JPH0451979B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an airtight terminal used in an airtight package that hermetically encapsulates circuit components.

[Background of the invention]

As shown in FIG. 1, the airtight package has a lead insertion hole 3 for inserting the lead 2 into the base 1.
At the same time, the circuit component 5 is connected to the inner side of the lead 2 of the airtight terminal T, which is constructed by inserting the lead 2 into the lead insertion hole 3 and sealing it with an insulating material 4 such as glass. 6 to airtightly encapsulate the circuit component 5.

FIG. 2 is a sectional view of such an airtight terminal T, and the same reference numerals as in FIG. 1 indicate the same parts.

Conventionally, when sealing the lead 2 into the lead insertion hole 3 formed in the base 1, there have been roughly two types of methods.

That is, a so-called matching method is used in which Kovar is used as the base material and the lead, and a Kovar sealing glass having the same expansion coefficient as the Kovar material is used as the glass of the insulating material 4 to seal the base material. This is the so-called compression method, in which iron is used as the material and lead material, and glass for iron sealing is used as the glass. According to the compression method described above, since glass and iron have different coefficients of thermal expansion, the iron material becomes compressed due to the expansion of the glass.

The hermetic terminal manufactured by the mating method uses a hard Kovar material for the base and leads, so it has the advantage of being strong and durable, but has the disadvantage of being expensive.

In addition, airtight terminals manufactured by the compression method have the advantage of being inexpensive because they use iron as the base and lead material, but since iron is soft, lead 2 in particular is prone to breakage, making them durable. It had the disadvantage of lacking sex.

In order to eliminate these two drawbacks, the present applicant uses iron as the base material and Kovar as the lead material, and also uses lead 2 of this Kovar material.
The airtight terminal is sealed using a mixed glass of 10 to 70% Kovar alloy sealing glass and 30 to 90% iron sealing glass (all percentages by weight) as the glass 4 for sealing to the iron base 1. and a patent application for its manufacturing method (Japanese Patent Application No. 1983-210224).

The above method has the advantage of being able to take advantage of the advantages of the compression method and the matching method. That is, since the base 1 is made of iron, it is less expensive than the conventional matching method, and since the leads 2 are made of Kovar material, the leads 2 have the advantage of good durability. As mentioned above, this lead 2 is sealed using a mixed glass of Kovar alloy sealing glass and iron sealing glass, so although the coefficients of thermal expansion are not strictly matched as in the matching method described above, , are matched to some extent, and therefore lead 2 is compressed to some extent, although not to the extent of the compression method. Therefore, there is an advantage that the sealing strength of the leads 2 is better than that of an airtight terminal manufactured by the matching method.

Such a method, the so-called semi-compression method, has various advantages as mentioned above and has better characteristics than conventional methods, but although it is not a matching method, it has many advantages over the compression method. It had the disadvantage of being expensive compared to .

[Summary of the invention]

The present invention has been made in view of the current situation, and has a lead part sealed by a semi-compression method and a lead part sealed by a compression method, and has good durability. The purpose is to provide an airtight terminal that is cheaper than conventional ones.

Therefore, the airtight terminal according to the present invention is an airtight terminal in which a lead is inserted into each of the lead insertion holes of a base having two or more lead insertion holes and hermetically sealed with glass, wherein the base is made of iron material, Kovar material is used as at least one lead, and this Kovar material lead has a Kovar alloy sealing glass of 10 to 70% and an iron sealing glass of 30 to 90%.
% of mixed glass, the remaining leads are made of iron, and the remaining leads are sealed with iron sealing glass.

[Specific description of the invention]

An embodiment of the present invention will be described in more detail below with reference to the drawings.

FIG. 3 is a perspective view of an embodiment of the airtight terminal according to the present invention, and the same reference numerals as in FIGS. 1 and 2 indicate the same members.

As is clear from FIG. 3, according to the embodiment of the present invention, a plurality of lead insertion holes 3, 3... are bored in the base 1, and these lead insertion holes 3, 3... Leads 2, 2', . . . are inserted through them, and sealed with glasses 4, 4’, .

In this embodiment, the lead designated by numeral 2 is made of iron material, and the lead designated by 2' is made of Kovar material. Also,
The glass indicated by the symbol 4 is a glass for iron sealing, while the glass indicated by the symbol 4' is a mixture of 10 to 70% Kovar public metal sealing glass and 30% iron sealing glass.
Shows ~90% mixed glass.

As is clear from FIG. 3, in one embodiment of the present invention, the lead insertion hole 3 at the top right of the drawing
The Kovar material lead 2' is sealed using a mixed glass 4' consisting of 10 to 70% Kovar alloy sealing glass and 30 to 90% iron sealing glass, while the lead is inserted into the remaining lead insertion hole 3. Lead 2, 2...
It is made of ordinary iron material and sealed with iron sealing glass.

The present invention has one or more lead parts sealed by the semi-compression method as described above. In hermetic terminals, the areas where a large load is applied to the lead section are approximately fixed, and therefore the semi-compression method is a good method for increasing lead sealing strength only in areas where a large load is expected to be applied. This is because if manufactured using the above method, the cost can be reduced without reducing the overall durability.

As mentioned above, in order to seal the Kovar material lead 2' to the iron material base 1, a mixed glass of 10 to 70% Kovar alloy sealing glass and 30 to 90% iron sealing glass is used. The reason why such a special glass is used is that when the leads 2' of the compression material are sealed to the iron base 1 using a compression type iron sealing glass, for example, the glass where the leads are inserted has a radial shape. This is because it causes a crack. Furthermore, if sealing is attempted using Kovar alloy sealing glass, for example, linear glass cracks will occur near the base 1, resulting in a significant loss of airtightness.

However, by using the above-mentioned two-component glass, the above-mentioned defects can be eliminated.

The iron sealing glass may be any glass that has been used for sealing iron materials in this type of airtight terminal. For example, soda barium glass can be used. On the other hand, the Kovar sealing glass is not fundamentally limited in the present invention as long as it is a Kovar sealing glass conventionally used for lead sealing of this type of hermetic terminal. For example, it can be borosilicate glass.

As mentioned above, the mixing amount of Kovar sealing glass and iron sealing glass is 10-70% for Kovar sealing glass and 30-90% for iron sealing glass, but if Kovar sealing glass exceeds 70%, This is because linear glass cracks occur near the base 1, while if the iron sealing glass exceeds 90%, radial glass cracks occur near the lead insertion portion.

Although the lead 2 described above is made of iron, it may be made of iron plated with nickel or the like in consideration of airtightness.

Furthermore, although the lead 2' is made of Kovar material, it may be made of Kovar material with an oxide film formed on its surface in consideration of airtightness and thermal shock resistance.

〔Effect of the invention〕

As explained above, according to the airtight terminal according to the present invention, the leads are sealed only in the lead sealing portions where a large load is expected to be applied, using the semi-compression method, which has a good sealing strength. ,
Since the remaining leads are sealed by an inexpensive compression method, there is an advantage that airtight terminals with good durability can be manufactured at a much lower cost than conventional methods.

[Brief explanation of drawings]

FIG. 1 is a partial sectional view for explaining an airtight package, FIG. 2 is a sectional view of an airtight terminal, and FIG. 3 is a perspective view of an airtight terminal according to an embodiment of the present invention. 1... Base, 2, 2'... Lead, 3... Lead insertion hole, 4, 4'... Glass.

Claims (1)

[Claims] 1 In an airtight terminal in which a lead is inserted into each of the lead insertion holes of a base having two or more lead insertion holes and hermetically sealed with glass, the base is made of iron material, and at least one or more leads are made of Kovar material. This Kovar material lead is sealed with a mixed glass of 10-70% Kovar alloy sealing glass and 30-90% iron sealing glass.
An airtight terminal characterized by using iron material as the remaining leads and sealing them with iron sealing glass.