JPH0373638B2 - - Google Patents
Info
- Publication number
- JPH0373638B2 JPH0373638B2 JP16375086A JP16375086A JPH0373638B2 JP H0373638 B2 JPH0373638 B2 JP H0373638B2 JP 16375086 A JP16375086 A JP 16375086A JP 16375086 A JP16375086 A JP 16375086A JP H0373638 B2 JPH0373638 B2 JP H0373638B2
- Authority
- JP
- Japan
- Prior art keywords
- sealing
- strip
- strip material
- sealing device
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、鋼板、フイルム等の帯状材を真空
又は高圧処理室で連続的に処理するためのシール
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a sealing device for continuously processing strip materials such as steel plates and films in a vacuum or high-pressure processing chamber.
［従来の技術］
従来、ブロアー、タービン等の回転軸のシール
機構としてラビリンスシールが知られている。[Prior Art] Labyrinth seals are conventionally known as sealing mechanisms for rotating shafts of blowers, turbines, and the like.
［発明の解決しようとする問題点］
上記ラビリンスシールを、帯状材を例えば真空
処理室に導く過程で大気とのシール装置として用
いようとすると、第４図に示す構成となる。帯状
材１を上下から挟んでシール材２，２が多段に設
けられている。シール材２，２の先端と帯状材１
との〓間３はできるだけ小さいことが望ましい。
しかし〓間３を小さくすると搬送される帯状材１
と接触して帯状材に疵をつけるおそれがある。ま
た、この図に示す直通型のラビリンスシールでは
「吹抜け」と呼ばれる流れ４が多くシール効果が
よくない等の問題がある。[Problems to be Solved by the Invention] When the labyrinth seal described above is used as a sealing device with the atmosphere during the process of guiding a strip material to, for example, a vacuum processing chamber, the configuration is shown in FIG. 4. Seal materials 2, 2 are provided in multiple stages, sandwiching the strip material 1 from above and below. Tips of sealing materials 2, 2 and strip material 1
It is desirable that the distance 3 between and 3 is as small as possible.
However, if the distance 3 is reduced, the belt material 1 to be conveyed
There is a risk of damage to the strip material due to contact with the material. Further, the direct type labyrinth seal shown in this figure has problems such as a large amount of flow 4 called "blow-through" and poor sealing effect.
この発明は、上記のような問題点を解消できる
ようにしたシール装置を提供することを目的とす
るものである。 SUMMARY OF THE INVENTION An object of the present invention is to provide a sealing device that can solve the above problems.
［問題点を解決するための手段、作用］
帯状材を上下から挟むように該帯状材の進行方
向に直交して配設された弾性材からなる板状のシ
ール材の帯状材に向く先端部を変形しやすいよう
に順次薄肉とすると共に、漏洩流体に対向する面
に該漏洩流体の流れを乱す凹状溝を形成する。[Means and actions for solving the problem] A tip end facing the band-shaped material of a plate-shaped sealing material made of an elastic material disposed perpendicular to the traveling direction of the band-shaped material so as to sandwich the band-shaped material from above and below. The walls are made gradually thinner so that they can be easily deformed, and concave grooves are formed on the surface facing the leaked fluid to disturb the flow of the leaked fluid.
弾性体からなるシール材の先端部が変形しやす
いように順次薄肉になつているので、帯状材に接
触することがあつても、帯状材に疵をつけること
がない。又漏洩流体の流れを乱す凹状溝が形成さ
れているので、吹抜けを防止することができる。 Since the end portion of the sealing material made of an elastic body is gradually thinned so as to be easily deformed, even if it comes into contact with the strip-shaped material, it will not damage the strip-shaped material. Furthermore, since a concave groove is formed to disturb the flow of leaked fluid, blow-by can be prevented.
［実施例］
本発明の一実施例を第１図により説明する。シ
ール装置１０は、帯状材１を上下から挟むよう
に、帯状材の進行方向に直交して設けられてい
る。シール装置１０は、ベース１１に弾性材から
なる板状シール材１２を設けて構成されている。
板状シール１２の材料は、ゴム、PTFF、ポリエ
チレン材、カーボン材などが適当であり、その硬
度はゴム硬度で60゜〜90゜となつている。そして板
状シール１２の帯状材１に向く先端部１３は変形
しやすいように順次薄肉に形成されている。また
漏洩流体４に対向する面にこの漏洩流体の流れを
乱す凹状溝１４が形成されている。[Example] An example of the present invention will be described with reference to FIG. The sealing device 10 is provided perpendicularly to the traveling direction of the strip material so as to sandwich the strip material 1 from above and below. The sealing device 10 includes a base 11 and a plate-shaped sealing material 12 made of an elastic material.
Suitable materials for the plate-shaped seal 12 include rubber, PTFF, polyethylene, carbon, etc., and the hardness thereof is 60° to 90° in terms of rubber hardness. The tip end 13 of the plate-shaped seal 12 facing the strip material 1 is formed to be thinner in order to be easily deformed. Furthermore, a concave groove 14 is formed on the surface facing the leakage fluid 4 to disturb the flow of the leakage fluid.
板状シール１２は、前後の圧力差によつて大き
く変形しない程度の剛性をもつている。そして、
シール材１２の先端部１３は、変形しやすい形状
となつているので、帯状材１が接触した場合に
も、帯状材に大きな力をかけることはない。そこ
でシール材先端部と帯状材との〓間を小さくし
て、シール効率を向上させることができる。ま
た、漏洩流体４の流れを乱す凹状溝１４が形成さ
れているから、図に示すように漏洩流体に対向す
る過流が発生するので、吹抜けを低減してシール
効果を向上させることができる。 The plate-shaped seal 12 has such rigidity that it will not be significantly deformed due to the pressure difference between the front and rear sides. and,
Since the tip portion 13 of the sealing material 12 has a shape that is easily deformed, even when the strip material 1 comes into contact with the tip portion 13, no large force is applied to the strip material. Therefore, the sealing efficiency can be improved by reducing the distance between the tip of the sealing material and the strip material. Furthermore, since the concave grooves 14 are formed to disturb the flow of the leaked fluid 4, a turbulent flow opposing the leaked fluid is generated as shown in the figure, so blow-through can be reduced and the sealing effect can be improved.
なお、シール材の材質としてゴル等のエラスト
マ弾性体を使用すると、熱に対して弱くなる。従
つて帯状材が高温である場合に熱変形しやすくな
る。そこで、第２図に示すように、シール材の弾
性変形を妨げないように先端部に冷却管１５を埋
設して、シール材の温度を適温にコントロールで
きるようにする。 Note that when an elastomer elastic body such as Gol is used as the material of the sealing material, it becomes weak against heat. Therefore, when the strip material is at a high temperature, it is likely to be thermally deformed. Therefore, as shown in FIG. 2, a cooling pipe 15 is embedded in the tip of the sealing material so as not to hinder the elastic deformation of the sealing material, so that the temperature of the sealing material can be controlled to an appropriate temperature.
次に本発明シール装置１０の適用例を第３図に
示す。帯状材１を真空処理室２１で連続処理する
ために、処理室２１の入側および出側に差動排気
装置２２が設けられている。差動排気装置２２の
各真空間をシールするためにシール装置１０が用
いられている。こうして、処理すべき帯状材に疵
をつけることなく、シール性を向上させ、差動排
気装置の真空ポンプの所要動力を低減させること
ができる。 Next, an example of application of the sealing device 10 of the present invention is shown in FIG. In order to continuously process the strip material 1 in the vacuum processing chamber 21, differential pumping devices 22 are provided on the entrance and exit sides of the processing chamber 21. A sealing device 10 is used to seal each vacuum space of the differential pumping device 22. In this way, the sealing performance can be improved and the power required for the vacuum pump of the differential pumping device can be reduced without damaging the strip material to be treated.
［発明の効果］
この発明は上記のようなもので、帯状材の連続
処理に際し、処理材に疵をつけることなく、シー
ル性を向上させることができる。[Effects of the Invention] The present invention as described above makes it possible to improve the sealing performance without causing flaws in the treated material during continuous treatment of the strip material.
第１図は本発明の一実施例を示す縦断面図、第
２図は変形例の縦断面図、第３図は本発明品を適
用した帯状材の連続処理設備の説明図、第４図は
ラビリンスシールを帯状材のシールに適用する場
合の説明図である。
１……帯状材、１０……シール装置、１２……
板状シール材、１３……先端部、１４……凹状
溝、１５……冷却管。
Fig. 1 is a longitudinal cross-sectional view showing one embodiment of the present invention, Fig. 2 is a longitudinal cross-sectional view of a modified example, Fig. 3 is an explanatory diagram of continuous processing equipment for strip material to which the product of the present invention is applied, Fig. 4 FIG. 2 is an explanatory diagram of a case where a labyrinth seal is applied to sealing a strip material. 1... Strip material, 10... Sealing device, 12...
Plate sealing material, 13... Tip portion, 14... Concave groove, 15... Cooling pipe.
Claims (1)
理室で連続的に処理するためのシール装置で、帯
状材を上下から挟むように該帯状材の進行方向に
直交して配設された弾性材からなる板状のシール
材の帯状材に向く先端部を変形しやすいように順
次薄肉とすると共に、漏洩流体に対向する面に該
漏洩流体の流れを乱す凹状溝を形成したことを特
徴とするシール装置。1 A sealing device for continuously processing strip materials such as steel plates and films in a vacuum or high-pressure processing chamber, and an elastic member disposed perpendicular to the traveling direction of the strip material so as to sandwich the strip material from above and below. The tip of the plate-shaped sealing material facing the band material is made thinner in order to make it easier to deform, and a concave groove is formed on the surface facing the leaking fluid to disturb the flow of the leaking fluid. sealing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16375086A JPS6320472A (en) | 1986-07-14 | 1986-07-14 | Sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16375086A JPS6320472A (en) | 1986-07-14 | 1986-07-14 | Sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320472A JPS6320472A (en) | 1988-01-28 |
| JPH0373638B2 true JPH0373638B2 (en) | 1991-11-22 |
Family
ID=15779982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16375086A Granted JPS6320472A (en) | 1986-07-14 | 1986-07-14 | Sealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320472A (en) |
-
1986
- 1986-07-14 JP JP16375086A patent/JPS6320472A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320472A (en) | 1988-01-28 |
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