JPH0572720B2 - - Google Patents
Info
- Publication number
- JPH0572720B2 JPH0572720B2 JP26384486A JP26384486A JPH0572720B2 JP H0572720 B2 JPH0572720 B2 JP H0572720B2 JP 26384486 A JP26384486 A JP 26384486A JP 26384486 A JP26384486 A JP 26384486A JP H0572720 B2 JPH0572720 B2 JP H0572720B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating member
- ion beam
- temperature
- passage hole
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims description 11
- 230000005684 electric field Effects 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、例えばシリコンウエハにイオンを注
入するイオン注入装置等に使用されるイオンビー
ム用静電加速器に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ion beam electrostatic accelerator used in, for example, an ion implantation apparatus for implanting ions into a silicon wafer.
（従来の技術）
従来の静電加速器の加速管は、第１図示のよう
に、イオンビームａの通過孔ｂを形成した絶縁部
材ｃを備え、該イオンビームａのイオンは絶縁部
材ｃの両端に加えられる例えば200kvの高電圧に
より加速するを一般とする。この場合通過孔ｂの
内壁面には、イオン加速のために抵抗ｄにより電
位差を与えられた円板ｅからなる加速電極が設け
られ、各円板ｅには高圧放電リングｆを設けて荷
電粒子が集積したときの放電を行なわせている。
また円板ｅは絶縁部材ｃのブロツク間に接着剤ｇ
で接着固定される。(Prior Art) As shown in the first diagram, an accelerating tube of a conventional electrostatic accelerator is equipped with an insulating member c in which a passage hole b for an ion beam a is formed, and the ions of the ion beam a pass through both ends of the insulating member c. It is generally accelerated by a high voltage of, for example, 200 kV applied to the vehicle. In this case, on the inner wall surface of the passage hole b, an accelerating electrode consisting of a disk e given a potential difference by a resistor d for ion acceleration is provided, and each disk e is provided with a high-pressure discharge ring f, so that charged particles discharge when accumulated.
In addition, the disc e has an adhesive g between the blocks of the insulating member c.
It is fixed with adhesive.
該通過孔ｂ内は真空であり、絶縁部材ｃの外周
はリングｆの放電のため大気中にさらされる。 The inside of the passage hole b is in a vacuum, and the outer periphery of the insulating member c is exposed to the atmosphere due to the discharge of the ring f.
（発明が解決しようとする問題点）
第１図示のような加速管では絶縁部材ｃは加速
軸方向に一様な電場がかからず、局部的に荷電粒
子が集積して高電場が発生する。この高電場と円
板ｅとの間で放電が生ずるがその放電量が大きい
と円板ｅを止める接着剤ｇが熱で解け、通過孔ｂ
内の真空状態が破れてしまう。そのため理想的な
一様の電場が得られる場合に比べて加速軸方向の
長さを数倍以上に構成して耐電圧性を高め、放電
の発生を防いでいる。(Problems to be Solved by the Invention) In the acceleration tube as shown in the first diagram, a uniform electric field is not applied to the insulating member c in the direction of the acceleration axis, and charged particles locally accumulate and a high electric field is generated. . A discharge occurs between this high electric field and the disk e, but when the amount of discharge is large, the adhesive g that holds the disk e melts due to heat, and the passage hole b
The vacuum inside is broken. Therefore, the length in the acceleration axis direction is made to be several times larger than that in the case where an ideal uniform electric field is obtained, thereby increasing the voltage resistance and preventing the occurrence of discharge.
加速管が長いと製作性が悪く、静電加速器の形
状が大型化して好ましくない。 A long accelerator tube is not preferable because it is difficult to manufacture and the shape of the electrostatic accelerator becomes large.
本発明は放電が発生しない長さの短い放電管を
得て前記した不都合を解決することを目的とする
ものである。 The object of the present invention is to solve the above-mentioned disadvantages by obtaining a short discharge tube in which no discharge occurs.
（問題点を解決するための手段）
本発明では、イオンビームの通過孔を形成した
絶縁部材と、該絶縁部材の両端部及びその中間部
に設けられ且つイオンビームの通過孔を形成した
加速電極と、を有する加速管を備えたイオンビー
ム用静電加速器に於いて、該絶縁部材を導電性セ
ラミツクで構成し、該絶縁部材の温度を制御する
温度制御装置を設け、前記の問題点を解決するよ
うにした。(Means for Solving the Problems) The present invention includes an insulating member having an ion beam passage hole formed therein, and an accelerating electrode provided at both ends of the insulating member and an intermediate portion thereof and having an ion beam passage hole formed therein. In an electrostatic accelerator for ion beams equipped with an accelerator tube, the insulating member is made of conductive ceramic, and a temperature control device for controlling the temperature of the insulating member is provided to solve the above problems. I decided to do so.
（作用）
真空化した加速管の通過孔をイオンビームが通
過し、該加速管の絶縁部材の両端に電源から与え
た加速電圧によりイオンビームを加速するが、該
絶縁部材は導電性セラミツクで構成されてるので
加速電圧を与えた場合、該絶縁部材をわずかに電
流が流れる。この電流は該絶縁部材の軸方向に流
れ、その軸方向の電場が一様になるので局所的に
高電場が発生することがなく、加速管の耐電圧性
が従来のものよりも高くなるので加速管の長さを
従来のものよりも短く、例えば数分の１にするこ
とが出来る。しかも該加速管の絶縁部材の温度を
制御する温度制御装置を設けたので、該セラミツ
クの温度を適当な温度に保つことによりその電気
伝導度を任意に制御することが出来る。電気伝導
度が低いと局所的高電場が発生して放電を生じ、
電気伝導度が高いと導電性セラミツクの絶縁物中
を流れる電流が多くなつて損失が大きくなるので
適当な電気伝導度とすることが必要になるが、そ
の制御を温度により行うと簡単になる。(Function) The ion beam passes through the passage hole of the evacuated acceleration tube, and the ion beam is accelerated by the accelerating voltage applied from the power source to both ends of the insulating member of the accelerating tube, and the insulating member is made of conductive ceramic. Therefore, when an accelerating voltage is applied, a small amount of current flows through the insulating member. This current flows in the axial direction of the insulating member, and the electric field in the axial direction is uniform, so no high electric field is generated locally, and the voltage resistance of the accelerator tube is higher than that of conventional ones. The length of the accelerating tube can be made shorter than that of conventional ones, for example, to a fraction of the length. Moreover, since a temperature control device is provided to control the temperature of the insulating member of the accelerator tube, the electrical conductivity of the ceramic can be controlled as desired by keeping the temperature of the ceramic at an appropriate temperature. When the electrical conductivity is low, a local high electric field is generated and a discharge occurs,
If the electrical conductivity is high, a large amount of current will flow through the conductive ceramic insulator, resulting in a large loss, so it is necessary to maintain an appropriate electrical conductivity, but this can be easily controlled by temperature.
（実施例）
本発明の実施例は図面第２図示の如くであり、
１はイオンビーム２の通過孔３を形成したイオン
ビーム用静電加速器の加速管４の絶縁部材で、該
絶縁部材１は例えばセラミツクにジルコニウムを
混入したデンスジルコン等の導電性セラミツクで
モールド成形される。５は該通過孔３に突出させ
た鍔形の加速電極で、例えば銀ろう付けで取付け
られ、電源６から該絶縁部材１の両端へ通電され
ると該加速電極５に電位が生じてイオンが加速さ
れる。７はヒータ、８は該ヒータ７への電気量を
制御する制御装置を示し、該ヒータ７と制御装置
８とで導電性セラミツクの絶縁部材１の温度を任
意に制御する温度制御装置９を構成するようにし
た。(Embodiment) An embodiment of the present invention is as shown in the second figure of the drawing,
Reference numeral 1 denotes an insulating member of an accelerating tube 4 of an ion beam electrostatic accelerator in which a passage hole 3 for an ion beam 2 is formed. Ru. Reference numeral 5 denotes a collar-shaped accelerating electrode that protrudes into the passage hole 3, and is attached, for example, by silver soldering.When electricity is applied from a power source 6 to both ends of the insulating member 1, a potential is generated in the accelerating electrode 5, and ions are generated. be accelerated. 7 is a heater, 8 is a control device for controlling the amount of electricity to the heater 7, and the heater 7 and the control device 8 constitute a temperature control device 9 for arbitrarily controlling the temperature of the conductive ceramic insulating member 1. I decided to do so.
該絶縁部材１として導電性エポキシ樹脂を使用
することも考えられる。 It is also conceivable to use conductive epoxy resin as the insulating member 1.
該通過孔３内を真空化してそこにイオンビーム
２を導入し、電源６からの電力を入力すると該イ
オンビーム２のイオンは加速電極５の電位により
加速される。絶縁部材１は導電性セラミツクで構
成され、わずかに電流が流れるのでイオンビーム
の加速軸方向に一様な電場となり、局所的に高電
場が発生することがなく、放電を防止出来るので
耐電圧が向上し、その結果従来のものよりも短く
構成出来る。該導電性セラミツクが前記デンスジ
ルコンの場合の温度と比抵抗の関係は第３図示の
曲線Ａで示す如くであり、温度が高いと電流が流
れ易くなる性質があるので、前記温度制御装置９
により適当温度に制御することによつて簡単に電
気伝導度を調節し、絶縁耐圧と電力損失が適当に
なるように設定出来る。即ち、電子伝導度が低く
なりすぎて局所的高電場が発生し、絶縁耐圧が悪
くなる不都合と、電気伝導度が高くなりすぎて絶
縁部材１中を流れる電流が多くなる電力損失の増
大の不都合と妥協点を任意に設定出来る。 When the inside of the passage hole 3 is evacuated and the ion beam 2 is introduced therein, and power from the power source 6 is input, the ions of the ion beam 2 are accelerated by the potential of the accelerating electrode 5. The insulating member 1 is made of conductive ceramic, and as a small amount of current flows through it, a uniform electric field is created in the direction of the acceleration axis of the ion beam, and a high electric field is not generated locally, preventing discharge and increasing the withstand voltage. As a result, it can be constructed shorter than the conventional one. When the conductive ceramic is the dense zircon, the relationship between temperature and specific resistance is as shown by curve A shown in FIG.
By controlling the temperature to an appropriate temperature, electrical conductivity can be easily adjusted, and dielectric strength voltage and power loss can be set to appropriate values. That is, the electronic conductivity becomes too low and a local high electric field is generated, resulting in poor dielectric strength. The electrical conductivity becomes too high, causing a large amount of current to flow through the insulating member 1, resulting in an increase in power loss. You can arbitrarily set a compromise.
また、温度制御装置９で絶縁部材１を常温より
高く維持することが出来るので通過孔の内面の吸
着ガスが減少し、放電発生の確立を低くすること
が出来る。 Further, since the temperature control device 9 can maintain the insulating member 1 at a temperature higher than normal temperature, the adsorbed gas on the inner surface of the passage hole is reduced, and the probability of occurrence of electric discharge can be lowered.
（発明の効果）
このように本発明では加速管の絶縁部材を導電
性セラミツクスで構成し、さらにこれの温度制御
装置を設けるようにしたので、一様な電場が得ら
れ、耐絶縁性が向上し、短い加速管で放電の少な
いものを製作出来、温度を制御して簡単に絶縁部
材の電気伝導度を調節出来るので使用上便利であ
る等の効果がある。(Effects of the Invention) In this way, in the present invention, the insulating member of the accelerator tube is made of conductive ceramics, and a temperature control device is further provided for this, so a uniform electric field can be obtained and insulation resistance is improved. However, it is possible to manufacture a short accelerating tube with little discharge, and it is convenient to use because the electrical conductivity of the insulating member can be easily adjusted by controlling the temperature.
第１図は従来の加速管の説明図、第２図は本発
明の実施例の説明図、第３図は導電性セラミツク
の電気伝導度の曲線である。
１……絶縁部材、２……イオンビーム、３……
通過孔、４……加速管、９……温度制御装置。
FIG. 1 is an explanatory diagram of a conventional accelerator tube, FIG. 2 is an explanatory diagram of an embodiment of the present invention, and FIG. 3 is a curve of electrical conductivity of conductive ceramic. 1... Insulating member, 2... Ion beam, 3...
Passing hole, 4...acceleration tube, 9...temperature control device.
Claims (1)
と、該絶縁部材の両端部及びその中間部に設けら
れ且つイオンビームの通過孔を形成した加速電極
と、を有する加速管を備えたイオンビーム用静電
加速器に於いて、該絶縁部材を導電性セラミツク
で構成し、該絶縁部材の温度を制御する温度制御
装置を設けたことを特徴とするイオンビーム用静
電加速器。1. An ion beam station equipped with an accelerating tube having an insulating member with an ion beam passage hole formed therein, and an accelerating electrode provided at both ends of the insulating member and an intermediate portion thereof and with an ion beam passage hole formed therein. 1. An electrostatic accelerator for ion beams, characterized in that the insulating member is made of conductive ceramic and is provided with a temperature control device for controlling the temperature of the insulating member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26384486A JPS63119199A (en) | 1986-11-07 | 1986-11-07 | Acceleration tube for electrostatic accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26384486A JPS63119199A (en) | 1986-11-07 | 1986-11-07 | Acceleration tube for electrostatic accelerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119199A JPS63119199A (en) | 1988-05-23 |
| JPH0572720B2 true JPH0572720B2 (en) | 1993-10-12 |
Family
ID=17395007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26384486A Granted JPS63119199A (en) | 1986-11-07 | 1986-11-07 | Acceleration tube for electrostatic accelerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119199A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3738734B2 (en) | 2002-02-06 | 2006-01-25 | 日新電機株式会社 | Electrostatic accelerator tube and ion implantation apparatus including the same |
| US7106143B2 (en) | 2004-03-31 | 2006-09-12 | Frequency Electronics, Inc. | Method for achieving highly reproducible acceleration insensitive quartz crystal oscillators |
| EP2478546B1 (en) * | 2009-09-18 | 2018-07-04 | FEI Company | Distributed ion source acceleration column |
-
1986
- 1986-11-07 JP JP26384486A patent/JPS63119199A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63119199A (en) | 1988-05-23 |
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