JPH0541700B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser vapor deposition apparatus for vapor depositing ceramics or the like onto a metal substrate or the like using, for example, a laser beam.

[Conventional technology]

FIG. 2 is a configuration diagram showing a conventional laser vapor deposition apparatus disclosed in Japanese Patent Application Laid-open No. 116373/1983. In the figure, 1 is a laser beam emitted from a laser oscillator (not shown), 2 is a first plane mirror, 3 is a condenser lens, 4 is a transmission window, 5 is a vacuum chamber, 6 is a second plane mirror, 7 is, for example Irradiated objects such as ceramics,
8 is a metal substrate, and 9 is a preheater. A first plane mirror 2, a condensing lens 3, a transmission window 4, and a second
The plane mirror 6 constitutes an optical system that guides the laser beam 1 emitted from the laser oscillator to the object 7 to be irradiated. In the figure, arrow A indicates the radiation direction of the laser beam 1, arrow B indicates the rotational direction of the irradiated object 7, and arrow C indicates the scattering direction of the evaporated particles of the irradiated object 7.

A parallel laser beam 1 emitted from a laser oscillator (not shown) is horizontally diverted by a first plane mirror 2, passes through a condensing lens 3, and is guided into a vacuum chamber 5 through a transmission window 4. After the optical path is changed again by the biplane mirror 6, the object 7 to be irradiated, which is formed in the shape of a ring or cylinder, is irradiated from the tangential direction of the outer peripheral surface of the ring or cylinder. The focal length and arrangement position of the condenser lens 3 are selected so that the focus is formed near the irradiation point on the object 7 to be irradiated. In addition, a ring-shaped or cylindrical irradiated object 7
rotates in the direction of arrow B around the center axis of the ring or cylinder at an arbitrary speed, and further swings in the direction of the center axis of the ring or cylinder by the thickness of the object 7 to be irradiated. Evaporate everything evenly. By irradiating the laser beam 1, the irradiated area on the outer periphery of the irradiated object 7 is evaporated, and evaporated particles fly out in the direction of the substrate 8 as shown by arrow C, and are deposited on the substrate 8. In addition, if the irradiated object 7 is made of a material that is extremely susceptible to thermal cracking, a preheater 9 is provided near the outer periphery of the irradiated object 7, and the preheater 9 preheats the irradiated object 7. By doing so, damage to the object 7 to be irradiated is prevented.

[Problem that the invention seeks to solve]

Since the conventional laser evaporation apparatus is configured as described above, some of the evaporated particles of the irradiated object also adhere to optical components such as the transmission window 4 and the plane mirror 6.
There was a problem in that the laser beam was absorbed by this deposit and the optical components were damaged.

This invention was made to solve the above-mentioned problems, and it measures the intensity of the laser beam irradiated onto the object as necessary and detects the absorption of the laser beam by optical components. Therefore, the object of the present invention is to obtain a laser evaporation apparatus that can monitor the contamination state of optical components.

[Means for solving problems]

A laser vapor deposition apparatus according to the present invention includes a vacuum chamber, an object to be irradiated placed in the vacuum chamber,
An optical system that guides the laser beam from the laser oscillator to the object to be irradiated, a substrate placed at a position where vaporized particles of the object to be irradiated by the laser beam are deposited, and a laser emitted from the laser oscillator before entering the vacuum chamber. A first detection sensor detects the intensity of the light, and a second detection sensor detects the intensity of the laser light guided into the vacuum chamber.
It is equipped with a detection sensor.

[Effect]

The laser evaporation apparatus according to the present invention detects the intensity of the laser beam before entering the vacuum chamber and the intensity of the laser beam guided into the vacuum chamber, and eliminates energy loss due to absorption of the laser beam by optical components, etc. Can be detected. By detecting this energy loss, it is possible to detect the state of deterioration of optical components and prevent damage to the optical components.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing a laser vapor deposition apparatus according to an embodiment of the present invention, and numerals 1 to 9 indicate parts similar to or equivalent to conventional ones. 20 is a detection sensor 30 that detects the intensity of the laser beam guided into the vacuum chamber 5;
3 is a drive mechanism for moving the plane mirror 6 in the direction of arrow D; 31 is a drive controller for the drive mechanism 30; 35 is a detection sensor that detects the intensity of the laser light emitted from the laser oscillator and before it enters the vacuum chamber 5. ,
40 is a control device that sends a control signal to the drive controller 31. The control device 40 sends a signal to the drive controller 31 to move the plane mirror 6 from the position 6a to the position 6b, and the detection sensor 20 measures the intensity of the laser beam irradiated onto the object 7. At the same time, the detection sensor 35 measures the intensity of the laser beam before it enters the vacuum chamber 5.

These two measurement results are compared by the control device 40,
The laser absorption rate of the optical components arranged in the detection sensors 20 and 35 is calculated, and when this value exceeds a set value, a control signal 41 is output. Generally, an alarm is issued based on this control signal 41.

The above monitoring is actually performed off-line, for example, every time one vapor deposition is completed, that is, once every 30 minutes to an hour.

As a result, the optical components between the detection sensors 20 and 35, in this case the first plane mirror 2, the condenser lens 3, the transmission window 4, and the second plane mirror 6, mainly the transmission window 4 and the second plane mirror 6, are contaminated. Since the state of deterioration can be monitored, the state of these optical parts can be constantly grasped, and damage to the optical parts can be prevented by cleaning and managing them according to the state. The lifespan of optical components has been significantly extended. Furthermore, since the state of optical components can now be accurately grasped, it is now easier to correct the deposition conditions, etc., making it possible to perform more stable deposition.

In the above embodiment, in order to detect the intensity of the laser beam guided into the vacuum chamber 5, the second
Although the plane mirror 6 is configured to change the direction in which the laser beam is reflected by the drive mechanism 30 and is detected by the detection sensor 20, the present invention is not limited to this. For example, the detection sensor 20 may be moved to detect when a detection is desired. You can also do that.

Furthermore, the positions of the detection sensors 20 and 35 are not limited to those in the above embodiments, and may be placed at positions where the intensity of the laser light before and after the component whose damage or contamination state is to be monitored can be detected.

Moreover, the detection sensor 2 can be used without providing the control device 40.
The detection values of 0 and 35 are displayed, and the two detection sensors 2 are selected according to the ratio of these detection values.
It is possible to monitor damage and contamination of parts between 0.35 and 0.35. Furthermore, monitoring may be performed based on the difference between the detected values, without taking the ratio of the detected values.

Further, in the above embodiment, a case has been described in which offline monitoring is performed every 30 minutes to one hour, but online monitoring can also be performed by controlling the drive mechanism 30 at high speed and controlling the laser beam in pulses.

Furthermore, it goes without saying that the detection sensor 35 is unnecessary when the laser output value is obtained from a laser oscillator.

〔Effect of the invention〕

As described above, according to the present invention, a vacuum chamber, an irradiated object placed in the vacuum chamber,
An optical system that guides the laser beam from the laser oscillator to the object to be irradiated, a substrate that is placed at a position where vaporized particles of the object to be irradiated by the laser beam are deposited, and an optical system that guides the laser beam from the laser oscillator to the object to be irradiated; By providing a first detection sensor that detects the intensity of the laser beam and a second detection sensor that detects the intensity of the laser beam guided into the vacuum chamber, laser light such as an optical component placed between the first and second detection sensors is provided. By knowing the light absorption rate, it is possible to monitor the state of contamination and deterioration of optical components etc. from this laser light absorption rate, preventing damage to the optical components, and providing a laser vapor deposition apparatus having optical components with a long life.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a laser vapor deposition apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional laser vapor deposition apparatus. 1... Laser light, 2... First plane mirror, 3... Condensing lens, 4... Transmission window, 5... Vacuum chamber,
6... Second plane mirror, 7... Irradiated object, 8... Substrate, 20... Second detection sensor, 35... First detection sensor. (The first plane mirror 2, condensing lens 3, transmission window 4, and second plane mirror 6 constitute an optical system.)
In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] 1 a vacuum chamber, an object to be irradiated placed in the vacuum chamber, an optical system that guides a laser beam from a laser oscillator to the object to be irradiated, and a vacuum chamber arranged at a position where evaporated particles of the object to be irradiated by the laser beam are deposited. a first detection sensor that detects the intensity of the laser beam emitted from the laser oscillator and before it enters the vacuum chamber, and a second detection sensor that detects the intensity of the laser beam guided into the vacuum chamber. Laser deposition equipment.