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JPH053905B2 - - Google Patents
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JPH053905B2 - - Google Patents

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Publication number
JPH053905B2
JPH053905B2 JP59234875A JP23487584A JPH053905B2 JP H053905 B2 JPH053905 B2 JP H053905B2 JP 59234875 A JP59234875 A JP 59234875A JP 23487584 A JP23487584 A JP 23487584A JP H053905 B2 JPH053905 B2 JP H053905B2
Authority
JP
Japan
Prior art keywords
aqueous solution
temperature
gas
sno
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59234875A
Other languages
Japanese (ja)
Other versions
JPS61114153A (en
Inventor
Tetsuya Iwao
Katsuji Morii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP23487584A priority Critical patent/JPS61114153A/en
Publication of JPS61114153A publication Critical patent/JPS61114153A/en
Publication of JPH053905B2 publication Critical patent/JPH053905B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【発明の詳細な説明】 〔技術分野〕 本発明は可燃性ガスの検知素子(以後素子と略
する。)の製造方法に関する。詳しくは、従来に
ない、高感度を有するSnO2主体の素子の製造方
法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for manufacturing a combustible gas detection element (hereinafter abbreviated as element). Specifically, the present invention relates to a method for manufacturing an element mainly composed of SnO 2 and having high sensitivity, which is unprecedented.

〔従来の技術〕[Conventional technology]

都市ガスの普及と共に、火災等の漏洩事故は増
加しつつあり、また熱有効利用の観点から密閉建
築が増加し、不完全燃焼による一酸化炭素(CO)
中毒事故も年々増加している。また作業環境規準
も厳しくなりつつある。
With the spread of city gas, leakage accidents such as fires are increasing, and the number of closed buildings is increasing from the perspective of effective heat utilization, and carbon monoxide (CO) due to incomplete combustion is increasing.
Poisoning accidents are also increasing year by year. Working environment standards are also becoming stricter.

そこで、水素、一酸化炭素、メタン、プロパ
ン、ブタン、アセトン、アルコール等の可燃性ガ
スを微量であつても高感度に検出しうる方法の開
発が望まれている。
Therefore, it is desired to develop a method that can detect flammable gases such as hydrogen, carbon monoxide, methane, propane, butane, acetone, and alcohol with high sensitivity even in trace amounts.

特に、COに対する検出方法は良いものがなく、
開発は急務であつた。
In particular, there are no good detection methods for CO.
Development was an urgent task.

これに対して、白金などの貴金属細線が、可燃
性ガスに接触した時、その抵抗値を変える特性を
利用した方式(接触燃焼方式)や、酸化錫
(SnO2)酸化亜鉛(ZnO)などの金属酸化物半導
体が可燃性ガスの濃度に対応してその抵抗値を変
える特性を利用した方式(酸化物半導体方式)が
知られている。
On the other hand, there are methods that utilize the property of fine metal wires such as platinum that change their resistance when they come into contact with flammable gas (catalytic combustion method), and methods that utilize thin wires of precious metals such as platinum that change their resistance when they come into contact with flammable gases, and methods that utilize thin wires of precious metals such as platinum that change their resistance when they come into contact with flammable gases, and methods that utilize thin wires of precious metals such as platinum that change their resistance when they come into contact with flammable gases (catalytic combustion method), and methods that utilize wires of precious metals such as platinum that change their resistance when they come into contact with flammable gas (catalytic combustion method ), and methods that utilize wires of precious metals such as platinum that change their resistance when they come into contact with flammable gases (catalytic combustion methods), A method (oxide semiconductor method) that utilizes the property of a metal oxide semiconductor to change its resistance value in response to the concentration of combustible gas is known.

前者は貴金属を用いる点、回路が複雑である点
から高価である。一方後者は、素子も容易に製作
でき、かつ回路も簡単なもので充分なので比較的
安価であるが、従来の材料を使用した素子では、
充分に高感度のもの(すなわち抵抗値の変化が大
きいもの)を製作できず、特に(CO)に対して
は不満足で、実用化された例は無い。
The former is expensive because it uses precious metals and has a complicated circuit. On the other hand, the latter is relatively inexpensive because the device is easy to manufacture and a simple circuit is sufficient, but with the device using conventional materials,
It has not been possible to manufacture one with sufficiently high sensitivity (that is, one with a large change in resistance value), and it is particularly unsatisfactory for (CO), so there are no examples of it being put to practical use.

したがつて酸化物半導体方式において高感度な
素子を得ることができれば増幅回路、誤報防止回
路、等を簡略化でき、検出装置が安価に製作でき
ると共にCOに対しても効果的に対応できるので
非常に好ましい。
Therefore, if a highly sensitive element can be obtained using the oxide semiconductor method, the amplifier circuit, false alarm prevention circuit, etc. can be simplified, the detection device can be manufactured at low cost, and it can effectively respond to CO, which is extremely important. preferred.

従来、SnCl4水溶液を、水酸化ナトリウム、水
酸化カリウム、アンモニア水溶液等のアルカリで
中和して得た白色沈澱を仮焼してSnO2を作り、
これから素子を製造することは公知である。しか
しながらこの素子は感度が低い難点がある。
Conventionally, SnO 2 is produced by calcining the white precipitate obtained by neutralizing a SnCl 4 aqueous solution with an alkali such as sodium hydroxide, potassium hydroxide, or ammonia aqueous solution.
It is known to manufacture elements from this. However, this element has the disadvantage of low sensitivity.

特公昭51−25159号には、四塩化錫(SnCl4
水溶液を硝酸アンモニウム(NH4NO3)水溶液
で「中和」する工程を経て得たSnO2を用いて素
子を製造するという方法が開示されている。
Special Publication No. 51-25159 contains tin tetrachloride (SnCl 4 ).
A method is disclosed in which an element is manufactured using SnO 2 obtained through a process of "neutralizing" an aqueous solution with an aqueous ammonium nitrate (NH 4 NO 3 ) solution.

しかしながらこの方法では、SnCl4水溶液に
NH4NO3水溶液を加えて中和しようとしても、
強酸の塩たるSnCl4がNH4NO3で中和されること
はなく、したがつて白色沈澱(β錫酸を主成分と
するもの)を得ることは非常に困難である。
However, in this method, SnCl 4 aqueous solution
Even if you try to neutralize by adding NH 4 NO 3 aqueous solution,
SnCl 4 , which is a strong acid salt, is not neutralized by NH 4 NO 3 , and therefore it is very difficult to obtain a white precipitate (based on β-stannic acid).

またこれらの素子は特にCOに対する感度が低
い。
These devices also have particularly low sensitivity to CO.

〔発明の目的〕[Purpose of the invention]

本発明の目的は可燃性ガスを高感度に検知しう
る素子を容易に製造する方法を提供することであ
る。
An object of the present invention is to provide a method for easily manufacturing an element that can detect flammable gas with high sensitivity.

本発明の他の目的は特に一酸化炭素ガスを高感
度に検知しうる素子を容易に製造する方法を提供
することである。
Another object of the present invention is to provide a method for easily manufacturing an element that can detect carbon monoxide gas with high sensitivity.

〔発明の開示〕[Disclosure of the invention]

本発明に従つて四塩化錫水溶液を硝酸アンモニ
ウム共存下にアンモニア水溶液で中和して得た沈
澱生成物を400〜700℃で仮焼し、次いで素子形状
に成形した後、500〜700℃で加熱焼結することを
特徴とするガス検知素子の製造方法が提供され
る。
According to the present invention, a precipitated product obtained by neutralizing a tin tetrachloride aqueous solution with an ammonia aqueous solution in the presence of ammonium nitrate is calcined at 400 to 700°C, then formed into an element shape, and then heated at 500 to 700°C. A method of manufacturing a gas sensing element is provided, which comprises sintering.

次に、本発明を詳細に説明する。 Next, the present invention will be explained in detail.

本発明の方法を分説すると以下のごとく三つの
工程からなる。すなわち、 (イ) 四塩化錫水溶液を硝酸アンモニウム共存下に
アンモニアで中和して沈澱生成物を得る工程、 (ロ) 沈澱生成物を400〜700℃で仮焼す工程、 (ハ) 仮焼して得た粉体を素子形状に成形し、500
〜700℃で加熱焼結して検知素子を製作する工
程、 である。
The method of the present invention consists of three steps as follows. That is, (a) a step of neutralizing an aqueous tin tetrachloride solution with ammonia in the coexistence of ammonium nitrate to obtain a precipitated product, (b) a step of calcining the precipitated product at 400 to 700°C, and (c) calcination. The powder obtained was molded into an element shape, and 500
This is a process of producing a sensing element by heating and sintering at ~700°C.

(イ)の工程は、SnCl4水溶液を硝酸アンモニウム
共存下にNH3で、中和して、β錫酸
(〔H2SnO35)を主成分とする白色沈澱を製造す
る工程である。
Step (a) is a step in which an aqueous SnCl 4 solution is neutralized with NH 3 in the coexistence of ammonium nitrate to produce a white precipitate whose main component is β-stannic acid ([H 2 SnO 3 ] 5 ).

アンモニアはSnCl4水溶液にガスで吹き込んで
もよいし液安として供給してもよいが操作の容易
性の点で水溶液の形で供給するのが好ましい。
Ammonia may be blown into the SnCl 4 aqueous solution as a gas or may be supplied as a liquid solution, but from the viewpoint of ease of operation, it is preferable to supply it in the form of an aqueous solution.

ここで使用するSnCl4水溶液の濃度は20〜40wt
%、また水溶液で加える場合のNH3水溶液の濃
度は、10〜30wt%、NH4NO3水溶液の濃度は、
5〜30wt%がそれぞれ好ましい。
The concentration of SnCl 4 aqueous solution used here is 20~40wt
%, and when added as an aqueous solution, the concentration of NH 3 aqueous solution is 10 to 30 wt%, and the concentration of NH 4 NO 3 aqueous solution is,
5 to 30 wt% is preferable.

NH3水溶液とNH4NO3水溶液は、前もつて混
合して加えても、各別に加えても良い。ただしそ
の場合、NH4NO3水溶液を先に加えて後NH3
溶液を加える必要がある。
The NH 3 aqueous solution and the NH 4 NO 3 aqueous solution may be mixed in advance and added, or may be added separately. However, in that case, it is necessary to add the NH 4 NO 3 aqueous solution first and then add the NH 3 aqueous solution.

中和点のPHは、6.5〜7.5であるが、より好まし
くは6.8〜7.0である。
The pH of the neutralization point is 6.5 to 7.5, more preferably 6.8 to 7.0.

(ロ)の工程は、(イ)の工程で作られた白色沈澱を、
仮焼して、SnO2を製造する工程である。
In step (b), the white precipitate produced in step (b) is
This is the process of producing SnO 2 by calcining.

この仮焼温度は、400〜700℃が好ましい。 This calcination temperature is preferably 400 to 700°C.

400℃未満では、SnCl4の残存率が高く、吸湿
性が大で、特性が不安定である。また700℃を越
えると活性点がなくなつてしまうせいか通常の
SnO2の性能と大差なくなつてしまう。
Below 400°C, the residual rate of SnCl 4 is high, hygroscopicity is large, and the properties are unstable. Also, if the temperature exceeds 700℃, the active sites disappear, so the normal
The performance is not much different from that of SnO 2 .

特公昭51−25159号では、仮焼温度500〜700℃
としているが、本発明の目的のためには、500℃
以上である必要はなく、400℃以上で、充分良好
な素子を作ることができる。
In Special Publication No. 51-25159, the calcination temperature is 500 to 700℃.
However, for the purpose of this invention, 500℃
It is not necessary that the temperature be higher than that, and a sufficiently good element can be made at a temperature of 400°C or higher.

(ロ)の工程で作られるSnO2は決して純粋なSnO2
ではなく、Cl原子、水酸基、等が残存しており、
また比表面積、細孔などの表面構造も、特異的で
あり、これらが、可燃性ガスを高感度かつ、迅速
に検出しうる性質をSnO2に与えるものと思われ
る。
The SnO 2 produced in step (b) is never pure SnO 2
Instead, Cl atoms, hydroxyl groups, etc. remain,
Furthermore, the specific surface area, pores, and other surface structures are also specific, and these are thought to give SnO 2 properties that allow flammable gases to be detected quickly and with high sensitivity.

(ハ)の工程は、素子を製作する工程である。上記
(ロ)で作られたSnO2を適当な大きさの素子形状に
成型する。
The step (c) is a step of manufacturing an element. the above
The SnO 2 made in (b) is molded into an element shape of an appropriate size.

この場合、素子の形も大きさも任意であるが、
好ましい大きさは、1mm角〜5mm角程度である。
In this case, the shape and size of the element can be arbitrary, but
The preferred size is approximately 1 mm square to 5 mm square.

そして素子の電気抵抗変化に応じて流れる電流
変化を測定するための1対の電極と素子を加熱す
るヒーターを具備する。一方の電極がヒーターを
兼ねていてもよい。電極の材質は、PtやPd−Ir
等が用いられる。
The device is equipped with a pair of electrodes for measuring changes in current flowing in response to changes in electrical resistance of the element, and a heater for heating the element. One electrode may also serve as a heater. The material of the electrode is Pt or Pd-Ir.
etc. are used.

素子を製作するためには、(ロ)のSnO2に、水や
ポリビニールアルコール水溶液等の液体粘結剤
や、シリカゾルやガラスフリツト等加熱後、成型
体に残つて、形状を維持する焼結助剤が添加され
る。さらには、素子の強度維持や、ガス濃度変化
に対する応答特性をよくするためのアルミナ、シ
リカアルミナ、マグネシア等の無機助剤を添加す
るケースもある。
In order to manufacture the element, (b) SnO 2 must be supplemented with a liquid binder such as water or an aqueous polyvinyl alcohol solution, or a sintering agent that remains in the molded product after heating and maintains its shape, such as silica sol or glass frit. agent is added. Furthermore, in some cases, inorganic auxiliaries such as alumina, silica alumina, and magnesia are added to maintain the strength of the element and improve response characteristics to changes in gas concentration.

また必要に応じ、検出ガスの選択性や高感度化
等を目的として、白金(Pt)、パラジウム(Pd)、
金(Au)、アンチモン(Sb)等の金属の酸化物
やハロゲン化物が添加される。
If necessary, platinum (Pt), palladium (Pd),
Metal oxides and halides such as gold (Au) and antimony (Sb) are added.

これらの好ましい添加量は、各々以下の通りで
ある。
The preferable addition amounts of these are as follows.

液体粘結剤は、充分な混合が行えかつ素子成型
が、簡単に行なえるに必要な量であればよい。
The liquid binder may be used in an amount necessary to enable sufficient mixing and easy device molding.

焼結助剤は、少なすぎると効果がなくなり、多
すぎるとSnO2粒子をカバーして、特性の発現を
防げるので、一般に0.01〜5wt%、好ましくは0.1
〜1wt%である。
If the sintering aid is too small, it will be ineffective, and if it is too large, it will cover the SnO 2 particles and prevent the development of properties, so it is generally 0.01 to 5 wt%, preferably 0.1
~1wt%.

無機助剤は多すぎるとむしろ成型しにくくなる
ので、0〜10wt%の範囲が良い。
If the amount of inorganic auxiliary agent is too large, it will actually become difficult to mold, so a range of 0 to 10 wt% is preferable.

触媒は、少ないと効果がなく、多すぎると高価
なので、0.001〜1wt%が好ましい。
The catalyst is preferably 0.001 to 1 wt% since it is ineffective if it is too small and expensive if it is too large.

次に焼結温度は、500〜700℃が好ましい。500
℃未満では、液体粘結剤が残存したり焼結効果が
充分でなく好ましくない。また700℃越えると(ロ)
の工程で得られた特性が失なわれてしまう。
Next, the sintering temperature is preferably 500 to 700°C. 500
If the temperature is less than 0.degree. C., the liquid binder remains or the sintering effect is not sufficient, which is not preferable. Also, if it exceeds 700℃ (b)
The properties obtained in the process are lost.

本発明を実施する場合においては、(イ)(ロ)(ハ)の工
程をそれぞれ経て、ガス検知素子を製作すること
が必須である。
When carrying out the present invention, it is essential to manufacture a gas detection element through the steps (a), (b), and (c), respectively.

例えば、(イ)の工程で、NH4NO3の添加を省略
して、中和を行つて得た白色粉末を用いて、(ロ)(ハ)
の工程を経由して素子を製作しても、可燃性ガス
の検出感度は非常に悪いものしか得られない。
For example, in step (a), omitting the addition of NH 4 NO 3 and using the white powder obtained by neutralization, (b) (c)
Even if the device is manufactured through this process, only very poor detection sensitivity for flammable gas can be obtained.

また(イ)の工程で、NH3のかわりに、NaOH、
KOH、CaOH等のアルカリ金属、アルカリ土類
金属の水酸化物を用いて中和を行い、得られた白
色粉末を用いて、(ロ)(ハ)の工程を経て素子を製作し
ても、可燃性ガスの検出感度は、同様にきわめて
悪い。
Also, in step (a), instead of NH3 , NaOH,
Even if an element is manufactured through steps (b) and (c) using the white powder obtained by neutralization using hydroxides of alkali metals and alkaline earth metals such as KOH and CaOH, The detection sensitivity for combustible gases is also extremely poor.

また(イ)(ロ)の工程を省略した市販SnO2を入手し、
微粉砕して(ハ)の工程を経て、ガス検知素子を製作
しても、可燃性ガスの検出感度は殆ど無い。
In addition, we obtained commercially available SnO 2 that omitted steps (a) and (b),
Even if a gas detection element is manufactured by pulverizing it and going through the process (c), it has almost no detection sensitivity for combustible gas.

さて(イ)(ロ)(ハ)の工程を経て、製作されたガス検知
素子は素子温度70〜500℃の範囲で可燃性ガスの
検出に用いられる。
Now, through the steps (a), (b), and (c), the manufactured gas detection element is used to detect combustible gas at an element temperature in the range of 70 to 500°C.

本発明の検知素子が検知することのできる可燃
性ガスとしては、水素、一酸化炭素、メタン、エ
タン、プロパン、ブタン、アセトン、エタノール
である。特に一酸化炭素の検知素子として使用す
ると選択性も良く、高感度である。
Combustible gases that can be detected by the sensing element of the present invention include hydrogen, carbon monoxide, methane, ethane, propane, butane, acetone, and ethanol. In particular, when used as a carbon monoxide detection element, it has good selectivity and high sensitivity.

なお、COガスの検知を行う場合、H2、エチル
アルコール、メタン、エタン等の共存下に、これ
らから分離して選択的に検出することが要求され
ることが多い。
Note that when detecting CO gas, it is often required to separate it from H 2 , ethyl alcohol, methane, ethane, etc. in the coexistence of these gases for selective detection.

たとえばCO警報器として用いられる時は、微
量のCOをエチルアルコールと分離して検出する
能力が要求される。
For example, when used as a CO alarm, the ability to separate and detect trace amounts of CO from ethyl alcohol is required.

工業用検知器として用いられる時は、COをH2
やメタン、プロパン等のハイドロカーボンから選
択的に検出することが必要になる。
When used as an industrial detector, CO is converted into H2
It is necessary to selectively detect hydrocarbons such as carbon dioxide, methane, and propane.

またCO濃度からバーナー等の燃焼コントロー
ルを行う場合に用いられる素子には、COをH2
ハイドロカーボンから選択的に検出する能力が要
求される。
Furthermore, elements used to control combustion in burners and the like based on CO concentration are required to have the ability to selectively detect CO from H 2 and hydrocarbons.

そのような場合には、素子温度を70〜150℃に
設定して使用すればよい。一般にSnO2等、酸化
物半導体を用いた検知素子は、H2、エチルアル
コール、プロパン等の可燃性ガスに対しては、素
子温度が高温になるほど検出温度が高くなり、逆
に素子温度が低くなると検出感度が低くなる性質
を有するところ、本発明の検知素子は、特にこの
性質が強く、素子温度が低くなると、全く、これ
らのガスに対する検出感度がなくなるからであ
る。一方、COに対しては、驚くべきことに、低
い素子温度の範囲で、検出温度のピークがあるの
である。
In such a case, the element temperature may be set at 70 to 150°C. In general, with sensing elements using oxide semiconductors such as SnO 2 , the higher the element temperature, the higher the detection temperature for flammable gases such as H 2 , ethyl alcohol, and propane; conversely, the higher the element temperature, the higher the detection temperature. This is because the detection element of the present invention has a property that the detection sensitivity becomes low when the temperature of the element decreases. On the other hand, for CO, surprisingly, there is a peak in the detected temperature in the low element temperature range.

その結果、上記素子温度を採用すればCOを他
ガスに影響されることなく、分離検出できる。
As a result, if the above element temperature is adopted, CO can be detected separately without being affected by other gases.

また、COの恕限度は50ppmであるが、このよ
うな微量でも、本発明の素子により非常に高感度
に検出できる。
Furthermore, although the limit for CO is 50 ppm, even such a minute amount can be detected with extremely high sensitivity by the element of the present invention.

本発明の検知素子は可燃性ガスの濃度に対応し
て素子の電気抵抗が変化する。そこで、その変化
を利用して、素子と電源そして警報手段又は制御
回路を含む回路を構成し、可燃性ガスを検出す
る。
In the sensing element of the present invention, the electrical resistance of the element changes depending on the concentration of combustible gas. Therefore, by utilizing this change, a circuit including an element, a power source, and an alarm means or a control circuit is configured to detect combustible gas.

本発明の素子を用いて具体的に検出装置を構成
する一例を示す。
An example of specifically configuring a detection device using the element of the present invention will be shown.

素子と電源と固定抵抗を直列に接続し、素子に
10V程度の定電圧を負荷する。素子のヒーターに
適当な電圧を負荷し、素子温度を一定に保つ。固
定抵抗の両端の出力をとり出し、増幅器に接続し
て、ベル、発光ダイオード等の警報手段を動作さ
せるか、リレー等の制御回路を動作させる。
Connect the element, power supply, and fixed resistor in series, and
Load a constant voltage of about 10V. Apply an appropriate voltage to the element heater to keep the element temperature constant. The outputs from both ends of the fixed resistor are taken out and connected to an amplifier to operate alarm means such as a bell or light emitting diode, or to operate a control circuit such as a relay.

本発明の素子は、簡単に製作でき、安価であ
り、かつ非常に高感度である。また回路も簡略化
できるので装置全体もコストが安い。
The device of the invention is easy to fabricate, inexpensive, and very sensitive. Furthermore, since the circuit can be simplified, the cost of the entire device is low.

またCO検知素子として用いた場合は、家庭用
としてガス湯わかし器、ガスストーブ、ガス風呂
等の不完全燃焼の警報器、工業用として各種ガス
中のCOの定量、CO濃度をモニターしたバーナー
等の燃焼制御等に有効に用いることができる。
In addition, when used as a CO detection element, it can be used as an alarm for incomplete combustion in gas water heaters, gas stoves, gas baths, etc. for household use, and for quantitative measurement of CO in various gases, burners that monitor CO concentration, etc. for industrial use. It can be effectively used for combustion control, etc.

以下に実施例により、さらに詳細に説明する
が、これらはあくまで例示であり本発明の技術的
範囲は、それらに拘束されるものではない。
Examples will be described in more detail below, but these are merely illustrative and the technical scope of the present invention is not restricted thereto.

実施例 1 SnCl4200gと硝酸アルミニウム4gを水1
に溶解する。
Example 1 200 g of SnCl 4 and 4 g of aluminum nitrate were added to 1 part of water.
dissolve in

一方、水1当りNH4NO3150gとNH3100g
を溶解した水溶液を用意し、PH7.0になるまで、
撹拌しつつ滴下する。大量の白色沈澱を別し、
1回、水洗した後、400℃にて仮焼する。
On the other hand, 150 g of NH 4 NO 3 and 100 g of NH 3 per 1 water
Prepare an aqueous solution with dissolved in it and stir until the pH reaches 7.0
Add dropwise while stirring. Separate a large amount of white precipitate,
After washing once with water, calcining at 400℃.

得られた仮焼物に塩化パラジウム(PdCl2
0.1wt%、シリカゲル0.1wt%、さらに2%ポリビ
ニールアルコール水溶液適当量を加え、充分撹拌
し混合してペーストにする。
Palladium chloride (PdCl 2 ) is added to the resulting calcined product.
Add 0.1wt% silica gel, 0.1wt% silica gel, and an appropriate amount of 2% polyvinyl alcohol aqueous solution, stir thoroughly and mix to form a paste.

このペーストを、両端に電極を有するアルミナ
製担体に塗布し、1晩風乾する。
This paste is applied to an alumina carrier with electrodes at both ends and air-dried overnight.

しかるのち、600℃、1.5hr焼成して、素子を作
る。
Afterwards, it is baked at 600℃ for 1.5 hours to make the element.

担体両端にある電極の一方はヒーターを兼ねて
おり、この素子と電源と固定抵抗を直列に結んだ
回路を構成し、出力は固定抵抗の両端からとり出
すようにする。
One of the electrodes at both ends of the carrier also serves as a heater, and a circuit is formed in which this element, a power source, and a fixed resistor are connected in series, and the output is taken out from both ends of the fixed resistor.

素子温度を120℃に設定して、COの検出を行つ
た。結果は、素子の空気中での抵抗(Va)とCO
を検出した時の抵抗(Vg)の比、抵抗変化率
(Va/Vg)で表示する。
CO was detected with the element temperature set at 120°C. The results are the resistance of the element in air (Va) and CO
Displayed as the ratio of resistance (Vg) and rate of change in resistance (Va/Vg) when detected.

結果は第1図に示す。 The results are shown in Figure 1.

COの恕限度50ppmより低い濃度まで充分に検
出できることがわかる。
It can be seen that it is possible to sufficiently detect concentrations lower than the CO limit of 50 ppm.

一方この素子温度では、H2、プロパン、エタ
ノールを全く検出しなかつた。
On the other hand, at this element temperature, no H 2 , propane, or ethanol was detected.

比較例 1 NH4NO3を全く添加しなかつた点を除いては
実施例1と同様に実験を行つた。
Comparative Example 1 An experiment was carried out in the same manner as in Example 1, except that no NH 4 NO 3 was added.

素子温度120℃では、COに対し全く感度がなか
つた。素子温度200℃でCOだけを選択的に検出し
たが、CO濃度50ppmでは全く感度が無く、
250ppmでは、抵抗変化率1.6であつた。また素子
温度250℃ではH2プロパンCOからCOを選択的に
検出することは不可能であつた。
At an element temperature of 120°C, there was no sensitivity to CO at all. Only CO was selectively detected at an element temperature of 200°C, but there was no sensitivity at all at a CO concentration of 50ppm.
At 250 ppm, the resistance change rate was 1.6. Furthermore, at an element temperature of 250°C, it was impossible to selectively detect CO from H 2 propane CO.

実施例1に比較して非常に感度が低く、CO検
知素子として実用化することは不可能であること
がわかる。
It can be seen that the sensitivity is very low compared to Example 1, and it is impossible to put it into practical use as a CO detection element.

実施例 2 SnCl4200gと硝酸アルミニウム4gを水1
に溶解する。
Example 2 200g of SnCl 4 and 4g of aluminum nitrate in 1 part of water
dissolve in

一方、水1当りNH4NO3100gとNH3150g
を溶解した水溶液を用意し、PH6.5になるまで、
撹拌しつつ滴下する。大量の白色沈澱を別し、
1回水洗した後、500℃にて仮焼する。
On the other hand, 100 g of NH 4 NO 3 and 150 g of NH 3 per 1 water
Prepare an aqueous solution containing dissolved and stir until the pH reaches 6.5.
Add dropwise while stirring. Separate a large amount of white precipitate,
After washing once with water, calcining at 500℃.

得られた仮焼物に塩化パラジウム(PdCl2
0.5wt%、ガラスフリツト0.1wt%さらに2%ポリ
ビニールアルコール水溶液適当量を加え、充分撹
拌し、混合してペーストにする。
Palladium chloride (PdCl 2 ) is added to the resulting calcined product.
Add 0.5wt% glass frit, 0.1wt% glass frit, and an appropriate amount of 2% polyvinyl alcohol aqueous solution, stir thoroughly, and mix to form a paste.

このペーストを両端に電極を有するアルミナ担
体に塗布し、1晩風乾する。
This paste is applied to an alumina support with electrodes at both ends and air-dried overnight.

しかるのち650℃、2hr焼成して素子を作る。以
後実施例1と同様にして回路を構成し、プロパン
の検出を行つた。
Afterwards, it is baked at 650℃ for 2 hours to make the element. Thereafter, a circuit was constructed in the same manner as in Example 1, and propane was detected.

素子温度は、350℃に設定した。 The element temperature was set at 350°C.

結果を第2図に示す。 The results are shown in Figure 2.

比較例 2 NH4NO3100g、NH3150gのかわりに、
NH4NO350g、NaOH176gを用いことを除い
て、実施例2と同様に実験を行つた。
Comparative Example 2 Instead of 100g of NH 4 NO 3 and 150g of NH 3 ,
The experiment was conducted in the same manner as in Example 2, except that 50 g of NH 4 NO 3 and 176 g of NaOH were used.

濃度1000ppmのプロパンに対する感度即ち抵抗
変化率は、およそ4であり実施例2に比較して非
常に小さかつた。またこの素子は、測定中のレベ
ル変動が激しく実用には耐えないものであつた。
The sensitivity to propane at a concentration of 1000 ppm, that is, the resistance change rate was approximately 4, which was much smaller than that of Example 2. Furthermore, this element had severe level fluctuations during measurement and was not suitable for practical use.

比較例 3 SnCl4200gと硝酸アンモニウム4gを1に
溶解する。
Comparative Example 3 200 g of SnCl 4 and 4 g of ammonium nitrate are dissolved in 1.

これを水1当りNH4NO3100gを溶解した水
溶液で、中和し沈澱を得ることを試みたが沈澱は
得られなかつた。
An attempt was made to neutralize this with an aqueous solution containing 100 g of NH 4 NO 3 per 1 portion of water to obtain a precipitate, but no precipitate was obtained.

〔発明の作用効果〕[Function and effect of the invention]

本発明の素子が、可燃性ガスに対して高感度で
ある理由は不明であるが、SnCl4水溶液を本発明
のようにNH4NO3とNH3の水溶液で中和した場
合、非常にカサ高い白色沈澱が得られるのに対
し、従来法のように単にアルカリで中和した場合
は、カサの小さい白色沈澱が生成することから、
本発明の方法で作られた素子は、比表面積、結晶
構造、Cl、NH3根等の化学成分等の諸点で、従
来の方法による素子に比較してはるかに高感度を
得ていると思われる。
The reason why the device of the present invention is highly sensitive to combustible gases is unknown, but when an aqueous SnCl 4 solution is neutralized with an aqueous solution of NH 4 NO 3 and NH 3 as in the present invention, it becomes very bulky. Whereas a high white precipitate can be obtained, when simply neutralizing with alkali as in the conventional method, a white precipitate with a small bulk is produced.
It is believed that the device made by the method of the present invention has much higher sensitivity than the device made by the conventional method in terms of specific surface area, crystal structure, and chemical components such as Cl and NH3 radicals. It will be done.

〔産業上の利用可能性〕 本発明の方法で作られた素子を用いることによ
り、可燃性ガスを非常に高感度に検出することが
できる。特に特定の条件で使用することで微量の
一酸化炭素を選択的に高感度で検出できる。
[Industrial Applicability] By using the element produced by the method of the present invention, combustible gases can be detected with extremely high sensitivity. In particular, when used under specific conditions, trace amounts of carbon monoxide can be selectively detected with high sensitivity.

したがつて本発明の産業上の利用可能性は極め
て大きいといわねばならない。
Therefore, it must be said that the industrial applicability of the present invention is extremely large.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は抵抗変化率とガス濃度の
関係を示すグラフである。
FIGS. 1 and 2 are graphs showing the relationship between resistance change rate and gas concentration.

Claims (1)

【特許請求の範囲】[Claims] 1 四塩化錫水溶液を硝酸アンモニウム共存下に
アンモニアで中和して得た沈澱生成物を400〜700
℃で仮焼し、次いで素子形状に成形した後、500
〜700℃で加熱焼結することを特徴とするガス検
知素子の製造方法。
1. A precipitated product obtained by neutralizing an aqueous tin tetrachloride solution with ammonia in the coexistence of ammonium nitrate,
After calcination at 500℃ and then molding into element shape,
A method for manufacturing a gas sensing element, characterized by heating and sintering at ~700°C.
JP23487584A 1984-11-09 1984-11-09 Manufacture of gas detecting element Granted JPS61114153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23487584A JPS61114153A (en) 1984-11-09 1984-11-09 Manufacture of gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23487584A JPS61114153A (en) 1984-11-09 1984-11-09 Manufacture of gas detecting element

Publications (2)

Publication Number Publication Date
JPS61114153A JPS61114153A (en) 1986-05-31
JPH053905B2 true JPH053905B2 (en) 1993-01-18

Family

ID=16977693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23487584A Granted JPS61114153A (en) 1984-11-09 1984-11-09 Manufacture of gas detecting element

Country Status (1)

Country Link
JP (1) JPS61114153A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125159A (en) * 1974-08-27 1976-03-01 Mitsui Shipbuilding Eng Yoatsuoryoshita ekimenreberukeisokuhoho

Also Published As

Publication number Publication date
JPS61114153A (en) 1986-05-31

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