JPH0376162B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a ceiling blowing filter device used in a clean room.

[Prior Art] Conventionally, this type of ceiling blowing filter device is equipped with an air volume adjustment means for adjusting the amount of air supplied between the ventilation duct and the filter, and the air supplied from the ventilation duct is blown by the air volume adjustment means. The air passes through a filter whose air flow rate is adjusted to remove dust and is sent into the room as dust-free air.The air flow rate adjustment means used is a conical damper as shown in Figure 4. This is done by appropriately rotating an adjustment bolt 55 inserted through the center plate 54 of the filter 53 to the duct connection part 52 which is the air supply part of the casing 51, and then adjusting the conical damper 56 connected thereto. By moving it up and down, the sloping outer surface of the damper 56 disperses and diffuses the amount of air.

[Problems to be Solved by the Invention] However, although it is possible to adjust the air volume with the conventional damper, it does not have the function of passing air uniformly over the entire surface of the filter, and therefore, the damper does not have the function of passing air uniformly over the entire surface of the filter. There was a problem that the filters had to be replaced quickly due to clogging caused by the drift of the filter.

The present invention aims to solve the above problems.

[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides annular inner and outer wall plates in which a large number of ventilation holes are formed in a circular bottom plate, arranged concentrically with a gap in between. and fixing the annular filter by inserting and fixing the annular filter into the cavity,
An annular lid plate is fixed to the upper surfaces of the inner and outer wall plates to provide a rectification chamber surrounded by the inner wall plates to form a filtration member, and the filtration member is bonded and fixed to the bottom plate of the air inflow chamber to form an opening in the bottom plate. and a rectification chamber, and further includes a diffusion plate having a large number of diffusion holes drilled in the lower surface of the rectification chamber, and a blowout having a diffusion chamber below the diffusion plate and having a large number of blowout holes drilled therein. The plate is fixed, and the upper part of the guide pipe is tightly inserted and fixed into the bottom plate on the lower surface of the rectifying chamber, and the lower part of the guide pipe is inserted and fixed into the center of the diffusion plate, and the blowout is fixed on the vertical lower surface of the guide pipe. A through hole is bored in the plate, and an adjustment bolt is provided with a locking groove at the lower end of the guide pipe, and an O-ring is fitted into the groove provided around the lower part of the adjustment bolt. The distal end of is rotatably supported by penetrating a bearing fixed on a shaft support plate connected to the center of a holding plate that projects inward from both sides above the rectification chamber, and is rotatably supported by the shaft support plate. A fixing nut is screwed into the adjustment bolt on the lower surface, and a disc-shaped damper, each having a slit that engages with a guide plate installed on the inner circumferential wall of the rectifying chamber, is loosely inserted into the adjustment bolt and fixed into the fixing nut. It is fixed to the bottom surface.

[Function] According to the present invention having the above configuration, the air flowing into the air inflow chamber flows into the rectification chamber through the opening at the top thereof and is rectified. By moving the damper up and down and adjusting its position, the air volume is adjusted, and the rectified air in the rectification chamber is deflected through all the ventilation holes in the inner wall plate located on the top surface of the disc-shaped damper. The air is exhausted to the annular filter with a uniform air volume.
Contaminated air is filtered by this annular filter to become clean air, which is further exhausted through the ventilation holes of the outer wall board with a uniform air volume from the annular filter, and then distributed in the clean room through the diffuser plate and the blow-off plate. It is evenly discharged.

[Embodiment] An example of the implementation of the present invention will be described in detail with reference to the drawings. A bottom plate 1, a side plate 2, and a top plate 3 are each connected in a rectangular shape to form an air inflow chamber 4, and the air inflow chamber 4
A duct connecting pipe 5 that opens in the upper plate 3 and connects to an air supply duct (not shown) is connected and fixed at a predetermined position of the upper plate 3, and a bottom plate 1 near the connection port of the duct connecting pipe 5 is connected and fixed. A circular opening 6 having a diameter about half the width of the opening 6 is provided in the opening 6. An annular inner wall plate 9 having the same diameter as the opening 6 in which a large number of ventilation holes 8 are bored on the circular bottom plate 7.
and an annular outer wall plate 10 having a large number of ventilation holes 8 with a diameter larger than that of the inner wall plate 9 are arranged and fixed concentrically with a gap 11 in between, and an annular filter is installed in the gap 11. 12 is fitted and fixed in sliding contact with each inner circumferential wall surface of the inner and outer wall plates 9 and 10,
An annular lid plate 13 is fixed to the upper surfaces of the inner and outer wall plates 9 and 10, and a rectification chamber 14 surrounded by the inner wall plate 9 is provided to form a filtration member 15. is bonded and fixed to the bottom plate 1 to allow the opening 6 of the air inflow chamber 4 and the rectification chamber 14 of the filter member 15 to communicate with each other.

A vertical plate 16 is vertically fixed to the edge of the side plate 2 of the air inflow chamber 4 at a distance 10a from the outer wall plate 10 of the filter member 15. A blow-off plate 18 having blow-off holes 17 is connected and fixed thereto, and a supporting plate 19 whose both ends are supported and fixed to a vertical plate 16 above the blow-off plate 18 has a rectifying plate having a large number of diffusion holes 20 formed therein. Diffusion plate 2 having approximately the same diameter as the chamber 14
1 is fixed so as to be positioned on the lower surface of the rectification chamber 14, and a diffusion chamber 22 is formed between the diffusion plate 21 and the blow-off plate 18.

A guide pipe 23 is fixed through the bottom plate 7 and the center of the diffusion plate 21 on the lower surface of the rectifying chamber 14, respectively, and the lower end surface of the guide pipe 23 is connected to the blowout plate 1.
8, and a through hole 24 is bored in the blow-off plate 18 on the vertical lower surface of the guide pipe 23, so that the lower surface of the guide pipe 23 can be visually observed through the through hole 24. Usually through hole 24
A cap 25 is fitted to the guide pipe 23 so that the guide pipe 23 is not visible.

The guide pipe 23 has an adjustment bolt 27 provided with a locking groove 26 on the lower end surface of which can lock the tip of a rotating tool such as a screwdriver. The ring 29 is fitted and inserted, and the tip of the adjustment bolt 27 is extended above the rectification chamber 14 and is placed in the center of a retaining plate 30 that is provided above the rectification chamber 14 and protrudes inward from both sides. It penetrates and is supported by a bearing 30b fixed on a connected shaft support plate 30a, so that it does not move up and down, but is rotatable.
Therefore, by locking and rotating the rotating tool in the locking groove 26, the adjustment bolt 27 does not move up and down, but is configured to be able to rotate. The O-ring 29 prevents air from the rectifying chamber 14 from entering through the gap between the adjustment bolt 27 at the upper end of the guide pipe 23 and leaking into the rectifying chamber 21 .

Furthermore, the adjustment bolt 2 on the lower surface of the shaft support plate 30a
A fixing nut 31 is screwed into 7, and is formed to have a slightly smaller diameter than the inner diameter of the inner wall plate 9 constituting the rectifying chamber 14, and is engaged with a guide plate 32 provided opposite the inner peripheral surface of the inner wall plate 9. A disk-shaped damper 34 formed with matching slits 33 is loosely inserted into the adjustment bolt 27 and fixed to the lower surface of the fixing nut 31. By rotating the adjustment bolt 27, the damper 34 is inserted into the fixing nut 31. The fixed disc-shaped damper 34 can move up and down without rotating while being engaged with the guide plate 32 through the slit 33.

In addition, 35 in the figure is the rectifying chamber 1 in the guide pipe 23.
4 Guide pipe 2 to hold the bottom plate 7 on the lower surface
This is a stopper that is inserted and fixed to the circumferential surface of the bottom plate 7, and an O-ring 36 is installed in the stopper 35, and the guide pipe 23 is tightly inserted and fixed to the bottom plate 7 by this O-ring 36. . Also, 3 in the diagram
7 is the bottom plate 7 on the lower surface of the rectification chamber 14 and the guide pipe 2
This sealing material 37 and the O-ring 36 prevent leakage of air from the bottom plate 7 of the rectifying chamber 14.

To explain the operation of the embodiment, air that has flowed into the air inflow chamber 4 through an air supply duct and a duct connection pipe 5 (not shown) flows into the rectification chamber 14 through the opening 6 at the top of the rectification chamber 14. rectified.
When the disc-shaped damper 34 is at the maximum lowered position as shown in FIG. The air is discharged to the annular filter 12 side through all the ventilation holes 8, and the maximum air volume is obtained.

Next, insert a rotating tool such as a screwdriver into the through hole 24 drilled in the blow-off plate 18, hook the tip of the tool into the hook groove 26 of the adjustment bolt 27, and rotate the adjustment bolt 27. does not move up and down, but the fixing nut 31 moves up and down, and the disc-shaped damper 34 fixed to the fixing nut 31 also moves up and down. When the disc-shaped damper 34 is located at the position shown in FIG. 3, air can only be exhausted from the ventilation hole 8 formed in the inner wall plate 9 located above the disc-shaped damper 34. , the air volume will decrease accordingly.

Then, the air flowing into the rectifying chamber 14 is
4, the air is rectified and discharged at a uniform air volume through the ventilation hole 8 of the inner wall plate 9, and the discharged air is sent to the annular filter 12, where the contaminated air is filtered and clean air is produced. From the annular filter 12, the clean air passes through the ventilation hole 8 drilled in the outer wall plate 10 and is exhausted to the space 10a with a uniform air volume. By passing through the diffusion hole 20, the air velocity distribution becomes uniform, and then the air is blown into the clean room from the blow-off hole 17 of the blow-off plate 18 at a uniform air volume and speed.

[Effects of the Invention] Since the present invention is as described above, when the air flowing from the air inflow chamber to the rectification chamber is adjusted by moving the disc-shaped damper up and down with the adjustment bolt, the air flows into the disc-shaped damper. The air is rectified through the ventilation holes located on the top of the damper, and is exhausted uniformly without drifting. It is filtered by an annular filter, becomes clean air, passes through a diffusion plate and a blowout plate, and enters the clean room with an even distribution of wind speed. The air is evacuated, and the filter is not clogged with air drift as in the past, allowing the filter to be used for a long period of time.

[Brief explanation of drawings]

Fig. 1 is a front longitudinal sectional view, Fig. 2 is a partially cutaway plan view, Fig. 3 is a side longitudinal sectional view, and Fig. 4 is a longitudinal sectional view on the side.
The figure is a longitudinal sectional view showing a conventional example. In the figure, 4 is an air inflow chamber, 6 is an opening, 7 is a bottom plate, 8 is a ventilation hole, 12 is an annular filter, 14 is a rectification chamber, 17 is a blow-off hole, 18 is a blow-off plate, 20 is a diffusion hole, 21 2 is a diffusion plate, 22 is a diffusion chamber, 23 is a guide pipe, 24 is a through hole, 26 is a retaining groove, 27 is an adjustment bolt, 28 is a groove, 29 is an O-ring, 30
30a is a holding plate, 30a is a shaft support plate, 30b is a bearing, 31 is a fixing nut, 32 is a guide plate, 33 is a slit, and 34 is a disc-shaped damper.

Claims (1)

[Claims] 1. Annular inner and outer wall plates with a large number of ventilation holes formed in a circular bottom plate are arranged and fixed in a concentric manner with a gap in between, and an annular filter is inserted and fixed in the gap, and the inner and outer wall plates are A filtration member is formed by fixing an annular lid plate to the upper surface of the outer wall plate and providing a rectification chamber surrounded by an inner wall plate, and the filtration member is bonded and fixed to the bottom plate of the air inflow chamber to form an opening in the bottom plate. and a rectification chamber, and further includes a diffusion plate having a large number of diffusion holes drilled in the lower surface of the rectification chamber, and a blowout having a diffusion chamber below the diffusion plate and having a large number of blowout holes drilled therein. The plate is fixed, and the upper part of the guide pipe is tightly inserted and fixed into the bottom plate on the lower surface of the rectifying chamber, and the lower part of the guide pipe is inserted and fixed into the center of the diffusion plate, and the blowout is fixed on the vertical lower surface of the guide pipe. An adjustment bolt having a through hole bored in the plate and a locking groove provided at the lower end of the guide pipe,
An O-ring is fitted into a groove provided around the lower part of the adjustment bolt, and the tip of the adjustment bolt is connected to a shaft connected to the center of a holding plate that protrudes inward from both sides above the rectifying chamber. A guide plate is rotatably supported by penetrating a bearing fixed on the support plate, a fixing nut is screwed into an adjustment bolt on the lower surface of the support plate, and the guide plate is provided opposite to the inner circumferential wall of the rectification chamber. A ceiling blowing filter device characterized in that a disc-shaped damper each having a slit that engages with the damper is loosely inserted into an adjustment bolt and fixed to the lower surface of a fixing nut.