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JPH0416294B2 - - Google Patents
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JPH0416294B2 - - Google Patents

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Publication number
JPH0416294B2
JPH0416294B2 JP29477485A JP29477485A JPH0416294B2 JP H0416294 B2 JPH0416294 B2 JP H0416294B2 JP 29477485 A JP29477485 A JP 29477485A JP 29477485 A JP29477485 A JP 29477485A JP H0416294 B2 JPH0416294 B2 JP H0416294B2
Authority
JP
Japan
Prior art keywords
microtome
sic
blade
substrate
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP29477485A
Other languages
Japanese (ja)
Other versions
JPS62152626A (en
Inventor
Hajime Kitamura
Tamaki Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP29477485A priority Critical patent/JPS62152626A/en
Publication of JPS62152626A publication Critical patent/JPS62152626A/en
Publication of JPH0416294B2 publication Critical patent/JPH0416294B2/ja
Granted legal-status Critical Current

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  • Sampling And Sample Adjustment (AREA)
  • Nonmetal Cutting Devices (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

(産業上の利用分野) 本発明は改良されたミクロトーム用SiCコーテ
イング刃、特には水のり性を格段に向上させたミ
クロトーム用SiCコーテイング刃及びその製造方
法に関するものである。 (従来の技術) 電子顕微鏡用試料作成に使用するミクロトーム
用刃には従来から金属、ガラス、サフアイア、ダ
イアモンドがある。しかし、これらにはそれぞれ
何らかの欠点がある。すなわち、金属刃には使用
の都度刃先を整えることが必要であり、ガラス刃
は使用の都度刃を作らねばならず、しかも、寿命
が短く、サフアイヤ刃は切削性に劣り寿命が短
い、またダイアモンド刃は高価で、手工業で生産
されているために生産性が悪いと言う難点があ
る。 また、従来のものの中には電子顕微鏡用試料の
検鏡試験の結果にスダレ、チヤター等の現象が発
生し、高度な医学動植物部門には使用出来ない等
の問題があり、また、高度な医学、動植物の研究
を進めるに当つては500Åより薄い試料が必要と
なつて来ているが従来のものでは500Åより薄い
試料を採取することは不可能と云う不利がある。 (発明の構成) 本発明はこのような不利を解決したミクロトー
ム用SiCコーテイング刃に関するものである。本
発明者らは先に基体上に結晶質炭化けい素を被覆
してなるミクロトーム用SiCコーテイング刃およ
びその製造方法を提案(特願昭60−49545)し従
来の難点を改良したが、さらに種々検討した結果
水のり性能が格段に優れたミクロトーム用刃をう
ることに成功し本発明に至つたのである。 本発明の第1の発明は結晶質SiCを被覆した基
体上にオリーブ油またはオレイン酸の超薄膜を被
覆してなるミクロトーム用SiCコーテイング刃に
関するものであり、第2の発明はその製造方法で
あつて、基体上プラズマ気相沈積法によつて形成
させた非晶質SiC膜を700〜1250℃の温度で熱処
理して該膜を結晶質化するとともに、熱処理した
のち該基体をオリーブ油またはオレイン酸に浸漬
することを特徴とする方法である。 本発明のミクロトーム用SiCコーテイング刃は
基体上に結晶質炭化けい素を被覆したものである
が、この基体は従来公知のものでもよく、これに
はステンレススチール、超硬合金などの金属、ガ
ラス、サフアイアなどが例示される。この基体に
被覆される結晶質炭化水素膜はその厚さ50Å以下
では薄すぎて信頼性に乏しいし、500Å以上では
電子顕微鏡用試料の採取不能となるので50〜500
Åの範囲、好ましくは80〜200Åの範囲にするこ
とがよい。 また結晶質炭化けい素被覆の上にオリーブ油ま
たはオレイン酸の超薄膜は熱処理直後の結晶質炭
化けい素被覆の表面温度50℃以下のものをオリー
ブ油またはオレイン酸の中に10分以上浸漬し、そ
の後取り出してメタノール、ヘキサン、アセト
ン、酢酸エチル等の公知の溶剤により20分〜80分
間洗浄することによつて得られる。浸漬時間が10
分未満ではオリーブ油及びオレイン酸の被覆が完
全なものでなく検鏡結果スダレ、チヤターがあ
り、また、洗浄時間が20分未満ではオリーブ油及
びオレイン酸の残量があり試料の厚みが500Å以
下にはならない。80分以上では検鏡結果スダレ、
チヤターが見られる。好ましくは浸漬時間は40分
〜80分が好ましく、洗浄時間は30〜60分が好まし
い。 本発明の結晶質炭化けい素の被覆についてはど
のような方法で作られたものであつてもよいが、
シラン化合物のプラズマ気相沈積法によつて基体
上に非晶質炭化けい素の被膜を形成し、それを加
熱することによつて得られる。 このプラズマ気相沈積法も実施は、反応器内に
基体を設置し、この反応器内にシラン化合物をキ
ヤリヤーガスとしての水素又はアルゴンガスの混
合ガスとして導入してから器内雰囲気圧力を1ト
ール以下とし、ついでこれに高周波電力を印加し
て系内にプラズマを発生させればよく、こによれ
ばシラン化合物がプラズマ火炎との接触で熱分解
されて非晶質炭化けい素が発生する。 これを熱処理することにより結晶質炭化けい素
とすることができる。熱処理温度は700〜1250の
範囲で行なうのがよい。 なお、こゝに使用されるシラン化合物としては
モノシラン(SiH4)と炭化水素との混合物また
はモノメチルシラン(CH3SiH3)、ジメチルシラ
ン〔(CH32SiH2〕、トリメチルシラン
〔(CH33SiH〕、テトラメチルシラン〔(CH34Si〕
であつてもよいが、これは一般式(CH3aSibHc
で示され、このa、b、cが1<b<4、a+1
≦2b+1、1<c≦2b+1、a+c=2b+2を
満足する数とされるメチルハイドロジエンポリシ
ランとすることが好ましく、このメチルハイドロ
ジエンポリシランとしては下記のものが例示され
る。
(Industrial Application Field) The present invention relates to an improved SiC coated blade for a microtome, particularly to a SiC coated blade for a microtome that has significantly improved water retention properties, and a method for manufacturing the same. (Prior Art) Microtome blades used to prepare specimens for electron microscopy have conventionally been made of metal, glass, sapphire, and diamond. However, each of these has some drawbacks. In other words, metal blades require the cutting edge to be adjusted each time they are used, glass blades must be refinished each time they are used, and their lifespan is short; sapphire blades have poor cutting performance and have a short lifespan; The disadvantage is that the blades are expensive, and because they are produced by hand, productivity is low. In addition, some conventional methods have problems such as sagging, chatter, and other phenomena that occur in the microscopic examination results of specimens for electron microscopy, making them unsuitable for use in advanced medical fauna and flora departments. In conducting research on animals and plants, samples thinner than 500 Å are becoming necessary, but conventional methods have the disadvantage that it is impossible to collect samples thinner than 500 Å. (Structure of the Invention) The present invention relates to a SiC coated blade for a microtome that solves the above-mentioned disadvantages. The present inventors previously proposed a SiC coated blade for microtome in which a substrate is coated with crystalline silicon carbide and a method for manufacturing the same (Japanese Patent Application No. 60-49545), and improved the conventional drawbacks. As a result of their research, they succeeded in creating a microtome blade with significantly superior water shedding performance, leading to the present invention. The first invention of the present invention relates to a SiC coating blade for a microtome, which is formed by coating an ultra-thin film of olive oil or oleic acid on a substrate coated with crystalline SiC, and the second invention is a manufacturing method thereof. , an amorphous SiC film formed by plasma vapor deposition on a substrate is heat-treated at a temperature of 700 to 1250°C to crystallize the film, and after the heat treatment, the substrate is soaked in olive oil or oleic acid. This method is characterized by immersion. The SiC coated blade for a microtome of the present invention is a substrate coated with crystalline silicon carbide, but this substrate may be of a conventionally known type, including metals such as stainless steel and cemented carbide, glass, Examples include saphire. If the crystalline hydrocarbon film coated on this substrate is less than 50 Å thick, it is too thin and unreliable, and if it is more than 500 Å, it becomes impossible to collect a sample for electron microscopy.
The range is preferably 80 to 200 Å. In addition, to form an ultra-thin film of olive oil or oleic acid on a crystalline silicon carbide coating, immerse the crystalline silicon carbide coating with a surface temperature of 50°C or less in olive oil or oleic acid for 10 minutes or more immediately after heat treatment. It is obtained by taking it out and washing it with a known solvent such as methanol, hexane, acetone, ethyl acetate, etc. for 20 to 80 minutes. Soaking time 10
If the cleaning time is less than 20 minutes, the coating of olive oil and oleic acid will not be complete and the microscopic results will sag or chatter.If the cleaning time is less than 20 minutes, there will be residual amounts of olive oil and oleic acid, and if the sample thickness is less than 500Å. No. If it takes more than 80 minutes, the speculum results will be dull.
Chatter can be seen. Preferably, the soaking time is preferably 40 to 80 minutes, and the washing time is preferably 30 to 60 minutes. The crystalline silicon carbide coating of the present invention may be made by any method, but
It is obtained by forming a film of amorphous silicon carbide on a substrate by a plasma vapor deposition method of a silane compound, and then heating the film. This plasma vapor deposition method is also carried out by installing a substrate in a reactor, introducing the silane compound into the reactor as a mixed gas of hydrogen or argon gas as a carrier gas, and then lowering the internal atmospheric pressure to 1 Torr or less. Then, high-frequency power is applied to this to generate plasma in the system, whereby the silane compound is thermally decomposed by contact with the plasma flame and amorphous silicon carbide is generated. By heat-treating this, crystalline silicon carbide can be obtained. The heat treatment temperature is preferably in the range of 700 to 1250C. The silane compounds used here include a mixture of monosilane (SiH 4 ) and a hydrocarbon, monomethylsilane (CH 3 SiH 3 ), dimethylsilane [(CH 3 ) 2 SiH 2 ], trimethylsilane [(CH 3 ) 3 SiH], tetramethylsilane [(CH 3 ) 4 Si]
However, this is the general formula (CH 3 ) a Si b H c
and a, b, c are 1<b<4, a+1
It is preferable to use a methylhydrodiene polysilane having a number satisfying ≦2b+1, 1<c≦2b+1, and a+c=2b+2, and examples of the methylhydrodiene polysilane include the following.

【式】【formula】

【式】【formula】

【式】【formula】 【式】【formula】

【式】【formula】

【式】 なお、上記におけるプラズマは1〜30MHzの高
周波電磁場内で発生させればよく、この作動ガス
としては単原子分子のガスとしてのアルゴンガス
あるいは反応を抑制しない水素ガスとすればよい
が、酸性ガスの混入は生成される炭化けい素の酸
化が招かれるので避けることが必要とされる。 次にミクロトーム用の刃先は切削特性を良好に
するためには刃先角度が鋭くなければならない
が、ミクロトーム用SiCコーテイング刃の場合、
刃先用稜線を形成する2面のなす角度が15゜〜70゜
が適当である。15゜以下の角度では歯こぼれがし
やすくまた70゜以上では切削性が格段と落ちる。
好ましくは30゜〜50゜である。 次に本発明の実施例をあげる。 実施例 1 (ミクロトーム用SiCコーテイング刃の製造) 人工サフアイヤ単結晶を刃先用稜線を形成する
2面のなす角度が45゜の形状に加工したものを純
粋及びイソプロピルアルコールで洗浄し乾燥して
から、内部に放電電極対を有する反応装置の中に
ガス状混合物の流れ方向に対して刃先の角度の2
等分線が平行となるように設置した。 ついで、この反応器内の圧力を5×102トール
まで排気したのち、ここにガス状のテトラメチル
ジシラン〔CH34Si2H2〕とキヤリヤーガスとし
ての水素ガスを導入し、ガス流通下に反応器内の
圧力を0.1トールに調整し、この雰囲気下で電極
間に13.5MHzの高周波電力(30W)を印加してグ
ロー放電を発生させ、このプラズマによる気相沈
積反応を行なわせたところ、人工サフアイヤの表
面に厚さ約100〜150Åの非晶質炭化けい素のプラ
ズマ重合膜が形成された。 次にこの人工サフアイヤを器内から取り出し、
洗浄後に熱処理炉内に1000℃において30分間加熱
してから徐冷し、得られた人工サフアイヤ刃につ
いて光学顕微鏡及びX線回折装置を用いてキズの
有無、蒸着した炭化けい素の結晶構造をしらべた
ところ、この被覆膜はキズの無い結晶質の炭化け
い素であることが確認された。 この徐冷した人工サフアイヤ刃をオレイン酸に
60分浸漬し、取り出して、ヘキサンにて洗浄を30
分行ない得られたところの人工サフアイヤ刃につ
いて切削試験及び6000倍の検鏡試験を行なつて従
来のものよりも水のり性が格段と良好であること
が確認された。 (ミクロトーム用SiCコーテイング刃の切削試
験) 上記で得た人工サフアイヤに結晶質炭化けい素
を被覆し、オレイン酸、ヘキサンで処理したミク
ロトーム用SiCコーテイング刃を用いて、エポキ
シ樹脂で硬化した臓器サンプルから顕微鏡試料を
切り出したところ、厚さ500Åの切片を採り出す
ことができ、これは従来からなるミクロトーム用
のサフアイア、ダイヤモンンドを材質とする刃と
同等の精度をもつものであることが確認された。 (ミクロトーム用SiCコーテイング刃の水のり
性能試験) 上記で得た人工サフアイヤに結晶質炭化けい素
を被覆し、オレイン酸、ヘキサンで処理したミク
ロトーム用SiCコーテイング刃を用いて、エポキ
シ樹脂で硬化した臓器サンプルから顕微鏡試料厚
さ500Åの切片を採り出し、この切片を6000倍の
顕微鏡で検鏡し、切片表面にスダレ、チターの形
状が発生するか否かを調べ、水のりが良好な場合
はこれらの形状発生が見られないので、この検鏡
の結果をもつて水のりの評価とするものである。
これは従来からあるミクロトーム用のサフアイ
ア、ダイヤモンドを材質とする刃にはこれらの形
状発生が見られるものであるが、本発明のミクロ
トーム用SiCコーテイング刃の場合はこれらの形
状発生が見られず従来からあるミクロトーム用の
刃よりも秀れていることが確認された。 実施例 2 刃角60゜の人工サフアイアを実施例1と同様に
処理して、この人工サフアイア表面に非晶質炭化
けい素のプラズマ重合膜を形成させた。これを
1000℃で30分間加熱処理し、該炭化けい素を結晶
化させたのち徐冷し、温度が50℃になつたときオ
リーブ油に60分間浸漬した。その後、これを取り
出して酢酸エチルで60分間洗浄し、乾燥した。 得られたミクロトーム用SiCコーテイング刃を
実施例1と同様な切削試験および6000倍の検鏡試
験を行つた結果、従来のものと比べ、蔵器サンプ
ルの切片にはスダレ及びチヤターが認められず良
好であることが確認された。
[Formula] Note that the plasma in the above may be generated within a high frequency electromagnetic field of 1 to 30 MHz, and the working gas may be argon gas as a monoatomic molecule gas or hydrogen gas that does not inhibit the reaction. Contamination with acidic gases must be avoided as this will lead to oxidation of the silicon carbide produced. Next, the cutting edge for a microtome must have a sharp cutting edge angle in order to have good cutting characteristics, but in the case of a SiC coated blade for a microtome,
A suitable angle between the two surfaces forming the edge line is 15° to 70°. If the angle is less than 15 degrees, tooth loss is likely to occur, and if the angle is more than 70 degrees, the cutting performance will be significantly reduced.
Preferably it is 30° to 50°. Next, examples of the present invention will be given. Example 1 (Manufacture of SiC coated blade for microtome) An artificial sapphire single crystal was processed into a shape in which the angle between the two faces forming the ridgeline for the blade edge was 45°, and after washing with pure and isopropyl alcohol and drying, 2 of the angle of the cutting edge with respect to the flow direction of the gaseous mixture in a reactor having a pair of discharge electrodes inside.
It was set up so that the equal dividing lines were parallel. Next, the pressure inside this reactor was evacuated to 5×10 2 Torr, and then gaseous tetramethyldisilane [CH 3 ) 4 Si 2 H 2 ] and hydrogen gas as a carrier gas were introduced therein, and the reactor was heated under gas flow. The pressure inside the reactor was adjusted to 0.1 Torr, and in this atmosphere, 13.5MHz high-frequency power (30W) was applied between the electrodes to generate a glow discharge, and this plasma caused a vapor-phase deposition reaction. , a plasma-polymerized film of amorphous silicon carbide with a thickness of about 100 to 150 Å was formed on the surface of the artificial saphire. Next, take out this artificial sapphire from the container,
After cleaning, the artificial sapphire blade was heated in a heat treatment furnace at 1000℃ for 30 minutes and then slowly cooled, and the resulting artificial sapphire blade was examined for scratches and the crystal structure of the deposited silicon carbide using an optical microscope and an X-ray diffraction device. Upon examination, it was confirmed that this coating film was made of crystalline silicon carbide without any flaws. This slowly cooled artificial sapphire blade is made into oleic acid.
Soak for 60 minutes, remove and wash with hexane for 30 minutes.
A cutting test and a 6000x magnification microscopy test were conducted on the artificial sapphire blade obtained, and it was confirmed that the water retention property was much better than that of the conventional blade. (Cutting test of SiC coated blade for microtome) Using the SiC coated blade for microtome, which was obtained by coating the artificial sapphire obtained above with crystalline silicon carbide and treating it with oleic acid and hexane, an organ sample was cured with epoxy resin. When cutting out a microscopic sample, we were able to extract a section with a thickness of 500 Å, which was confirmed to have the same accuracy as conventional microtome blades made of sapphire or diamond. . (Water retention performance test of SiC coated blade for microtome) Organs cured with epoxy resin were used to coat the artificial sapphire obtained above with crystalline silicon carbide and treated with oleic acid and hexane. A section with a thickness of 500 Å is taken from the sample, and this section is examined under a microscope with a magnification of 6,000 times to check whether there are any sag or titan shapes on the surface of the section. Since no formation of this shape was observed, the results of this microscopic examination were used to evaluate the water deposits.
This is because the generation of these shapes is seen in the conventional blades made of saphire and diamond for microtomes, but in the case of the SiC coated blade for microtomes of the present invention, these shapes are not generated. It was confirmed that this blade was superior to the microtome blade available from . Example 2 An artificial sapphire having a blade angle of 60° was treated in the same manner as in Example 1 to form a plasma polymerized film of amorphous silicon carbide on the surface of the artificial sapphire. this
Heat treatment was performed at 1000°C for 30 minutes to crystallize the silicon carbide, followed by slow cooling, and when the temperature reached 50°C, it was immersed in olive oil for 60 minutes. Thereafter, it was taken out, washed with ethyl acetate for 60 minutes, and dried. The obtained SiC coated blade for microtome was subjected to the same cutting test as in Example 1 and a microscopy test at 6000x magnification, and the results showed that the section of the sample was in good condition with no sag or chatter observed compared to the conventional one. It was confirmed that

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のミクロトーム用SiCコーテイ
ング刃の縦断面概要図を示したものである。 1……基体、2……SiCコーテイング膜、3…
…オレイン酸超薄膜。
FIG. 1 shows a schematic vertical cross-sectional view of a SiC coated blade for a microtome according to the present invention. 1...Substrate, 2...SiC coating film, 3...
...Oleic acid ultra-thin film.

Claims (1)

【特許請求の範囲】 1 結晶質SiCを被覆した基体上にオリーブ油ま
たはオレイン酸の超薄膜を被覆してなるミクロト
ーム用SiCコーテイング刃。 2 プラズマ気相沈積法によつて基体上に非晶質
SiC膜を形成させ、ついで700〜1250℃の温度で
熱処理して該膜を結晶質化するとともに熱処理し
たのち該基体をオリーブ油またはオレイン酸に浸
漬することを特徴とするミクロトーム用SiCコー
テイング刃の製造方法。
[Claims] 1. A SiC coated blade for a microtome, which is formed by coating an ultra-thin film of olive oil or oleic acid on a substrate coated with crystalline SiC. 2 Amorphous material is deposited on the substrate by plasma vapor deposition method.
Production of a SiC-coated blade for a microtome, characterized in that a SiC film is formed, then heat treated at a temperature of 700 to 1250°C to crystallize the film, and after the heat treatment, the substrate is immersed in olive oil or oleic acid. Method.
JP29477485A 1985-12-25 1985-12-25 SiC coated blade for microtome and its manufacturing method Granted JPS62152626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29477485A JPS62152626A (en) 1985-12-25 1985-12-25 SiC coated blade for microtome and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29477485A JPS62152626A (en) 1985-12-25 1985-12-25 SiC coated blade for microtome and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS62152626A JPS62152626A (en) 1987-07-07
JPH0416294B2 true JPH0416294B2 (en) 1992-03-23

Family

ID=17812118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29477485A Granted JPS62152626A (en) 1985-12-25 1985-12-25 SiC coated blade for microtome and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS62152626A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4575735B2 (en) * 2004-09-27 2010-11-04 フェザー安全剃刀株式会社 Microtome blade
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