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JPH0513263B2 - - Google Patents
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JPH0513263B2 - - Google Patents

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Publication number
JPH0513263B2
JPH0513263B2 JP60068379A JP6837985A JPH0513263B2 JP H0513263 B2 JPH0513263 B2 JP H0513263B2 JP 60068379 A JP60068379 A JP 60068379A JP 6837985 A JP6837985 A JP 6837985A JP H0513263 B2 JPH0513263 B2 JP H0513263B2
Authority
JP
Japan
Prior art keywords
defect
tip
wave
depth
vertical probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60068379A
Other languages
Japanese (ja)
Other versions
JPS61228345A (en
Inventor
Takeshi Myajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP60068379A priority Critical patent/JPS61228345A/en
Publication of JPS61228345A publication Critical patent/JPS61228345A/en
Publication of JPH0513263B2 publication Critical patent/JPH0513263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/07Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/26Scanned objects
    • G01N2291/269Various geometry objects
    • G01N2291/2697Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔発明の利用分野〕 本発明は、超音波を利用して各種固体に発生し
た表面開口欠陥の深さを測定する方法に関する。 ここにいう固体の表面開口欠陥とは、いろいろ
な産業分野の、たとえば電気装置、機械装置、化
学装置などの装置を構成している部品または部材
に発生している欠陥であつて、その部品または部
材の表面に開口している線状(筒状を含む)およ
び面状の状態のあらゆる欠陥を言い、欠陥の深・
浅、欠陥の傾き、欠陥先端部の形状・寸法、開口
幅寸法の大小などは問はない。また、本発明でい
う固体とは、金属および非金属(ガラス、セラミ
ツク、コンクリート、合成樹脂、ゴム等)であつ
て、超音波が伝搬され得る物体をいう。 また、ここにいう表面開口欠陥の深さは、欠陥
が開口している前記固体の表面から、欠陥先端ま
での垂直距離をいう。 〔発明の背景〕 本発明の利用分野において、装置を構成する部
品または部材に関し、欠陥の有無を調査し、万一
欠陥が発生している場合には、欠陥の位置、形
状、寸法などその欠陥の性状や種類に応じてでき
るだけ詳しい欠陥情報が要求される。そしてこの
欠陥に関する情報は、部品または部材はもちろん
装置全体の強度解析および寿命計算上、重要かつ
不可欠のものである。このため欠陥の性状や種類
に応じて各種の探傷法が開発され実用に供されて
いる。固体の表面に開口した線状または平面状の
欠陥、つまり表面開口欠陥に関しては、その欠陥
の位置、分布およびおおよその大きさを非破壊的
に検知する方法としては、X線やγ線などの放射
線透過、磁気、電気誘導、溶液の浸透、後述の超
音波を利用する方法など物理的エネルギーを利用
する各種の探傷法が提供され、被検体の材質、形
状、寸法などに応じて使い分けられている。しか
し現在のところ、表面開口欠陥の深さを容易に精
度よく、しかもリアルタイムに測定できる方法は
開発されていないのが実状である。 ところで表面開口欠陥は、一般に割れ、あるい
はき裂と云われている欠陥で、その種類および性
状は多い。例えば、溶接金属または熱影響部に発
生する溶接割れ、部材の応力集中部における疲労
き裂、熱処理時の焼き割れ、残留応力を保有して
いる部材の置割れ、比較的高温で発生する粒界割
れ、オーステナイト系ステンレス鋼などに発生し
やすい応力腐食割れなど、それぞれ発生条件や発
生環境により分類されている。これら各種の表面
開口欠陥の深さを測定する方法としては、従来、
前記の放射線透過を利用した放射線透過検査法が
多く使用されてきた。しかし本方法においては、
被検体の透過写真が必要であり、かつ撮影された
写真の出来如何に検査の結果が左右されるから、
解像度の高いプリントが作成されなければならな
い。ところが、被検体の形状や寸法によつては写
真撮影ができない場合があり、写真撮影が可能な
場合でも被検体に応じてフイルム感度や放射線の
エネルギーの強弱を選定する必要があり、さらに
取り扱いによつては放射線の被爆という特殊な安
全上の問題点も有しており、測定上、多くの要件
が要求される。このため簡便に、精度よく測定す
ることができない場合が多い。他方、超音波を利
用する方法はすでに実用に供されていることが報
告(「超音波探傷試験B」1979社団法人日本非
破壊検査協会発行第117〜第118頁、「非破壊検
査」第32巻第2号1983−2月第110頁〜第111頁)
されているが、その方法は少なく、また限られて
いる。前記報告を以下に第11図ないし第14図
を参照しながら説明する。 上記報告は、,とも端部ピークエコー法と
いわれている方法で、その方法の概要を第11図
および第12図により説明する。図において1は
被検体で、その表面に開口した深さdの面状の欠
陥1aが設けられている。1bは被検体1の探傷
面、1cは欠陥1aの先端、1dは被検体1の底
面(反探傷面)である。20は通常の斜角探触子
または点集束斜角探触子(以下斜角探触子とい
う)で、探傷面1bに当接し、欠陥の先端1cか
らのエコーを捕らえるように、矢印AまたはBの
方向に前後走査しながら超音波を発射する。20
a,20bは斜角探触子20を前後走査したとき
の任意の位置を示す。いま斜角探触子20を20
aの位置から矢印Bの方向に走査すると、第12
図のAスコープ表示のCRT4上に、斜角探触子
20の移動距離に伴う欠陥1aからのエコー高さ
が次第に低くなるように連続的に変化して表示さ
れ、エコー包絡線50が得られる。この場合、斜
角探触子20のビーム軸30が欠陥の先端1cに
入射すると、ビーム路程xに対応するCRT4上
の位置に若干のピークエコー60が得られ、エコ
ー包絡線50にその位置が表示される。端部ピー
クエコー法は、欠陥の先端1cからのピークエコ
ー60の位置のビーム路程xと、斜角探触子20
の屈折角θから幾何学的に欠陥の深さdを、 d=x・cos θ として求める方法である。そして報告において
は、超音波の入射方向と欠陥1aの面とのなす角
αが10°以上の時という測定条件で、ピークエコ
ー60をより明瞭に識別するには屈折角θ=45°
の通常の斜角探触子を使用するか、音波を絞れる
点集束斜角探触子または分割形探触子を使用する
とよいことが記され、欠陥の深さdが比較的大き
い場合には、±2mm程度の精度で深さdの寸法推
定が可能である旨記載されている。しかし欠陥の
先端1cに他の欠陥が付随した場合には測定精度
が落ちると報告されている。また報告は本願発
明者等が行つた報告で、端部ピークエコー法に関
する一考察として、欠陥の高さ(深さ)に対する
欠陥の先端の形状および大きさによる影響につい
て種々実験したものである。第13図はその被検
体および実験要領を示すもので、板厚65mmの鋼板
に開先をとり、深さdの溶け込み不良部を設けて
CO2半自動突き合わせ溶接をしたものである。第
11図と同じ符号のものは同じものを示す。探傷
面1bは平滑(〓)に仕上げられ、欠陥深さdは
約30mmに作られている。実験はまず第14図に示
す3つのタイプの欠陥の先端1cの形状および大
きさと〔欠陥深さの測定値du−実際の欠陥深さ
dR=測定誤差Δd〕との関係について行つている。
第14図に示す欠陥の先端の形状は、第13図の
欠陥の先端1c部を模式的に拡大したもので、そ
の大きさは図に示すように定義した2ρ(単位mm)
である。実験結果はほとんど形状に差がなく2ρが
約1mm以下ではΔdが約±3mm程度の精度で測定
できるが、2ρが1mmを超えると精度は急に悪くな
つている。つぎに欠陥高さ(深さ)dの測定精度
を探触子の種類を変えて各タイプについて実験し
ている。その実験結果は下表のとおりである。表
の中で、nはサンプル数、は測定誤差の平均
値、σは測定誤差の標準偏差である。
[Field of Application of the Invention] The present invention relates to a method of measuring the depth of surface opening defects generated in various solids using ultrasonic waves. The solid surface opening defect referred to here is a defect that occurs in parts or members that constitute equipment in various industrial fields, such as electrical equipment, mechanical equipment, chemical equipment, etc. Refers to all linear (including cylindrical) and planar defects that are open on the surface of a member, and the depth and depth of the defect
There is no problem with the shallowness, the slope of the defect, the shape and dimensions of the tip of the defect, the size of the opening width, etc. Furthermore, the term solid as used in the present invention refers to objects including metals and non-metals (glass, ceramics, concrete, synthetic resins, rubber, etc.) through which ultrasonic waves can be propagated. Further, the depth of the surface open defect referred to herein refers to the vertical distance from the surface of the solid where the defect is open to the tip of the defect. [Background of the Invention] In the field of application of the present invention, parts or members constituting a device are investigated for the presence or absence of defects, and if a defect occurs, the location, shape, size, etc. of the defect are investigated. Detailed defect information is required depending on the nature and type of defect. Information regarding this defect is important and indispensable for strength analysis and life calculation of not only parts or members but also the entire device. For this reason, various flaw detection methods have been developed and put into practical use depending on the nature and type of the defect. Regarding linear or planar defects with openings on the surface of a solid, that is, surface opening defects, a nondestructive method for detecting the location, distribution, and approximate size of the defects is to use X-rays, γ-rays, etc. Various flaw detection methods that utilize physical energy are provided, including radiographic transmission, magnetism, electrical induction, solution penetration, and ultrasonic methods described below, and are used depending on the material, shape, and dimensions of the object to be inspected. There is. However, at present, no method has been developed that can easily measure the depth of surface opening defects with high accuracy and in real time. Incidentally, surface opening defects are defects generally referred to as cracks or cracks, and there are many types and properties thereof. For example, weld cracks that occur in weld metal or heat-affected zones, fatigue cracks in stress concentration areas of parts, quench cracks during heat treatment, place cracks in parts that retain residual stress, and grain boundaries that occur at relatively high temperatures. Each type is classified according to the conditions and environment in which it occurs, such as cracks and stress corrosion cracks that tend to occur in austenitic stainless steel. Conventionally, methods for measuring the depth of these various surface opening defects include
Radiographic inspection methods that utilize the aforementioned radiographic transmission have been widely used. However, in this method,
Transmission photographs of the subject are required, and the test results will depend on the quality of the photographs taken.
High resolution prints must be produced. However, depending on the shape and size of the object, it may not be possible to take a photograph, and even if it is possible to take a photograph, the sensitivity of the film and the strength of the radiation energy must be selected depending on the object, and handling may be difficult. It also has the special safety problem of radiation exposure, and many requirements are required for measurement. For this reason, it is often impossible to measure easily and accurately. On the other hand, it has been reported that methods using ultrasonic waves have already been put into practical use ("Ultrasonic Flaw Detection Test B" published by the Japan Nondestructive Inspection Association in 1979, pp. 117-118, "Nondestructive Inspection" No. 32) Volume 2, February 1983, pages 110-111)
However, the methods are few and limited. The above report will be explained below with reference to FIGS. 11 to 14. The above report uses a method called the edge peak echo method, and the outline of the method will be explained with reference to FIGS. 11 and 12. In the figure, reference numeral 1 denotes an object to be inspected, and a planar defect 1a with an opening and a depth d is provided on the surface of the object. 1b is the flaw detection surface of the test object 1, 1c is the tip of the defect 1a, and 1d is the bottom surface (anti-flaw detection surface) of the test object 1. Reference numeral 20 denotes a normal bevel probe or a point-focusing bevel probe (hereinafter referred to as bevel probe), which is in contact with the flaw detection surface 1b and is pointed at arrow A or so as to capture the echo from the tip 1c of the defect. Emit ultrasonic waves while scanning back and forth in direction B. 20
a and 20b indicate arbitrary positions when the angle probe 20 is scanned back and forth. Now the angle probe 20 is 20
When scanning from position a in the direction of arrow B, the 12th
On the CRT 4 in the A scope display shown in the figure, the echo height from the defect 1a is displayed as it changes continuously so that it gradually becomes lower as the angle probe 20 moves, and an echo envelope 50 is obtained. . In this case, when the beam axis 30 of the angle probe 20 enters the tip 1c of the defect, a slight peak echo 60 is obtained at a position on the CRT 4 corresponding to the beam path length x, and the echo envelope 50 shows that position. Is displayed. The edge peak echo method uses the beam path x at the position of the peak echo 60 from the tip 1c of the defect, and the angle probe 20.
In this method, the depth d of the defect is determined geometrically from the refraction angle θ as d=x·cos θ. In the report, under the measurement condition that the angle α between the incident direction of the ultrasonic wave and the surface of the defect 1a is 10° or more, the refraction angle θ = 45° to more clearly identify the peak echo 60.
It is noted that it is better to use a normal bevel probe, or a point-focusing bevel probe or split-type probe that can narrow down the sound waves, and if the depth d of the defect is relatively large. , it is stated that it is possible to estimate the depth d with an accuracy of approximately ±2 mm. However, it has been reported that when another defect is attached to the tip 1c of the defect, the measurement accuracy decreases. This report is a report conducted by the inventors of the present application, in which various experiments were conducted on the influence of the shape and size of the tip of a defect on the height (depth) of the defect, as a study on the edge peak echo method. Figure 13 shows the test object and the experimental procedure, in which a bevel was taken on a 65 mm thick steel plate and a penetration failure part of depth d was created.
CO 2 semi-automatic butt welding. The same reference numerals as in FIG. 11 indicate the same things. The flaw detection surface 1b is finished smooth (ⓓ), and the defect depth d is approximately 30 mm. The experiment was first conducted by comparing the shape and size of the tip 1c of the three types of defects shown in FIG.
d R = measurement error Δd].
The shape of the tip of the defect shown in Figure 14 is a schematic enlargement of the tip 1c of the defect in Figure 13, and its size is 2ρ (unit: mm) defined as shown in the figure.
It is. The experimental results show that there is almost no difference in shape, and when 2ρ is less than about 1 mm, Δd can be measured with an accuracy of about ±3 mm, but when 2ρ exceeds 1 mm, the accuracy suddenly deteriorates. Next, the measurement accuracy of the defect height (depth) d was tested using different types of probes. The experimental results are shown in the table below. In the table, n is the number of samples, is the average value of the measurement error, and σ is the standard deviation of the measurement error.

〔発明の目的〕[Purpose of the invention]

本発明は、前記した従来技術の問題点を解消
し、固体に発生している表面開口欠陥の深さを、
欠陥の深・浅、欠陥の傾き、欠陥の先端の形状お
よび大きさ、欠陥の開口幅の大小などに影響を受
けることなく、容易に高精度に測定でき、しかも
リアルタイムに測定することができる超音波によ
る固体の表面開口欠陥の深さ測定方法を提供する
ことを目的とする。 〔発明の概要〕 本発明は、超音波を利用して固体の表面に開口
している欠陥の深さを測定する方法であつて、固
体の表面に開口した開口欠陥上の表面に垂直探触
子を当接し、該垂直探触子から前記表面とほぼ垂
直に前記開口欠陥の先端に向けて縦波の超音波を
入射し、その入射波が前記開口欠陥の先端に到達
して該先端を音源として散乱した散乱波を前記垂
直探触子に受信し、該受信した散乱波伝搬時間を
評価指標として表面開口欠陥の深さを測定するこ
とにより、電気装置や機械装置などを構成してい
る部品や部材に発生している表面開口欠陥の深さ
を、非破壊的に、高精度に、しかもリアルタイム
に測定することが、容易にできる方法に関するも
のである。 〔発明の実施例〕 本発明の第1の実施例を第1図ないし第8図を
参照しながら説明する。図において第11図およ
び第12図と同じ符号のものは同じものを示す。
第1図において、2は縦波垂直探触子(以下垂直
探触子という)で、被検体1の表面開口欠陥1a
の直上の探傷面1bに当接しており、Aスコープ
表示のパルス反射式超音波探傷装置(以下超音波
探傷器という)3と高周波ケーブルで接続されて
いる。本実施例における表面開口欠陥は、面状欠
陥で、探傷面1bとほぼ垂直方向に向いており、
欠陥の先端が線状になつている深さdRの欠陥であ
る。いま垂直探触子2から欠陥の先端1cに向け
てほぼ垂直に縦波の超音波を入射させると、表面
開口欠陥1aが存在していない場合には、第2図
に示すように超音波は、垂直探触子2の周波数
(波長)と振動子寸法により定まる指向性にて、
点線で示すビーム6で被検体1内を伝搬し、板厚
tの底面1dに達したのち反射し、再び垂直探触
子2に受信される。7は入射波、8は底面反射波
である。ところが、表面開口欠陥1aがある場合
には、第3図に示すように、欠陥の先端1cが音
源となり、第2図における入射波7が先端1cに
到達したとき、該先端が励振されて入射波7が2
次元的に散乱し、その散乱した円筒波9を被検体
1内を伝搬する。円筒波9の一部は垂直探触子2
に受信され、受信された円筒波9のエコーを
CRT4上に表示させると、第4図に示すような
エコーパターンが得られる。すなわち、CRT4
の時間軸上の原点に送信パルスTが表示され、送
信パルスTの位置から表面開口欠陥1aの深さdR
に相当する時間軸上の位置duに、円筒波9のエコ
ーFが表示され、板厚tに相当する位置tuに底面
エコーBがほぼ同時に表示される。この場合、表
示された各エコーの位置は、後述するわずかな測
定誤差を含むもののそのまゝ表面開口欠陥1aの
深さdRおよび板厚tを表示することになり、表面
開口欠陥の深・浅、傾き、先端形状および大き
さ、開口幅の大小などの影響を受けることなく、
円筒波9によるエコーFの伝搬時間duより欠陥の
深さdRの測定が可能となる。 第5図は本実施例に使用した被検体の形状およ
び寸法を示す図で、板厚100mm×長さ300mm×幅
100mmの鋼板(材質SS41)の中央に、幅1.0mmで深
さdRを変えて放電加工によりスリツトを設けたも
のである。サンプル数は12で、深さdRは1.0,2.0,
3.0,5.0,7.0,10.0,20.0,30.0,40.0,50.0,
60.0,70.0mmの12種類である。またスリツトの先
端a部は第6図に示すようにR0.5mmに加工され
ている。スリツトの深さdRの測定は、前述の第1
図に示す要領で行われた。使用した垂直探触子の
周波数は5MHzである。まず垂直探触子を第2図
に示すようにスリツトのない場所の鋼板面に当接
し、その底面エコー高さをCRT上の基準感度
(0dB)とする。ついで垂直探触子を移動して第
3図に示すようにスリツトの直上に当接し、スリ
ツト先端から散乱する円筒波のエコーをCRT上
に表示させる。表示させた円筒波のエコー高さh
(単位dB)と、スリツトの深さdR(単位mm)との
関係を第7図に示す。図は横軸がスリツトの深さ
dRの対数値、縦軸がエコー高さhで、○印が測定
値である。また図の点線はノイズ領域を示し、そ
の値は約−75dBである。各測定値について最小
2乗法により回帰式を求めると、 h=−22 log dR−19.5 となる。上式は図中に鎖線で示す直線となり、両
者は良い相関関係が成立することが判る。この相
関関係は散乱波の距離振幅特性 h∝1/dRとよ
く一致している。またスリツト深さdRの測定可能
な限界は、理論上上記回帰式の鎖線がノイズ領域
の点線と交わる点Pまでであり、本実施例の場合
約300mm付近まで可能であると推定できる。つぎ
に本実施例における測定精度を第8図により説明
する。図は横軸が実際のスリツト深さdR(単位
mm)、縦軸が本発明の方法により得られた回帰式
より求めたスリツト深さdU(単位mm)で、○印が
その値である。この結果、両者は非常によく一致
し、高精度に測定できることが判る。誤差の平均
値は+0.058mm、誤差の標準偏差σは0.211mm
で、dRとdUの相関関係γは0.99997と非常に良い
相関を示している。 前記第1の実施例は、被検体に人工的に加工精
度のよい開口欠陥を設けた場合について説明した
が、以下に第9図および第10図を参照して、実
際の溶接継手の溶接止端部に発生した開口欠陥の
第2の実施例について説明する。本実施例に使用
された被検体は、第9図に示すように板厚25mm×
高さ50mm×長さ100mmのウエブと、板厚25mm×幅
250mm×長さ100mmのフランジをT形溶接したもの
で、フランジ側の溶接止端部に疲労き裂が発生し
ているものである。材質はウエブ、フランジとも
SM50(JIS G3106)である。き裂の深さdRは0.8
mm〜9.3mmまで13種類である。測定は垂直探触子
2がき裂の直上に当接できないため、第9図に示
すようにき裂に接するように当接して行つた。測
定結果を第10図に示す。図は横軸がき裂の実際
の深さdR(単位mm)、縦軸が本発明の方法により測
定したき裂の深さdU(単位mm)で、○印が測定値
である。両者は非常に良く一致し、測定誤差の平
均値=−0.062mm、誤差の標準偏差σ=0.266mm
で、dRとdUの相関関係γは0.868と非常に良い相
関を示している。 以上説明した第1および第2の実施例における
表面開口欠陥は、面状の欠陥で、欠陥の先端が線
状の長さを有するものについて行つたが、表面開
口欠陥が線状の欠陥で、欠陥の先端が点状のもの
については、その欠陥の先端から散乱する散乱波
は3次元的に拡がり、球面波となつて、その一部
が垂直探触子に受信され、第4図に示すようなエ
コーパターン、すなわち、送信パルスTの位置か
ら表面開口欠陥の深さに相当する位置に球面波の
エコーが表示され、板厚に相当する位置に底面エ
コーがほぼ同時に表示される点が異なるだけで、
球面波によるエコーの伝搬時間より欠陥の深さを
測定することおよびその他の測定方法は同じであ
る。 〔発明の効果〕 以上説明したように本発明は、固体の表面に開
口した開口欠陥上の表面に垂直探触子を当接し、
該垂直探触子から前記表面とほぼ垂直に前記開口
欠陥の先端に向けて縦波の超音波を入射し、その
入射波が前記開口欠陥の先端に到達して該先端を
音源として散乱した散乱波を前記垂直探触子に受
信し、該受信した散乱波の伝搬時間を評価指標と
して開口欠陥の深さを測定するようにしたから、
表面開口欠陥の深さが、欠陥の深・浅、欠陥の傾
き、欠陥の先端の形状および大きさ、欠陥の開口
幅の大小などに影響を受けることなく、容易に高
精度に、しかもリアルタイムに測定することがで
きる。
The present invention solves the problems of the prior art described above, and the depth of surface opening defects occurring in solids can be reduced by
Ultra-high-precision measurement that can be easily and accurately measured without being affected by the depth or shallowness of the defect, the inclination of the defect, the shape and size of the tip of the defect, the size of the opening width of the defect, etc., and can be measured in real time. The purpose of the present invention is to provide a method for measuring the depth of a surface opening defect in a solid using sound waves. [Summary of the Invention] The present invention is a method for measuring the depth of an open defect on the surface of a solid using ultrasonic waves. A vertical probe is brought into contact with the probe, and a longitudinal ultrasonic wave is incident from the vertical probe toward the tip of the aperture defect almost perpendicularly to the surface, and the incident wave reaches the tip of the aperture defect and causes the tip to Electric devices, mechanical devices, etc. are constructed by receiving scattered waves as a sound source into the vertical probe and measuring the depth of a surface aperture defect using the received scattered wave propagation time as an evaluation index. The present invention relates to a method that can easily measure the depth of surface opening defects occurring in parts and members non-destructively, with high precision, and in real time. [Embodiment of the Invention] A first embodiment of the present invention will be described with reference to FIGS. 1 to 8. In the figures, the same reference numerals as in FIGS. 11 and 12 indicate the same things.
In FIG. 1, 2 is a longitudinal wave vertical probe (hereinafter referred to as a vertical probe), and the surface opening defect 1a of the object 1 is
It is in contact with the flaw detection surface 1b directly above the flaw detection surface 1b, and is connected to a pulse reflection type ultrasonic flaw detector (hereinafter referred to as an ultrasonic flaw detector) 3 indicated by an A scope via a high frequency cable. The surface opening defect in this example is a planar defect and is oriented almost perpendicularly to the flaw detection surface 1b.
This is a defect with a depth d R where the tip of the defect is linear. Now, if a longitudinal ultrasonic wave is incident almost perpendicularly from the vertical probe 2 toward the tip 1c of the defect, if there is no surface aperture defect 1a, the ultrasonic wave will be emitted as shown in Fig. 2. , with the directivity determined by the frequency (wavelength) of the vertical probe 2 and the transducer dimensions,
The beam 6 shown by the dotted line propagates through the object 1, reaches the bottom surface 1d of plate thickness t, is reflected, and is received by the vertical probe 2 again. 7 is an incident wave, and 8 is a bottom reflected wave. However, when there is a surface opening defect 1a, the tip 1c of the defect becomes a sound source, as shown in FIG. 3, and when the incident wave 7 in FIG. 2 reaches the tip 1c, the tip is excited and the incident wave wave 7 is 2
The cylindrical waves 9 are scattered dimensionally, and the scattered cylindrical waves 9 are propagated within the subject 1. A part of the cylindrical wave 9 is connected to the vertical probe 2
The echo of the received cylindrical wave 9 is
When displayed on the CRT 4, an echo pattern as shown in FIG. 4 is obtained. In other words, CRT4
The transmission pulse T is displayed at the origin on the time axis of
An echo F of the cylindrical wave 9 is displayed at a position d u on the time axis corresponding to , and a bottom echo B is displayed almost simultaneously at a position t u corresponding to the plate thickness t. In this case, the position of each displayed echo will display the depth dR and plate thickness t of the surface aperture defect 1a as is, although it includes a slight measurement error that will be described later. Unaffected by shallowness, inclination, tip shape and size, opening width, etc.
The depth d R of the defect can be measured from the propagation time d u of the echo F caused by the cylindrical wave 9 . Figure 5 is a diagram showing the shape and dimensions of the test object used in this example.
A slit is made in the center of a 100mm steel plate (material SS41) by electrical discharge machining with a width of 1.0mm and a varying depth dR . The number of samples is 12, and the depth d R is 1.0, 2.0,
3.0,5.0,7.0,10.0,20.0,30.0,40.0,50.0,
There are 12 types: 60.0 and 70.0 mm. Furthermore, the tip a of the slit is machined to have an radius of 0.5 mm as shown in Fig. 6. The slit depth dR is measured using the first method described above.
The test was carried out as shown in the figure. The frequency of the vertical probe used was 5MHz. First, as shown in Figure 2, the vertical probe is brought into contact with the surface of the steel plate where there are no slits, and the bottom echo height is taken as the reference sensitivity (0 dB) on the CRT. Next, the vertical probe is moved so that it touches directly above the slit as shown in Figure 3, and the echoes of the cylindrical waves scattered from the tip of the slit are displayed on the CRT. Echo height h of the displayed cylindrical wave
Figure 7 shows the relationship between the slit depth dR (unit: dB) and the slit depth dR (unit: mm). In the figure, the horizontal axis is the slit depth.
d The logarithm value of R , the vertical axis is the echo height h, and the circle mark is the measured value. Furthermore, the dotted line in the figure indicates the noise region, and its value is approximately -75 dB. When a regression equation is obtained for each measured value using the least squares method, h=-22 log d R -19.5. The above equation becomes a straight line shown by the chain line in the figure, and it can be seen that there is a good correlation between the two. This correlation agrees well with the distance amplitude characteristic h∝1/d R of the scattered waves. The measurable limit of the slit depth d R is theoretically up to the point P where the chain line of the regression equation intersects with the dotted line of the noise region, and in the case of this embodiment, it can be estimated that it is possible up to about 300 mm. Next, the measurement accuracy in this example will be explained with reference to FIG. In the figure, the horizontal axis is the actual slit depth d R (unit:
mm), and the vertical axis is the slit depth d U (unit: mm) obtained from the regression equation obtained by the method of the present invention, and the ○ mark is the value. As a result, it can be seen that the two values match very well and that highly accurate measurement can be performed. The average value of error is +0.058mm, and the standard deviation of error σ is 0.211mm.
The correlation γ between d R and d U is 0.99997, showing a very good correlation. In the first embodiment, a case was explained in which an opening defect with good machining accuracy was artificially provided in the test object, but below, with reference to FIGS. A second example of an opening defect occurring at an end will be described. The test object used in this example was 25 mm thick as shown in Figure 9.
Web of height 50mm x length 100mm and board thickness 25mm x width
A 250mm x 100mm long flange is T-welded, and a fatigue crack has occurred at the weld toe on the flange side. Materials are both web and flange.
It is SM50 (JIS G3106). Crack depth d R is 0.8
There are 13 types from mm to 9.3mm. Since the vertical probe 2 could not be brought into contact directly above the crack, the measurement was carried out by bringing it into contact with the crack as shown in FIG. The measurement results are shown in FIG. In the figure, the horizontal axis is the actual crack depth d R (unit: mm), the vertical axis is the crack depth d U (unit: mm) measured by the method of the present invention, and the circles indicate the measured values. Both agree very well, mean measurement error = -0.062mm, standard deviation of error σ = 0.266mm
The correlation γ between d R and d U is 0.868, showing a very good correlation. The surface opening defect in the first and second embodiments described above is a planar defect, and the tip of the defect has a linear length, but the surface opening defect is a linear defect, If the tip of the defect is point-shaped, the scattered waves scattered from the tip of the defect spread three-dimensionally and become spherical waves, part of which is received by the vertical probe, as shown in Figure 4. The difference is that a spherical wave echo is displayed at a position corresponding to the depth of the surface aperture defect from the position of the transmitted pulse T, and a bottom echo is displayed almost simultaneously at a position corresponding to the plate thickness. Just,
The depth of the defect is measured from the propagation time of the echo caused by the spherical wave, and other measurement methods are the same. [Effects of the Invention] As explained above, the present invention brings a vertical probe into contact with the surface of an aperture defect opened on the surface of a solid,
A longitudinal ultrasonic wave is incident from the vertical probe toward the tip of the aperture defect almost perpendicularly to the surface, and the incident wave reaches the tip of the aperture defect and is scattered using the tip as a sound source. The wave is received by the vertical probe, and the depth of the aperture defect is measured using the propagation time of the received scattered wave as an evaluation index.
The depth of a surface opening defect can be easily determined with high precision and in real time without being affected by the depth or shallowness of the defect, the slope of the defect, the shape and size of the tip of the defect, or the size of the opening width of the defect. can be measured.

【図面の簡単な説明】[Brief explanation of drawings]

第1図ないし第8図は本発明の第1の実施例の
説明図で、第1図は本発明の測定方法の概略説明
図、第2図は表面開口欠陥が存在しない場合の被
検体への入射波および反射波の説明図、第3図は
表面開口欠陥の先端から散乱する散乱波の説明
図、第4図は第3図の場合に得られたCRT上の
エコーパターンを示す図、第5図は本実施例に使
用した被検体の形状および寸法(単位mm)を示す
図、第6図は第5図のa部拡大図、第7図は第5
図に示す被検体の欠陥深さに伴うエコー高さの関
係および測定可能限界を示す図、第8図は本実施
例における測定精度の説明図である。第9図およ
び第10図は本発明の第2の実施例の説明図で、
第9図は溶接継手の溶接止端部に発生した表面開
口欠陥を測定する説明図、第10図は第9図の方
法により測定された値の測定精度の説明図であ
る。第11図ないし第14図は従来の端部ピーク
エコー法に関する説明図で、第11図は表面開口
欠陥の深さを測定する端部ピークエコー法の概略
説明図、第12図は第11図の方法により得られ
たCRT上のエコーパターンを示す図、第13図
は端部ピークエコー法において欠陥の深さに対す
る欠陥の先端の形状および大きさによる影響を実
験した説明図、第14図は欠陥の先端形状および
大きさを模式的に定義した図である。 1……被検体、1a……表面開口欠陥、1b…
…探傷面、1c……欠陥の先端、1d……底面、
2……垂直探触子、3……超音波探傷器、4……
CRT、9……散乱波、20……斜角探触子、3
0……ビーム軸、50……包絡線、60……ピー
クエコー。
1 to 8 are explanatory diagrams of the first embodiment of the present invention, FIG. 1 is a schematic explanatory diagram of the measurement method of the present invention, and FIG. Figure 3 is an illustration of the scattered waves scattered from the tip of the surface aperture defect, Figure 4 is a diagram showing the echo pattern on the CRT obtained in the case of Figure 3, Fig. 5 is a diagram showing the shape and dimensions (unit: mm) of the subject used in this example, Fig. 6 is an enlarged view of section a in Fig. 5, and Fig. 7 is a diagram showing the
FIG. 8 is a diagram showing the relationship between the echo height and the defect depth of the object to be examined and the measurable limit, and is an explanatory diagram of the measurement accuracy in this example. FIG. 9 and FIG. 10 are explanatory diagrams of the second embodiment of the present invention,
FIG. 9 is an explanatory diagram for measuring surface opening defects occurring at the weld toe of a welded joint, and FIG. 10 is an explanatory diagram of the measurement accuracy of the values measured by the method of FIG. 9. Figures 11 to 14 are explanatory diagrams regarding the conventional edge peak echo method. Figure 11 is a schematic explanatory diagram of the edge peak echo method for measuring the depth of surface aperture defects, and Figure 12 is the diagram shown in Figure 11. Figure 13 is an explanatory diagram showing the effect of the shape and size of the tip of a defect on the depth of the defect in the edge peak echo method, and Figure 14 is a diagram showing the echo pattern on a CRT obtained by the method of FIG. 3 is a diagram schematically defining the tip shape and size of a defect. 1...Object to be inspected, 1a...Surface opening defect, 1b...
...Flaw detection surface, 1c...Tip of defect, 1d...Bottom surface,
2... Vertical probe, 3... Ultrasonic flaw detector, 4...
CRT, 9...scattered waves, 20...bevel probe, 3
0...beam axis, 50...envelope, 60...peak echo.

Claims (1)

【特許請求の範囲】 1 固体の表面に開口した開口欠陥上の表面に垂
直探触子を当接し、該垂直探触子から前記表面と
ほぼ垂直に前記開口欠陥の先端に向けて縦波の超
音波を入射し、その入射波が前記開口欠陥の先端
に到達して該先端を音源として散乱した散乱波を
前記垂直探触子に受信し、該受信した散乱波の伝
搬時間を評価指標として固体の表面開口欠陥の深
さを測定する方法。 2 固体の表面に開口した欠陥の先端性状が点状
の開口欠陥上の表面に垂直探触子を当接し、該垂
直探触子から前記表面とほぼ垂直に前記開口欠陥
の先端に向けて縦波の超音波を入射し、その入射
波が前記開口欠陥の先端に到達して該先端を音源
として散乱した球面波を前記垂直探触子に受信
し、該受信した球面波の伝搬時間を評価指標とし
て固体の表面開口欠陥の深さを測定する方法。 3 固体の表面に開口した欠陥の先端性状が線状
の開口欠陥上の表面に垂直探触子を当接し、該垂
直探触子から前記表面とほぼ垂直に前記開口欠陥
の先端に向けて縦波の超音波を入射し、その入射
波が前記開口欠陥の先端に到達して該先端を音源
として散乱した円筒波を前記垂直探触子に受信
し、該受信した円筒波の伝搬時間を評価指標とし
て固体の表面開口欠陥の深さを測定する方法。
[Claims] 1. A vertical probe is brought into contact with the surface of an aperture defect opened on the surface of a solid, and a longitudinal wave is emitted from the vertical probe almost perpendicularly to the surface toward the tip of the aperture defect. Inject an ultrasonic wave, the incident wave reaches the tip of the aperture defect, the scattered wave is received by the vertical probe using the tip as a sound source, and the propagation time of the received scattered wave is used as an evaluation index. A method for measuring the depth of surface open defects in solids. 2. A vertical probe is brought into contact with the surface of an open defect where the tip of the defect opening on the surface of the solid is dotted, and the probe is vertically moved from the vertical probe almost perpendicularly to the surface toward the tip of the open defect. Inject an ultrasonic wave, the incident wave reaches the tip of the aperture defect, the tip is used as a sound source, and the scattered spherical wave is received by the vertical probe, and the propagation time of the received spherical wave is evaluated. A method for measuring the depth of surface opening defects in solids as an indicator. 3. A vertical probe is brought into contact with the surface of the open defect where the tip of the defect opening on the surface of the solid is linear, and the vertical probe is vertically moved from the vertical probe almost perpendicularly to the surface toward the tip of the open defect. Inject an ultrasonic wave, the incident wave reaches the tip of the aperture defect, the tip is used as a sound source, and the scattered cylindrical wave is received by the vertical probe, and the propagation time of the received cylindrical wave is evaluated. A method for measuring the depth of surface opening defects in solids as an indicator.
JP60068379A 1985-04-02 1985-04-02 Method for measuring depth of surface aperture flaw of solid by ultrasonic wave Granted JPS61228345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60068379A JPS61228345A (en) 1985-04-02 1985-04-02 Method for measuring depth of surface aperture flaw of solid by ultrasonic wave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60068379A JPS61228345A (en) 1985-04-02 1985-04-02 Method for measuring depth of surface aperture flaw of solid by ultrasonic wave

Publications (2)

Publication Number Publication Date
JPS61228345A JPS61228345A (en) 1986-10-11
JPH0513263B2 true JPH0513263B2 (en) 1993-02-22

Family

ID=13372041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60068379A Granted JPS61228345A (en) 1985-04-02 1985-04-02 Method for measuring depth of surface aperture flaw of solid by ultrasonic wave

Country Status (1)

Country Link
JP (1) JPS61228345A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63302359A (en) * 1987-06-02 1988-12-09 Hitachi Constr Mach Co Ltd Measurement of depth of surface opening defect by using ultrasonic wave
US5125272A (en) * 1989-03-16 1992-06-30 The Babcock & Wilcox Company Ultrasonic crack sizing method
DE4005545A1 (en) * 1990-02-22 1991-08-29 Bbc Reaktor Gmbh DEVICE FOR ULTRASOUND TESTING A HEAD SCREW INSERTED IN A COMPONENT
JP3540139B2 (en) * 1997-11-14 2004-07-07 日立建機株式会社 Portable non-destructive inspection equipment
JP5730644B2 (en) * 2011-04-01 2015-06-10 株式会社Ihi検査計測 Ultrasonic measurement method and apparatus for surface crack depth
JP5491471B2 (en) * 2011-09-20 2014-05-14 株式会社Ihi検査計測 Analysis method of defect detection probability by ultrasonic testing

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203950A (en) * 1981-06-10 1982-12-14 Sumitomo Metal Ind Ltd Electromagnetic ultrasonic flaw detector
JPS587557A (en) * 1981-07-07 1983-01-17 Mitsubishi Electric Corp Electromagnetic ultrasonic flaw detector

Also Published As

Publication number Publication date
JPS61228345A (en) 1986-10-11

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