JPH0459746B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a charged particle beam scanning analyzer such as a scanning electron microscope or an X-ray microanalyzer.

Conventionally, as shown in Figure 1, electron beam B is irradiated onto sample A, which is a rotationally symmetrical object such as a round bar or pipe, and the surface image is observed using secondary electrons, and X-ray spectroscopy is performed. When the sample is stationary and both ends of the observation area D in the Y-axis direction are shifted from the focus of the electron beam, the range that can be analyzed in one X, Y scan is limited, making it difficult to observe the entire circumference. There was a problem that X-ray analysis was not possible.

In view of the above-mentioned problems, the present invention has developed a charged particle that enables continuous scanning of a wide range along the entire circumference or circumference of a cylindrical sample, and that allows accurate analysis and observation without causing a shift in focus. The purpose of this invention is to provide a line scanning analyzer.

Figure 2 shows an example in which the present invention is applied to a scanning electron microscope. In the figure (CX) is the X-axis deflection coil of the electron beam irradiation device, and in the case of cylindrical surface observation, the Y-axis deflection coil. is not shown because it is not used. In other words, the electron beam B is scanned only in a straight line in the axial direction of the sample A by X-axis scanning,
The sample A is step-driven in the circumferential direction instead of the conventional Y-axis scanning. The shape of the sample that can be analyzed by the device of the present invention is cylindrical, conical, or rotationally symmetrical with a stepwise change in outer diameter. It is rotatably attached to the support device 1. The sample support device 1 is movable in the X-axis direction, and its inclination can be adjusted within a vertical plane including the rotation axis. Reference numeral 3 is a pulse motor which drives the chuck shaft 2 step by step through a reduction gear 4. To control the pulse motor 3, a blanking signal Sb for erasing the blanking line on the CRT7 screen can be used. The pulse motor 3 is controlled via the drive circuit 6 by the blanking signal Sb output from the scanning signal generator 5, and is blanked every time the electron beam B is scanned in the X-axis direction by the X-axis scanning signal Sx. The ranking signal Sb rotates the sample A by one step in the Y-axis direction. In this way, the sample surface is symmetrically scanned in the XY direction by the electron beam, and the step drive of the sample is synchronized with the Y-axis scanning of the CRT7, so the secondary electron image appears on the screen as if it were a flat sample surface. It appears as if it is a photograph of the image. In addition, if the rotation angle per pulse of the pulse motor 3 can be adjusted, any desired surface area of the sample surface can be displayed on the screen. For example, the entire circumference of the sample can be compressed and displayed on one screen. You can also do it. Also, by repeating the Y-axis scanning of CRT7,
It is also possible to continuously display images that are arbitrarily long in the circumferential direction while being switched within a fixed screen.

The present invention is constructed as described above, and because the electron beam is biased only in the X-axis direction and the sample itself is step-driven in the Y-axis direction, accurate observation and analysis has been impossible in the past. This method has the advantage of not only improving the accuracy of analysis on the surface of a cylindrical sample, but also being able to observe and analyze the entire circumference of the sample in one go, and is particularly convenient for analyzing thin round rods. It is clear that the same effect can be produced not only in the scanning electron microscope of this embodiment but also in an X-ray microanalyzer, and it is also possible to use a charged particle beam such as an ion beam. Not even. By applying the technical concept of the present invention and step-driving a flat sample within a plane, it is also possible to analyze a long and narrow region with high precision.

[Brief explanation of drawings]

Fig. 1 is a perspective view for explaining a conventional example, Fig. 2 is a perspective view for explaining a conventional example;
The figure is a block diagram showing one embodiment of the device of the present invention. 1 is a sample support device, 2 is a chuck shaft, 3 is a pulse motor, 4 is a reduction gear, 5 is a scanning signal generator, 6 is a drive circuit, 7 is a CRT, (CX) is an X
Axial deflection coil, A is the sample, B is the electron beam or charged particle beam, D is the observation area, Sx is the X-axis scanning signal,
Sy is the Y-axis scanning signal, and Sb is the blanking signal.

[Claims]

1. A method of introducing ions into an ion trap of an ion cyclotron resonance spectrometer, wherein the ion trap is placed in a constant uniform magnetic field and is designed as an electrode parallel to and/or parallel to an axis of symmetry having the direction of the magnetic field. or comprising a plurality of walls extending at right angles and supplied with a trapping potential to hold the ions in the ion trap, one of the walls extending at right angles to the direction of the magnetic field is provided with a hole; , generating ions outside the ion trap, forming the ions into an ion beam, and directing the ion beam in the direction of a magnetic field toward the hole formed in the one wall of the ion trap, and passing through the hole. and reducing the velocity of movement of ions entering the ion trap in the direction of a magnetic field below a value required for the ions to escape from the ion trap, as determined by the trapping potential. A method characterized in that a motion component is imparted to the ivy ions in a direction perpendicular to the magnetic field. 2 The ions extend parallel to the magnetic field.