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JPH0478562B2 - - Google Patents
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JPH0478562B2 - - Google Patents

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Publication number
JPH0478562B2
JPH0478562B2 JP31712388A JP31712388A JPH0478562B2 JP H0478562 B2 JPH0478562 B2 JP H0478562B2 JP 31712388 A JP31712388 A JP 31712388A JP 31712388 A JP31712388 A JP 31712388A JP H0478562 B2 JPH0478562 B2 JP H0478562B2
Authority
JP
Japan
Prior art keywords
water
oil
metal compound
particle size
microspheres
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP31712388A
Other languages
Japanese (ja)
Other versions
JPH01301502A (en
Inventor
Seiji Yamanaka
Yasuyuki Ogata
Koji Shirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP31712388A priority Critical patent/JPH01301502A/en
Publication of JPH01301502A publication Critical patent/JPH01301502A/en
Publication of JPH0478562B2 publication Critical patent/JPH0478562B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14Methods for preparing oxides or hydroxides in general
    • C01B13/32Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of elements or compounds in the liquid or solid state or in non-aqueous solution, e.g. sol-gel process
    • C01B13/328Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of elements or compounds in the liquid or solid state or in non-aqueous solution, e.g. sol-gel process by processes making use of emulsions, e.g. the kerosine process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は水溶性金属化合物の水溶液に油を混合
し超音波振動により生成した油中水型エマルジヨ
ンを加熱することにより、水分と油分を除去して
セラミツクマイクロ球を製造する方法に関する。
Detailed Description of the Invention [Industrial Application Field] The present invention removes water and oil by heating a water-in-oil emulsion produced by mixing oil with an aqueous solution of a water-soluble metal compound and using ultrasonic vibration. The present invention relates to a method for manufacturing ceramic microspheres.

[従来の技術] この種のセラミツクマイクロ球の製造方法とし
て、本出願人はセラミツク微粉体を水に分散させ
た懸濁液をこの懸濁液とほぼ同じ比重であつて水
と混合せずかつセラミツク微粉体と反応しない高
沸点液体中に小滴状で分散させた後、セラミツク
マイクロ球を得る方法を特許出願し(特開昭61−
263628)、更にセラミツク微粉体をアルコール溶
液中に分散させた懸濁液又はゾルを流動パラフイ
ン中に小滴状に分散させた後、アルコールを蒸発
させてセラミツクマイクロ球を得る方法を特許出
願した(特開昭62−262734)。
[Prior Art] As a method for producing ceramic microspheres of this type, the present applicant has developed a method for producing a suspension of fine ceramic powder dispersed in water, which has approximately the same specific gravity as the suspension and which is not mixed with water. A patent application was filed for a method for obtaining ceramic microspheres by dispersing them in the form of small droplets in a high-boiling liquid that does not react with ceramic fine powder (Japanese Patent Application Laid-Open No. 1983-1999).
263628), and also filed a patent application for a method for obtaining ceramic microspheres by dispersing a suspension or sol of ceramic fine powder in an alcohol solution into liquid paraffin in the form of small droplets, and then evaporating the alcohol ( (Japanese Patent Publication No. 62-262734).

[発明が解決しようとする課題] 上記従来の製造方法は、均一な粒径を有する真
球のセラミツクマイクロ球が得られる優れた方法
であるが、オリフイスを通してセラミツク微粉体
の懸濁液を高沸点液体中に小滴状に分散させるた
め、得られるセラミツクマイクロ球の平均粒径は
オリフイス径に依存し、数μmから数10μmの比
較的大きなものしかつくることができない。
[Problems to be Solved by the Invention] The conventional manufacturing method described above is an excellent method for obtaining truly spherical ceramic microspheres having a uniform particle size. Since the ceramic microspheres are dispersed in the form of small droplets in a liquid, the average particle size of the resulting ceramic microspheres depends on the orifice diameter, and only relatively large particles ranging from several μm to several tens of μm can be produced.

また上記従来の製造方法は、懸濁液を調製する
ために使用するセラミツク微粉体の粒径が常に目
的とするセラミツクマイクロ球の粒径よりも遥か
に小さな粒径であることが必要であり、そのため
アルコキシド加水分解法のような特別の製法によ
りつくられた微細なセラミツク微粉体を用いなけ
ればならない不具合があつた。
Furthermore, in the conventional manufacturing method described above, it is necessary that the particle size of the ceramic fine powder used to prepare the suspension is always much smaller than the particle size of the target ceramic microspheres. Therefore, there was a problem in that fine ceramic powder made by a special manufacturing method such as an alkoxide hydrolysis method had to be used.

本発明の目的は、出発原料として微細なセラミ
ツク微粉体を必要とすることなく、粒度分布幅の
狭い、サブミクロンオーダの平均粒径を有するセ
ラミツクマイクロ球が得られるセラミツクマイク
ロ球の製造方法を提供することにある。
An object of the present invention is to provide a method for producing ceramic microspheres that does not require fine ceramic powder as a starting material and that can produce ceramic microspheres with a narrow particle size distribution and an average particle size on the submicron order. It's about doing.

また本発明の別の目的は、油中水型エマルジヨ
ンを生成するための超音波の周波数を変えること
により所望の平均粒径のセラミツクマイクロ球を
作り出せるセラミツクマイクロ球の製造方法を提
供することにある。
Another object of the present invention is to provide a method for producing ceramic microspheres that can produce ceramic microspheres with a desired average particle size by changing the frequency of ultrasonic waves for producing a water-in-oil emulsion. .

[課題を解決するための手段] 上記目的を達成するために、本発明のセラミツ
クマイクロ球の製造方法は、水溶性金属化合物が
溶解した水溶液にこの水溶液に不溶で水より高沸
点の油を混合し、この混合液に超音波振動を与え
て油中水型エマルジオンを生成し、このエマルジ
ヨンを水の沸点未満の温度で加熱し、前記水溶性
金属化合物が溶解する液滴の水分を蒸発させて油
相に球形の水溶性金属化合物を分散させた後、こ
の分散液を前記水溶性金属化合物が分解し金属酸
化物となる温度以上でこの金属酸化物の粒成長開
始温度未満の温度範囲で加熱して油を蒸発又は分
解して除去し、金属酸化物のマイクロ球を得る方
法である。
[Means for Solving the Problems] In order to achieve the above object, the method for producing ceramic microspheres of the present invention includes mixing an aqueous solution in which a water-soluble metal compound is dissolved with an oil that is insoluble in this aqueous solution and has a higher boiling point than water. Then, ultrasonic vibration is applied to this mixed liquid to generate a water-in-oil emulsion, and this emulsion is heated at a temperature below the boiling point of water to evaporate the water in the droplets in which the water-soluble metal compound is dissolved. After dispersing a spherical water-soluble metal compound in the oil phase, this dispersion is heated in a temperature range that is higher than the temperature at which the water-soluble metal compound decomposes and becomes a metal oxide and lower than the temperature at which grain growth of the metal oxide starts. In this method, the oil is removed by evaporation or decomposition to obtain metal oxide microspheres.

本発明の出発原料は目的とするセラミツクスを
構成する水溶性金属化合物である。この水溶性金
属化合物を所定の組成比で20〜50℃の水に溶解し
て水溶液を調製する。
The starting material of the present invention is a water-soluble metal compound constituting the target ceramic. This water-soluble metal compound is dissolved in water at a temperature of 20 to 50°C at a predetermined composition ratio to prepare an aqueous solution.

この水溶液に油を混合して油中水型エマルジヨ
ンを生成する。油は上記水溶性に不溶でありかつ
水より高沸点のものであれば、特に限定されず、
毒性及び価格の点からパラフイン油が望ましい。
またエマルジヨンを生成する際にはエマルジヨン
を長時間安定に存在させるために乳化剤を使用し
た方がよい。この乳化剤はイオン系乳化剤、非イ
オン系乳化剤等いずれの乳化剤でもよい。上記水
溶液100重量部に対して油は35〜100重量部また乳
化剤は1〜6重量部混合する。
This aqueous solution is mixed with oil to form a water-in-oil emulsion. The oil is not particularly limited as long as it is insoluble in the water solubility and has a boiling point higher than water.
Paraffin oil is preferred from the viewpoint of toxicity and cost.
Further, when producing an emulsion, it is better to use an emulsifier in order to make the emulsion exist stably for a long time. This emulsifier may be any emulsifier such as an ionic emulsifier or a nonionic emulsifier. 35 to 100 parts by weight of oil and 1 to 6 parts by weight of emulsifier are mixed with 100 parts by weight of the above aqueous solution.

本発明の特徴ある点の1つはエマルジヨンを超
音波振動により生成する。エマルジヨンの生成を
超音波振動以外の攪拌式ホモジナイザ、圧力式ホ
モジナイザ等の手段で行つた場合には、液滴の径
は部分的にサブミクロンのオーダとなるが、平均
的にサブミクロンのオーダとならず、しかもその
液滴径の分布幅は広いため、最終的に得られるセ
ラミツクマイクロ球の平均粒径が大きくかつ不揃
いとなる。このため超音波振動以外の方法は本発
明に適しない。この超音波の周波数は10kHz〜
100kHzの範囲が好ましい。超音波は一般的に可
聴域より上の周波数、すなわち20kHz以上の音波
であるが、本発明では10kHzの周波数においても
液滴の平均径をサブミクロンのオーダにすること
ができるので、周波数が10kHz以上で20kHz未満
の音波についても、超音波の用語を用いる。周波
数を高めて強い超音波にすると、本発明の最終生
成物であるセラミツクマイクロ球の平均粒径がよ
り一層細かくなり、反対に周波数を低くして弱い
超音波にすると、平均粒径が大きくなる。このこ
とから超音波の周波数を適宜選定すれば、平均粒
径を所望の値に設定することができる。
One of the characteristics of the present invention is that the emulsion is generated by ultrasonic vibration. When the emulsion is generated by a means other than ultrasonic vibration, such as a stirring homogenizer or a pressure homogenizer, the diameter of the droplets is partially on the order of submicrons, but on average it is on the order of submicrons. Moreover, since the distribution width of the droplet size is wide, the average particle size of the ceramic microspheres finally obtained is large and irregular. Therefore, methods other than ultrasonic vibration are not suitable for the present invention. The frequency of this ultrasound is 10kHz~
A range of 100kHz is preferred. Ultrasound is generally a sound wave with a frequency above the audible range, that is, 20 kHz or more, but in the present invention, even at a frequency of 10 kHz, the average diameter of the droplet can be made to the order of submicrons, so the frequency is 10 kHz. In the above, the term ultrasonic wave is also used for sound waves below 20kHz. When the frequency is increased to make the ultrasound stronger, the average particle size of the ceramic microspheres, which is the final product of the present invention, becomes even finer.On the other hand, when the frequency is lowered to make the ultrasound weaker, the average particle size becomes larger. . From this, by appropriately selecting the frequency of the ultrasonic waves, the average particle size can be set to a desired value.

生成したエマルジヨンを加熱して水溶性金属化
合物が溶解する液滴の水分を蒸発させるときの加
熱温度は、高温の方が迅速に液滴の水分を除去で
きるが、100℃を越えると水の沸騰が起きエマル
ジヨンが壊れるので、100℃未満、望ましくは70
〜95℃がよい。
When heating the generated emulsion to evaporate the water in the droplets in which the water-soluble metal compound is dissolved, the higher the heating temperature, the faster the water in the droplets can be removed, but if the temperature exceeds 100°C, the water will boil. temperature below 100°C, preferably 70°C, as this will cause the emulsion to break.
~95℃ is good.

更に油を蒸発又は分解するとともに水溶性金属
化合物を熱分解するときの加熱温度は、水溶性金
属化合物が分解し金属酸化物となる温度以上でこ
の金属酸化物の粒成長開始温度未満の温度である
ことが必要である。
Furthermore, the heating temperature when evaporating or decomposing the oil and thermally decomposing the water-soluble metal compound is at least the temperature at which the water-soluble metal compound decomposes into a metal oxide and lower than the temperature at which grain growth of this metal oxide starts. It is necessary that there be.

[作用] 水溶性金属化合物が溶解した水溶液に油を混合
し、必要により乳化剤を加えて超音波振動を与え
ると、超音波による強力なキヤビテーシヨン効果
が混合液全体に均一に加わり、前記水溶性がサブ
ミクロンのオーダの液滴にまで細分割されて油相
に分散する。ここで超音波の周波数を適宜設定す
れば、マイクロ球の所望の平均粒径を決めること
ができる。
[Function] When oil is mixed with an aqueous solution in which a water-soluble metal compound is dissolved, an emulsifier is added if necessary, and ultrasonic vibration is applied, a strong cavitation effect due to ultrasonic waves is uniformly applied to the entire mixed liquid, and the water-soluble metal compound is dissolved. It is finely divided into droplets on the order of submicrons and dispersed in the oil phase. By appropriately setting the frequency of the ultrasonic waves, a desired average particle size of the microspheres can be determined.

このエマルジヨンを加熱して水溶性金属化合物
が溶解する液滴の水分を蒸発させると、液滴が濃
縮され、油相にサブミクロンのオーダの球形の水
溶性金属化合物が分散する。
When this emulsion is heated to evaporate the water in the droplets in which the water-soluble metal compound is dissolved, the droplets are concentrated and the spherical water-soluble metal compound on the order of submicrons is dispersed in the oil phase.

この水溶性金属化合物が分散した油液を加熱し
て油を蒸発又は分解するとともに水溶性金属化合
物を熱分解させれば、サブミクロンのオーダの金
属酸化物のマイクロ球が得られる。
By heating the oil liquid in which the water-soluble metal compound is dispersed to evaporate or decompose the oil and thermally decompose the water-soluble metal compound, submicron-order metal oxide microspheres can be obtained.

[発明の効果] 以上述べたように、本発明の製造方法は、超音
波振動によりサブミクロンのオーダの水溶性金属
化合物の液滴が油相に分散するエマルジヨンを生
成した後、このエマルジヨンを加熱して水と油を
順次除去してセラミツクマイクロ球を製造するの
で、従来のように出発原料として微細なセラミツ
ク微粉体を用いずに、真球に近い粉体粒子が得ら
れる。
[Effects of the Invention] As described above, the manufacturing method of the present invention involves generating an emulsion in which droplets of a water-soluble metal compound on the order of submicrons are dispersed in an oil phase by ultrasonic vibration, and then heating this emulsion. Since ceramic microspheres are produced by sequentially removing water and oil, powder particles that are close to perfect spheres can be obtained without using fine ceramic powder as a starting material as in the past.

特に乳化が超音波振動により行われ、かつ油の
蒸発・分解温度が金属酸化物の粒成長開始温度未
満であるため、得られた粒子は互いに本質的に点
接触するだけで凝集せず、サブミクロンのオーダ
の平均粒径を有し、かつ粒度分布幅の狭いセラミ
ツクマイクロ球となる。
In particular, since the emulsification is carried out by ultrasonic vibration and the evaporation and decomposition temperature of the oil is below the grain growth initiation temperature of the metal oxide, the resulting particles are essentially in point contact with each other and do not aggregate, but are Ceramic microspheres have an average particle size on the order of microns and a narrow particle size distribution.

更に超音波の周波数を適宜選定すれば、マイク
ロ球の平均粒径を所望の値にすることができる。
Furthermore, by appropriately selecting the frequency of the ultrasonic waves, the average particle diameter of the microspheres can be set to a desired value.

[実施例] 次に本発明の実施例を比較例とともに説明す
る。
[Example] Next, an example of the present invention will be described together with a comparative example.

<実施例1> ZrO(NO32・2H2O 10gを40℃の水50gに溶
解して水溶液を調製した。この水溶液にパラフイ
ン油25gと乳化剤としてポリ・オキシエチレン・
ノニルフエニル・エーテル1gを加えた後、超音
波発生機(Branson社製B−30)により15秒間超
音波振動を与えて油中水型エマルジヨンを生成し
た。この時の超音波の周波数は30kHzであつた。
このエマルジヨンを乾燥器に入れ、大気圧下80℃
の温度で8時間乾燥し、水を蒸発させて除去し
た。エマルジヨンはZrO2粒子が分散する懸濁液
となつた。この懸濁液を大気圧下700℃の温度で
3時間焼成し油を分解して除去し、ZrO2球を得
た。走査型電子顕微鏡によりこのZrO2球の粒径
を測定したところ、平均粒径が0.1μmで粒度分布
幅が±0.02μmの極めて微細でバラツキの少ない
ZrO2の単分散セラミツクマイクロ球であつた。
<Example 1> An aqueous solution was prepared by dissolving 10 g of ZrO(NO 3 ) 2.2H 2 O in 50 g of water at 40°C. Add 25g of paraffin oil to this aqueous solution and use polyoxyethylene as an emulsifier.
After adding 1 g of nonyl phenyl ether, ultrasonic vibration was applied for 15 seconds using an ultrasonic generator (B-30 manufactured by Branson) to produce a water-in-oil emulsion. The frequency of the ultrasound at this time was 30kHz.
Place this emulsion in a dryer at 80°C under atmospheric pressure.
The water was removed by evaporation. The emulsion became a suspension in which ZrO 2 particles were dispersed. This suspension was calcined at a temperature of 700°C under atmospheric pressure for 3 hours to decompose and remove the oil, yielding ZrO 2 spheres. When the particle size of this ZrO 2 sphere was measured using a scanning electron microscope, it was found to be extremely fine with an average particle size of 0.1 μm and a particle size distribution width of ±0.02 μm, with little variation.
They were monodisperse ceramic microspheres of ZrO 2 .

<比較例1> 超音波発生機の代わりに攪拌式ホモジナイザに
よりエマルジヨンを生成したこと以外は実施例1
と同様にしてZrO2球を得た。実施例1と同様に
このZrO2の粒径を測定したところ、0.1〜3μmの
粒度分布幅の広いセラミツクマイクロ球であつ
た。
<Comparative Example 1> Example 1 except that the emulsion was generated using a stirring homogenizer instead of the ultrasonic generator.
Two ZrO spheres were obtained in the same manner. When the particle size of this ZrO 2 was measured in the same manner as in Example 1, it was found to be ceramic microspheres with a wide particle size distribution of 0.1 to 3 μm.

<実施例2> ZrO(NO32・2H2O 5.34gとPb(CH3COO)
・3H2O6.76gとを40℃の水50gに溶解した水溶
液を使用したこと以外は実施例1と同様にして
PbZrO3球を得た。実施例1と同様にこのPbZrO3
球の粒径を測定したところ、実施例1と同じ0.1
±0.02μmの極めて微細で粒度分布幅の狭い
PbZrO3の単分散セラミツクマイクロ球であつた。
<Example 2> ZrO(NO 3 ) 2.2H 2 O 5.34g and Pb(CH 3 COO)
The same procedure as in Example 1 was used except that an aqueous solution of 6.76 g of 2.3H 2 O dissolved in 50 g of water at 40°C was used.
Three spheres of PbZrO were obtained. As in Example 1, this PbZrO 3
When the particle size of the sphere was measured, it was 0.1, the same as in Example 1.
Extremely fine ±0.02μm with narrow particle size distribution
They were monodisperse ceramic microspheres of PbZrO 3 .

<比較例2> 超音波発生機の代わりに圧力式ホモジナイザに
よりエマルジヨンを生成したこと以外は実施例2
と同様にしてPbZrO3球を得た。実施例1と同様
にこのPbZrO3の粒径を測定したところ、比較例
1と同じ0.1〜3μmの粒度分布幅の広いセラミツ
クマイクロ球であつた。
<Comparative Example 2> Example 2 except that the emulsion was generated using a pressure homogenizer instead of the ultrasonic generator.
Three PbZrO spheres were obtained in the same manner. When the particle size of this PbZrO 3 was measured in the same manner as in Example 1, it was found to be ceramic microspheres with a wide particle size distribution of 0.1 to 3 μm, the same as in Comparative Example 1.

<実施例3> 超音波の周波数を10kHzとした以外は実施例1
と同様にしてZrO2球を得た。実施例1と同様に
このZrO2の粒径を測定したところ、平均粒径が
実施例1より若干大きい0.7μmで粒度分布幅も実
施例1より若干広い±0.11μmのZrO2の単分散セ
ラミツクマイクロ球であつた。
<Example 3> Example 1 except that the ultrasonic frequency was 10kHz
Two ZrO spheres were obtained in the same manner. When the particle size of this ZrO 2 was measured in the same manner as in Example 1, the average particle size was 0.7 μm, which was slightly larger than in Example 1, and the particle size distribution width was ±0.11 μm, which was slightly wider than in Example 1 . It was a micro sphere.

<実施例4> 超音波の周波数を100kHzとした以外は実施例
1と同様にしてZrO2球を得た。実施例1と同様
にこのZrO2の粒径を測定したところ、平均粒径
が実施例1より極めて小さい0.02μmで粒度分布
幅も実施例1より極めて狭い±0.003μmのZrO2
の単分散セラミツクマイクロ球であつた。
<Example 4> ZrO 2 spheres were obtained in the same manner as in Example 1 except that the frequency of the ultrasonic waves was 100 kHz. When the particle size of this ZrO 2 was measured in the same manner as in Example 1, the average particle size was 0.02 μm, which was much smaller than in Example 1, and the particle size distribution width was ±0.003 μm, which was much narrower than in Example 1.
They were monodisperse ceramic microspheres.

Claims (1)

【特許請求の範囲】 1 水溶性金属化合物が溶解した水溶液にこの水
溶液に不溶で水より高沸点の油を混合し、この混
合液に超音波振動を与えて油中水型エマルジヨン
を生成し、このエマルジヨンを水の沸点未満の温
度で加熱し、前記水溶性金属化合物が溶解する液
滴の水分を蒸発させて油相に球形の水溶性金属化
合物を分散させた後、この分散液を前記水溶性金
属化合物が分解し金属酸化物となる温度以上でこ
の金属酸化物の粒成長開始温度未満の温度範囲で
加熱して油を蒸発又は分解して除去し、金属酸化
物のマイクロ球を得るセラミツクマイクロ球の製
造方法。 2 超音波の周波数を10kHz〜100kHzの範囲から
選定して所望の平均粒径のマイクロ球を得る請求
項1記載のセラミツクマイクロ球の製造方法。 3 水溶性金属化合物が溶解した水溶液に油とと
もに乳化剤を加えて油中水型エマルジヨンを生成
する請求項1記載のセラミツクマイクロ球の製造
方法。
[Claims] 1. Mixing an aqueous solution in which a water-soluble metal compound is dissolved with an oil that is insoluble in this aqueous solution and has a higher boiling point than water, and applying ultrasonic vibration to this mixture to produce a water-in-oil emulsion, This emulsion is heated at a temperature below the boiling point of water to evaporate the water in the droplets in which the water-soluble metal compound is dissolved, and the spherical water-soluble metal compound is dispersed in the oil phase. The ceramic material is heated in a temperature range above the temperature at which the metallic compound decomposes to become a metal oxide and below the temperature at which the grain growth of the metal oxide begins, to evaporate or decompose and remove the oil, thereby obtaining metal oxide microspheres. Method for manufacturing microspheres. 2. The method for producing ceramic microspheres according to claim 1, wherein microspheres having a desired average particle size are obtained by selecting the frequency of the ultrasonic waves from a range of 10kHz to 100kHz. 3. The method for producing ceramic microspheres according to claim 1, wherein a water-in-oil emulsion is produced by adding an emulsifier together with oil to an aqueous solution in which a water-soluble metal compound is dissolved.
JP31712388A 1988-02-18 1988-12-15 Production of ceramic microsphere Granted JPH01301502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31712388A JPH01301502A (en) 1988-02-18 1988-12-15 Production of ceramic microsphere

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63-36239 1988-02-18
JP3623988 1988-02-18
JP31712388A JPH01301502A (en) 1988-02-18 1988-12-15 Production of ceramic microsphere

Publications (2)

Publication Number Publication Date
JPH01301502A JPH01301502A (en) 1989-12-05
JPH0478562B2 true JPH0478562B2 (en) 1992-12-11

Family

ID=26375281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31712388A Granted JPH01301502A (en) 1988-02-18 1988-12-15 Production of ceramic microsphere

Country Status (1)

Country Link
JP (1) JPH01301502A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4174887B2 (en) 1998-05-21 2008-11-05 堺化学工業株式会社 Method for producing fine spherical particles of nickel, cobalt or copper carbonate or hydroxide
JP4543202B2 (en) * 2005-07-04 2010-09-15 独立行政法人産業技術総合研究所 Liposome production apparatus and production method using multiple ultrasonic irradiation

Also Published As

Publication number Publication date
JPH01301502A (en) 1989-12-05

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