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JPH0476423B2 - - Google Patents
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JPH0476423B2 - - Google Patents

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Publication number
JPH0476423B2
JPH0476423B2 JP9721885A JP9721885A JPH0476423B2 JP H0476423 B2 JPH0476423 B2 JP H0476423B2 JP 9721885 A JP9721885 A JP 9721885A JP 9721885 A JP9721885 A JP 9721885A JP H0476423 B2 JPH0476423 B2 JP H0476423B2
Authority
JP
Japan
Prior art keywords
magnetic
magnetic field
coil
alloy plate
amorphous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9721885A
Other languages
Japanese (ja)
Other versions
JPS61254828A (en
Inventor
Ichiro Yamashita
Hiroyuki Hase
Shinya Tokuono
Masayuki Wakamya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60097218A priority Critical patent/JPS61254828A/en
Priority to US06/853,717 priority patent/US4812758A/en
Priority to DE8686105368T priority patent/DE3680387D1/en
Priority to EP86105368A priority patent/EP0204928B1/en
Publication of JPS61254828A publication Critical patent/JPS61254828A/en
Publication of JPH0476423B2 publication Critical patent/JPH0476423B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/243Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of AC
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、非晶質磁性合金を用いた力学量−イ
ンダクタンス変換型のセンサの駆動方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for driving a mechanical quantity-inductance conversion type sensor using an amorphous magnetic alloy.

従来の技術 従来の検出方法を圧力センサを用いて説明す
る。第5図は非晶質磁性合金板を用いた圧力セン
サを示した断面図である。1は磁歪を有する非晶
質合金板、2は軟磁性フエライトからなるコア、
3はコア2の中に設けられたコイルで、コイル3
に電流を流すと非晶質合金板1とコア2で磁気回
路Hを構成し、全体はケース4に納められてい
る。圧力は導入部5と透孔6からなる圧力伝達手
段7により非晶質合金板1の他面の一部に加えら
れる。圧力の印加に伴い非晶質合金板1に歪が発
生すると磁歪効果により非晶質合金板1の磁性が
変化し、発振電源8とインダクタンス測定回路9
からなる検出部10によりその変化が検出され、
圧力がインダクタンスで検出される。
Prior Art A conventional detection method will be explained using a pressure sensor. FIG. 5 is a sectional view showing a pressure sensor using an amorphous magnetic alloy plate. 1 is an amorphous alloy plate having magnetostriction, 2 is a core made of soft magnetic ferrite,
3 is a coil provided in the core 2, and the coil 3
When a current is applied to the magnetic circuit H, the amorphous alloy plate 1 and the core 2 form a magnetic circuit H, which is housed in a case 4 as a whole. Pressure is applied to a part of the other surface of the amorphous alloy plate 1 by a pressure transmitting means 7 consisting of an introduction part 5 and a through hole 6. When strain occurs in the amorphous alloy plate 1 due to the application of pressure, the magnetism of the amorphous alloy plate 1 changes due to the magnetostrictive effect, and the oscillation power source 8 and inductance measurement circuit 9
The change is detected by the detection unit 10 consisting of
Pressure is detected by inductance.

この時従来は、第6図に示す単一周波数の交流
信号を用いて検出していた。
At this time, conventionally, detection was performed using a single frequency AC signal shown in FIG.

発明が解決しようとする問題点 第7図に、第6図のような単一周波数の交流信
号のみで測定した場合の圧力−インダクタンスの
関係を示す。矢印は測定の順序を示している。圧
力−インダクタンスの関係は再現性が悪くヒステ
リシスが発生し、デイスアコモデーシヨン(以下
DAと略す)により安定性も悪く、時間と伴に変
化する。さらに単一信号だけでは非晶質磁性合金
板の透磁率が歪や応力に対して大きな変化を示さ
ず、センサの出力が小さい。
Problems to be Solved by the Invention FIG. 7 shows the pressure-inductance relationship when measured using only a single frequency alternating current signal as shown in FIG. 6. Arrows indicate the order of measurements. The relationship between pressure and inductance has poor reproducibility and hysteresis occurs, resulting in disaccommodation (hereinafter referred to as
(abbreviated as DA), it has poor stability and changes over time. Furthermore, with only a single signal, the magnetic permeability of the amorphous magnetic alloy plate does not show a large change with respect to strain or stress, and the output of the sensor is small.

本発明は、これらの問題点を解決するものであ
る。
The present invention solves these problems.

問題点を解決するための手段 コイルに交流磁界に重畳して、立上り時大振巾
で後一定値に収斂される矩形波様磁界を加え、そ
の収斂される矩形波様磁界印加状態でコイルのイ
ンダクタンスを測定する。
Means to solve the problem: Apply a rectangular wave-like magnetic field that has a large amplitude at rise and then converges to a constant value by superimposing it on an alternating current magnetic field, and when the rectangular wave-like magnetic field is applied, the coil Measure inductance.

作 用 コイルに立ち上がり時大振巾の磁界を印加する
ことにより、磁気回路の磁性体内の磁区はその磁
気モーメントの方向が強制的に磁界方向に平行に
なる。その後一定値の磁界まで下がるが、このと
き大振巾の磁界により強く一方向に配向された磁
区がやや配向気味の磁区構造に再現性良く移行す
る。この効果は、消磁と同じく磁性体の内部状態
をリセツトすることになり、センサの出力の再現
性が良くなる。また磁性体内の磁区構造が固定さ
れるために起こるデイスアコモデーシヨンの影響
もなくすことができる。
Effect By applying a large amplitude magnetic field to the coil at startup, the direction of the magnetic moment of the magnetic domains in the magnetic body of the magnetic circuit is forced to become parallel to the direction of the magnetic field. Thereafter, the magnetic field decreases to a certain value, but at this time, due to the large amplitude magnetic field, the magnetic domains that are strongly oriented in one direction transition to a slightly oriented magnetic domain structure with good reproducibility. This effect, like demagnetization, resets the internal state of the magnetic material, improving the reproducibility of the sensor output. Furthermore, the influence of disaccommodation caused by the fixed magnetic domain structure within the magnetic body can also be eliminated.

さらに磁界が一定値に収斂後は一定直流磁界が
重畳されたのと同じであり、磁性体内では回転磁
化過程により磁性体内の磁束変化が起こる。その
結果磁壁移動がなくなり、自発磁化だけになるの
で温度特性は大巾に改善される。また非晶質磁性
合金板を用いたセンサの応力に対する感度も大き
くする作用がある。
Furthermore, after the magnetic field converges to a constant value, it is the same as a constant DC magnetic field being superimposed, and magnetic flux changes within the magnetic body occur due to the rotational magnetization process. As a result, there is no domain wall movement and only spontaneous magnetization occurs, resulting in a significant improvement in temperature characteristics. It also has the effect of increasing the sensitivity of the sensor using the amorphous magnetic alloy plate to stress.

直流磁界が重畳した場合に、センサ出力が増大
する直流磁界領域が存在する。この様な効果が得
られるのは次のような理由によると考えられる。
There is a DC magnetic field region where the sensor output increases when DC magnetic fields are superimposed. The reason why such an effect is obtained is considered to be due to the following reasons.

圧力によつて歪が非晶質磁性合金板に発生する
と、その歪が生じた部分で透磁率が減少する。そ
の結果磁気回路内では磁束が連続であるため、歪
を生じた部分で直流および交流磁界が他の部分よ
り大きくなる。直流磁界が大きくなると、非晶質
磁性合金板の透磁率は通常の軟磁性体同様減少す
るので、初めの歪だけによる透磁率の減少以上に
透磁率の減少が大きくなる。この変化は交流磁界
に対する透磁率の直流磁界依存性が大きいB−H
ループの肩に相当する部分で効果が大きい。この
B−Hループの肩に相当するように直流磁界を設
定すれば磁気抵抗は数倍に増大する。この部分が
センサ出力が増大する直流磁界領域に相当すると
考えられる。この直流磁界による透磁率減少効
果、磁気抵抗増大効果が大きいため、交流磁界成
分振巾がやや大きくなつても影響がほとんどな
い。
When strain occurs in the amorphous magnetic alloy plate due to pressure, the magnetic permeability decreases in the portion where the strain occurs. As a result, since the magnetic flux is continuous within the magnetic circuit, the DC and AC magnetic fields are larger in the distorted part than in other parts. As the DC magnetic field increases, the magnetic permeability of the amorphous magnetic alloy plate decreases like a normal soft magnetic material, so the decrease in magnetic permeability becomes greater than the decrease in magnetic permeability due to initial strain alone. This change is due to the large dependence of magnetic permeability on AC magnetic field on B-H
The effect is greatest in the part corresponding to the shoulder of the loop. If the DC magnetic field is set to correspond to the shoulder of this B-H loop, the magnetic resistance will increase several times. This portion is considered to correspond to the DC magnetic field region where the sensor output increases. Since the magnetic permeability reducing effect and magnetic resistance increasing effect of this DC magnetic field are large, even if the amplitude of the AC magnetic field component becomes slightly large, there is almost no effect.

一方磁気回路中に歪を生じない部分では磁界が
減少し透磁率は大きくなり、磁気抵抗は減少す
る。しかしこの部分の磁気抵抗は、歪の生じた部
分の磁気抵抗と直列に接続されるため、全体の磁
気抵抗変化は、歪は受けた部分の大きな磁気抵抗
変化が主なものとなる。よつてセンサの感度が直
流磁界印加により大きくなると考えられる。
On the other hand, in areas where no distortion occurs in the magnetic circuit, the magnetic field decreases, magnetic permeability increases, and magnetic resistance decreases. However, since the magnetic resistance of this portion is connected in series with the magnetic resistance of the strained portion, the overall magnetic resistance change is mainly due to the large magnetic resistance change of the strained portion. Therefore, it is thought that the sensitivity of the sensor increases with the application of a DC magnetic field.

実施例 第1図は、第5図の圧力センサに直流磁界を重
畳した場合のインダクタンスが直流磁界Hdcの大
きさによりどのように変化するかを、0気圧、30
気圧の圧力時において示したものである。測定温
度は50度とし、周波数は20KHzである。これから
も交流磁界のみで測定した場合(Hdc=0の場
合)は出力が小さいことが判り、通常の測定が不
適当であることが判る。また直流磁界を重畳した
場合、出力が増大する直流磁界領域が存在する。
Example Figure 1 shows how the inductance changes depending on the magnitude of the DC magnetic field H dc when a DC magnetic field is superimposed on the pressure sensor shown in Figure 5.
This is shown at atmospheric pressure. The measurement temperature is 50 degrees and the frequency is 20KHz. From this, it can be seen that the output is small when measured only with an alternating magnetic field (H dc = 0), and it can be seen that normal measurement is inappropriate. Furthermore, when a DC magnetic field is superimposed, there is a DC magnetic field region where the output increases.

第2図は本実施例による駆動方法においてコイ
ルに印加される磁界を示している。低周波の矩形
波の立上り部分が大振巾Hnaxにされ、その後一
定値Hsに収斂され、一定直流磁界が加わるよう
になつている。インダクタンスの測定は、この収
斂後の直流磁界印加状態で行なう。Hsの直流磁
界はある一定周期で零にされ再び上述の波形が繰
り返される。
FIG. 2 shows the magnetic field applied to the coil in the driving method according to this embodiment. The rising portion of the low-frequency rectangular wave is made to have a large amplitude Hnax , and then converged to a constant value Hs , and a constant DC magnetic field is applied. The inductance is measured in a state where a direct current magnetic field is applied after this convergence. The DC magnetic field of H s is made zero at a certain period, and the above-mentioned waveform is repeated again.

このような測定波形では第5図の圧力センサの
磁気回路中のそれぞれの磁性体の磁区構造は大き
く変化する。ここでは非晶質磁性合金板の磁区構
造の変化について説明するが、軟磁性フエライト
でも同じことが当てはまる。
With such a measurement waveform, the magnetic domain structure of each magnetic body in the magnetic circuit of the pressure sensor shown in FIG. 5 changes greatly. Here, changes in the magnetic domain structure of an amorphous magnetic alloy plate will be explained, but the same applies to soft magnetic ferrite.

第3図は非晶質磁性合金板のヒステリシスルー
プであるが、大振巾の磁界Hnaxが印加されると、
非晶質磁性合金板の磁束密度は飽和磁気に達す
る。これは非晶質磁性合金板の中で磁区構造がな
くなり、自発磁化すなわち磁気モーメントが回転
して印加磁界に平行になつていることを示してい
る。この状態から一定値の直流重畳磁界Hsに磁
界が収斂されると、磁気モーメントがHnaxの印
加磁界方向に配向気味の磁区構造になる。この磁
区構造の変化はHnaxが十分大きければ再現性が
高い。すなわちHnax印加後、Hsの磁界が重畳さ
れた交流磁界で測定を行うと、再現性の良い磁区
構造の状態で、測定を行うことになる。これによ
りセンサ出力が安定になり、透磁率が長期にわた
つて変化するデイスアコモデーシヨンの影響がな
くなる。
Figure 3 shows the hysteresis loop of an amorphous magnetic alloy plate. When a large amplitude magnetic field H nax is applied,
The magnetic flux density of the amorphous magnetic alloy plate reaches saturation magnetism. This indicates that the magnetic domain structure disappears in the amorphous magnetic alloy plate, and the spontaneous magnetization, that is, the magnetic moment, rotates and becomes parallel to the applied magnetic field. When the magnetic field is converged from this state to a DC superimposed magnetic field H s of a constant value, a magnetic domain structure is formed in which the magnetic moment tends to be oriented in the direction of the applied magnetic field H nax . This change in magnetic domain structure is highly reproducible if H nax is sufficiently large. That is, if measurement is performed using an alternating current magnetic field on which a magnetic field of H s is superimposed after applying H nax , the measurement will be performed in a state of a magnetic domain structure with good reproducibility. This stabilizes the sensor output and eliminates the effects of disaccommodation, which causes long-term changes in magnetic permeability.

またHsの磁界を重畳された交流磁界で測定を
行うと、回転磁化過程を用いた測定になる。磁壁
移動磁化過程では、磁壁が磁性体内の温度により
変化しやすいエネルギー障壁を越えて行くため温
度の影響をうけやすいが、回転磁化過程での透磁
率は温度による影響はすくない。これは磁化の回
転による磁化過程のため、透磁率が磁気モーメン
トの温度特性だけで決まるからである。このよう
な理由からHsの磁界が重畳された交流磁界で測
定を行うと温度特性のよいセンサが構成できる。
Furthermore, if measurement is performed using an alternating current magnetic field superimposed with the H s magnetic field, the measurement uses a rotational magnetization process. In the domain wall displacement magnetization process, the domain wall crosses an energy barrier that easily changes depending on the temperature inside the magnetic body, so it is easily affected by temperature, but in the rotational magnetization process, magnetic permeability is not affected by temperature much. This is because the magnetic permeability is determined only by the temperature characteristics of the magnetic moment due to the magnetization process due to rotation of magnetization. For these reasons, a sensor with good temperature characteristics can be constructed by performing measurements with an alternating magnetic field superimposed with an H s magnetic field.

また出力は第1図からわかるように増大する。 The output also increases as can be seen in FIG.

第4図は第2図の駆動方法で第5図の圧力セン
サの圧力−インダクタンスの関係を測定した結果
である。第7図の従来例に比し著しく再現性、安
定性、感度が向上することが判る。
FIG. 4 shows the results of measuring the pressure-inductance relationship of the pressure sensor shown in FIG. 5 using the driving method shown in FIG. 2. It can be seen that the reproducibility, stability, and sensitivity are significantly improved compared to the conventional example shown in FIG.

発明の効果 以上述べたように、本発明による駆動方法を用
いれば、非晶質磁性合金板の磁歪を用いた力学量
−インダクタンス変換型のセンサにおいて、出力
の増大がはかれ、再現性、安定性のよい、経時変
化の少ないセンサが実現でき、その効果は極めて
大きい。
Effects of the Invention As described above, if the driving method according to the present invention is used, the output can be increased, and the reproducibility and stability can be increased in a mechanical quantity-inductance conversion type sensor using magnetostriction of an amorphous magnetic alloy plate. A sensor with good performance and little change over time can be realized, and its effects are extremely large.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は0気圧、30気圧印加した時の圧力セン
サのインダクタンスの直流磁界依存性を示す図、
第2図は本発明の一実施例における磁界の波形
図、第3図は非晶質磁性合金板のB−Hループを
示す図、第4図は本発明の駆動方法による圧力−
インダクタンスの関係を示す図、第5図は非晶質
磁性合金板を用いた圧力センサの断面図、第6図
は従来の磁界の波形図、第7図は従来の駆動方法
による圧力−インダクタンスの関係を示す図であ
る。 1……非晶質磁性合金板、2……コア、3……
コイル、7……圧力伝達手段、8……発振電源、
9……インダクタンス測定回路、10……検出
部。
Figure 1 shows the dependence of the inductance of the pressure sensor on the DC magnetic field when 0 atm and 30 atm are applied.
FIG. 2 is a waveform diagram of the magnetic field in one embodiment of the present invention, FIG. 3 is a diagram showing the B-H loop of an amorphous magnetic alloy plate, and FIG.
Figure 5 is a cross-sectional view of a pressure sensor using an amorphous magnetic alloy plate, Figure 6 is a waveform diagram of a conventional magnetic field, and Figure 7 is a diagram showing the relationship between pressure and inductance using a conventional drive method. It is a figure showing a relationship. 1...Amorphous magnetic alloy plate, 2...Core, 3...
Coil, 7...pressure transmission means, 8...oscillation power supply,
9...Inductance measurement circuit, 10...Detection section.

Claims (1)

【特許請求の範囲】[Claims] 1 磁歪を有する非晶質磁性合金板の一面に軟磁
性材からなるコアを設け、そのコア中にコイルを
設け、上記非晶質磁性合金板、コアおよびコイル
で磁気回路を構成し、上記非晶質磁性合金板の他
面の一部に圧力伝達手段を設け、上記コイルに発
振電源とインダクタンス測定回路からなる検出部
を設け、上記圧力伝達手段により非晶質磁性合金
板の一部に発生する歪をコイルのインダクタンス
で検出するセンサにおいて、上記コイルに交流磁
界に重畳して、立ち上がり時大振巾で後一定値に
収斂される矩形波様磁界を加え、その収斂される
矩形波様磁界印加状態でコイルのインダクタンス
を測定することを特徴とする非晶質磁性合金応用
センサの駆動方法。
1 A core made of a soft magnetic material is provided on one surface of an amorphous magnetic alloy plate having magnetostriction, a coil is provided in the core, a magnetic circuit is constituted by the amorphous magnetic alloy plate, the core, and the coil, and the A pressure transmission means is provided on a part of the other surface of the crystalline magnetic alloy plate, and a detection section consisting of an oscillation power source and an inductance measuring circuit is provided on the coil, and the pressure generated on a part of the amorphous magnetic alloy plate by the pressure transmission means is In a sensor that detects the strain caused by the inductance of a coil, a rectangular wave-like magnetic field that has a large amplitude at rise and then converges to a constant value is applied to the coil, superimposed on an alternating current magnetic field, and the converged rectangular wave-like magnetic field is A method for driving an amorphous magnetic alloy applied sensor characterized by measuring the inductance of a coil in an applied state.
JP60097218A 1985-04-18 1985-05-08 Driving method of amorphous magnetic alloy applied sensor Granted JPS61254828A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60097218A JPS61254828A (en) 1985-05-08 1985-05-08 Driving method of amorphous magnetic alloy applied sensor
US06/853,717 US4812758A (en) 1985-04-18 1986-04-18 Method of operating an amorphous-magnetic-alloy sensor
DE8686105368T DE3680387D1 (en) 1985-04-18 1986-04-18 MAGNETIC FIELD CONTROL FOR AMORPHOUS ALLOY SENSOR.
EP86105368A EP0204928B1 (en) 1985-04-18 1986-04-18 Exciting of magnetic field for amorphous-alloy sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60097218A JPS61254828A (en) 1985-05-08 1985-05-08 Driving method of amorphous magnetic alloy applied sensor

Publications (2)

Publication Number Publication Date
JPS61254828A JPS61254828A (en) 1986-11-12
JPH0476423B2 true JPH0476423B2 (en) 1992-12-03

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JP60097218A Granted JPS61254828A (en) 1985-04-18 1985-05-08 Driving method of amorphous magnetic alloy applied sensor

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JP4897657B2 (en) * 2007-12-11 2012-03-14 本田技研工業株式会社 Magnetostrictive torque sensor device, magnetostrictive torque sensor device for electric steering, and initialization method of magnetostrictive torque sensor device

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