JPH06101939B2 - Actuator using laminated piezoelectric ceramic as a driving source and stepping motor using the actuator - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator using a laminated piezoelectric ceramic as a drive source and a stepping motor using the actuator.

Problems to be Solved by the Invention In recent years, as an actuator used to drive various actuating devices, since the response speed is fast and the accuracy is good,
Instead of the conventional motor, hydraulic or pneumatic equipment as the drive source, an actuator that uses a laminated piezoelectric ceramic as a drive source, in which a large number of piezoelectric ceramics whose thickness is changed by the application of voltage is laminated, has attracted attention and its development has been developed. As one of them, the laminated piezoelectric ceramic is provided between the base and the operating body in the reciprocating direction of the operating body. An actuator has been proposed in which the actuator is arranged in a tilted posture and the displacement is amplified by expanding and contracting the laminated piezoelectric ceramic to transmit it to the actuator to reciprocate the actuator, but the laminated piezoelectric ceramic is proposed. It is necessary to rotatably support the both ends of the base body and the actuation body,
In addition, the structure is complicated because it is necessary to store the laminated piezoelectric ceramic in the cylinder and to store it in the base body so that the laminated piezoelectric ceramic does not buckle when subjected to a compressive load. In addition, the device is upsized and the laminated piezoelectric ceramic is directly applied to the actuator,
When an impact force is applied to the actuator, the force is directly transmitted to the piezoelectric ceramic, and the piezoelectric ceramic is easily damaged.

The present invention has been completed in view of the above points, and provides an actuator using a laminated piezoelectric ceramic that is compact in size and has excellent durability as a driving source, and by using the actuator. An object of the present invention is to provide a stepping motor that is compact and compact.

First Embodiment First, a first embodiment of an actuator using the laminated piezoelectric ceramic of the present invention as a drive source will be described with reference to FIGS. 1 to 4.

Reference numeral 1 denotes a base body, which has a structure in which a pair of side plates 3 and 3 are fixed by screws 4 on both sides of a bottom plate 2 having protrusions 2a and 2b formed at both ends in the lengthwise direction. A lower insulator 6 having a groove 6a formed on the upper surface along the lengthwise direction is fitted on the upper surface, and an upper insulator 7 is laid on the upper surface to form one side plate 3
It is fastened with a screw 8 to form a slender storage chamber 9 between the lower insulator 6 and the upper insulator 7, and a slender laminated piezoelectric ceramic 10 is stored in the storage chamber 9.

This laminated piezoelectric ceramic 10 uses a piezoelectric ceramic combination body recently developed by NEC Corporation, and the piezoelectric ceramic combination body 11 is made of magnesium niobium as shown in FIG. Binary solid solution of lead oxide and lead titanate Ceramics {(1-X) Pb (Mg1 / 3Nb2 / 3)
O ₃ -PbTiO ₃ } of which X is near 0.35 is alternately laminated and integrated with ceramic plates 12 and internal electrode plates 13 and the sintered element is cut into a desired shape and size, and the entire circumference is cut. The inner electrode plate 13 exposed on the surface is electrically insulated by insulating material 14 every other layer on the upper and lower sides, and the external electrode plates 15 and 16 are attached to the upper and lower side surfaces to place the inner electrode plate 13 on one layer. Has a structure in which it is electrically connected to the external electrode plates 15 and 16 and by applying a positive or negative voltage to each ceramic plate.
12 increases or decreases the thickness so that the piezoelectric ceramic coupling body 11 expands or contracts in the stacking direction of the ceramic plates 12 and does not deteriorate at all even when a voltage is repeatedly applied, and the response speed is It has a characteristic of being extremely fast. A large number of piezoelectric ceramic coupling bodies 11 are superposed on each other, and the external electrode plates 15 and the individual piezoelectric ceramic coupling bodies 11 and
The laminated piezoelectric ceramic 10 described above is configured by connecting the electrode plates of the same polarity among the 16 with the electric wire 18, and the tip end of the laminated piezoelectric ceramic 10 is connected to the screw hole 20 formed at one end of the storage chamber 9. An adjusting screw 21 having an abutting member 22 having an insulating property is screwed onto the abutting member 22, and one end of the laminated piezoelectric ceramic 10 is abutted on the abutting member 22 and connected to the external electrode plates 15 and 16. The lead wires 24 and 25 are led to the outside through the insertion hole 26.

A concave portion 28 having an arcuate cross section is formed on the inner surface of one of the projections 2a of the bottom plate 2 described above, and the end portion of the upper insulating portion 7 on the side corresponding thereto has an arcuate cross section with a tip having a small diameter. Guiding body
29 is fixed, and a U-shaped passage 30 reaching the upper part of the protrusion 2a from the storage chamber 9 is formed between the protrusion 2a and the guide body 29. A plurality of rollers 31 are tightly accommodated in a state of being connected to each other, and the lowermost roller 31 is brought into contact with the other end of the laminated piezoelectric ceramic 10 via a pressing member 32 having an insulating property. ing.

Above the above-mentioned upper insulator 7, a slender steel plate is formed by punching into a mountain shape having a gentle inclination angle with the central portion in the longitudinal direction as the apex, and the steel rollers 36, 37 at both ends. The elastic plate 35, which is secured by welding, is a laminated piezoelectric ceramic.
The roller 36, which is arranged in parallel with 10 in parallel, has the end of the roller 36, 37 on the same side as the end on the adjusting screw 21 side of the laminated piezoelectric ceramic 10 on the inner surface of the protrusion 2b. Only the rotation around the axis is freely fitted in the formed circular hole 38, and the roller 37 on the opposite side is fitted in the passage 30 and abuts on the uppermost roller 31 of the series of rollers 31. The actuating body 40 is attached to the apex of the elastic plate 35, and a notch 41 and a through hole 42 for facilitating bending are formed on both sides of the actuating body 40. Further, on the upper surface of the upper insulator 7, A stopper 44 for restricting the downward movement of the operating body 40 is attached.

Next, the operation of the actuator of this embodiment will be described.

When the laminated piezoelectric ceramic 10 is expanded by applying a positive voltage to the laminated piezoelectric ceramic 10, the lowermost roller 31 of the series of rollers 31 is pressed via the pressing member 32,
A series of rollers 31 move along the passage 30, and the uppermost roller 31 is extruded with the same displacement amount as the laminated piezoelectric ceramic 10 and changing the direction by approximately 180 degrees, whereby the elastic plate is A pressing force in a substantially horizontal direction is applied to one roller 37 of 35, and the elastic plate 35 is further bent, and its apex moves in the horizontal direction slightly toward the fixed roller 36 side and moves upwards.

Although the amount of displacement transmitted to the roller 37 on the operating side of the elastic plate 35 is very small, the elastic plate 35 is in an oblique posture with respect to the moving direction of the apex, and the apex is horizontal. Since the movement in the direction is regulated to some extent, the apex moves with a displacement amount amplified more than the displacement amount of the roller 37 on the operating side. This will be described with reference to FIG. Is inclined between the angles θ1Y1 before being pressed, and the working end of the elastic plate 35 is pressed to be located between X2Y2, the displacement amount of the working end of the elastic plate 35 is Δx, and the apex of the elastic plate 35 is The displacement amount of Δy is Δy, and the ratio of the displacement amount Δx to the length of the elastic plate 35 from the working end to the apex is E. The relational expression of is obtained, and when E = 4 × 10 ⁻³ and θ = 3 °, Δy / Δx = 18.5, and the displacement amount of the vertex Δy
Is 18.5 times the displacement Δx at the working end.

Therefore, the operating body 40 attached to the top of the elastic plate 35,
The displacement amount is amplified more than the displacement amount of the laminated piezoelectric ceramic 10 to advance to the position indicated by the chain line in FIG.

Next, when the laminated piezoelectric ceramic 10 contracts by applying a negative voltage to the laminated piezoelectric ceramic 10, the elastic plate
Due to its restoring elastic force, one roller 37 returns to a state in which one roller 37 presses a series of rollers 31 and the lowermost roller 31 comes into contact with the other end of the contracted laminated piezoelectric ceramic 10 via the pressing member 32. Then, the operating body 40 retracts to the position indicated by the solid line in FIG.

Therefore, by applying a high-frequency AC voltage to the laminated piezoelectric ceramic 10, the operating body 40 can be reciprocally driven at a high speed between the chain line position and the solid line position in FIG.

Further, since the operating body 40 is attached to the elastic plate 35,
When an impact force is applied to the actuation body 40, this is absorbed by the elastic plate 35, and there is no fear that the impact force is transmitted to the laminated piezoelectric ceramic 10.

Also, by changing the screwing amount of the adjusting screw 21,
The inclination angle of the elastic plate 35 can be changed, whereby the amplification degree of the displacement amount of the laminated piezoelectric ceramic 10 can be changed,
It is possible to adjust the displacement amount of the actuation body 40.

In the above embodiment, a plurality of steel rollers 31 are used as an interposer for transmitting the displacement amount of the laminated piezoelectric ceramic 10 to the elastic plate 35, but a plurality of steel balls are connected. Alternatively, it may be a flexible interposer that is not expandable or contractable in the axial direction of a liquid or the like and has flexibility.

Further, in the above-mentioned embodiment, the elastic plate 35 is arranged substantially parallel to the horizontal plane, but it is also possible to raise the elastic plate 35 so as to make a right angle posture with respect to the horizontal plane, and in this case, Can reciprocate the actuator 40 along a horizontal plane.

Further, in the above embodiment, the elastic plate 35 is made of steel plate and the steel rollers 36 and 37 are fixed to both ends thereof by welding, but the elastic plate 35 is made of FRP so that the rollers 36 and 37 are integrally formed. May be.

FIGS. 5 (a) to 5 (e) show another embodiment of the actuator, and the actuator of the second embodiment shown in FIG. 5 (a) has one end and the other end of the elastic plate 35 and the passages 30 and 30a. The actuator is abutted against one end and the other end of the laminated piezoelectric ceramic 10 in the same direction through a series of rollers 31 and 31a housed in the actuator. The actuator of the third embodiment shown in FIG. The two laminated piezoelectric ceramics 10 and 10a are arranged on both sides to fix the ends on the center side, and one end and the other end of the elastic plate 35 are laminated via a series of rollers 31 and 31a. Shaped piezoelectric ceramics 10 and 10a that are in contact with the ends in the same direction,
The actuators of the second and third embodiments are elastic plates.
Since 35 is pushed from both sides, actuating body 40 can be driven to reciprocate straight in a direction perpendicular to the length direction of elastic plate 35.

The actuator of the fourth embodiment shown in FIG. 5 (c) is based on the actuator of the first embodiment, and the laminated piezoelectric ceramic 10 is a laminated piezoelectric ceramic 10b having a constant length.
Are arranged in parallel with each other at a plurality of intervals, one laminated piezoelectric ceramic 10b and the next laminated piezoelectric ceramic 10b.
The end of the same direction of the roller 31b, which is stored in the passage 30b.
Of the laminated piezoelectric ceramics 10b which are in contact with one end and the other end of the actuator, and the actuator of the fifth embodiment shown in FIG. 5 (d) is the same as that shown in FIG. 5 (a). Using the second embodiment as a basic type, the laminated piezoelectric ceramic 10 is
At both ends of one laminated piezoelectric ceramic 10c, a laminated piezoelectric ceramic 1 shorter than the laminated piezoelectric ceramic 10c is provided.
The actuators of the sixth embodiment shown in FIG. 5 (e) are the same as those shown in FIG. The third embodiment of (b) is based on the basic structure, and the laminated piezoelectric ceramics 10 and 10a are formed by connecting a plurality of laminated piezoelectric ceramics 10b and 10b in parallel through rollers 31b. In the fourth to sixth embodiments, the displacement amount can be made large by making the total length of the laminated piezoelectric ceramic 10 or 10a long, and the actuating body 40 can be made larger in displacement amount. It becomes possible to drive.

Next, a first embodiment of the stepping motor using the actuator A shown in the above embodiment will be described with reference to FIG.

51 has a central hole 52 and is 60 along the entire length of the outer peripheral surface.
A tubular body having a star-shaped cross section with six bulging portions 53 radially protruding at intervals of a degree. The body is attached to a pair of legs 55, 55 in a horizontal posture, and has a central hole 52 in the body 51. A cylindrical rotor 56 is concentrically fitted inside and is rotatably supported around a horizontal axis. On the outer peripheral surface of the rotor 56, a large number of outer peripheral teeth 57 in the shape of an isosceles triangle are fixed. Are formed continuously.

On the inner peripheral surface of each bulging portion 53 of the body 51, a guide groove 59 facing the center of the rotor 56 is bored over the entire length, and in each guide groove 59, a surface corresponding to the rotor 56 is formed. A pressing body 60 formed with a plurality of feed teeth 61 that form the same pitch as the outer peripheral teeth 57.
However, the rotor 56 is fitted in the center of the rotor 56 via the slide plate 62 so that the feed teeth 61 are positioned relative to the outer peripheral teeth 57 in two positional relations with each other. Based on the feed dog 61, two feed teeth 61 between them are provided.
However, the phase shift with respect to the outer peripheral tooth 57 is sequentially increased counterclockwise by 1/3 pitch, and if the feed teeth 61a at positions I and IV facing each other are aligned with the outer peripheral tooth 57, The feed teeth 61b at the positions II and V facing each other are out of phase with the outer teeth 57 at the 1/3 pitch, and the feed teeth 61c at positions III and VI facing each other are out of phase with the outer peripheral teeth 57, respectively.

On the lower surface of each pressing body 60, an actuator A using the above-mentioned laminated piezoelectric ceramic as a drive source is installed along the axial direction of the body 1 and fixed to the body 51, and the operating body 40 is mounted on the lower surface of the pressing body 60. The pushing body 60 is pushed up by the forward movement of the actuating body 40, and the pushing body 60 is moved forward to a position where the feed dog 61 thereof engages with the outer peripheral teeth 57 of the rotor 56. Elastic rings for returning the pressing body 60 (not shown) are fitted so as to be inscribed at both ends in the length direction of the body 60.

The stepping motor of this embodiment has the above structure,
In a state where the pressing bodies 60 at the positions I and IV facing each other are moved forward and the feed dog 61a is meshed with the outer peripheral tooth 57, the feed tooth 61b is out of phase with the outer peripheral tooth 57 by 1/3 pitch phase. When a positive voltage is applied to the actuator A at positions II and V and a negative voltage is applied to the actuator A at positions I and IV, the pressing body 60 at positions II and V moves forward and The pressing body 60 retracts due to the elasticity of the elastic ring, and as described above, the feed teeth 61 at the positions II and V are fed.
b is shifted by 1/3 pitch with respect to the outer peripheral tooth 57, and the tooth tip of the feed tooth 61b corresponds to the frontward slope of the outer peripheral tooth 57 in the clockwise direction. Then, the tooth tip pushes the slope of the outer peripheral tooth 57 to move the rotor 6 counterclockwise.
Rotate 1/3 pitch, and in this state, position III next to it
Since the feed teeth 61c of VI and VI are out of phase with the outer teeth 57 by 1/3 pitch, a positive voltage is continuously applied to the actuator A at positions III and VI to move the feed teeth 61c forward.
By applying a negative voltage to the actuator A at the positions II and V and retracting the feed dog 61b, the rotor 56 is re-engaged.
/ 3 pitch Rotate in the same direction.

As described above, by repeating the application of the positive voltage and the application of the negative voltage to the actuators A at the positions I and IV, the positions II and V and the positions III and VI facing each other in a constant cycle, the rotor The 56 can be rotated counterclockwise intermittently by 1/3 pitch, and when the predetermined pair of feed teeth 61 meshes with the outer peripheral teeth 57, the actuator A can be kept in a state where a positive voltage is applied. For example, the rotor 56 can be stopped at any rotation angle.

Further, since the actuator A is excellent in high-speed response, the rotor 56 can be smoothly and continuously rotated by applying a high-frequency AC voltage whose phases are sequentially shifted.

Further, when the pressing body 60 moves forward and the tooth tip of the feed dog 61 hits the slope of the outer peripheral tooth 57, the actuator 40 of the actuator A is moved.
However, this impact force is not absorbed by the elastic plate 35 and is not transmitted to the laminated piezoelectric ceramic 10, and the actuator A due to damage to the laminated piezoelectric ceramic 10 can be prevented, and The durability of the ping motor is improved.

FIG. 7 shows a second embodiment of a stepping motor using an actuator A which uses a laminated piezoelectric ceramic as a drive source. In this stepping motor, a body 71 is a narrow tubular shape having a substantially equilateral triangle cross section. None, in the center hole 72 thereof, similarly to the first embodiment, a rotor 73 having outer peripheral teeth 74 continuously formed on the outer peripheral surface is rotatably supported around a horizontal axis, and is formed on the inner peripheral surface of the body 71. Three guide grooves 75 facing the center of the rotor 73 are provided at positions corresponding to the centers of the sides of the triangle.
A pressing body 77 having feed teeth 78 formed on the corresponding surface of the rotor 73, which are formed at intervals of 0 degree and in which the phase shift with respect to the outer peripheral teeth 74 increases sequentially by 1/3 pitch in the counterclockwise direction.
Is fitted in the rotor 73 so as to move back and forth in the direction of the center, and the actuator A described above is mounted on the lower surface of each pressing body 77 in a posture along each side of the triangle and fixed to the body 71, and the operating body 40 is Corresponding to the lower surface of the pressing body 77, application of a positive voltage and application of a negative voltage to the actuators A at positions I, II and III are repeated in a fixed cycle to move each pressing body 77 counterclockwise. Drive the rotor sequentially
Since 73 can be rotated counterclockwise intermittently by 1/3 pitch and the actuator A is installed along the circumferential direction of the body 71, the axial direction of the stepping motor is different from that of the first embodiment. The size of can be made small.

In the first and second embodiments, the outer peripheral teeth 57 and 74 are in the shape of an isosceles triangle and are formed on both sides with slopes. It is possible to rotate the rotors 56 and 73 clockwise in 1/3 pitch increments by sequentially driving the rotor 56 and 73.
When it is sufficient to rotate the gears 73 and 73 only in one direction, the outer peripheral teeth 57 and 74 may have a sawtooth shape having a slope only on one side, and the number of the feed teeth 61 and 78 may be two or more. .

Structure and Effect of the Invention As specifically described in the above embodiments, the actuator using the laminated piezoelectric ceramic of the present invention as a drive source has a chevron shape whose base is a substantially central portion in the longitudinal direction. A long and narrow elastic plate bent in parallel and a long and thin laminated piezoelectric ceramic in which a large number of piezoelectric ceramics whose thickness is changed by application of a voltage are stacked are arranged in parallel in parallel, and one end of the elastic plate is provided on the base. The elastic plate and the laminated piezoelectric ceramic are brought into contact with one end in the same direction of the laminated piezoelectric ceramic through an insertion body which is not expandable and contractible in the axial direction and is disposed in the substantially U-shaped passage, and which is in the same direction. The other end of each of the abutting portions provided on the base, or the other end of the laminated piezoelectric ceramic or one end of the laminated piezoelectric ceramic that is substantially parallel to the laminated piezoelectric ceramic. Hit the striking part The other end of the other laminated piezoelectric ceramic in contact with the same direction is brought into contact with the base body through another interposer installed in another passage provided separately from the passage, and the laminated piezoelectric ceramic, or An actuator that engages with the apex of the elastic plate by the reciprocating motion of the apex of the elastic plate caused by expansion and contraction of the laminated piezoelectric ceramic and the other laminated piezoelectric ceramic in a direction substantially perpendicular to the length direction of the elastic plate. The purpose is to drive the actuator, and the actuator can be reciprocally driven with a displacement amount that is an amplification of the displacement amount of the laminated piezoelectric ceramic in a direction perpendicular to the length direction of the laminated piezoelectric ceramic. Unlike the previously proposed actuator, it is not necessary to incline the laminated piezoelectric ceramic obliquely with respect to the reciprocating direction of the operating body, and it is not necessary to store the laminated piezoelectric ceramic in the cylinder, so it is small in size. To In addition to being able to stop, there is no sound of friction between the conventional laminated piezoelectric ceramic and the operating body and the base body, so it can be operated quietly, and it is elastic even if an impact force is applied to the operating body. The elastic force of the plate itself is absorbed, the impact force is not transmitted to the laminated piezoelectric ceramic, and there is no danger of being damaged, and the effect that the durability of the actuator can be enhanced is exerted, and the laminated piezoelectric ceramic of the present invention is driven. A stepping motor using an actuator as a power source rotatably supports a rotor, which has a large number of teeth having slopes on one side or both sides on the outer peripheral surface, in a cylindrical body, and the inner peripheral surface of the body is rotatably supported. , A plurality of pressing bodies that have engaging portions that engage with the teeth and that are free to move back and forth in the center direction of the rotor are provided with different phases of the engaging portions with respect to the teeth. In both cases, a slender elastic plate bent in a mountain shape with the apex at the approximate center in the length direction and a slender laminated piezoelectric ceramic in which a number of piezoelectric ceramics whose thickness changes by the application of a voltage are stacked are arranged in parallel. Of the laminated piezoelectric ceramics through an interposer which has one end of the elastic plate and which is not expandable and contractible in the axial direction and which is installed in a substantially U-shaped passage provided in the base. The elastic plate and the other end of the laminated piezoelectric ceramic are brought into contact with one end in the same direction, and the other end of the laminated piezoelectric ceramic is brought into contact with another abutting portion provided on the base body. At the other end in the same direction of the other laminated piezoelectric ceramic which is substantially parallel to the laminated piezoelectric ceramic and has one end abutting against the other abutting portion provided on the substrate, the other provided on the substrate separately from the passage. Via another interposer installed in the passage And abut, and the reciprocating motion of the apex of the elastic plate in a direction substantially perpendicular to the longitudinal direction of the elastic plate by expansion and contraction of the laminated piezoelectric ceramic or the laminated piezoelectric ceramic and the other laminated piezoelectric ceramic. The actuator to be fixed is fixed to the body on the outside of each pressing body, the apex of the elastic plate corresponds to the outer surface of the pressing body, and the pressing body is sequentially advanced and retracted, and when the pressing body is advanced. The step of the stepping motor is characterized in that the rotor is rotated by a predetermined angle by pressing the inclined surface of the tooth by the engaging portion, and a small bulk actuator is used. It has the effect of being able to collect itself in a small volume.

[Brief description of drawings]

FIG. 1 is a sectional view of a first embodiment of an actuator of the present invention, FIG. 2 is an exploded perspective view thereof, FIG. 3 is a partially enlarged sectional view of a laminated piezoelectric ceramic, and FIG. 4 is a displacement amplification of an actuator. FIGS. 5 (a) to 5 (e) are cross-sectional views of the second to sixth embodiments of the actuator, and FIGS. 6 and 7 show the stepping motor using the actuator of the present invention. It is a partially notched front view of 1st Example and 2nd Example. A: Actuator, 1: Substrate, 10, 10a, 10b, 10c, 10d:
Laminated piezoelectric ceramic, 12: ceramic plate, 22: abutting member, 30, 30a, 30b: passage, 31, 31a, 31b: roller, 35: elastic plate, 38: fitting hole, 40: actuating body, 51, 71: Body, 56, 73:
Rotor, 57, 74: outer peripheral tooth, 60, 77: pressing body, 61, 78: feed tooth

Claims (3)

[Claims] 1. A long and narrow laminated piezoelectric ceramic in which a long and thin elastic plate bent in a mountain shape having an apex at a substantially central portion in the longitudinal direction and a large number of piezoelectric ceramics whose thickness is changed by application of a voltage are laminated on a substrate. The laminated plates are arranged in parallel in parallel with each other, and one end of the elastic plate is arranged in a substantially U-shaped passage provided in the base through an insertion body which is not expandable and contractible in the axial direction and has flexibility. Abut one end of the piezoelectric ceramic in the same direction,
The elastic plate and the other end of the laminated piezoelectric ceramic are respectively brought into contact with different abutting portions provided on the base body, or
The other end of the laminated piezoelectric ceramic or the other end in the same direction of the other laminated piezoelectric ceramic which is in parallel with the laminated piezoelectric ceramic and has one end abutting another abutting portion provided on the substrate The laminated piezoelectric ceramics or the laminated piezoelectric ceramics and the other laminated piezoelectric ceramics are expanded and contracted by abutting them via another interposer installed in another passage provided separately from the above-mentioned passage. A driving source for a laminated piezoelectric ceramic, characterized in that a reciprocating motion of the apex of the elastic plate which occurs in a direction substantially perpendicular to the length direction of the elastic plate drives an actuating body engaging with the apex. Actuator 2. The laminated piezoelectric ceramic or the other laminated piezoelectric ceramic is formed by arranging a plurality of laminated piezoelectric ceramic constituents in parallel at a distance from each other to form one laminated piezoelectric ceramic constituent. Substantially U, in which the end portion in the same direction of the laminated piezoelectric ceramic structure of the next stage is provided on the base body
Characterized in that the laminated piezoelectric ceramic constituents are connected in series by contacting one end and the other end of a flexible insert which is not expandable and contractable in the axial direction and is installed in the character-shaped passage. An actuator using the laminated piezoelectric ceramic according to claim 1 as a drive source. 3. A rotor having a large number of teeth having inclined surfaces on one side or both sides provided on an outer peripheral surface thereof is rotatably supported in a cylindrical body, and the inner peripheral surface of the body is engaged with the teeth. A plurality of pressing bodies having engaging portions and free to move back and forth in the center direction of the rotor are provided with different phases with respect to the teeth of the engaging portions, and a substantially central portion in the longitudinal direction is provided. An elongated elastic plate bent in a mountain shape at the apex and an elongated laminated piezoelectric ceramic in which a large number of piezoelectric ceramics whose thickness is changed by application of a voltage are laminated are arranged in parallel to each other on a substrate, and the elastic plate of the elastic plate is formed. One end of the laminated piezoelectric ceramic is abutted against one end of the laminated piezoelectric ceramic in the same direction through an insertion member that is not expandable and contractible in the axial direction and is installed in a substantially U-shaped passage provided in the base body, and the elastic The other end of the plate and the laminated piezoelectric ceramic is connected to the base body. Abutting on each of the different abutting portions provided, or abutting on the other end of the laminated piezoelectric ceramic or one abutting end substantially parallel to the laminated piezoelectric ceramic on the base body The other end of the laminated piezoelectric ceramic of the same direction is abutted via another interposer installed in another passage provided separately from the passage to the base, and the laminated piezoelectric ceramic, or An actuator that reciprocates the apex of the elastic plate in a direction substantially perpendicular to the length direction of the elastic plate by expansion and contraction of the laminated piezoelectric ceramic and the other laminated piezoelectric ceramic is fixed to the body outside the pressing bodies. By making the apex of the elastic plate correspond to the outer surface of the pressing body, advancing and retracting the pressing body in sequence, and pressing the inclined surface of the tooth by the engaging portion when the pressing body advances. The rotor Scan Tetsu ping motor using actuator having a multilayered piezoelectric ceramic drive source, characterized in that the arrangement is rotated by a predetermined angle