JPH053424B2 - - Google Patents
Info
- Publication number
- JPH053424B2 JPH053424B2 JP60028625A JP2862585A JPH053424B2 JP H053424 B2 JPH053424 B2 JP H053424B2 JP 60028625 A JP60028625 A JP 60028625A JP 2862585 A JP2862585 A JP 2862585A JP H053424 B2 JPH053424 B2 JP H053424B2
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- zinc sulfide
- firing
- zinc
- based sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000005083 Zinc sulfide Substances 0.000 claims description 32
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 32
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 32
- 238000010304 firing Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000000843 powder Substances 0.000 claims description 8
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 7
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 7
- 229910052783 alkali metal Inorganic materials 0.000 claims description 6
- 150000001340 alkali metals Chemical class 0.000 claims description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 5
- 239000007864 aqueous solution Substances 0.000 claims description 5
- 239000011812 mixed powder Substances 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- 239000011701 zinc Substances 0.000 claims description 5
- 229910052788 barium Inorganic materials 0.000 claims description 3
- 229910052792 caesium Inorganic materials 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 229910052744 lithium Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- 229910052701 rubidium Inorganic materials 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 5
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 4
- QGJOPFRUJISHPQ-UHFFFAOYSA-N Carbon disulfide Chemical compound S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 description 3
- 239000012190 activator Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004020 luminiscence type Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910021380 Manganese Chloride Inorganic materials 0.000 description 1
- GLFNIEUTAYBVOC-UHFFFAOYSA-L Manganese chloride Chemical compound Cl[Mn]Cl GLFNIEUTAYBVOC-UHFFFAOYSA-L 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011565 manganese chloride Substances 0.000 description 1
- 235000002867 manganese chloride Nutrition 0.000 description 1
- 229940099607 manganese chloride Drugs 0.000 description 1
- 150000002697 manganese compounds Chemical class 0.000 description 1
- 229940099596 manganese sulfate Drugs 0.000 description 1
- 239000011702 manganese sulphate Substances 0.000 description 1
- 235000007079 manganese sulphate Nutrition 0.000 description 1
- SQQMAOCOWKFBNP-UHFFFAOYSA-L manganese(II) sulfate Chemical compound [Mn+2].[O-]S([O-])(=O)=O SQQMAOCOWKFBNP-UHFFFAOYSA-L 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- CADICXFYUNYKGD-UHFFFAOYSA-N sulfanylidenemanganese Chemical compound [Mn]=S CADICXFYUNYKGD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度かつ高純度の硫化亜鉛系焼結体
の製造方法に関し、とりわけ、高品質の螢光体薄
膜を蒸着法やスパツタリング法で形成する場合に
原料として用いる硫化亜鉛系焼結体の製造方法に
関する。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a method for manufacturing a high-density and high-purity zinc sulfide-based sintered body, and in particular, to a method for forming a high-quality phosphor thin film by a vapor deposition method or a sputtering method. The present invention relates to a method for producing a zinc sulfide-based sintered body used as a raw material in some cases.
従来の技術
従来硫化亜鉛系焼結体の製造方法としては、硫
化亜鉛粉末を加圧しながら焼成するホツトプレス
法や加圧成形した成形体を真空中で焼成する真空
焼成法が用いられていた。しかしホツトプレス法
を用いた場合、成形体中に残留する水分や酸素ガ
スの影響により、硫化亜鉛中に酸化亜鉛が少量含
まれるという問題点や加圧容器からの不純物の混
入という問題点があつた。また真空焼成法を用い
た場合は、酸化亜鉛が同時に形成されることはな
いが、焼結体の密度を上げるために焼成温度を高
くした場合、硫化亜鉛が昇華するため高い密度の
硫化亜鉛系焼結体が得られないことや、添加物の
濃度制御が困難であるという問題点があつた。BACKGROUND ART Conventionally, methods for manufacturing zinc sulfide-based sintered bodies include a hot press method in which zinc sulfide powder is fired while being pressurized, and a vacuum firing method in which a press-formed compact is fired in a vacuum. However, when using the hot press method, there were problems such as a small amount of zinc oxide being included in the zinc sulfide due to the influence of moisture and oxygen gas remaining in the compact, and impurities coming in from the pressurized container. . Furthermore, when using the vacuum firing method, zinc oxide is not formed at the same time, but when the firing temperature is raised to increase the density of the sintered body, zinc sulfide sublimes, resulting in a high density zinc sulfide system. There were problems in that a sintered body could not be obtained and that it was difficult to control the concentration of additives.
上記の問題点を解決するための技術としては、
例えば、本出願人が特願昭59−118510で提案して
いるように硫化亜鉛粉末あるいは硫化亜鉛を主成
分とする混合粉末を加圧して成形体を形成し、そ
の成形体を二硫化炭素ガスを含む雰囲気中で、
200℃以上、800℃以下の温度で焼成して１次焼結
体を形成し、しかる後その１次焼結体を硫化水素
ガスあるいは硫化水素ガスを含む不活性ガス中
で、1300℃以下の温度で焼結して焼結体を得る方
法がある。 As a technique to solve the above problems,
For example, as proposed in Japanese Patent Application No. 59-118510 by the present applicant, zinc sulfide powder or a mixed powder containing zinc sulfide as a main component is pressed to form a molded body, and the molded body is exposed to carbon disulfide gas. In an atmosphere containing
A primary sintered body is formed by firing at a temperature of 200°C or higher and 800°C or lower, and then the primary sintered body is heated at a temperature of 1300°C or lower in hydrogen sulfide gas or an inert gas containing hydrogen sulfide gas. There is a method of obtaining a sintered body by sintering at high temperature.
発明が解決しようとする問題点
このような従来の製造方法では、硫化亜鉛系焼
結体の焼結性は良好であるが、密度ムラ、変形、
ヒビ割れなどが生じやすく、製造の歩留まりが低
いという問題点があつた。Problems to be Solved by the Invention In such conventional manufacturing methods, the sinterability of zinc sulfide-based sintered bodies is good, but density unevenness, deformation,
There were problems in that cracks were likely to occur and the manufacturing yield was low.
本発明にかかる点に鑑みてなされたもので、簡
易な構成で焼結性が良く、高歩留まりの、さらに
改良された硫化亜鉛系焼結体の製造方法を提供す
ることを目的としている。 The present invention has been made in view of the points related to the present invention, and an object of the present invention is to provide a further improved method for producing a zinc sulfide-based sintered body that has a simple structure, good sinterability, and a high yield.
問題点を解決するための手段
本発明は上記問題点を解決するため、硫化亜鉛
粉末あるいは硫化亜鉛を主成分とする混合粉末を
加圧成形した後焼成して１次焼結体を形成し、前
記１次焼結体にアルカリ金属、またはアルカリ土
類金属を含む水溶液を含浸させた後乾燥、焼成し
て焼結するものである。Means for Solving the Problems In order to solve the above problems, the present invention forms a primary sintered body by press-molding zinc sulfide powder or a mixed powder containing zinc sulfide as a main component and then firing it. The primary sintered body is impregnated with an aqueous solution containing an alkali metal or alkaline earth metal, then dried and fired to sinter.
作 用
本発明は上記した構成により、加圧成形後焼成
した１次焼結体にアルカリ金属、またはアルカリ
土類金属を含む水溶液を含浸させてからさらに焼
成を行なつているためあらかじめアルカリ金属、
またはアルカリ土類金属を粉末に混入して加圧成
形し焼成したものに比べても、焼結体の密度にム
ラが発生しにくく、したがつて変形や割れが生じ
なく歩留まりが大きくなる。Effects According to the present invention, with the above configuration, the primary sintered body fired after pressure forming is impregnated with an aqueous solution containing an alkali metal or an alkaline earth metal, and then fired.
Alternatively, even when compared to a product in which an alkaline earth metal is mixed into powder, pressure molded, and fired, the density of the sintered body is less likely to be uneven, and therefore deformation and cracking do not occur, resulting in a higher yield.
実施例
図に本発明の製造方法を説明するためのフロー
チヤートを示す。本発明の製造方法によれば硫化
亜鉛系焼結体は以下のようにして製造される。EXAMPLE The figure shows a flowchart for explaining the manufacturing method of the present invention. According to the manufacturing method of the present invention, a zinc sulfide-based sintered body is manufactured as follows.
市販の硫化亜鉛粉末に、発光付活剤として0.8
原子％のマンガンを含むように二酸化マンガン
（MnO2）を添加した混合粉末を原材料１とし、
300Kg／cm2の圧力で加圧成形２し、真空中で700℃
の温度１時間１次焼成３して１次焼結体４を得
た。この１次焼結体は密度が低く蒸着中の突沸現
象などで薄膜中のピンホールの数が多い。そこで
この１次焼結体を硫酸バリウム（BaSO4）の水
溶液に浸しバリウムの亜鉛に対する濃度が１原子
％になるように含浸５させ、空気中で120℃の温
度で２時間乾燥６し、これを10％の硫化水素を含
む窒素ガス雰囲気中1200℃で１時間２次焼成７す
ることにより本発明の硫化亜鉛系焼結体の２次焼
結体８を形成することができた。 Commercially available zinc sulfide powder contains 0.8% as a luminescence activator.
Raw material 1 is a mixed powder to which manganese dioxide (MnO 2 ) is added so as to contain atomic percent of manganese.
Pressure molding 2 at a pressure of 300Kg/cm 2 and 700℃ in vacuum
A primary sintered body 4 was obtained by performing primary firing 3 at a temperature of 1 hour for 1 hour. This primary sintered body has a low density and a large number of pinholes in the thin film due to bumping phenomena during vapor deposition. Therefore, this primary sintered body was immersed in an aqueous solution of barium sulfate (BaSO 4 ) so that the concentration of barium to zinc was 1 atomic %5, and dried in air at a temperature of 120°C for 2 hours6. By performing secondary firing 7 for 1 hour at 1200° C. in a nitrogen gas atmosphere containing 10% hydrogen sulfide, it was possible to form a secondary sintered body 8 of the zinc sulfide-based sintered body of the present invention.
ここでは原材料１として発光付活剤を添加した
混合粉末を用いたが、硫化亜鉛粉末のみでもよ
く、また発光付活剤用添加物として二酸化マンガ
ンを用いたが、硫化マンガン、塩化マンガン、硫
酸マンガンなどのマンガン化合物を用いても高密
度、高純度の硫化亜鉛系焼結体が得られた。また
Mn以外に、Cu、Ag、Al、Tb、Dy、Er、Pr、
Sm、Ho、Tm、Euまたはこれらのハロゲン化
物、や他の化合物を用いても同様の結果が得られ
た。 Here, a mixed powder to which a luminescence activator was added was used as raw material 1, but zinc sulfide powder alone may also be used, and manganese dioxide was used as an additive for the luminescence activator, but manganese sulfide, manganese chloride, manganese sulfate, etc. High-density, high-purity zinc sulfide-based sintered bodies were obtained using manganese compounds such as . Also
In addition to Mn, Cu, Ag, Al, Tb, Dy, Er, Pr,
Similar results were obtained using Sm, Ho, Tm, Eu or their halides, and other compounds.
加圧成形２時の圧力としては50Kg／cm2以上600
Kg／cm2以下が適当であつた。50Kg／cm2未満の場合
は、焼結体の密度が低く、600Kg／cm2より大きい
場合は、ひび割れが生じ成形が困難であつた。１
次焼成３の条件としてはとくに限定されるもので
はないが、たとえば真空中あるいはアルゴンガス
などの不活性ガス中で焼成温度としては、200℃
以上800℃以下が適当であつた。200℃未満の場合
は焼結体中に酸化亜鉛が残留することがあり、
800℃より高い場合には、とくに真空中では硫化
亜鉛が昇華するため高密度の焼結体が得られなか
つた。 The pressure during pressure molding 2 is 50Kg/cm2 or more 600
Kg/cm 2 or less was appropriate. When the density was less than 50 Kg/cm 2 , the density of the sintered body was low, and when it was larger than 600 Kg/cm 2 , cracks occurred and molding was difficult. 1
The conditions for the next firing 3 are not particularly limited, but for example, the firing temperature may be 200°C in a vacuum or in an inert gas such as argon gas.
A temperature of 800°C or less was appropriate. If the temperature is below 200℃, zinc oxide may remain in the sintered body.
When the temperature was higher than 800°C, a high-density sintered body could not be obtained because zinc sulfide sublimated, especially in a vacuum.
含浸５で添加するアルカリ土類金属としては、
Ca、Mg、Sr、Baが有効であり、添加量として
は、亜鉛に対する濃度が0.02〜２原子％が適当で
あつた。つまり0.02原子％以下では効果が微弱で
あり、２原子％より上では焼成時にボートと反応
する欠点があつた。 The alkaline earth metal added in impregnation 5 is as follows:
Ca, Mg, Sr, and Ba were effective, and the appropriate amount to add was 0.02 to 2 atomic percent relative to zinc. That is, below 0.02 atomic %, the effect is weak, and above 2 atomic %, there is a drawback that it reacts with the boat during firing.
また添加するアルカリ金属としては、Li、Na、
Ｋ、Rb、Csが有効であり、添加量としては亜鉛
に対する濃度が0.1〜２原子％が適当であつた。
つまり、01％以下では効果が微弱であり、２％以
上では焼成時にボートと反応する欠点があつた。 In addition, the alkali metals to be added include Li, Na,
K, Rb, and Cs were effective, and the appropriate amount to add was 0.1 to 2 atomic percent relative to zinc.
In other words, if it is less than 0.01%, the effect is weak, and if it is more than 2%, it has the disadvantage of reacting with the boat during firing.
硫化水素を含む不活性ガス中での焼成９での焼
成温度は、1300℃以下が望ましく、この値より高
い場合、硫化亜鉛の昇華が激しくなり、焼結体中
の添加物の濃度制御が困難であつた。 The firing temperature in step 9 of firing in an inert gas containing hydrogen sulfide is preferably 1300°C or lower; if it is higher than this value, sublimation of zinc sulfide will be intense and it will be difficult to control the concentration of additives in the sintered body. It was hot.
本発明の他の実施例を以下に記す。 Other embodiments of the invention are described below.
市販の硫化亜鉛粉末を400Kg／cm2の圧力で成形
し、直径15mm、厚さ10mmの円柱体とし、これを真
空中で700℃の温度で１時間の焼成を行なつた。
これを硝酸バリウム（Ba（NO3）2）0.05モルの水
溶液中に30分間含浸させた後、空気中で150℃の
温度で12時間乾燥を行なつた。これを15％の硫化
水素を含む窒素ガス雰囲気中で1100℃の温度で、
１時間の焼成を行なつて本発明の焼結体を得た。 Commercially available zinc sulfide powder was molded at a pressure of 400 kg/cm 2 to form a cylinder with a diameter of 15 mm and a thickness of 10 mm, which was then fired in a vacuum at a temperature of 700° C. for 1 hour.
This was impregnated in an aqueous solution of 0.05 mol of barium nitrate (Ba(NO 3 ) 2 ) for 30 minutes, and then dried in air at a temperature of 150° C. for 12 hours. This was done at a temperature of 1100℃ in a nitrogen gas atmosphere containing 15% hydrogen sulfide.
Firing was performed for 1 hour to obtain a sintered body of the present invention.
上記二つの実施例とも得られた焼結体の密度ム
ラはなく、変形や割れもなく、歩留まりが著しく
向上した。また、製造方法による焼結体は、蒸着
法やスパツタリング法により硫化亜鉛系薄膜を形
成する場合の原料として用いることにより、ピン
ホールや微小付着物が極めて少ない良質の硫化亜
鉛系薄膜を再現よく形成できた。 In both of the above two examples, the obtained sintered bodies had no density unevenness, no deformation or cracking, and the yield was significantly improved. In addition, the sintered body manufactured by the manufacturing method can be used as a raw material for forming zinc sulfide thin films using vapor deposition or sputtering methods, allowing for the reproducibility of high-quality zinc sulfide thin films with extremely few pinholes and microscopic deposits. did it.
発明の効果
以上のように、本発明の製造方法によれば密度
ムラがなく変形や割れのない硫化亜鉛系焼結体を
高歩留まりで製造することができ、蒸着法やスパ
ツタリング法などを用いて光学薄膜、螢光体薄
膜、EL薄膜として応用した場合、光学特性や安
定性の優れた素子を形成することができ、その実
用的価値は大きい。Effects of the Invention As described above, according to the manufacturing method of the present invention, a zinc sulfide-based sintered body with uniform density and no deformation or cracking can be manufactured at a high yield. When applied as optical thin films, phosphor thin films, and EL thin films, it is possible to form elements with excellent optical properties and stability, and its practical value is great.
図は、本発明の硫化亜鉛系焼結体の製造方法を
説明するためのフローチヤートである。
１……原材料、２……加圧成形、３……１次焼
成、４……１次焼結体、５……含浸、６……乾
燥、７……２次焼成、８……２次焼結体。
The figure is a flowchart for explaining the method for manufacturing a zinc sulfide-based sintered body of the present invention. 1... Raw material, 2... Pressure forming, 3... Primary firing, 4... Primary sintered body, 5... Impregnation, 6... Drying, 7... Secondary firing, 8... Secondary Sintered body.
Claims (1)
る混合粉末を加圧成形した後焼成して１次焼結体
を形成する工程、前記１次焼結体にアルカリ金
属、またはアルカリ土類金属を含む水溶液を含浸
させた後乾燥、焼成して２次焼結体を形成する工
程とを含むことを特徴とする硫化亜鉛系焼結体の
製造方法。 ２ アルカリ金属が、Li、Na、Ｋ、Rb、Csより
成ることを特徴とする特許請求の範囲第１項に記
載の硫化亜鉛系焼結体の製造方法。 ３ アルカリ金属の亜鉛に対する濃度が0.1〜２
原子％であることを特徴とする特許請求の範囲第
１項に記載の硫化亜鉛系焼結体の製造方法。 ４ アルカリ土類金属が、Ca、Mg、Sr、Baよ
り成ることを特徴とする特許請求の範囲第１項記
載の硫化亜鉛系焼結体の製造方法。 ５ アルカリ土類金属の亜鉛に対する濃度が0.02
〜２原子％であることを特徴とする特許請求の範
囲第１項記載の硫化亜鉛系焼結体の製造方法。[Claims] 1. A step of press-molding zinc sulfide powder or a mixed powder containing zinc sulfide as a main component and then firing it to form a primary sintered body, the primary sintered body containing an alkali metal, or 1. A method for producing a zinc sulfide-based sintered body, comprising the steps of impregnating it with an aqueous solution containing an alkaline earth metal, followed by drying and firing to form a secondary sintered body. 2. The method for producing a zinc sulfide-based sintered body according to claim 1, wherein the alkali metal is comprised of Li, Na, K, Rb, and Cs. 3 Concentration of alkali metal to zinc is 0.1 to 2
The method for producing a zinc sulfide-based sintered body according to claim 1, wherein the content is atomic %. 4. The method for producing a zinc sulfide-based sintered body according to claim 1, wherein the alkaline earth metal is composed of Ca, Mg, Sr, and Ba. 5 The concentration of alkaline earth metal to zinc is 0.02
2. The method for producing a zinc sulfide-based sintered body according to claim 1, wherein the content is 2 atomic %.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60028625A JPS61191554A (en) | 1985-02-15 | 1985-02-15 | Manufacturing method of zinc sulfide-based sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60028625A JPS61191554A (en) | 1985-02-15 | 1985-02-15 | Manufacturing method of zinc sulfide-based sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61191554A JPS61191554A (en) | 1986-08-26 |
| JPH053424B2 true JPH053424B2 (en) | 1993-01-14 |
Family
ID=12253735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60028625A Granted JPS61191554A (en) | 1985-02-15 | 1985-02-15 | Manufacturing method of zinc sulfide-based sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61191554A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5019343B2 (en) * | 2004-01-27 | 2012-09-05 | Ｊｘ日鉱日石金属株式会社 | ZnS powder for sputtering target and sputtering target |
-
1985
- 1985-02-15 JP JP60028625A patent/JPS61191554A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61191554A (en) | 1986-08-26 |
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