JPH0364724B2 - - Google Patents
Info
- Publication number
- JPH0364724B2 JPH0364724B2 JP58163547A JP16354783A JPH0364724B2 JP H0364724 B2 JPH0364724 B2 JP H0364724B2 JP 58163547 A JP58163547 A JP 58163547A JP 16354783 A JP16354783 A JP 16354783A JP H0364724 B2 JPH0364724 B2 JP H0364724B2
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- vacuum
- piston
- rod
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Actuator (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本装置は、真空装置内に外部より往復運動を伝
達するための装置である。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This device is a device for transmitting reciprocating motion from the outside into a vacuum device.
従来例の構成とその問題点
従来、真空装置内に外部から往復運動を伝達さ
せる装置としては第１図のように、直接シリンダ
１を真空容器２にフランジ３を介して取りつけて
いた。しかしこの方法であると、シリンダロツド
４が動作するたびに、シリンダ１の潤滑油が真空
容器２内でガス化するため、真空度が悪化すると
いう現象が起きていた。Conventional Structure and its Problems Conventionally, as a device for transmitting reciprocating motion from the outside into a vacuum device, a cylinder 1 was directly attached to a vacuum vessel 2 via a flange 3, as shown in FIG. However, with this method, the lubricating oil in the cylinder 1 gasifies in the vacuum container 2 every time the cylinder rod 4 operates, resulting in a worsening of the degree of vacuum.
発明の目的
本発明は従来の欠点に鑑み、あらかじめストロ
ーク分だけのロツド部分の潤滑油をガス化して取
り去り、真空容器内の真空度への悪影響を低減す
るものである。OBJECTS OF THE INVENTION In view of the drawbacks of the prior art, the present invention is to gasify and remove the lubricating oil from the rod portion corresponding to the stroke in advance, thereby reducing the adverse effect on the degree of vacuum within the vacuum vessel.
発明の構成
本発明は、シリンダのロツド突出部分の前面に
真空引き可能でしかもシリンダのストロークと同
一かそれ以上の摺動方向への長さを有する真空室
を有し、前記真空室内をシリンダロツドが貫通し
ているよう構成されており、部屋はシール材によ
り隔離されている。Structure of the Invention The present invention has a vacuum chamber on the front surface of the protruding portion of the rod of the cylinder that can be evacuated and has a length in the sliding direction that is equal to or longer than the stroke of the cylinder, and the cylinder rod is inserted into the vacuum chamber. It has a penetrating structure, and the rooms are isolated by sealing material.
実施例の説明
以下本発明の実施例について図面を参照しなが
ら説明する。DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第２図は本発明による真空装置用往復動シリン
ダである。シリンダ５内にはピストン６が摺動
し、ピストン６にはＯリング７がはめこまれてい
る。またピストン６にはロツド８が固定されてお
り、シリンダ５にもＯリング９が挿入されてい
る。一方Ｏリング１０を介してリアプレート１１
がシリンダ５に固定されている。穴１２，１３は
エア導入排気口である。 FIG. 2 shows a reciprocating cylinder for a vacuum device according to the present invention. A piston 6 slides within the cylinder 5, and an O-ring 7 is fitted into the piston 6. Further, a rod 8 is fixed to the piston 6, and an O-ring 9 is inserted into the cylinder 5 as well. On the other hand, the rear plate 11 is inserted through the O-ring 10.
is fixed to the cylinder 5. Holes 12 and 13 are air introduction and exhaust ports.
シリンダ５には真空室１４が固定されており、
Ｏリング１５を介してロツド８が貫通している。
穴１６は真空ポンプ１７に連結されている。真空
室１４は真空槽１８に固定されている。 A vacuum chamber 14 is fixed to the cylinder 5,
Rod 8 penetrates through O-ring 15.
Hole 16 is connected to a vacuum pump 17. Vacuum chamber 14 is fixed to vacuum chamber 18 .
発明の効果
本発明により高真空を必要とする真空槽内で往
復動力を供給可能となり、一方シリンダの潤滑油
量を制限することなく使用することが可能となつ
た。Effects of the Invention The present invention has made it possible to supply reciprocating power within a vacuum chamber that requires high vacuum, and on the other hand, it has become possible to use the cylinder without limiting the amount of lubricating oil.
第１図は従来の真空装置へ取りつけたエアシリ
ンダの断面図、第２図は本発明の一実施例におけ
る真空装置用エアシリンダの断面図である。
６…ピストン、５…シリンダ、８…ロツド、１
４…真空室。
FIG. 1 is a sectional view of an air cylinder attached to a conventional vacuum device, and FIG. 2 is a sectional view of an air cylinder for a vacuum device according to an embodiment of the present invention. 6... Piston, 5... Cylinder, 8... Rod, 1
4...Vacuum chamber.
Claims (1)
復動可能なよう収納したシリンダと、前記ピスト
ンと連結され、真空装置内に作動力を伝達可能な
ピストンロツドと、前記シリンダと前記真空装置
との間に設けられ、内部を真空引き可能なよう構
成され、前記シリンダーロツドが摺動可能な貫通
孔を有し、前記シリンダのストロークと同一長さ
かそれ以上の長さを有する真空室とからなる真空
装置用往復動シリンダ。1. A reciprocating piston, a cylinder housing the piston so that it can reciprocate, a piston rod connected to the piston and capable of transmitting operating force into the vacuum device, and between the cylinder and the vacuum device. a vacuum chamber configured to be able to draw a vacuum inside, having a through hole through which the cylinder rod can slide, and having a length equal to or longer than the stroke of the cylinder; Reciprocating cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58163547A JPS6057004A (en) | 1983-09-05 | 1983-09-05 | Reciprocating cylinder for vacuum apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58163547A JPS6057004A (en) | 1983-09-05 | 1983-09-05 | Reciprocating cylinder for vacuum apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6057004A JPS6057004A (en) | 1985-04-02 |
| JPH0364724B2 true JPH0364724B2 (en) | 1991-10-08 |
Family
ID=15775964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58163547A Granted JPS6057004A (en) | 1983-09-05 | 1983-09-05 | Reciprocating cylinder for vacuum apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057004A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6293505A (en) * | 1985-10-16 | 1987-04-30 | Teru Saamuko Kk | Air cylinder with bellows seal |
| DE3601164A1 (en) * | 1986-01-17 | 1987-07-23 | Festo Kg | WORK CYLINDER ARRANGEMENT |
| JPS62174102U (en) * | 1986-04-25 | 1987-11-05 | ||
| JPH0648162Y2 (en) * | 1987-01-26 | 1994-12-12 | 日電アネルバ株式会社 | Vacuum chamber linear motion introduction machine |
| JPS63188310U (en) * | 1987-05-28 | 1988-12-02 | ||
| JPH0187304U (en) * | 1987-12-01 | 1989-06-09 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142705A (en) * | 1974-09-30 | 1976-04-12 | Universal Oil Prod Co | Tankasuisono tenkaho |
| JPS6024087Y2 (en) * | 1980-08-12 | 1985-07-18 | 石川島芝浦機械株式会社 | Extension leveling plate mounting device |
-
1983
- 1983-09-05 JP JP58163547A patent/JPS6057004A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6057004A (en) | 1985-04-02 |
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