JPH0555807B2 - - Google Patents
Info
- Publication number
- JPH0555807B2 JPH0555807B2 JP59074389A JP7438984A JPH0555807B2 JP H0555807 B2 JPH0555807 B2 JP H0555807B2 JP 59074389 A JP59074389 A JP 59074389A JP 7438984 A JP7438984 A JP 7438984A JP H0555807 B2 JPH0555807 B2 JP H0555807B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid helium
- electrical resistance
- electrode
- superconducting
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
Landscapes
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Description
【発明の詳細な説明】
〔発明の対象〕
本発明は、金属又はガラスよりなる容器内の液
体ヘリウムの液面を測定する液体ヘリウム液面計
に関するもので、更に詳述すれば液面計の検出部
の改良に関するものである。Detailed Description of the Invention [Object of the Invention] The present invention relates to a liquid helium level meter that measures the level of liquid helium in a container made of metal or glass. This relates to improvements to the detection unit.
従来の容器内の液体ヘリウムの液面の測定をす
る液面計については、特願昭58−220076号(特公
平1−14522号)「液体ヘリウム液面計」の明細書
がある。
Regarding a conventional liquid level meter for measuring the level of liquid helium in a container, there is a specification of Japanese Patent Application No. 1982-220076 (Japanese Patent Application No. 1-14522) entitled ``Liquid Helium Level Gauge.''
この技術を第1図により説明すれば、1は液面
計で、2は電源及び測定回路を内蔵したケース、
3は検出部のステンレススチール製のパイプ、4
は支持部である。パイプ3の内面は電気絶縁兼断
熱材層3aで覆われており、電気絶縁兼断熱材層
3aの内側空間には、電気抵抗線5と、電気抵抗
線5の下端に接続したリード線6が配置されてい
る。電気抵抗線5は、ジルコニウムとロジウムと
からなる非晶質超電導合金よりなり、リボン状で
あり、その超電導遷移温度が液体ヘリウム温度の
4.2Kにほぼ等しいものである。尚、パイプ3を
液体ヘリウム中に挿入した場合、パイプ3内に液
体ヘリウムが入り、パイプ3の内外の液面が同じ
となる。 To explain this technology using Figure 1, 1 is a liquid level gauge, 2 is a case with a built-in power supply and measurement circuit,
3 is the stainless steel pipe of the detection part, 4
is the support part. The inner surface of the pipe 3 is covered with an electrically insulating and heat insulating material layer 3a, and an electrical resistance wire 5 and a lead wire 6 connected to the lower end of the electrical resistance wire 5 are installed in the inner space of the electrically insulating and heat insulating material layer 3a. It is located. The electrical resistance wire 5 is made of an amorphous superconducting alloy of zirconium and rhodium, has a ribbon shape, and has a superconducting transition temperature equal to that of liquid helium.
It is approximately equal to 4.2K. Note that when the pipe 3 is inserted into liquid helium, liquid helium enters the pipe 3, and the liquid level inside and outside the pipe 3 becomes the same.
第1図の従来の液面計は、液体ヘリウムの検出
部にステンレススチールよりなるパイプを外筒と
して使用している。これは、金属やガラス容器内
の液体ヘリウムを一時的に、簡単に測定する場合
に、検出部の剛性を保持し、信頼性を持たせるた
めである。しかし、(1)パイプ3の熱容量が大き
く、容器内に挿入された検出部の持つ熱のため液
体ヘリウムが著しく蒸発し、(2)パイプ3の熱伝導
率が高いために、液体ヘリウム中に常時又は長時
間浸漬すると、外部室温からの断熱ができず、熱
の侵入が大きく、液体ヘリウムの消費量が多い、
(3)パイプ3が伝導体であるために、パイプ内面に
電気絶縁物質をコーテイング又は介在させて電気
抵抗線の短絡を防止していたが、長時間の使用に
よる劣化によつて絶縁性が失われ、短絡が起こり
易く、製品としての耐久性及び信頼性に問題があ
り、(4)パイプ3の熱伝導率が高いために、パイプ
内面に断熱材を設けて電気抵抗線の保温効果を上
げているが、長い検出部をもつ場合、使用中にパ
イプが湾曲する場合が多く、電気抵抗線は必ずし
もパイプ中央には位置せず、往々にしてパイプ内
面に接触している場合が多く、この場合は熱を電
気抵抗線から奪い、又は電気抵抗線に与えること
により測定誤差の原因となる、という欠点があつ
た。
The conventional liquid level gauge shown in FIG. 1 uses a stainless steel pipe as an outer cylinder in the liquid helium detection section. This is to maintain the rigidity of the detection section and provide reliability when temporarily and easily measuring liquid helium in a metal or glass container. However, (1) the heat capacity of the pipe 3 is large, and liquid helium evaporates significantly due to the heat of the detection part inserted into the container; and (2) the thermal conductivity of the pipe 3 is high, so If it is immersed constantly or for a long time, it will not be able to be insulated from the outside room temperature, allowing a large amount of heat to enter, and will consume a large amount of liquid helium.
(3) Since the pipe 3 is a conductor, electrical insulating material was coated or interposed on the inner surface of the pipe to prevent electrical resistance wires from short-circuiting; (4) Due to the high thermal conductivity of the pipe 3, a heat insulating material is provided on the inner surface of the pipe to increase the heat retention effect of the electrical resistance wire. However, when a long detection part is used, the pipe often bends during use, and the electrical resistance wire is not necessarily located in the center of the pipe, but often comes into contact with the inner surface of the pipe. In this case, heat is taken away from or applied to the electrical resistance wire, which causes measurement errors.
そこで本発明は、液体ヘリウムの液面を測定す
る連続型液面計の検出部の構造において、熱容量
が小さく、熱伝導率の低い、かつ絶縁性の良い検
出部に改良することをその技術的課題とするもの
である。
Therefore, the present invention aims to improve the structure of the detection part of a continuous liquid level gauge that measures the level of liquid helium to a detection part with small heat capacity, low thermal conductivity, and good insulation. This is an issue to be addressed.
前記技術的課題を解決するために本発明が講じ
た技術的手段は、非晶質合金相をその主たる構造
としてもつ超電導合金を電気抵抗線としてほぼ鉛
直に張り、液体ヘリウム中に浸漬して超電導遷移
現象を用いて、液面の検出を連続して表示する液
体ヘリウム用の液面計において、熱膨張収縮の小
さい繊維を混合した樹脂系複合材にて棒状に形成
した支持部の表面の一部に、真空蒸着、スパツタ
リング、イオンプレーテイング等の真空成膜技術
によつて、ジルコニウムとロジウムとからなり
(ジルコニウムの割合が72.5〜77.5原子%の組成)
超電導遷移温度が液体ヘリウム温度に近い4.2K
〜4.5Kである非晶質超電導合金薄膜を直線又は
螺旋状に形成し、この直線又は螺旋状の非晶質超
電導合金薄膜より電気抵抗線を形成し、電気抵抗
を測定する一方のリード線を支持部を貫通して端
部の電極に配線し、もう一方の電極を支持部に設
け、更に端部の電極を指示部内に埋め込んだもの
である。
The technical means taken by the present invention to solve the above-mentioned technical problem is that a superconducting alloy having an amorphous alloy phase as its main structure is stretched almost vertically as an electrical resistance wire and immersed in liquid helium to make it superconducting. In a liquid helium level gauge that continuously displays liquid level detection using a transition phenomenon, a part of the surface of a support part formed into a rod shape from a resin composite material mixed with fibers with low thermal expansion and contraction is used. The film is made of zirconium and rhodium (composition with a zirconium ratio of 72.5 to 77.5 at.%) using vacuum film-forming techniques such as vacuum evaporation, sputtering, and ion plating.
Superconducting transition temperature is 4.2K, close to liquid helium temperature
An amorphous superconducting alloy thin film with a temperature of ~4.5K is formed in a straight or spiral shape, an electrical resistance wire is formed from this straight or spiral amorphous superconducting alloy thin film, and one lead wire for measuring electrical resistance is formed. Wiring passes through the support part to the electrode at the end, the other electrode is provided in the support part, and the electrode at the end is embedded in the indicator part.
ここで、真空蒸着、スパツタリング、イオンプ
レーテイング等の真空成膜技術は、上記非晶質超
電導合金薄膜の薄膜構造を形成すると同時に非晶
質構造を形成する。 Here, vacuum film forming techniques such as vacuum evaporation, sputtering, and ion plating form an amorphous structure at the same time as forming the thin film structure of the amorphous superconducting alloy thin film.
上記技術的手段は次のように作用する。すなわ
ち、熱膨張収縮の小さい繊維を混合した樹脂系複
合材にて棒状に形成した支持部の表面の一部に、
真空蒸着、スパツタリング、イオンプレーテイン
グ等の真空成膜技術によつて、ジルコニウムとロ
ジウムとからなり超電導遷移温度が液体ヘリウム
温度に近い4.2K〜4.5Kである非晶質超電導合金
薄膜を直線又は螺旋状に形成し、この直線又は螺
旋状の非晶質超電導合金薄膜より電気抵抗線を形
成しているために、容器内の液体ヘリウムの量
(容器よりの高さ)が連続して測定でき、電気抵
抗線である非晶質超電導合金が薄膜(10μm以下)
であり、樹脂系複合材の支持部上に密着している
ため熱容量が小さく外部室温からの熱侵入も極め
て少なく、従つて、容器への挿入時及び、長時間
浸漬して使用する場合においても液体ヘリウムの
消費量は共に従来に比べて半分以下となる。ま
た、支持部の樹脂系複合材に非晶質超電導合金薄
膜が密着して一体的であり、リード線も貫通して
埋め込まれているために、電気抵抗線やリード線
の曲がり、破損もなく、更に持ち運び及び振動に
対しても極めて安定しており、耐久性及び信頼性
のある連続測定のできる液面計であり、更に端部
の電極を樹脂系複合材の支持部内に埋め込んで形
成することによつてコンパクトで信頼性が高い、
破損しにくい構造の液面計である。
The above technical means works as follows. That is, on a part of the surface of the support part formed into a rod shape from a resin composite material mixed with fibers with low thermal expansion and contraction,
Using vacuum film-forming techniques such as vacuum evaporation, sputtering, and ion plating, an amorphous superconducting alloy thin film made of zirconium and rhodium and having a superconducting transition temperature of 4.2K to 4.5K, which is close to the temperature of liquid helium, is formed into a straight or spiral shape. Since the electrical resistance wire is formed from this linear or spiral amorphous superconducting alloy thin film, the amount of liquid helium in the container (height above the container) can be measured continuously. Thin film (10 μm or less) of amorphous superconducting alloy that is electrical resistance wire
Because it is in close contact with the support made of resin-based composite material, it has a small heat capacity and extremely little heat intrusion from outside room temperature. The amount of liquid helium consumed is less than half that of the conventional method. In addition, since the amorphous superconducting alloy thin film is closely adhered to and integrated with the resin composite material of the support part, and the lead wires are also penetrated and embedded, there is no bending or damage to the electrical resistance wires or lead wires. Furthermore, it is extremely stable against transportation and vibration, and is a durable and reliable liquid level gauge that can perform continuous measurement.Furthermore, the electrode at the end is embedded in the supporting part of resin composite material. Especially compact and reliable,
This is a liquid level gauge with a structure that is difficult to damage.
本発明は、次の特有の効果を生じる、すなわち
(1) 非熱膨張収縮の小さい繊維を混合した樹脂系
複合材にて棒状に形成した支持部の表面の一部
に、真空蒸着、スパツタリング、イオンプレー
テイング等の真空成膜技術によつて、ジルコニ
ウムとロジウムとからなり超電導遷移温度が液
体ヘリウム温度に近い4.2K〜4.5Kである非晶
質超電導合金薄膜を直線又は螺旋状に形成し、
この直線又は螺旋状の非晶質超電導合金薄膜に
よる電気抵抗線を形成するため、支持部の径を
小さくでき(1〜5mm)、小型少電流で測定で
きる。
The present invention has the following unique effects: (1) Vacuum deposition, sputtering, By vacuum film forming technology such as ion plating, an amorphous superconducting alloy thin film made of zirconium and rhodium and having a superconducting transition temperature of 4.2K to 4.5K, which is close to the liquid helium temperature, is formed in a linear or spiral shape,
Since the electric resistance wire is formed by the linear or spiral amorphous superconducting alloy thin film, the diameter of the support part can be made small (1 to 5 mm), and measurements can be made in a small size and with a small current.
(2) 非晶質超電導合金の厚さが従来のリボン状の
場合は20μmであるのに対し、本発明の薄膜の
場合は10μm以下であり、抵抗値は2倍以上と
なり検出部の感度が非常に良い。(2) The thickness of the amorphous superconducting alloy is 20 μm in the conventional ribbon-like case, but it is less than 10 μm in the case of the thin film of the present invention, and the resistance value is more than double, which increases the sensitivity of the detection part. very good.
(3) 構造が簡単なために、非常に低コストで製作
でき、殆ど破損しない構造のために運搬に便利
である。(3) Because of its simple structure, it can be manufactured at a very low cost, and because it is almost unbreakable, it is convenient to transport.
(4) ジルコニウムとロジウムとからなり超電導遷
移温度が液体ヘリウム温度に近い4.2K〜4.5K
である非晶質超電導合金を用いることで、気体
ヘリウム領域にある樹脂系複合材の支持部上の
電気抵抗線の温度をわずかな電流で常電導体に
もどすことができ、この熱量は通常のニオブ、
チタン系超電導体(超電導遷移温度10K)に比
べて10分の1以下である。従つて、測定にかか
る熱量が小さいことからくる液体ヘリウムの蒸
発を極力抑えることができる。特に、樹脂複合
材の支持材の表面に超電導体からなる電気抵抗
線を設けたことで、遷移が直接に液面に触れる
部分で急峻に起こることで、追従性の極めてよ
い、精度の高い測定が可能となる。(4) Made of zirconium and rhodium, the superconducting transition temperature is 4.2K to 4.5K, close to the liquid helium temperature.
By using an amorphous superconducting alloy that is niobium,
This is less than one-tenth that of titanium-based superconductors (superconducting transition temperature 10K). Therefore, evaporation of liquid helium due to the small amount of heat required for measurement can be suppressed as much as possible. In particular, by providing an electrical resistance wire made of a superconductor on the surface of the resin composite support material, the transition occurs steeply at the part that directly touches the liquid surface, resulting in extremely good followability and highly accurate measurement. becomes possible.
(5) 支持部の樹脂系複合材としてFRP(繊維強化
樹脂)を使用した場合、支持部の外径が数mm以
下と細ければ、多少の湾曲や弾性範囲での変形
が可能であり、底面が液面挿入口の直下にない
容器や液面系を挿入する導入管が直線でない場
合にも使用可能である。(5) When FRP (fiber-reinforced resin) is used as the resin-based composite material for the support part, if the outer diameter of the support part is as small as a few mm or less, it is possible to bend to some extent and deform within an elastic range. It can also be used in cases where the bottom surface is not directly below the liquid level insertion port or where the introduction pipe into which the liquid level system is inserted is not straight.
以下、上記技術的手段の一具体的例を示す実施
例について説明する。
An example illustrating a specific example of the above technical means will be described below.
第2図において、1は液体ヘリウム液面計、2
は電子回路を内蔵した電気抵抗の計測部、10は
FRPよりなる支持部である。11は電気抵抗線
であり、支持部10の表面の一部に、真空蒸着、
スパツタリング、イオンプレーテイング等の真空
成膜技術によつて、ジルコニウムとロジウムとか
らなる非晶質超電導合金薄膜を直線状に形成し、
この直線状の非晶質超電導合金薄膜より電気抵抗
線を形成する。この非晶質超電導合金薄膜の超電
導遷移温度は、ジルコニウムの割合が75原子%の
組成では4.42K、ジルコニウムの割合が74原子%
の組成では4.40K、ジルコニウムの割合が73原子
%の組成では4.22Kである。12及び13は真鍮
よりなる電極で支持部10に埋め込まれている。
14a及び14bはリード線であり、支持部10
に埋め込まれている。リード線14aは丸棒の中
央を貫通して、電極12と接続している。 In Fig. 2, 1 is a liquid helium level gauge, 2
10 is an electrical resistance measurement unit with a built-in electronic circuit;
The support part is made of FRP. 11 is an electric resistance wire, which is vacuum-deposited on a part of the surface of the support part 10;
Using vacuum film-forming techniques such as sputtering and ion plating, an amorphous superconducting alloy thin film consisting of zirconium and rhodium is formed in a linear shape.
An electrical resistance wire is formed from this linear amorphous superconducting alloy thin film. The superconducting transition temperature of this amorphous superconducting alloy thin film is 4.42 K when the proportion of zirconium is 75 at%, and the superconducting transition temperature is 4.42 K when the proportion of zirconium is 74 at%.
The temperature is 4.40K for the composition, and 4.22K for the composition with a 73 atomic percent zirconium content. Electrodes 12 and 13 are made of brass and are embedded in the support portion 10.
14a and 14b are lead wires, which are connected to the support part 10.
embedded in. The lead wire 14a passes through the center of the round bar and is connected to the electrode 12.
以上の構成において、その作用を説明すれば、
液面計の検出部10を液体ヘリウム内に挿入すれ
ば、液面をAとし、検出部の端面電極12をBと
すれば、A〜B間の電気抵抗は0となり、従つ
て、他の電極をCとすればA〜Cの電気抵抗が測
定され、A〜B,A〜C間の垂直距離すなわち容
器内の液体ヘリウムの高さがメータに表示される
ことになる。更に、A点が変化しても連続的に表
示されるものである。 In the above configuration, the operation is explained as follows.
If the detection part 10 of the liquid level gauge is inserted into liquid helium, the liquid level is A, and the end electrode 12 of the detection part is B, the electrical resistance between A and B becomes 0, and therefore other If the electrode is C, the electrical resistance of A to C will be measured, and the vertical distance between A to B and A to C, that is, the height of the liquid helium in the container will be displayed on the meter. Furthermore, even if the A point changes, it is displayed continuously.
第1図は従来例を示すもので、イは外観斜視図
であり、ロは要部の拡大断面図である。第2図は
本発明の実施例を示すものであり、イは概略説明
図、ロは下側電極の斜視図であり、ハはロの側面
断面図、ニは上側電極の側面断面図である。
1……液面計、10……支持部材、11……電
気抵抗線、12,13……電極、14a,14b
……リード線。
FIG. 1 shows a conventional example, in which A is an external perspective view and B is an enlarged sectional view of the main part. FIG. 2 shows an embodiment of the present invention, in which A is a schematic explanatory diagram, B is a perspective view of the lower electrode, C is a side sectional view of B, and D is a side sectional view of the upper electrode. . 1... Liquid level gauge, 10... Support member, 11... Electric resistance wire, 12, 13... Electrode, 14a, 14b
……Lead.
Claims (1)
電導合金を電気抵抗線としてほぼ鉛直に張り、液
体ヘリウム中に浸漬して超電導遷移現象を用い
て、液面の検出を連続して表示する液体ヘリウム
用の液面計において、 熱膨張収縮の小さい繊維を混合した樹脂系複合
材にて棒状に形成した支持部の表面の一部に、真
空蒸着、スパツタリング、イオンプレーテイング
等の真空成膜技術によつて、ジルコニウムとロジ
ウムとからなり超電導遷移温度が液体ヘリウム温
度に近い4.2K〜4.5Kである非晶質超電導合金薄
膜を直線又は螺旋状に形成し、この直線又は螺旋
状の非晶質超電導合金薄膜より電気抵抗線を形成
し、電気抵抗を測定する一方のリード線を支持部
を貫通して端部の電極に配線し、もう一方の電極
を支持部に設け、更に端部の電極を支持部内に埋
め込んだ、液体ヘリウム液面計。[Claims] 1. A superconducting alloy having an amorphous alloy phase as its main structure is stretched almost vertically as an electrical resistance wire, and is immersed in liquid helium to continuously detect the liquid level using the superconducting transition phenomenon. In a level gauge for liquid helium that displays as Using the vacuum film forming technology of An electrical resistance wire is formed from a shaped amorphous superconducting alloy thin film, one lead wire for measuring electrical resistance is routed through the support part to an electrode at the end, and the other electrode is provided on the support part. A liquid helium level gauge with an electrode at the end embedded within the support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7438984A JPS60216224A (en) | 1984-04-12 | 1984-04-12 | Liquid helium level gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7438984A JPS60216224A (en) | 1984-04-12 | 1984-04-12 | Liquid helium level gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60216224A JPS60216224A (en) | 1985-10-29 |
| JPH0555807B2 true JPH0555807B2 (en) | 1993-08-18 |
Family
ID=13545771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7438984A Granted JPS60216224A (en) | 1984-04-12 | 1984-04-12 | Liquid helium level gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60216224A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030177826A1 (en) * | 2002-03-20 | 2003-09-25 | Sobha Adkadkam | Liquid nitrogen level sensor-monitor device using high Tc superconductors and method of manufacture thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630620A (en) * | 1979-08-21 | 1981-03-27 | Toshiba Corp | Element of continuous liquid level meter |
| JPS58166220A (en) * | 1982-03-26 | 1983-10-01 | Aisin Seiki Co Ltd | Liquid level indicator of liquid helium |
-
1984
- 1984-04-12 JP JP7438984A patent/JPS60216224A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60216224A (en) | 1985-10-29 |
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