JPH0465903B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a thin film deposition apparatus used for forming a thin film on a desired workpiece by vacuum deposition.

<Prior Art> A workpiece rotation system is well known as a thin film deposition apparatus. For example, by placing a workpiece holder around a shaft (or table) that is rotatable relative to the evaporation source, and rotating the workpiece held in the holder, the same surface always faces the evaporation source. There is a so-called revolution type vapor deposition apparatus that is equipped with a jig that performs vapor deposition in a state where the vapor deposition is performed. In addition to the above method, the workpiece holder itself is also provided with a driven gear that meshes with the drive gear provided on the rotating shaft, and the holder directly connected to the driven gear is rotated by planetary motion. A vapor deposition apparatus equipped with a jig device is known.

<Problems to be Solved by the Invention> In the above-mentioned revolution type vapor deposition apparatus, the direction of the workpiece relative to the evaporation source is fixed in one direction, so a thin film can only be formed on the surface of the workpiece facing the evaporation source. In addition, the revolution method solves the problem of the revolution method described above and has the effect of being able to deposit the entire surface of the rotating surface.Although each of the above functions can be used depending on the conditions of the workpiece, both of the above methods Now, if the conditions of the workpiece require processing that does not allow film formation only on a certain direction, or if there is a request to form a film effectively only on a required surface or part, it is necessary to position the workpiece holder. This requires complicated work, such as adjusting each time and preparing and using special additional jigs, making it difficult to handle and inefficient, and a solution to this problem is desired.

The present invention has been provided in view of the above-mentioned problems.In addition to the functions of the conventional revolution method and auto-revolution method, it is also possible to arbitrarily vary the rotation ratio between the rotation and revolution of the auto-revolution method, and when the holder revolves. The purpose of this invention is to enable the direction and angle of the evaporation source to be arbitrarily set variably.

<Means for Solving the Problems> In order to achieve the above object, the present invention provides a thin film deposition apparatus equipped with a workpiece mounting jig configured to rotate around the evaporation source. A jig table is provided to be rotatable around the base, a first motor for controlling the table is provided, and a ring gear is provided to be rotatable concentrically with respect to the base and the jig table. The ring gear is configured by meshing a drive gear driven by a second motor that requires control and a driven gear provided on the rotation shafts of an appropriate number of workpiece holders rotatably supported with respect to the jig table. It is something.

<Function> When using only for revolution, the jig table is rotated by driving the first control motor, and the second control motor is driven to rotate the ring gear in synchronization with the rotation of the table. By setting and driving the rotation speed according to the meshing gear ratio, the workpiece can be held in the workpiece holder and always have the same surface facing the evaporation source, that is, it can be driven in revolution. . In addition, when rotating and revolving as in the past, the second control motor is stopped and only the first motor is driven to rotate the jig table, so that the jig table is rotatably supported by the table. The rotating shaft of the workpiece holder has a driven gear that meshes with the ring gear, so it moves while rotating relative to the ring gear that has stopped rotating due to the action of a rack and pinion gear. It can be driven. If you want to vary the rotation speed ratio of this rotation to the revolution, if you control the second control motor to the required rotation speed during the above-mentioned rotation and revolution drive, the ring gear will rotate at the set speed, so the workpiece will be relatively The holder rotation is changed in speed and operates.

Furthermore, when changing the angle of the evaporation surface of the workpiece to a required angle with respect to the evaporation source, the workpiece is held in the holder, the second control motor is driven to change the angle to the required angle, and then the control The first motor and the second motor may be driven in the same manner as the above-mentioned revolution drive, and this makes it possible to perform vapor deposition on the corresponding surface of the workpiece by setting an arbitrary angle, and to perform vapor deposition on each required surface.

<Example> Hereinafter, preferred examples of the present invention will be described based on the drawings.

FIG. 1 is a side view showing the configuration of a vapor deposition apparatus according to an embodiment of the present invention, and FIG. 2 is a plan view of FIG. 1.

In the figure, 1 is the outer shell of the vapor deposition apparatus, and a disk-shaped base 2 is provided at the center of the bottom of the shell. An evaporation source 3 composed of a reservoir (not shown) or the like is installed inside the outer shell 1. 4 is outer shell 1
This is a jig table disposed in the shape of a hollow disk around the base 2, and the table is rotatably provided with respect to the base 2 by a structure described later. On the upper surface of the jig table 4, workpiece holders 5 are erected and supported at appropriate intervals on the circumference at the center of its width, with the holder shaft 5a being rotatable. 5b is an arm that supports and fixes the upper portions of each workpiece holder 5 to each other. Further, a part of the outer periphery of the lower surface of the jig table 4 is stepped, and a gear is formed on the stepped outer periphery to form a table gear 6.
A pulley 8 coaxially connected to a drive gear 7 meshing with the gear 6 and a control motor 9 are connected by a belt,
The rotation of the jig table 4 is controlled by a first control motor 9. This control first motor 9
Any type of motor can be used, such as a fixed rotational output type or a variable rotational speed type motor such as a pulse motor.

10 is a driven gear attached to the end of the holder shaft 5a, and the driving gear 11 is the gear 1.
A pulley 13 coaxially connected to the drive gear 11 and a control motor 14 having the same function as the first motor are connected by a belt, and the driven gear 10 is rotated by the second control motor 14. I am trying to control the movement.

That is, the workpiece holder 5 rotates on the jig table 4 due to the rotation of the driven gear 10. The ring gear 12 is rotatably disposed on the outer periphery of the base 2 in the same manner as the jig table 4, and in the illustrated example, the outer periphery of the base 2 is stepped and bearings 15 are provided on the stepped seat. Supported through. The ring gear 12 has a geared outer peripheral surface, and the driving gear 11 whose rotation is controlled by the driven gear 10 of the holder shaft 5a and the second control motor 14 meshes with the geared part as described above. It is something that In the case of the illustrated example, a part (inner circumferential side) of the jig table 4 is located on the upper surface of the ring gear 12 via a bearing 16, and with these configurations, the jig table 4 and the ring gear 12 are It is designed so that it can rotate concentrically with respect to the base 2 and also rotate independently of each other.

In the above configuration, a required workpiece (not shown) that requires vapor deposition is placed on the workpiece holder 5.
When vapor deposition is performed while the workpiece is held in place, first, the second control motor 14 is stopped to perform vapor deposition on the entire surface of the workpiece in so-called rotation and revolution by rotating the jig table 4 and rotating the holder 5. The first control motor 9 is then driven. Then, since the second motor 14 is stopped, the ring gear 12
Since the ring gear 1 remains stationary without being rotated, the ring gear 1 is rotated by the rotation of the jig table 4, which starts rotating via the drive gear 7 by the drive of the first motor 9.
The driven gear 10 meshing with the holder 2 rotates, and the holder shaft 5a, which is coaxially connected, rotates relative to the jig table 4. In other words, the workpiece holder 5 rotates on the jig table 4. It will revolve while doing so.

When the second motor 14 is stopped, the ratio of rotation to revolution is fixed to a predetermined value by the gear ratio of each gear part, but it is necessary to change the rotation ratio depending on the conditions of the workpiece. If this occurs,
During the above driving, the second control motor 14 is set to a rotation speed according to the above conditions and driven. Then, the ring gear 12 will rotate with respect to the base 2 due to the rotational drive of the second motor 14, and therefore the driven gear 10 of the holder shaft 5a will correspond to the rotation of the ring gear 12 compared to the case of rotation and revolution described above. The rotation speed will be changed by that amount, and it will rotate.

If the second motor 14 is of a type capable of forward and reverse rotation, the direction of rotation of the workpiece holder 5 can also be changed arbitrarily.

Next, when operating only by revolution with the workpiece holder fixed, the first control motor 9
The second motor 14 is driven. In this case, the rotation direction and rotation speed of the jig table 4 and the ring gear 12 are set and controlled to be the same. Then, the workpiece holder 5 rotates while always facing the same plane with respect to the evaporation source 3, that is, it can be driven to revolve.

However, in the revolving drive of the lever, if it is necessary to deposit other surfaces of the workpiece as well, according to the conventional method, the orientation of the workpiece holder 5,
Although it was necessary to set the orientation of the workpiece again using a jig or the like, in the embodiment of the present invention, after the work by the above-mentioned revolution drive, it is stopped during revolution or once, and then the second control motor 14 , i.e., if it is revolving, the synchronous rotation with the jig table 4 is shifted by a required length to change the angle of the workpiece holder 5 to a required angle, and then the workpiece holder 5 is rotated synchronously with the jig table again. In the case of a temporary stop, after the stop, the second motor 14 is driven to change the workpiece holder 5 to the required angle, and then the first and second motors 9 and 14 are respectively driven to rotate the ring gear 12 and the workpiece holder 5. The jig table 4 may be controlled to rotate synchronously. As a result, when the same workpiece has two or more evaporation surfaces instead of the entire surface, it is possible to sequentially and arbitrarily change the evaporation surface only by controlling both motors 9 and 14.

In the above embodiment, gear meshing is used to drive the ring gear 12 and the jig table 4 to rotate, but the drive of the jig table 4 is not limited to the above configuration, and for example, the drive of the jig table 4 is not limited to the above configuration. It is also possible to adopt a configuration in which the drive gear 7 is separated and a gear belt is hung between both gears for driving.
In addition, the first and second motors 9 and 14 are connected to pulleys 8 and 13.
Not only the connection type but also the corresponding gears 7 and 11.
Direct drive is also possible by connecting directly to the shaft.

<Effects of the Invention> As described above, according to the present invention, drive control motors are provided for the rotation mechanism of the workpiece holder and the rotation mechanism of the jig table that supports the holder, respectively, so that the two mechanisms can be mutually operated. Since it is possible to drive independently while also being related to the workpiece, settings such as revolution, fixed revolution/revolution ratio, variable revolution/revolution ratio, and change of the deposition surface during revolution can be made according to the deposition conditions of the workpiece.
In other words, the apparatus of the present invention can be used in general for vapor deposition conditions.
Further, the work can be done exclusively for various types of workpieces, and the apparatus can be provided as a highly economical and practical device.

[Brief explanation of drawings]

The drawings show a preferred embodiment of the present invention, and FIG. 1 is a side view showing the configuration of a vapor deposition apparatus, and FIG. 2 is a plan view of FIG. 1. In the figure, 1 is the outer shell, 2 is the base, 3 is the evaporation source, and 4
is a jig table, 5 is a workpiece holder, 6 is a table gear, 7 is a drive gear, 9 is a first motor for control, 10 is a driven gear, 11 is a drive gear, 12 is a ring gear, 14 is a second control motor It's a motor.

Claims (1)

[Scope of Claims] 1. In a thin film deposition apparatus equipped with a workpiece mounting jig configured to rotate around and around an evaporation source, the jig table is rotatable around a base provided with an evaporation source. and a first control motor for rotationally driving the table, a ring gear rotatable concentrically with respect to the base and the jig table, and a second control motor drives the ring gear. 1. A thin film deposition apparatus characterized in that a drive gear is meshed with driven gears provided on rotational shafts of an appropriate number of workpiece holders rotatably supported with respect to the jig table.