JPH0363050B2 - - Google Patents
Info
- Publication number
- JPH0363050B2 JPH0363050B2 JP56195458A JP19545881A JPH0363050B2 JP H0363050 B2 JPH0363050 B2 JP H0363050B2 JP 56195458 A JP56195458 A JP 56195458A JP 19545881 A JP19545881 A JP 19545881A JP H0363050 B2 JPH0363050 B2 JP H0363050B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- optical waveguide
- light
- film optical
- guided light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/335—Acousto-optical deflection devices having an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/295—Analog deflection from or in an optical waveguide structure]
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
- G02F2201/305—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating diffraction grating
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Description
【発明の詳細な説明】
この発明は例えば音響光学効果や熱光学効果を
利用して、２次元的に導波光を偏向できるように
した薄膜型２次元光偏向器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin film type two-dimensional optical deflector that can two-dimensionally deflect guided light by utilizing, for example, an acousto-optic effect or a thermo-optic effect.
従来の薄膜光偏向器は、例えば第１図に示すよ
うに圧電体基板１の表面に薄膜状に形成された薄
膜光導波路２と、この薄膜光導波路２表面に形成
された櫛型電極３（以下IDTと称す）と、入射光
を薄膜光導波路２内へ導入するグレーテイングカ
プラ４とから概略形成されている。 For example, as shown in FIG. 1, a conventional thin film optical deflector includes a thin film optical waveguide 2 formed in the form of a thin film on the surface of a piezoelectric substrate 1, and a comb-shaped electrode 3 ( (hereinafter referred to as IDT) and a grating coupler 4 that introduces incident light into the thin film optical waveguide 2.
上記のような薄膜光偏向器において、グレーテ
イングカプラ４からレーザ等の光を薄膜光導波路
２内に入射させ、上記IDT３に高周波電圧を印加
すると、IDT３によつて発生される弾性表面波５
（以下SAWと称する）によつて導波光６はブラツ
グ回折現象により偏向されて出射される。 In the thin film optical deflector as described above, when light such as a laser is made to enter the thin film optical waveguide 2 from the grating coupler 4 and a high frequency voltage is applied to the IDT 3, a surface acoustic wave 5 generated by the IDT 3 is generated.
(hereinafter referred to as SAW), the guided light 6 is deflected by the Bragg diffraction phenomenon and is emitted.
すなわち、導波光６の波長をλ，SAW５の波
長をΛ，導波光６の入射角度をθとすれば、ブラ
ツグの式
θ＝arcsin（λ／2Λ） …(1)
を満足するように入射角度θを設定することによ
り、導波光６はSAW５によつて同じくθの角度
で出射されることとなる。 In other words, if the wavelength of the guided light 6 is λ, the wavelength of the SAW 5 is Λ, and the angle of incidence of the guided light 6 is θ, then the angle of incidence is set so as to satisfy Bragg's equation θ=arcsin(λ/2Λ)...(1) By setting θ, the guided light 6 will be emitted by the SAW 5 at the same angle of θ.
そして、IDT３に印加する高周波電圧の周波数
を掃引させることによつて、上記出射角度θをθ2
の角度範囲で偏向方向を変化させることができ
る。 Then, by sweeping the frequency of the high-frequency voltage applied to the IDT 3, the above emission angle θ is changed to θ 2
The deflection direction can be changed within an angular range of .
しかし、上記のような構造の薄膜光偏向器にあ
つては導波光の偏向方向が１次元（直線）的であ
るためその用途には限界がある。 However, since the deflection direction of the guided light is one-dimensional (linear) in the thin film optical deflector having the above structure, there is a limit to its use.
従つて、現在普及し始めたレーザ光を利用した
バーコードリーダやレーザプリンタ，フアクシミ
リ等の２次元スキヤンを必要とする機器にあつて
は、回転ミラーや振動ミラー等を用いた機械的な
２次元スキヤン構造のみしかなく、その構造の複
雑さや高速性及び信頼性が低い、小型化に限界が
ある等の問題を有している。 Therefore, for devices that require two-dimensional scanning, such as barcode readers, laser printers, and facsimiles that use laser light, which are now becoming popular, mechanical two-dimensional scanning using rotating mirrors, vibrating mirrors, etc. There is only a scan structure, and there are problems such as the complexity of the structure, low speed and reliability, and there is a limit to miniaturization.
この発明は上記問題点に鑑みなされたもので、
薄膜光偏向器における２次元光偏向を可能とし、
２次元スキヤナに応用できる薄膜型２次元光偏向
器を提供することを目的とする。 This invention was made in view of the above problems.
Enables two-dimensional optical deflection in a thin film optical deflector,
The purpose of the present invention is to provide a thin film type two-dimensional optical deflector that can be applied to a two-dimensional scanner.
以下この発明の一実施例を第２図以下の図面を
用いて詳細に説明する。 Hereinafter, one embodiment of the present invention will be described in detail with reference to FIG. 2 and the following drawings.
第２図に示すように、この実施例の薄膜型２次
元光偏向器は、ニオブ酸リチウム（LiNbO3）単
結晶等の圧電体基板１１表面にチタン（Ti）を
熱拡散させて形成された薄膜光導波路１２と、こ
の薄膜光導波路１２表面の一側部に形成された
IDT１４と、入射光を薄膜光導波路１２内へ導入
するグレーテイングカプラ１３と、薄膜光導波路
１２の光出射端部１２ａ表面にNi−Cr等の蒸着
等により一定幅の帯状に形成された発熱体１５と
から概略構成されている。 As shown in FIG. 2, the thin film type two-dimensional optical deflector of this embodiment is formed by thermally diffusing titanium (Ti) onto the surface of a piezoelectric substrate 11 such as lithium niobate (LiNbO 3 ) single crystal. The thin film optical waveguide 12 and the thin film optical waveguide 12 formed on one side of the surface thereof.
IDT 14, a grating coupler 13 that introduces incident light into the thin film optical waveguide 12, and a heating element formed in a band shape of a constant width by vapor deposition of Ni-Cr or the like on the surface of the light output end 12a of the thin film optical waveguide 12. It is roughly composed of 15.
上記のように構成された薄膜光偏向器におい
て、グレーテイングカプラ１３からブラツグの式
(1)を満たす入射角度θで入射された導波光１６
は、IDT１４に印加される高周波電圧１８によつ
て発生するSAW１９によりブラツグ回折され、
薄膜光導波路１２面に対し平行方向へ偏向され
る。 In the thin film optical deflector configured as described above, from the grating coupler 13, Bragg's equation
Guided light 16 incident at an incident angle θ that satisfies (1)
is Bragg diffracted by the SAW 19 generated by the high frequency voltage 18 applied to the IDT 14,
It is deflected in a direction parallel to the plane of the thin film optical waveguide 12.
次に上記発熱体１５に直流電圧１７を印加する
と、この発熱体１５によつて加熱された薄膜光導
波路１２の屈折率が増加する。この屈折率増加度
は加熱温度が高い程大となるので発熱体１５に近
い程屈折率が大きい。すなわち、第３図に示すよ
うに薄膜光導波路１２の光出射端部１２ａに仮想
プリズム２１が形成されたと考えることができ
る。 Next, when a DC voltage 17 is applied to the heating element 15, the refractive index of the thin film optical waveguide 12 heated by the heating element 15 increases. The degree of increase in the refractive index increases as the heating temperature increases, so the closer the heating element 15 is, the higher the refractive index becomes. That is, it can be considered that a virtual prism 21 is formed at the light output end 12a of the thin film optical waveguide 12 as shown in FIG.
従つて上記SAW１９によつて偏向された導波
光２０は、上記仮想プリズム２１によつて屈折さ
れた後、出射され、薄膜光導波路１２面に対し垂
直方向に偏向されることとなる。 Therefore, the guided light 20 deflected by the SAW 19 is refracted by the virtual prism 21 and then emitted, and is deflected in a direction perpendicular to the surface of the thin film optical waveguide 12.
そして、上記発熱体１５に印加される直流電圧
１７を可変して発熱体１５の発熱量を変化させる
ことによつて上記光出射端部１２ａの屈折率を可
変させることができる。すなわち、第３図に示す
ように発熱体１５の発熱量の増加に伴つて仮想プ
リズム２１の屈折率増加部分はａ→ｂ→ｃのよう
に増大して光出射角θ3が増すこととなる。 By varying the DC voltage 17 applied to the heating element 15 to change the amount of heat generated by the heating element 15, the refractive index of the light emitting end 12a can be varied. That is, as shown in FIG. 3, as the heat generation amount of the heating element 15 increases, the refractive index increasing portion of the virtual prism 21 increases from a to b to c, and the light output angle θ 3 increases. .
上記のようにしてIDT１４に印加する高周波電
圧の周波数と発熱体１５の発熱量を適宜に可変さ
せることによつて導波光の２次元光偏向における
偏向方向を自由に変えることができる。 By appropriately varying the frequency of the high-frequency voltage applied to the IDT 14 and the amount of heat generated by the heating element 15 as described above, the direction of two-dimensional optical deflection of the guided light can be freely changed.
以上説明したように本発明の薄膜型２次元光偏
向器にあつては、その薄膜光導波路面に対して平
行方向と垂直方向に導波光２次元光偏向すること
ができるとともに、固体素子を用いて小型で簡単
な構造で形成できることから、この発明の薄膜型
２次元光偏向器をレザー２次元スキヤナ等の２次
元スキヤンの必要な機器に応用することにより、
これらの機器自体を小型化、簡単化でき、かつ信
頼性を向上させることができる等の利点を有して
いる。 As explained above, the thin-film type two-dimensional optical deflector of the present invention is capable of two-dimensionally deflecting guided light in parallel and perpendicular directions to the thin-film optical waveguide surface, and also uses a solid-state element. Since it can be formed with a compact and simple structure, the thin film type two-dimensional optical deflector of the present invention can be applied to equipment that requires two-dimensional scanning, such as a laser two-dimensional scanner.
These devices themselves have advantages such as being able to be made smaller and simpler, and having improved reliability.
また、この発明では、第１の偏向手段により偏
向された導波光を第２の偏向手段によつて電気的
に偏向するので、偏向角度や偏向速度の制御が容
易であり、しかも光導波路を固定した状態で光を
偏向するので、従来に比して導波光の偏向精度が
向上するという効果を有する。 Further, in this invention, since the guided light deflected by the first deflection means is electrically deflected by the second deflection means, it is easy to control the deflection angle and deflection speed, and the optical waveguide is fixed. Since the light is deflected in this state, the deflection accuracy of the guided light is improved compared to the conventional method.
第１図は従来の薄膜光偏向器を示す概略構成
図、第２図は本発明の薄膜型２次元光偏向器の一
実施例を示す概略構成図、第３図はその光出射端
部の拡大説明図である。
１２……薄膜光導波路、１４……IDT、１５…
…発熱体。
FIG. 1 is a schematic configuration diagram showing a conventional thin film optical deflector, FIG. 2 is a schematic configuration diagram showing an embodiment of the thin film type two-dimensional optical deflector of the present invention, and FIG. It is an enlarged explanatory diagram. 12... Thin film optical waveguide, 14... IDT, 15...
...heating element.
Claims (1)
光導波路面に対し平行な面内で偏向させる第１の
偏向手段と、 前記薄膜光導波路の光出射端部表面上に設けら
れ、電気エネルギーを受けて、前記光導波路中に
光の屈折率分布を形成するとともに、電気エネル
ギーの大きさに応じて前記光の屈折率分布を変化
させることにより、前記第１の偏向手段により偏
向された導波光を前記薄膜光導波路面に対して垂
直な面内で偏向させる第２の偏向手段と、を備
え、 前記光導波路を固定した状態で光を２次元に偏
向することを特徴とする薄膜型２次元光偏向器。[Scope of Claims] 1. A first deflection means for deflecting guided light propagating in a thin film optical waveguide in a plane parallel to the surface of the thin film optical waveguide; The first deflecting means is provided, receives electrical energy, forms a refractive index distribution of light in the optical waveguide, and changes the refractive index distribution of the light according to the magnitude of the electrical energy. a second deflection means for deflecting the guided light deflected by the thin-film optical waveguide in a plane perpendicular to the plane of the thin-film optical waveguide, and deflects the light two-dimensionally with the optical waveguide fixed. A thin film type two-dimensional optical deflector.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19545881A JPS5897027A (en) | 1981-12-04 | 1981-12-04 | Thin film type two dimensional optical deflector |
| US06/818,915 US4762383A (en) | 1981-12-04 | 1986-01-15 | Two dimensional light beam deflectors utilizing thermooptical effect and method of using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19545881A JPS5897027A (en) | 1981-12-04 | 1981-12-04 | Thin film type two dimensional optical deflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5897027A JPS5897027A (en) | 1983-06-09 |
| JPH0363050B2 true JPH0363050B2 (en) | 1991-09-27 |
Family
ID=16341400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19545881A Granted JPS5897027A (en) | 1981-12-04 | 1981-12-04 | Thin film type two dimensional optical deflector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5897027A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59147327A (en) * | 1983-02-10 | 1984-08-23 | Omron Tateisi Electronics Co | Optical deflector |
| CN106842760B (en) * | 2017-03-08 | 2019-10-15 | 暨南大学 | A lithium niobate waveguide for beam deflection using array electrodes and its manufacturing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6029092B2 (en) * | 1976-07-21 | 1985-07-09 | オリンパス光学工業株式会社 | two-dimensional optical scanner |
-
1981
- 1981-12-04 JP JP19545881A patent/JPS5897027A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5897027A (en) | 1983-06-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4767170A (en) | Optical deflector device | |
| US4762383A (en) | Two dimensional light beam deflectors utilizing thermooptical effect and method of using same | |
| WO1991003000A1 (en) | Optical deflector | |
| JPH0363050B2 (en) | ||
| US5657152A (en) | Acoustooptic device | |
| JP2603086B2 (en) | Optical waveguide device | |
| JPH08328050A (en) | Optical scanning element, optical scanning method and image forming device using the same | |
| JPS58130327A (en) | Two-dimensional optical deflector | |
| JPS58125025A (en) | Two-dimensional optical deflector | |
| JPH01107213A (en) | Optical waveguide element | |
| US5706370A (en) | Optical deflection scanning device | |
| JPH0234011B2 (en) | ||
| JPS58125024A (en) | Two-dimensional optical deflector | |
| JPH0778586B2 (en) | Light deflection device | |
| JPS60112023A (en) | Light wavelength conversion element | |
| JPS58125023A (en) | Two-dimensional optical deflector | |
| JPS58137824A (en) | Two dimensional light deflector | |
| JPS62238537A (en) | Two-dimensional optical deflecting device | |
| JPS62244024A (en) | Two-dimensional optical deflector | |
| JPH0786625B2 (en) | Light deflection device | |
| JPH09146129A (en) | Optical scanner and image forming device | |
| JPS58115424A (en) | Optical deflection element | |
| JPH0431805A (en) | Method for inputting light to optical waveguide and method for outputting light therefrom | |
| JPH11281831A (en) | Grating coupler | |
| JPH01178918A (en) | Waveguide type optical modulator |