JPH0464813B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a vibration-isolating support device for supporting processing machines, parts, etc. in a product manufacturing line or the like so that they are not affected by external vibrations.

(Prior art) Figures 7A and 7B show a conventional vibration isolator,
1 is a fixed base, 2 is a vibration-proof base, 3 is a surface plate (mounting base), 4 is an air spring, and 5 is a processing device mounted on the vibration-proof support device.

The conventional anti-vibration support device configured in this way is
Equipment 5 is passed through the fixed base 1, anti-vibration base 2, and surface plate 3.
The air springs 4 can reduce the floor vibrations transmitted to the floor.

(Problem to be Solved by the Invention) However, since the anti-vibration base 2 is only supported by the air springs 4, vibrations caused by the operation of the processing equipment 5 or changes in balance may cause the anti-vibration base to
tends to fluctuate in the XY direction (horizontal direction) and Z direction (vertical direction), and the processing equipment 5 mounted on the surface plate 3 also tends to fluctuate. If there is such a change in the processing equipment, when the processing is finished with the processing equipment and the workpiece is automatically mounted or removed by a robot (not shown), the workpiece may be incorrectly mounted or removed. This tends to occur, making automation difficult.

Furthermore, it was impossible to mount and remove the workpiece with high precision.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides horizontal positioning in a vibration-proof support device that holds equipment on a base elastically supported by air springs. a clamp mechanism that positions the base by vertically pushing it down after the base has been removed; a servo valve that controls the supply of air to the air spring to maintain the base in a floating state at a predetermined position; an electric control means for controlling the clamp mechanism; and an electric control means for controlling the clamp mechanism by cutting off air supply to the servo valve based on a first signal generated in response to the operation of the device. actuate to fix the device, release the clamp mechanism by the electrical control means based on a second signal generated in response to the operation of the device, and then actuate the servo valve to float the device; We propose an anti-vibration support device that is characterized by maintaining the same condition.

(Example) FIGS. 1A and 1B show an example of the present invention,
Components that are the same as in FIG. 4 are given the same reference numerals.
In the figure, 12 is a vibration-proof base, and four arm parts 12b and 12c integrally protrude from a central support part 12a. The upper end of an air spring 4 whose lower end is supported by the fixed base 11 is pressed against a position near the center support part 12a of each arm part 12b, 12c. 12 is supported in a floating state parallel to the horizontal plane. Note that the air supply to each air spring 4 is controlled by a servo valve which will be described later, and the vibration isolating base 12 is controlled so as to be always horizontal at a predetermined position.

Reference numeral 16 denotes a positioning clamp mechanism, which is provided between the arm portion 12b of the anti-vibration base 12 and the fixed base 11. A clamp mechanism 17 is provided between the arm portion 12c of the anti-vibration base 12 and the fixed base 11. The positioning clamp mechanism 16 and the clamp mechanism 17 move the anti-vibration base 12 to Z when the function of the servo valve is stopped.
The function is to move downward in the vertical direction.
When the anti-vibration base 12 is lowered, the anti-vibration base 12
are clamped (fixed) to each fixed base 11.

Further, the positioning clamp mechanism 16 not only fixes the vibration isolation base 12 in the Z direction, but also positions and fixes the vibration isolation base in the XY direction (horizontal plane direction).

FIG. 2 shows details of the positioning clamp mechanism 16. In the figure, reference numeral 21 denotes an air cylinder, which pushes down the piston rod 22 in the direction B when supplied with air from the supply port a, and pushes the piston rod 22 upward in the direction A when supplied with air from the supply port b. The lower end of the air cylinder 21 is fixed to the lower shelf 11a of the fixed base 11, and the piston rod 22 is connected by a joint nut 23.
It is connected to a pull rod 24. 25 is a tension rod 24
This is a bearing that guides the holder to move only in the A or B direction, and is housed in a bearing box 26, which is fixed to the upper shelf 11b of the fixed base 11. 24a is a spherical portion integrally formed on the tension rod 24, and the smallest diameter portion 27 of the positioning bush 27 fixed to the arm portion 12b of the vibration-proof base 12.
It has dimensions that fit with a. Also, the ball portion 24a
does not fit above the tapered portion 27b of the positioning bush 27, and a gap is formed between the two. A vibration-proof base presser 28 is fixed to the upper end of the tension rod 24 with a nut. 29 is the anti-vibration base 12
This is a stopper adjustment screw fixed to the arm portion 12b of the fixing base 11, and protrudes opposite to the stopper 30 fixed to the upper shelf 11b of the fixed base 11. The amount of protrusion of the stopper adjustment screw 29 is such that when the tension rod 24 is pulled down and the ball portion 24a is fitted into the minimum diameter portion 27a of the positioning bush 27, it comes into contact with the stopper 30 when it is further lowered by a predetermined amount. be adjusted.

FIG. 3 shows the details of the clamp mechanism 17, and all but a part of the positioning clamp mechanism 1
Equal to 6. The clamping mechanism 17 is different from the positioning clamp mechanism 16 in that this mechanism 17 does not position the anti-vibration base 12 in the XY direction (horizontal direction), so the tension rod 31 does not have a ball portion 24a, and also has a positioning bushing. 27, a presser ring 32 is fixed to the arm portion 12c. The protrusion amount of the stopper adjustment screw 29 in the clamp mechanism 17 is as shown in FIG. 3B.
is in contact with the stopper 30, and the adjustment screw 29 in the positioning clamp mechanism 16 and the stopper 3
0 is in contact with each other as shown in FIG. 2B, the vibration isolating base 12 is adjusted to be horizontal.

FIG. 4 shows the vibration isolating support device of this embodiment using an air circuit. In the figure, air at a predetermined pressure (for example, 5 kg/cm ² ) supplied from an air source is branched into two systems, each passing through an air filter 35 to a pressure transducer (regulator) 3.
6 and 37 to different predetermined pressures (eg, 3 kg/cm ² by converter 36 and 4 kg/cm ² by converter 37), respectively. The pressurized air produced by the transducer 36 is passed through a first line 38 to four 5-port solenoid valves 39-42.
while the air under pressure produced by the transducer 37 passes through a second line 43 to three
It is supplied to port solenoid valves 44-46. The five-port solenoid valves 39 to 42 have the function of selecting whether to supply air to the air cylinder 21 from the supply port a or from the supply port b. Here, S ₁
In the energized state, air is supplied from the supply port a to push up the tension rods 24, 31, and in the _S2 energized state, air is supplied from the supply port b to pull down the tension bars 24, 31 to prevent vibrations. The base 12 is set to move downward. The air that has passed through the converter 36 is supplied to each air cylinder 21 through five-port solenoid valves 39 to 42 and further through throttle valves 47 to 50 that alleviate pressure fluctuations.

On the other hand, the two-port solenoid valves 44-46 have the function of selecting whether to supply or stop air to the servo valves 51-53 and each air spring 4. Here, the two-port solenoid valves 44 to 46 are set to supply air when _S1 is energized and to stop the air supply when _S2 is energized.

In addition, the servo valves 51 to 53 are connected to the vibration isolation base 1.
2 are detected by mechanical sensors 51a to 53a, and the air pressure applied to each air spring 4 is adjusted to maintain the vibration isolation base 12 at a predetermined position.

FIG. 5 shows the state of electrical connection between the vibration isolation support device of this embodiment, the processing equipment 5, and the automatic hand 55. 56 is a microprocessor (hereinafter referred to as a microprocessor) for electrically controlling the anti-vibration support device and exchanging signals with the processing equipment 5 and the automatic hand 55.
(abbreviated as MPU), read-only memory 5
The above-mentioned process is executed according to the process procedure stored in 7. 58 is an interface circuit;
Anti-vibration support device, processing equipment 5 and auto hand 55
The combination is performed on the signals. 59,6
0 are sensors for detecting the position of the anti-vibration base 12, respectively. The sensor 59 generates a clamp release signal when the vibration isolation base 12 rises from a predetermined fixed position and reaches a predetermined floating position. Conversely, the sensor 60 generates a clamp completion signal when the vibration isolation base 12 descends from a predetermined floating position and reaches a predetermined fixed position. A timer 61 is turned on when the sensor 59 generates a clamp release signal, and outputs an output to the MPU 56 after a predetermined time has elapsed. 62 is 5 port solenoid valve 39~42 MPU
It is a driver that switches based on the control of 56,
63 is a driver that switches the two-port solenoid valves 44 to 46 based on the control of the MPU 56.

Next, the operations of the anti-vibration support device, processing equipment 5, and automatic hand 55 constructed as above will be explained based on the flowchart of FIG. First, assuming that it is fixed on the top surface of the surface plate 3, step S1
As shown, the 2-port solenoid valves 44 to 46 and the 5-port solenoid valves 39 to 42 are in the _S1 energized state, and the vibration isolation base 12 is maintained in a floating state at a predetermined position by the action of the servo valves 51 to 53. There is.
When the machining etc. in the equipment 5 is completed, the equipment 5 generates a machining end signal k (step S2), and based on this signal, the MPU 56 resets the timer 61 (step S3), and further resets the 5-port solenoid valves 39 to 42 and 2. The ports 44 to 46 are brought into the _S2 energized state (step S4). As a result, air supplied to the servo valves 51 to 53 and the air spring 4 is cut off. Therefore, the servo function that holds the anti-vibration base 12 in a predetermined position is stopped. At the same time, air begins to be supplied to the supply port a of each air cylinder 21, and the piston rod 22 is pulled down. The piston rod 22 is connected to the pull rods 24, 31 by a joint nut 23, so that the pull rods 24, 31 are pulled down.

The tension rods 24 and 31 fit into the inner diameter of the bearing 25 held by the bearing box 26 and slide downward without play. When the tension rod 24 is pulled down, the ball portion 24a
is lowered, and the tapered part 2 of the positioning bush 27
7b and descends while rubbing the surface of the tapered part 27b, so the positioning bushing 27 and the anti-vibration base 12 connected thereto are forcibly moved in the XY direction, and the ball part 24a is brought into engagement with the minimum diameter part 27a. Anti-vibration base 1 in XY direction when used
The second position will be determined. When the tension bar 24 is further pulled down by a small amount from this state, the vibration-proof base presser 28 provided at the upper end of the tension bar 24 hits the upper surface of the positioning bush 27 and pushes the positioning bush 27 down. After this, the tension rods 24, 31
When the vibration isolating base 12 is further lowered, the anti-vibration base 12 also lowers and stops at a predetermined position. At this time, since the tension rod 31 is also being pulled down, the vibration-proof base presser foot 28 is pushing down the presser foot receiving ring 32. At this time, the stopper adjustment screws 29 of the positioning clamp mechanism 16 and the clamp mechanism 17 come into contact with the stopper 30, and the position of the anti-vibration base 12 in the Z direction is determined, and the anti-vibration base 12 is clamped against the fixed base 11. be done. When the anti-vibration base 12 reaches the fixed position in this manner, the sensor 60 generates a clamp completion signal 1, and the process proceeds to the next step (step S5).

Based on the clamp completion signal l, the MPU 56:
The automatic hand operation start signal m is sent to the automatic hand 55 (step S6), and the device 5 is made to remove and attach the workpiece (step S6).
S7). When the removal and installation of the workpiece is completed,
An auto hand operation end signal n is generated from the device 5, and the MPU 56 switches the 5 port solenoid valves 39 to 42 to S ₂
Make it energized (steps S8, S9). As a result, air is supplied to the supply port b of the air cylinder 21, and the tension rods 24 and 31 are pushed up. Therefore, the vibration isolating base 12 becomes free and is pushed upward by the force of the air spring 4, releasing it from the clamped state. When the anti-vibration base 12 reaches a predetermined floating position, the sensor 59 generates a clamp release completion signal 0, and the 2-port solenoid valve 4
4 to 46 are brought into the _S1 energized state (step S10,
S11). As a result, air is again supplied to the servo valves 51 to 53 and the air spring 4, and the vibration isolating base 12 is stably held at a predetermined holding position. The states of the positioning clamp mechanism 16 and clamp mechanism 17 in this state are shown in FIGS. 2A and 3A. Further, at the same time that the two-port solenoid valves 44 to 46 become _S1 energized, the timer 61 is started (step S12).

When the timer 61 counts a predetermined time t,
A device processing start signal p is sent to the device 5, and the device 5 begins processing (steps S13, S14,
S15).

By repeating the above operations, the workpieces are automatically replaced and processed one after another, so that the processing speed is significantly reduced.

Further, in the processing process using the equipment 5, the vibration-proof base 12 is maintained in a floating state by the air spring 4, and vibrations from the floor are effectively removed. Furthermore, when attaching or detaching a workpiece to or from the equipment 5, the vibration isolating base 12 is clamped at an accurate position, so attachment and detachment can be carried out reliably without mistakes, and these operations can be carried out with high precision. Able to carry out the process.

Note that the present invention is not limited to the above embodiments.

For example, in the embodiment, the vibration isolating base 12 is clamped for positioning, but the surface plate 3 may be clamped for positioning.

Also, install the positioning button 27 on the anti-vibration base 12 and the positioning pin on the fixing base 11, and then pull down the anti-vibration base 12 to remove the positioning button 27.
The vibration isolating base 12 may be positioned by inserting a positioning pin into the position.

In addition, a positioning bush 27 is provided on the anti-vibration base 12, and the positioning rod 27 is installed with an air cylinder from below.
Alternatively, the anti-vibration base 12 may be pushed up and positioned by the ball portion 24a, and the anti-vibration base 12 may be pushed up and brought into contact with the stopper 30.

Further, the vibration isolation base 12 may be positioned in the XYZ directions other than the horizontal direction and the vertical direction. The power source for operating the positioning clamp mechanism and the tension shaft of the clamp mechanism may be other sources such as hydraulic pressure.

(Effects) As explained above, the present invention provides a vibration-proof support device that holds equipment on a base elastically supported by an air spring, in which the base is moved vertically after positioning in the horizontal direction. Clamp mechanisms 24a, 27, 28 for positioning by pushing down, and servo valves 51, 52, 28 for controlling the supply of air to the air springs 4, 4... to maintain the base in a floating state at a predetermined position.
53, electrical control means 56 to 63 for controlling the servo valve and the clamp mechanism, and a first signal k generated in response to the operation of the device.
Based on the electric control means, the air supply to the servo valve is cut off and the clamp mechanism is actuated to fix the device; and based on a second signal n generated in response to the operation of the device. The present invention proposes a vibration damping support device characterized in that after the clamping mechanism is released by the electrical control means, a servo valve is operated to maintain the device in a floating state, and the device is configured to send a predetermined signal to the device. In response to this, the device has a control means that automatically switches between a floating state using a servo valve and a clamping state that involves positioning in the XYZ directions. Delivery can be performed automatically, making it possible to use it on production lines, etc.

[Brief explanation of the drawing]

Figure 1 shows an example of the present invention, where A is a top view and B is a top view.
is a side view, FIGS. 2A and B are explanatory views showing the operation of the positioning clamp mechanism, FIGS. 3A and B are explanatory views showing the operation of the clamp mechanism, and FIG. 4 is an air circuit diagram.
FIG. 5 is a block circuit diagram, FIG. 6 is a flowchart, and FIG. 7 is a conventional example, where A is a side view and B is a top view. 3...Surface plate, 4...Air spring, 5...Equipment, 11...Fixing base, 12...Vibration isolation base, 16...Positioning clamp mechanism, 17...Clamp mechanism, 21...Air cylinder, 39-42...5 port electromagnetic valve, 44-4
6...2-port electromagnetic valve, 51-53...servo valve, 55...auto hand, 56...microprocessor.

Claims (1)

[Claims] 1. In a vibration-proof support device that holds equipment on a base elastically supported by an air spring, after positioning in the horizontal direction, the base is pushed down in the vertical direction to perform positioning. a clamp mechanism; a servo valve that controls the supply of air to the air spring to maintain the base in a floating state at a predetermined position; an electrical control means that controls the servo valve and the clamp mechanism; Based on a first signal generated in response to the operation of the device, the electric control means cuts off the air supply to the servo valve and operates the clamp mechanism to fix the device; The vibration isolating support device is characterized in that the electric control means releases the clamp mechanism based on a second signal generated in response to the above, and then operates a servo valve to maintain the device in a floating state. .