JPH0473209B2 - - Google Patents
Info
- Publication number
- JPH0473209B2 JPH0473209B2 JP58095722A JP9572283A JPH0473209B2 JP H0473209 B2 JPH0473209 B2 JP H0473209B2 JP 58095722 A JP58095722 A JP 58095722A JP 9572283 A JP9572283 A JP 9572283A JP H0473209 B2 JPH0473209 B2 JP H0473209B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetoresistive
- magnetic
- head
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
磁気抵抗効果型ヘツドは再生用磁気ヘツドとし
て磁気デイスク、磁気テープ装置用として検討さ
れており、記録波長の短波長化や、テープ速度の
低下などの場合に磁気誘導型ヘツドより高再生出
力が得られる。磁気抵抗効果型ヘツドの性能、形
状、構造などは使用目的によつて異なり、それぞ
れ最適化が図られている。[Detailed Description of the Invention] [Field of Application of the Invention] Magnetoresistive heads are being studied as playback magnetic heads for use in magnetic disks and magnetic tape devices, and there are problems such as shorter recording wavelengths and lower tape speeds. In this case, a higher reproduction output can be obtained than a magnetic induction head. The performance, shape, structure, etc. of magnetoresistive heads vary depending on the purpose of use, and each is optimized.
従来の磁気抵抗効果型ヘツドのシールド膜には
パーマロイが使用されていたが、パーマロイはビ
ツカース硬度で100〜150と非常に軟らかいため、
磁気テープ表面との摺動によりパーマロイが塑性
流動を起こし、本来絶縁されている筈の磁気抵抗
効果膜と短絡を起こす。また、磁気テープとの摺
動によりヘツド表面が摩耗して、磁気抵抗効果膜
の幅が減少する。
Permalloy was used for the shielding film of conventional magnetoresistive heads, but since permalloy is extremely soft with a Vickers hardness of 100 to 150,
As permalloy slides against the surface of the magnetic tape, it causes plastic flow, causing a short circuit with the magnetoresistive film, which is supposed to be insulated. Furthermore, the head surface is worn out by sliding with the magnetic tape, reducing the width of the magnetoresistive film.
本発明は耐摺動性に優れたヘツド摩耗の少ない
磁気抵抗効果型ヘツドを提供することを目的とす
る。
SUMMARY OF THE INVENTION An object of the present invention is to provide a magnetoresistive head with excellent sliding resistance and less head wear.
従来の磁気シールド膜の代りにビツカース硬度
で600〜800の高硬度の非晶質軟磁性膜を使用する
ことにより、上述の塑性流動による電気的摺動が
減少するとともに、摩耗量も著しく減少する。し
たがつて、ヘツド特性の長時間にわたる安定性が
保たれる。以上述べた本発明の効果を以下の実施
例にて詳しく説明する。
By using an amorphous soft magnetic film with a high hardness of 600 to 800 on the Bitkers hardness scale instead of the conventional magnetic shielding film, the electrical sliding caused by the above-mentioned plastic flow is reduced, and the amount of wear is also significantly reduced. . Therefore, the stability of the head characteristics over a long period of time is maintained. The effects of the present invention described above will be explained in detail in the following examples.
実施例 １
第１図に本発明に於けるシールド型磁気抵抗効
果型ヘツドの断面を示す。１はガラス、Al2O3，
Al2O3・TiC，SiC−Siなどの絶縁性基板で、２
は非晶質軟磁性シールド膜、３は絶縁膜SiO2、
４は磁気バイアス用薄膜、５は絶縁膜SiO2、６
は磁気抵抗膜パーマロイ、７は通電用電極、８は
絶縁膜SiO2、９は非晶質軟磁性膜、１０は素子
保護膜のSiO2である。この構造の磁気抵抗効果
ヘツドに於て、非晶質軟磁性膜として
Fe5Co70Si15B10をスパツタ法で作製したヘツド
は、従来のパーマロイ膜を磁気シールド膜とした
ヘツドに対して、初期の磁気再生特性には優劣は
認められないが、テープとの摺動時間の増大とと
もに両者の再生特性に差が生ずる。第２図はパー
マロイをシールド膜として用いたヘツドと非晶質
膜をシールド膜としたヘツドの多数の再生特性に
おける劣化の最も著しいサンプルの再生信号の比
較を行なつたもので、パーマロイをシールド膜と
したヘツドに比較して非晶質膜をシールド膜とし
たヘツドの特性劣化の少ないことがわかり、シー
ルド膜として非晶質磁性膜を用いたことの効果は
明らかである。
Embodiment 1 FIG. 1 shows a cross section of a shield type magnetoresistive head according to the present invention. 1 is glass, Al 2 O 3 ,
Insulating substrates such as Al 2 O 3・TiC, SiC-Si, etc.
3 is an amorphous soft magnetic shielding film, 3 is an insulating film SiO 2 ,
4 is a thin film for magnetic bias, 5 is an insulating film SiO 2 , 6
7 is a magnetoresistive film permalloy, 7 is a current-carrying electrode, 8 is an insulating film SiO 2 , 9 is an amorphous soft magnetic film, and 10 is an element protection film SiO 2 . In a magnetoresistive head with this structure, as an amorphous soft magnetic film,
A head made of Fe 5 Co 70 Si 15 B 10 using the sputtering method has no superiority in initial magnetic reproduction characteristics compared to a conventional head with a permalloy film as a magnetic shielding film, but it has poor friction with tape. As the operating time increases, a difference arises in the reproduction characteristics of the two. Figure 2 compares the reproduction signals of a number of samples with the most significant deterioration in the reproduction characteristics of a head using Permalloy as a shielding film and a head using an amorphous film as a shielding film. It was found that the head using an amorphous film as a shield film had less characteristic deterioration than the head using an amorphous magnetic film as a shield film, and the effect of using an amorphous magnetic film as a shield film is clear.
実施例 ２
第１図で示した磁気シールド膜２，９に非晶質
軟磁性材料であるCO80Mo9.5Zr10.5を使用した場
合にも第２図で示したものと同様の特性が得られ
た。Example 2 Characteristics similar to those shown in Fig. 2 can be obtained when CO 80 Mo 9.5 Zr 10.5 , which is an amorphous soft magnetic material, is used for the magnetic shield films 2 and 9 shown in Fig. 1. Ta.
以上の実施例から明らかなように、磁気抵抗効
果型ヘツドの磁気シールド膜に非晶質磁性膜を使
用すると、極めて特性の安定したヘツドの作製が
可能となる。この特性向上の原因は、既に述べた
ように、高硬度の非晶質磁性材料が磁気テープと
の摺動に耐えて塑性流動を起こし難いこと、高硬
度のため耐摩耗性が良いことなどに帰因している
ものとみられる。 As is clear from the above embodiments, when an amorphous magnetic film is used for the magnetic shield film of a magnetoresistive head, it is possible to manufacture a head with extremely stable characteristics. As mentioned above, this improvement in characteristics is due to the fact that the highly hard amorphous magnetic material can withstand sliding with the magnetic tape and does not easily cause plastic flow, and its high hardness provides good wear resistance. This seems to be due to this.
第１図は本発明に関わる磁気ヘツドの構造を示
す断面断、第２図は従来のヘツドと本発明のヘツ
ドとの再生信号の特性比較を示す図である。
１…絶縁性基板、２…非晶質軟磁性シールド
膜、３…絶縁膜、６…磁気抵抗膜パーマロイ、８
…絶縁膜、９…非晶質軟磁性膜。
FIG. 1 is a sectional view showing the structure of a magnetic head according to the present invention, and FIG. 2 is a diagram showing a comparison of reproduction signal characteristics between a conventional head and a head according to the present invention. DESCRIPTION OF SYMBOLS 1... Insulating substrate, 2... Amorphous soft magnetic shielding film, 3... Insulating film, 6... Magnetoresistive film permalloy, 8
...Insulating film, 9...Amorphous soft magnetic film.
Claims (1)
絶縁膜を介して、磁気シールド用磁性膜を形成し
たシールド型磁気抵抗効果型ヘツドに於て、当該
磁気シールド膜にFeCoSiBまたはCoMoZrからな
る非晶質磁性材料膜を使用したことを特徴とする
磁気抵抗効果型再生ヘツド。 ２ 前記非晶質磁性材料膜は600以上のビツカー
ス硬度を有する特許請求の範囲第１項記載の磁気
抵抗効果型再生ヘツド。 ３ 前記非晶質磁性材料膜はCoを主成分とする
特許請求の範囲第１項または２項記載の磁気抵抗
効果型再生ヘツド。[Claims] 1. In a shield type magnetoresistive head in which a magnetic film for magnetic shielding is formed on one or both sides of a magnetoresistive film via an electrically insulating film, the magnetic shielding film is made of FeCoSiB or A magnetoresistive playback head characterized by using an amorphous magnetic material film made of CoMoZr. 2. The magnetoresistive read head according to claim 1, wherein the amorphous magnetic material film has a Vickers hardness of 600 or more. 3. The magnetoresistive read head according to claim 1 or 2, wherein the amorphous magnetic material film contains Co as a main component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9572283A JPS59223923A (en) | 1983-06-01 | 1983-06-01 | Magneto-resistance effect type playback head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9572283A JPS59223923A (en) | 1983-06-01 | 1983-06-01 | Magneto-resistance effect type playback head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59223923A JPS59223923A (en) | 1984-12-15 |
| JPH0473209B2 true JPH0473209B2 (en) | 1992-11-20 |
Family
ID=14145361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9572283A Granted JPS59223923A (en) | 1983-06-01 | 1983-06-01 | Magneto-resistance effect type playback head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59223923A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200472512Y1 (en) * | 2014-03-10 | 2014-05-27 | 문병찬 | High temperature insulation tape |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60239911A (en) * | 1984-05-11 | 1985-11-28 | Fujitsu Ltd | Magnetic resistance effect type reproducing head |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165923A (en) * | 1980-05-24 | 1981-12-19 | Matsushita Electric Ind Co Ltd | Magnetic head |
-
1983
- 1983-06-01 JP JP9572283A patent/JPS59223923A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200472512Y1 (en) * | 2014-03-10 | 2014-05-27 | 문병찬 | High temperature insulation tape |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59223923A (en) | 1984-12-15 |
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