JPH0464812B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a vibration isolating table for holding processing machines, parts, etc. in a product manufacturing line or the like so that they are not affected by external vibrations.

(Prior art) Figures 4A and 4B show a conventional vibration isolation table.
2 is a fixed base, 2 is a vibration isolation base, 3 is a surface plate (mounting base), 4 is an air spring, and 5 is a processing device mounted on the vibration isolation base.

The conventional anti-vibration table configured as described above can reduce floor vibrations transmitted to the equipment 5 through the fixed table 1, the anti-vibration base 2, and the surface plate 3 by the air springs 4.

(Problem to be Solved by the Invention) However, since the anti-vibration base 2 is only supported by the air springs 4, vibrations caused by the operation of the processing equipment 5 or changes in balance may cause the anti-vibration base to
tends to fluctuate in the XY direction (horizontal direction) and Z direction (vertical direction), and the processing equipment 5 mounted on the surface plate 3 also tends to fluctuate. If there is such a change in the processing equipment, when the processing is finished with the processing equipment and the workpiece is automatically mounted or removed by a robot (not shown), the workpiece may be incorrectly mounted or removed. This tends to occur, making automation difficult.

Furthermore, it was impossible to mount and remove the workpiece with high precision.

(Means for Solving the Problems) In order to solve the above-mentioned problems, the present invention provides the following: Air springs are provided between a plurality of arm parts extending from a vibration-proof base holding equipment and a fixing base, and air springs are provided between the arm parts. A positioning bushing having an engaging part on the inner diameter for determining the horizontal position of the vibration-proof base is attached to a part thereof, and a shaft member having a ball part that engages with the inner diameter engaging part of the positioning bush. The positioning bushing is passed through a hole bored in the arm part, and a driving means for moving the shaft member forward and backward is connected to the shaft member passed through the shaft member, and the shaft member engages with the arm part by movement of the shaft member. and a stopper for vertical positioning of the arm between the arm and the fixing base, and a stopper for vertical positioning of the vibration isolation base by the positioning bush and the shaft member After the above positioning, the vibration isolating base is vertically positioned by the holding member and the stopper.

(Example) FIGS. 1A and 1B show an example of the present invention,
Components that are the same as in FIG. 4 are given the same reference numerals.
In the figure, reference numeral 12 denotes a vibration-proofing base, and four arm parts 12b and 12c integrally protrude from a central support part 12a. The upper end of an air spring 4 whose lower end is supported by the fixed base 11 is pressed against a position near the center support part 12a of each arm part 12b, 12c. 12 is supported in a floating state parallel to the horizontal plane. Note that the air supply to each air spring 4 is controlled by a servo valve (not shown), and the vibration isolating base 12 is controlled so as to be always horizontal at a predetermined position.

Reference numeral 16 denotes a positioning clamp mechanism, which is provided between the arm portion 12b of the anti-vibration base 12 and the fixed base 11. A clamp mechanism 17 is provided between the arm portion 12c of the anti-vibration base 12 and the fixed base 11. The positioning clamp mechanism 16 and the clamp mechanism 17 move the anti-vibration base 12 to Z when the function of the servo valve is stopped.
The function is to move downward in the vertical direction.
When the anti-vibration base 12 is lowered, the anti-vibration base 12
are clamped (fixed) to each fixed base 11.

Further, the positioning clamp mechanism 16 not only fixes the vibration isolation base 12 in the Z direction, but also positions and fixes the vibration isolation base in the XY direction (horizontal plane direction).

FIG. 2 shows details of the positioning clamp mechanism 16. In the figure, reference numeral 21 denotes an air cylinder, which pushes down the piston rod 22 in the direction B when supplied with air from the supply port a, and pushes the piston rod 22 upward in the direction A when supplied with air from the supply port b. The lower end of the air cylinder 21 is fixed to the lower shelf 11a of the fixed base 11, and the piston rod 22 is connected by a joint nut 23.
It is connected to a pull rod 24. 25 is a tension rod 24
This is a bearing that guides the holder to move only in the A or B direction, and is housed in a bearing box 26, which is fixed to the upper shelf 11b of the fixed base 11. Reference numeral 24a denotes a ball portion integrally formed on the tension rod 24, and a minimum diameter portion 27a of the positioning bush 27 fixed to the arm portion 12b of the anti-vibration base 12.
It has dimensions to fit. Also, the ball portion 24a
does not fit above the tapered portion 27b of the positioning bush 27, and a gap is formed between the two. A vibration-proof base presser 28 is fixed to the upper end of the tension rod 24 with a nut. 29 is the anti-vibration base 12
This is a stopper adjustment screw fixed to the arm portion 12b of the fixing base 11, and protrudes opposite to the stopper 30 fixed to the upper shelf 11b of the fixed base 11. The amount by which the stopper adjustment screw 29 protrudes is such that it comes into contact with the stopper 30 when the tension rod 24 is pulled down and the ball portion 24a is fitted into the minimum diameter portion 27a of the positioning bush 27, and then further lowered by a predetermined amount. will be adjusted accordingly.

FIG. 3 shows the details of the clamp mechanism 17, and all but a part of the positioning clamp mechanism 1
Equal to 6. The clamping mechanism 17 is different from the positioning clamp mechanism 16 in that this mechanism 17 does not position the anti-vibration base 12 in the XY direction (horizontal direction), so the tension rod 31 does not have a ball portion 24a, and also has a positioning bushing. 27, a presser ring 32 is fixed to the arm portion 12c. The protrusion amount of the stopper adjustment screw 29 in the clamp mechanism 17 is as shown in FIG. 3B.
is in contact with the stopper 30, and the adjustment screw 29 in the positioning clamp mechanism 16 and the stopper 3
0 is in contact with each other as shown in FIG. 2B, the vibration isolating base 12 is adjusted to be horizontal.

Next, the operation of the vibration isolation table having the above configuration will be explained.

First, the equipment 5 mounted on the surface plate 3 of the vibration isolating table
When the processing, etc., is completed, a termination signal is generated from the equipment 5, and this signal activates a solenoid valve (not shown) to cut off the air supplied to the servo valve and the air spring 4. This allows the anti-vibration base 1
The servo function that holds 2 in place stops.
Next, air is supplied to the supply port a of the air cylinder 21, and the piston rod 22 is pulled down. The piston rod 22 is connected to the tension rods 24, 31 by means of a joint nut 23, so that the tension rods 24, 31
Lower 31.

The tension rods 24 and 31 fit into the inner diameter of the bearing 25 held by the bearing box 26 and slide downward without play. When the tension rod 24 is pulled down, the ball portion 24a
is lowered, and the tapered part 2 of the positioning bush 27
7b and descends while rubbing the surface of the tapered part 27b, so the positioning bushing 27 and the anti-vibration base 12 connected thereto are forcibly moved in the XY direction, and the ball part 24a is brought into engagement with the minimum diameter part 27a. Anti-vibration base 1 in XY direction when used
The second position will be determined. When the tension bar 24 is further pulled down by a small amount from this state, the vibration-proof base presser 28 provided at the upper end of the tension bar 24 hits the upper surface of the positioning bush 27 and pushes the positioning bush 27 down. After this, the tension rods 24, 31
When the vibration isolating base 12 is lowered, the anti-vibration base 12 also lowers and stops at a predetermined position. At this time, since the tension rod 31 is also being pulled down, the vibration-proof base presser foot 28 is pushing down the presser foot receiving ring 32. Also, at this time, each stopper adjustment screw 29 of the positioning clamp mechanism 16 and clamp mechanism 17 is set to the stopper 3.
0, the position of the anti-vibration base 12 in the Z direction is determined, and the anti-vibration base 12 contacts the fixed base 1.
Clamped to 1.

Next, in response to the clamp operation end signals from the positioning clamp mechanism 16 and the clamp mechanism 19, a robot or the like (not shown) removes and attaches the workpiece to the equipment 5. The clamp operation end signal is generated by counting with a timer or the like. When the removal and installation of the workpiece is completed, a completion signal is generated from the device 5, air is supplied to the supply port b of the air cylinder 21, and the tension rod 2
4 and 31 are pushed up, and the vibration isolating base 12 is also pushed up and released from the clamped state.
Incidentally, the force pushing up the vibration isolating base 12 at this time is the elastic force of the air spring 4.

When the vibration-proof base 12 shifts to the floating state, air is again supplied to the servo valve and the air spring 4, and the vibration-proof base 12 is stably held at a predetermined holding position. The positioning clamp mechanism 16 and clamp mechanism 17 in this state are in the second state.
This is shown in Figure A and Figure 3A.

As described above, in the processing process using the device 5, the vibration-proof base 12 is maintained in a floating state by the air spring 4, and vibrations from the floor are effectively removed. Furthermore, when attaching or detaching a workpiece to or from the equipment 5, the vibration isolating base 12 is clamped at an accurate position, so attachment and detachment can be carried out reliably without mistakes, and these operations can be carried out with high precision. Able to carry out the process.

Note that the present invention is not limited to the above embodiments.

For example, in the embodiment, the vibration isolating base 12 is clamped for positioning, but the surface plate 3 may be clamped for positioning.

Also, install the positioning button 27 on the anti-vibration base 12 and the positioning pin on the fixing base 11, and then pull down the anti-vibration base 12 to remove the positioning button 27.
The vibration isolating base 12 may be positioned by inserting a positioning pin into the position.

In addition, a positioning bush 27 is provided on the anti-vibration base 12, and the positioning rod 27 is installed with an air cylinder from below.
4 may be pushed up and positioned by the ball portion 24a, and the vibration-proof base 12 may be pushed up and brought into contact with the stopper 30.

Further, the vibration isolation base 12 may be positioned in the XYZ directions other than the horizontal direction and the vertical direction. Further, the power source for operating the positioning clamp mechanism and the tension shaft of the clamp mechanism may be other sources such as hydraulic pressure.

(Effects) As explained above, the present invention provides air springs 12b, 12b between the plurality of arm parts 12b, 12b, 12c, 12c extending from the vibration isolation base 12 holding the device 5 and the fixed bases 11, 11.
... is provided, and a positioning bush 27 having an engaging part 27a on an inner diameter for determining the horizontal position of the vibration isolation base is attached to a part of the arm part, and engages with the inner diameter engaging part of the positioning bush. A shaft member 24 having a matching ball portion 24a is passed through the hole bored in the positioning bush and the arm portion, and drive means 21, 21, etc. for driving the shaft member forward and backward are connected to the shaft member passed through. and presser members 28, 28 that engage with the arm portion and press down the arm portion as the shaft member moves.
and a stopper 29 for vertical positioning of the arm between the arm and the fixing base.
30, horizontal restraint is not performed in the vibration-isolated state, and horizontal positioning is performed by the clamp, especially the spherical portion 24a of the shaft member 24 and the inner diameter spherical engagement portion 27a of the positioning bushing, and then, As the shaft member 24 descends, the arm part (vibration isolation base) is lowered by the engagement of the presser member 28 and the arm part (positioning button), and the stopper 29.
30 is used for vertical positioning, thereby accurately fixing (clamping) the position of the vibration isolating base in the X, Y, and Z directions. Therefore, when attaching and detaching objects (equipment) to and from the base, these operations can be performed accurately.

[Brief explanation of the drawing]

FIG. 1 shows an embodiment of the present invention, where A is a top view;
B is a side view, FIGS. 2A and B are explanatory views showing the operation of the positioning clamp mechanism, FIGS. 3A and B are explanatory views showing the operation of the clamp mechanism, FIG. 4 is a conventional example, and A is a side view. Figure B is a top view. 3... Surface plate, 4... Air spring, 5... Equipment, 11... Fixing base, 12... Vibration isolation base, 16... Positioning clamp mechanism, 17... Clamp mechanism.

Claims (1)

[Scope of Claims] 1. An air spring is provided between a plurality of arm parts extending from a vibration-proof base that holds equipment and a fixed base, and the horizontal position of the vibration-proof base is determined by a part of the arm parts. A positioning bush having an engaging portion on the inner diameter of the positioning bush is attached, and a shaft member having a ball portion that engages with the inner diameter engaging portion of the positioning bush is passed through the hole bored in the positioning bush and the arm portion. and a drive means for driving the shaft member forward and backward is connected to the shaft member passing through the shaft member, and a pressing member that engages with the arm portion and presses down the arm portion as the shaft member moves; and a stopper for vertical positioning of the arm part between the positioning bushing and the fixing base, and after the vibration-proof base is positioned in the horizontal direction by the positioning bushing and the shaft member, the holding member and the stopper A vibration isolating device characterized in that the vibration isolating base is positioned vertically using the vibration isolating base.