は、通常250〜300℃程度に押え乍ら運転するのが
望ましく、これよりも温度が上昇すると爆発等装
置が危険な状態になるおそれあり、反対に温度が
低下すると反応が不充分になるおそれがある。な
お、この種の装置として関連するものには、例え
ば特公昭49−4631号等が挙げられる。 On the other hand, it is desirable to maintain the reaction temperature in the palladium catalyst tank 6 at about 250 to 300 degrees Celsius during operation. If it decreases, the reaction may become insufficient. Note that related devices of this type include, for example, Japanese Patent Publication No. 49-4631.
上記従来技術は、パラジユウム触媒槽における
反応温度の制御について配慮がされておらず、誤
操作や操作忘れにより、パラジユウム触媒槽の温
度が異常に上昇し、極端な場合は爆発のおそれ
等、安全性の面で問題があつた。
The above conventional technology does not take into account the control of the reaction temperature in the palladium catalyst tank, and due to incorrect operation or forgetting to operate, the temperature of the palladium catalyst tank may rise abnormally, and in extreme cases, there is a risk of explosion, resulting in safety concerns. There was a problem on the front.
また、逆に反応温度が低下し過ぎて、反応不良
により酸素を含んだままのアルゴンが需要端へ供
給され、最終製品の多量な不良につながるおそれ
がある等、信頼性の面でも問題があつた。更に、
運転操作上非常に人手が掛るという問題もあつ
た。 On the other hand, if the reaction temperature drops too much, argon containing oxygen may be supplied to the demand end due to a poor reaction, which may lead to a large number of defects in the final product, leading to reliability problems. Ta. Furthermore,
Another problem was that it required a lot of manpower to operate.
本発明の目的は、前記従来技術による欠点を除
去した人手が掛らず安全で、しかも、安定した運
転が可能な不活性ガス精製装置の制御方法を提供
するものである。 SUMMARY OF THE INVENTION An object of the present invention is to provide a control method for an inert gas purification apparatus that eliminates the disadvantages of the prior art and allows safe and stable operation without requiring any manpower.
本発明は、パラジユウム触媒槽における発熱量
と、通過ガスに持去られる熱量とのバランスに注
目してなされたものであり、その特徴とするとこ
ろは、不活性ガス圧縮機と触媒槽を備え、酸素を
含む不活性ガスに水素ガスを添加し、触媒槽にて
不活性ガス中の酸素と添加水素を反応させて、不
活性ガス中の酸素を水分として除去する不活性ガ
ス精製装置において、前記不活性ガス圧縮機の出
口ガスを該不活性ガス圧縮機の入口側にバイパス
せしめ、前記触媒槽内の温度を検出して前記不活
性ガス圧縮機のバイパス流量を制御することにあ
る。
The present invention was made by paying attention to the balance between the calorific value in the palladium catalyst tank and the amount of heat carried away by the passing gas, and its features include an inert gas compressor and a catalyst tank, In an inert gas purification device that adds hydrogen gas to an inert gas containing oxygen, and causes the oxygen in the inert gas to react with the added hydrogen in a catalyst tank to remove the oxygen in the inert gas as moisture, The present invention is to bypass the outlet gas of the inert gas compressor to the inlet side of the inert gas compressor, detect the temperature in the catalyst tank, and control the bypass flow rate of the inert gas compressor.
パラジユウム触媒槽に検出端を有する温度調節
計において、検出温度が設定値より低下すると、
自動調節弁の開度を増大させて不活性ガス圧縮機
のバイパス流量を増加させることにより、パラジ
ユウム触媒槽へ流入する不活性ガス流量が減少す
るため、触媒槽より不活性ガスにより持去られる
熱量が減少して温度低下は抑制される。反対に温
度調節計検出温度が設定値より上昇すると、自動
調節弁の開度を減少させて不活性ガス圧縮機のバ
イパス流量を減少させることにより、パラジユウ
ム触媒槽へ流入する不活性ガス流量が増大するた
め、触媒槽より不活性ガスにより持去られる熱量
が増大して温度上昇は抑制される。これらの操作
は自動的に行なわれるため、人手を必要とせず、
かつ、誤操作のおそれもない。
In a temperature controller that has a detection end in a palladium catalyst tank, when the detected temperature falls below the set value,
By increasing the opening degree of the automatic control valve and increasing the bypass flow rate of the inert gas compressor, the flow rate of inert gas flowing into the palladium catalyst tank is reduced, so the amount of heat carried away by the inert gas from the catalyst tank is reduced. decreases, and the temperature drop is suppressed. On the other hand, when the temperature detected by the temperature controller rises above the set value, the opening degree of the automatic control valve is reduced and the bypass flow rate of the inert gas compressor is reduced, thereby increasing the flow rate of inert gas flowing into the palladium catalyst tank. Therefore, the amount of heat removed from the catalyst tank by the inert gas increases and the temperature rise is suppressed. These operations are performed automatically, so no human intervention is required.
Moreover, there is no risk of erroneous operation.
以下、本発明の一実施例を粗アルゴン精製装置
について第１図により説明する。
Hereinafter, one embodiment of the present invention will be described with reference to FIG. 1 regarding a crude argon purification apparatus.
第１図において、粗アルゴン精溜塔（図示省
略）などからの粗アルゴンガスは管１から送入さ
れ、管２を経てアルゴン圧縮機３にて装置の運転
上必要とする圧力、例えば１Kg／cm2Ｇまで昇圧さ
れ、管４にて管５から供給される水素ガスを混合
したのち、パラジユウム触媒槽６にて粗アルゴン
中の酸素と添加水素を2H2＋O2→2H2Oなる反応
を行なわせ、管７を経てアルゴン予冷器８にて管
９から供給される冷却水により冷却することによ
り、前記反応時に発生した水分を凝縮させ、ドレ
ーンの形でドレーントラツプ１０から排出除去さ
れる。一方、アルゴンガスは管１１より管１２を
経て脱湿塔１３にて水分をほほ完全に除去したの
ち、管１４よりアルゴン精溜塔（図示省略）など
の後続装置へ供給される。 In FIG. 1, crude argon gas from a crude argon rectification column (not shown) is fed through a pipe 1, passes through a pipe 2, and is sent to an argon compressor 3 to meet the pressure required for the operation of the device, for example, 1 kg/kg. After the pressure is increased to cm 2 G and hydrogen gas supplied from tube 5 is mixed in tube 4, oxygen in crude argon and added hydrogen are reacted in palladium catalyst tank 6 as 2H 2 +O 2 →2H 2 O. The water generated during the reaction is condensed by cooling with cooling water supplied from a pipe 9 in an argon precooler 8 via a pipe 7, and is discharged and removed from a drain trap 10 in the form of a drain. On the other hand, the argon gas passes from the pipe 11 to the pipe 12, and after almost completely removing water in the dehumidification tower 13, it is supplied from the pipe 14 to a subsequent device such as an argon rectification tower (not shown).
前記のパラジユウム触媒槽６における反応は発
熱反応であるから、アルゴンガス中の酸素の絶対
量が多い場合は発熱量も多く、少ない場合は発熱
量も少ない。一方、パラジユウム触媒槽６におけ
る反応温度は通常250〜300℃程度に押えながら運
転する必要があり、これよりも温度が上昇すると
装置が危険な状態になり、低下すると反応不充分
となるおそれがある。 Since the reaction in the palladium catalyst tank 6 is an exothermic reaction, when the absolute amount of oxygen in the argon gas is large, the calorific value is large, and when the absolute amount of oxygen in the argon gas is small, the calorific value is small. On the other hand, the reaction temperature in the palladium catalyst tank 6 must normally be maintained at around 250 to 300°C during operation; if the temperature rises above this temperature, the equipment will be in a dangerous state, and if it falls below this temperature, the reaction may become insufficient. .
反応温度の異常上昇防止のために、アルゴン圧
縮機３の容量は、管１より供給される粗アルゴン
ガス量、すなわち、装置の処理容量の例えば1.5
〜3.0倍程度の容量を選定し、管１５、自動調節
弁１６、管１７からなる循環回路を設けると共
に、圧力調節計１８を設け、管２の圧力が圧力調
節計１８の設定値よりも高い場合は自動調節弁１
６の開度を減少させ、反対に低い場合はその開度
を増大させるごとく作動することにより、その循
環量は常にアルゴン圧縮機３の容量マイナス粗ア
ルゴン供給量となる如く自動制御される。 In order to prevent an abnormal rise in reaction temperature, the capacity of the argon compressor 3 is set to 1.5, for example, the amount of crude argon gas supplied from the pipe 1, that is, the processing capacity of the apparatus.
~3.0 times the capacity is selected, and a circulation circuit consisting of a pipe 15, an automatic control valve 16, and a pipe 17 is provided, and a pressure regulator 18 is also provided, so that the pressure in pipe 2 is higher than the set value of the pressure regulator 18. If automatic control valve 1
By decreasing the opening degree of the argon compressor 6 and increasing the opening degree when the opening degree is low, the circulating amount is automatically controlled so as to always be equal to the capacity of the argon compressor 3 minus the crude argon supply amount.
このように構成することにより、もし、管１か
ら送入される粗アルゴンガスに含まれる酸素の濃
度が上昇しても、管１７からの酸素を含まないア
ルゴンガスにより約1.5〜3.0倍に薄められるた
め、パラジユウム触媒槽６における温度の上昇は
1.5〜3.0分の１に押えられる。 With this configuration, even if the concentration of oxygen contained in the crude argon gas fed from the pipe 1 increases, it will be diluted to about 1.5 to 3.0 times by the oxygen-free argon gas from the pipe 17. Therefore, the temperature rise in the palladium catalyst tank 6 is
It can be suppressed to 1.5 to 3.0 times less.
上述とは反対に、反応温度の低下防止について
説明する。粗アルゴン中の酸素濃度が低下した場
合は、発熱量も少なくなるので、パラジユウム触
媒槽６を通過するアルゴンガスの量が一定の場合
は、発熱量に比しガスに持去られる熱量が増える
ため、反応温度は必然的に低下する。 Contrary to the above, prevention of a decrease in reaction temperature will be explained. When the oxygen concentration in crude argon decreases, the calorific value also decreases, so if the amount of argon gas passing through the palladium catalyst tank 6 is constant, the amount of heat carried away by the gas increases compared to the calorific value. , the reaction temperature necessarily decreases.
この対策として、本発明ではアルゴン圧縮機３
に管１９、自動調節弁２３、管２１よりなるバイ
パス回路を設けると共に、パラジユウム触媒槽６
に検出端を有する温度調節計２４を設け、その設
定値よりも検出度が低下した場合は自動調節弁２
３の開度を自動的に増大せしめ、管１９、自動調
節弁２３、管２１とを流すアルゴン圧縮機３のバ
イパス流量を増大させる。この結果、パラジユウ
ム触媒槽６へ流入するアルゴンガスの流量が減少
されるため、温度低下は自動的に押えられる。 As a countermeasure against this, in the present invention, the argon compressor 3
A bypass circuit consisting of a pipe 19, an automatic control valve 23, and a pipe 21 is provided, and a palladium catalyst tank 6 is provided.
A temperature controller 24 having a detection end is provided at
The bypass flow rate of the argon compressor 3 through which the pipe 19, automatic control valve 23, and pipe 21 flow is increased. As a result, the flow rate of argon gas flowing into the palladium catalyst tank 6 is reduced, so that the temperature drop is automatically suppressed.
反対に検出温度が設定値より上昇した場合は、
温度調節計２４の作用により自動調節弁２３の開
度は自動的に減少せられるため、パラジユウム触
媒槽６に対する流入アルゴンガスは増加して温度
上昇は自動的に押えられる。 Conversely, if the detected temperature rises above the set value,
Since the opening degree of the automatic control valve 23 is automatically reduced by the action of the temperature controller 24, the amount of argon gas flowing into the palladium catalyst tank 6 increases, and the temperature rise is automatically suppressed.
〔発明の効果〕
本発明によれば、パラジユウム触媒槽の温度は
自動的に制御されるので従来技術の欠点を除去し
た人手が掛らず、温度上昇による爆発等のおそれ
がなく、安全でしかも操作ミスがなく安定した運
転が可能な不活性ガス精製装置の制御方法を提供
することができる。[Effects of the Invention] According to the present invention, the temperature of the palladium catalyst tank is automatically controlled, which eliminates the disadvantages of the prior art, does not require manual labor, eliminates the risk of explosion due to temperature rise, and is safe. It is possible to provide a control method for an inert gas purification device that allows stable operation without operational errors.
第１図は本発明による不活性ガス精製装置の制
御方法の一実施例を示す系統図、第２図は従来技
術によるアルゴン精製装置の一例を示す系統図で
ある。
１，２，４，５，７，９，１１，１２，１４，
１５，１７，１９，２１……管、３……アルゴン
圧縮機、６……パラジユウム触媒槽、８……アル
ゴン予冷器、１０……ドレーントラツプ、１３…
…脱湿塔、１６，２３……自動調節弁、１８……
圧力調節計、２４……温度調節計。
FIG. 1 is a system diagram showing an embodiment of the control method for an inert gas purification apparatus according to the present invention, and FIG. 2 is a system diagram showing an example of an argon purification apparatus according to the prior art. 1, 2, 4, 5, 7, 9, 11, 12, 14,
15, 17, 19, 21... pipe, 3... argon compressor, 6... palladium catalyst tank, 8... argon precooler, 10... drain trap, 13...
...Dehumidification tower, 16, 23...Automatic control valve, 18...
Pressure controller, 24...temperature controller.
Claims (1)
む不活性ガスに水素ガスを添加し、触媒槽にて不
活性ガス中の酸素と添加水素を反応させて、不活
性ガス中の酸素を水分として除去する不活性ガス
精製装置において、前記不活性ガス圧縮機の出口
ガスを該不活性ガス圧縮機の入口側にバイパスせ
しめ、前記触媒槽内の温度を検出して前記不活性
ガス圧縮機のバイパス流量を制御することを特徴
とする不活性ガス精製装置の制御方法。1 Equipped with an inert gas compressor and a catalyst tank, hydrogen gas is added to the inert gas containing oxygen, and the oxygen in the inert gas reacts with the added hydrogen in the catalyst tank to convert the oxygen in the inert gas. In an inert gas purification device that removes water as water, the outlet gas of the inert gas compressor is bypassed to the inlet side of the inert gas compressor, the temperature inside the catalyst tank is detected, and the inert gas compressor is A method for controlling an inert gas purification device, the method comprising: controlling a bypass flow rate of an inert gas purifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21947286A JPS6377539A (en) | 1986-09-19 | 1986-09-19 | Control method for inert gas purification equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21947286A JPS6377539A (en) | 1986-09-19 | 1986-09-19 | Control method for inert gas purification equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6377539A JPS6377539A (en) | 1988-04-07 |
| JPH0340314B2 true JPH0340314B2 (en) | 1991-06-18 |
Family
ID=16735964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21947286A Granted JPS6377539A (en) | 1986-09-19 | 1986-09-19 | Control method for inert gas purification equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6377539A (en) |
-
1986
- 1986-09-19 JP JP21947286A patent/JPS6377539A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6377539A (en) | 1988-04-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |