JPH0783620B2 - Stepping motor using an actuator driven by a bimorph type piezoelectric ceramic - Google Patents
Stepping motor using an actuator driven by a bimorph type piezoelectric ceramicInfo
- Publication number
- JPH0783620B2 JPH0783620B2 JP60017838A JP1783885A JPH0783620B2 JP H0783620 B2 JPH0783620 B2 JP H0783620B2 JP 60017838 A JP60017838 A JP 60017838A JP 1783885 A JP1783885 A JP 1783885A JP H0783620 B2 JPH0783620 B2 JP H0783620B2
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- rotor
- piezoelectric ceramic
- teeth
- pressing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims description 53
- 238000003825 pressing Methods 0.000 claims description 57
- 230000002093 peripheral effect Effects 0.000 claims description 33
- 230000010363 phase shift Effects 0.000 claims description 6
- 230000008602 contraction Effects 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000011295 pitch Substances 0.000 description 15
- 241000282472 Canis lupus familiaris Species 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 229910052742 iron Inorganic materials 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 3
- 229910020215 Pb(Mg1/3Nb2/3)O3PbTiO3 Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、バイモルフ型圧電セラミツクを駆動源とする
アクチユエータを用いたステツピングモータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stepping motor using an actuator having a bimorph type piezoelectric ceramic as a drive source.
発明が解決しようとする問題点 従来のステツピングモータとしては、ロータの外周に複
数個の鉄片を一定ピツチで設けるとともに、ステータの
内周に、複数個の磁極をロータの鉄片に対するずれが一
定角度ずつ順次増加するように配置し、各磁極を順次に
励磁して鉄片を吸引することによりロータを一定角度ず
つ回転させるものが知られているが、このように磁力で
ロータの鉄片を吸引してロータを回転させるステツピン
グモータでは、磁極と鉄片とが、例えば歯同士がかみ合
うときのように機械的に係合するのではないから、ロー
タを回転させたときにその慣性力に抗して磁極と鉄片と
が整合する位置で確実に停止させることが困難であり、
確動性に欠ける欠点があつた。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention In a conventional stepping motor, a plurality of iron pieces are provided on the outer circumference of a rotor with a constant pitch, and a plurality of magnetic poles are provided on the inner circumference of a stator at a constant angle with respect to the iron pieces of the rotor. It is known that the rotor is rotated by a fixed angle by sequentially exciting each magnetic pole by sequentially exciting each magnetic pole and attracting iron pieces. In a stepping motor that rotates the rotor, the magnetic pole and the iron piece do not mechanically engage, for example, when teeth are engaged with each other. Therefore, when the rotor is rotated, the magnetic pole is resisted against its inertial force. It is difficult to surely stop at the position where the iron piece and the iron piece are aligned,
There was a shortcoming of lack of certainty.
そこで、本願出願人は、確動性に優れたステツピングモ
ータとして、外周面に多数の歯を設けたロータを筒形の
ボデイ内に回転自由に支持し、ボデイの内周面に、前記
歯に係合する係合部を有し、かつ、ロータの中心方向へ
の進退自由な複数の押圧体を、係合部の歯に対する位相
を異ならせて装置するとともに、前記のボデイに、電圧
の印加により厚さの変化する圧電セラミツクを多数枚積
層した積層型圧電セラミツクを駆動源として伸縮するア
クチユエータを各押圧体に対応して設け、各押圧体を順
次に前進及び後退させて、押圧体の前進時に係合部で歯
の斜面を押圧することによりロータを一定角度ずつ回転
させるようにしたものを開発して特願昭59-51371号(特
公平3-34306号)として出願したが、かかる構造のステ
ツピングモータは、ロータと押圧体の機械的係合により
ロータを回転させるのであるから上記した確動性に優
れ、しかも、圧電セラミツクは高速応答性に優れるた
め、順次に位相のずれた高周波のパルス電圧を夫々のア
クチユエータに印加することによつて、ロータを円滑に
連続回転させることができるもので、各圧電セラミツク
の厚さの変化の総和で伸縮する積層型圧電セラミツクを
駆動源とするアクチユエータは変化量が比較的小さく、
押圧体に必要なストロークを得るためには圧電セラミツ
クの積層枚数を多くしてアクチユエータの全長を長くと
る必要があり、押圧体をロータの中心方向へ進退させる
ためにロータの外周にアクチユエータを収納する大きな
スペースが必要となつてモータが大型化する不具合があ
り、また、これを回避するために、アクチユエータを押
圧体とボデイの間に押圧体の進退方向に対して斜めに傾
けて配置し、その押圧体と係合する作動端を前記進退方
向にのみ移動自由に拘束することによつて、アクチユエ
ータの変位量を増幅して押圧体を駆動する方法も考えら
れたが、構造が複雑となつて製造に手間が掛かる不具合
があり、未だ改良の余地が残されていた。Therefore, the applicant of the present application, as a stepping motor having excellent positive motion, rotatably supports a rotor having a large number of teeth on the outer peripheral surface in a cylindrical body, and the tooth on the inner peripheral surface of the body. A plurality of pressing bodies that have engaging portions that engage with each other and that are free to move back and forth in the direction of the center of the rotor are provided with different phases to the teeth of the engaging portions. An actuator that expands and contracts using a laminated piezoelectric ceramic in which a plurality of piezoelectric ceramics whose thickness changes by application is laminated as a drive source is provided corresponding to each pressing body, and each pressing body is moved forward and backward in sequence to We developed a motor that rotates the rotor by a certain angle by pressing the beveled surface of the tooth with the engaging part when moving forward, and filed it as Japanese Patent Application No. 59-51371 (Japanese Patent Publication No. 3-34306). The structure of stepping motor is low Since the rotor is rotated by the mechanical engagement of the pressing body and the pressing body, the above-mentioned accuracy is excellent, and since the piezoelectric ceramic is excellent in high-speed response, the high-frequency pulse voltages whose phases are sequentially shifted are applied to the respective actuators. Since the rotor can be smoothly and continuously rotated by applying the voltage to the actuator, the actuator driven by the laminated piezoelectric ceramic that expands and contracts according to the total change in the thickness of each piezoelectric ceramic has a relatively small amount of change. small,
In order to obtain the stroke required for the pressing body, it is necessary to increase the number of laminated piezoelectric ceramics and increase the total length of the actuator, and the actuator is housed on the outer circumference of the rotor to move the pressing body back and forth toward the center of the rotor. There is a problem that the motor becomes large due to the large space required, and in order to avoid this, the actuator is placed between the pressing body and the body at an angle with respect to the moving direction of the pressing body. A method of driving the pressing body by amplifying the displacement of the actuator by restricting the operating end that engages with the pressing body so as to move freely only in the advancing / retreating direction was also considered, but the structure is complicated. There was a problem that it took time to manufacture, and there was still room for improvement.
本発明は、叙上の点に鑑み完成されたものであつて、押
圧体を駆動するアクチユエータにバイモルフ型圧電セラ
ミツクを駆動源とするアクチユエータを用いることによ
り、ロータの確動性を保証し並びにロータの円滑な連続
回転を可能とする積層型圧電セラミツクを駆動源とする
アクチユエータを用いたステツピングモータの優れた特
徴をそのまま活かし、なおかつ、構造が簡単で小嵩にま
とめ得るステツピングモータを提供することを目的とす
る。The present invention has been completed in view of the above points, and by using an actuator that uses a bimorph type piezoelectric ceramic as a drive source for an actuator that drives a pressing body, the accuracy of the rotor is guaranteed and the rotor To provide a stepping motor that utilizes the excellent characteristics of a stepping motor that uses an actuator that uses a laminated piezoelectric ceramic that enables smooth continuous rotation as described above, and that has a simple structure and can be integrated into a small volume. The purpose is to
実施例 以下、本発明の一実施例を第1図乃至第3図に基づいて
説明する。Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.
1は中心孔2を有し、かつ、断面略正三角形の幅の狭い
筒形を成すボデイであつて、一対の脚3、3で支持され
ており、このボデイ1の中心孔2内に、筒形のロータ4
が同心に嵌装されて水平軸周りの回転自由に支持されて
おり、ロータ4の外周面に、二等辺三角形をした多数の
外周歯5が一定のピツチで連続して形成されている。Reference numeral 1 denotes a body having a center hole 2 and having a narrow tubular shape of a substantially equilateral cross section, which is supported by a pair of legs 3 and 3. In the center hole 2 of the body 1, Cylindrical rotor 4
Are fitted concentrically and are rotatably supported around a horizontal axis, and a large number of isosceles outer peripheral teeth 5 are continuously formed on the outer peripheral surface of the rotor 4 with constant pitches.
ボデイ1の内周面における三角形の各辺の中央に対応す
る位置には、ロータ4の中心を向いた3個の案内溝6が
120度間隔で形成され、各案内溝6内に、ロータ4との
対応面に前記外周歯5と同一ピツチになる複数個ずつの
送り歯8を形成した押圧体7が、滑り板9を介してロー
タ4の中心方向の進退自由に嵌装されており、これらの
送り歯8の外周歯5に対する位置関係は、外周歯5と整
合する送り歯8を基準として、その他の2個の送り歯8
が、外周歯5に対する位相のずれを1/3ピツチずつ反時
計方向に順次に増加させるようになつており、位置Iの
送り歯8aが外周歯5と整合していると、位置IIの送り歯
8bは1/3ピツチ、位置III送り歯8cは2/3ピツチ夫々外周
歯5と位相がずれている。At the position corresponding to the center of each side of the triangle on the inner peripheral surface of the body 1, three guide grooves 6 facing the center of the rotor 4 are provided.
A pressing body 7 is formed at intervals of 120 degrees, and a plurality of feed teeth 8 are formed in each guide groove 6 on the surface corresponding to the rotor 4 so as to have the same pitch as the outer peripheral teeth 5. The rotor 4 is fitted so as to move back and forth in the direction of the center, and the positional relationship of these feed teeth 8 with respect to the outer peripheral teeth 5 is based on the feed teeth 8 aligned with the outer peripheral teeth 5 and the other two feed teeth. 8
However, the phase shift with respect to the outer peripheral tooth 5 is sequentially increased counterclockwise by 1/3 pitch, and when the feed dog 8a at the position I is aligned with the outer peripheral tooth 5, the feed at the position II is fed. tooth
8b is out of phase with the 1/3 pitch, and the position III feed dog 8c is out of phase with the outer peripheral tooth 5 in each of the 2/3 pitches.
前記ボデイ1内の各押圧体7の下面には、押圧体7を駆
動するためのアクチユエータ11が、三角形の各辺に沿つ
た姿勢で装置されて固定されている。このアクチユエー
タ11は、第2図に示すように、バイモルフ型圧電セラミ
ツク12を駆動源とするものであつて、このバイモルフ型
圧電セラミツク12は、第3図に示すように、マグネシウ
ム・ニオブ酸鉛とチタン酸鉛の二成分固溶体セラミツク
{(1−X)Pb(Mg1/3Nb2/3)・O3-PbTiO3}のうちの
Xが0.35近くのものからなり、電圧の印加により伸びを
生ずる性質を持つ細長い圧電セラミツク板13の一面に、
ステンレス鋼板等の伸縮率の小さい裏板14を重ねて張り
合わせた構造になり、圧電セラミツク板13に電圧を印加
した際に、その自由な表面側と拘束された裏面側との伸
びの差によつて表面側に膨んで彎曲し、電圧の印加を除
去すると元に戻るように作用し、応答速度が極めて速
く、また、細長い板状のものを彎曲させるのであるか
ら、積層型圧電セラミツクに比べて変位量を大きく取れ
るという特徴を有しており、このバイモルフ型圧電セラ
ミツク12が基体15の上面に形成した細長い凹部16内に表
面を上にして装入され、両端に固着したローラ17、17を
円形孔18、18内に軸線周りの回転自由に嵌合して支持さ
れているとともに、このバイモルフ型圧電セラミツク12
の長さ方向の中央部に作動子20が嵌着されており、圧電
セラミツク板13の両端には第3図に示すように電極40、
41が装着されており、これらは図示しない電源にリード
線で接続されていて、圧電セラミツク板13への通電と遮
電とをくり返すことによつて、バイモルフ型圧電セラミ
ツク12が鎖線に示す彎曲と実線に示す自由状態への復帰
をくり返し、これによつて、作動子20が鎖線位置と実線
位置の間で往復運動するようになつている。Actuators 11 for driving the pressing bodies 7 are installed and fixed to the lower surface of each pressing body 7 in the body 1 in a posture along each side of the triangle. As shown in FIG. 2, the actuator 11 uses a bimorph-type piezoelectric ceramic 12 as a driving source, and the bimorph-type piezoelectric ceramic 12 includes magnesium-niobate lead as shown in FIG. It consists of lead titanate binary solution ceramics {(1-X) Pb (Mg 1/3 Nb 2/3 ) O 3 -PbTiO 3 } in which X is close to 0.35. On one surface of the elongated piezoelectric ceramic plate 13 having the property to occur,
It has a structure in which a back plate 14 having a small expansion / contraction rate such as a stainless steel plate is laminated and bonded to each other, and when a voltage is applied to the piezoelectric ceramic plate 13, a difference in elongation between the free front surface side and the restrained back surface side is caused. Then, it swells and bends to the surface side, it returns to its original state when the voltage application is removed, the response speed is extremely fast, and it bends an elongated plate-shaped object, so compared to the laminated piezoelectric ceramics. The bimorph type piezoelectric ceramic 12 has a feature that a large amount of displacement can be taken, and the bimorph type piezoelectric ceramic 12 is loaded with the surface upward in an elongated recess 16 formed on the upper surface of the substrate 15, and the rollers 17 and 17 fixed to both ends are provided. The bimorph-type piezoelectric ceramic 12 is fitted and supported in the circular holes 18 and 18 so as to freely rotate around the axis.
An actuator 20 is fitted in the central portion in the longitudinal direction of the piezoelectric ceramic plate 13, and electrodes 40, 40 are provided on both ends of the piezoelectric ceramic plate 13 as shown in FIG.
41 are attached, and these are connected to a power source (not shown) by a lead wire, and by repeatedly energizing and insulating the piezoelectric ceramic plate 13, the bimorph type piezoelectric ceramic 12 has a curve shown by a chain line. And the return to the free state shown by the solid line is repeated, whereby the actuator 20 reciprocates between the chain line position and the solid line position.
このアクチユエータ11が、前記のように作動子20を押圧
体7の下面に対応させて装置され、作動子20の前進によ
り押圧体7をその送り歯8がロータ4の外周歯5とかみ
合う位置まで前進させるようになつており、また、各押
圧体7に内接するようにして、図示しない押圧体7の復
帰用の弾性リングが嵌合されている。The actuator 11 is provided with the actuator 20 corresponding to the lower surface of the pressing body 7 as described above, and the forward movement of the actuator 20 moves the pressing body 7 to the position where the feed dog 8 of the pressing body 7 meshes with the outer peripheral teeth 5 of the rotor 4. An elastic ring (not shown) for returning the pressing body 7 is fitted so as to be inwardly in contact with each pressing body 7.
なお、上記のバイモルフ型圧電セラミツク12には、第5
図に示すように2枚の圧電セラミツク板13を張り合わ
せ、電極40、41により電圧を印加することにより一方の
圧電セラミツク板13が伸び、他方の圧電セラミツク板13
が縮んで曲率を変化させるようにしたものを用いてもよ
い。In addition, the above-mentioned bimorph type piezoelectric ceramic 12 has a fifth
As shown in the figure, two piezoelectric ceramic plates 13 are attached to each other, and one piezoelectric ceramic plate 13 is expanded by applying a voltage by the electrodes 40 and 41, and the other piezoelectric ceramic plate 13 is expanded.
It is also possible to use the one that contracts to change the curvature.
次に、本実施例の作用について説明する。Next, the operation of this embodiment will be described.
第1図に示すように、位置Iの押圧体7が前進して送り
歯8aが外周歯5とかみ合つている状態において、送り歯
8bが外周歯5に対して1/3ピツチ位相がずれている隣り
のアクチユエータ11に通電するとともに、位置Iのアク
チユエータ11の通電を遮断すると、位置IIの押圧体7が
前進するとともに、位置Iの押圧体7が弾性リングの弾
力で後退し、上記のように、位置IIの送り歯8bは外周歯
5に対して1/3ピツチ位相がずれていて、送り歯8bの歯
先が外周歯5の時計方向の前側の斜面に対応しているこ
とから、送り歯8bの前進行程でその歯先が外周歯5の斜
面を押して、ロータ4を反時計方向に1/3ピツチ回転さ
せ、この状態では、その隣りの位置IIIの送り歯8cが外
周歯5に対して1/3ピツチ位相がずれているから、引続
いて、位置IIIのアクチユエータ11に通電して送り歯8c
を前進させ、位置IIのアクチユエータ11の通電を遮断し
て送り歯8bを後退させることによつて、ロータ4が再び
1/3ピツチ同方向に回転する。As shown in FIG. 1, when the pressing body 7 at the position I is advanced and the feed dog 8a is engaged with the outer peripheral tooth 5, the feed dog is moved.
When 8b energizes the adjacent actuator 11 whose phase is shifted by 1/3 pitch with respect to the outer peripheral tooth 5 and cuts off energization of the actuator 11 at the position I, the pressing body 7 at the position II moves forward and the position I The pressing body 7 of 6 moves backward by the elastic force of the elastic ring, and as described above, the feed dog 8b at the position II is out of phase by 1/3 pitch with respect to the outer peripheral tooth 5, and the tip of the feed tooth 8b is the outer peripheral tooth. Since it corresponds to the clockwise front slope of No. 5, the tooth tip pushes the slope of the outer peripheral tooth 5 in the forward movement of the feed dog 8b to rotate the rotor 4 counterclockwise by 1/3 pitch. In this state, the feed dog 8c adjacent to the position III is out of phase with the outer peripheral tooth 5 by 1/3 pitch, so that the actuator 11 at the position III is continuously energized to feed dog 8c.
By moving the actuator 11 at the position II off and turning the feed dog 8b backward.
1/3 pitch Rotate in the same direction.
このように、位置I、II及びIIIのアクチユエータ11に
対して通電と遮電とを一定のサイクルで繰り返すことに
よつて、ロータ4を反時計方向に1/3ピツチずつ間欠回
転させることができ、所定の送状り歯8が外周歯5とか
み合つたところで、そのアクチユエータ11の通電状態に
保持すれば、ロータ4を任意の回転角度で停止させるこ
とができる。As described above, the rotor 4 can be intermittently rotated counterclockwise by 1/3 pitch by repeating energization and interruption in the actuators 11 at the positions I, II, and III in a constant cycle. When the predetermined sending tooth 8 meshes with the outer peripheral tooth 5, if the actuator 11 is kept in the energized state, the rotor 4 can be stopped at an arbitrary rotation angle.
また、押圧体7をバイモルフ型圧電セラミツク12を使用
したアクチユエータ11で駆動するようになつており、こ
のバイモルフ型圧電セラミツク12は高速応答性に優れて
いるから、アクチユエータ11に順次に位相のずれた高周
波のパルス電圧を印加することにより、ロータ4を円滑
に連続回転させることができ、また、このバイモルフ型
圧電セラミツク12は、板状のものが曲率を変えるように
彎曲するのであつて、作動子20の変化量を大きく取るこ
とができるため、積層型圧電セラミツクを駆動源とする
アクチユエータを用いた場合のように、押圧体7に必要
なストロークを得るために、全長を長く取つたアクチユ
エータをロータ4の中心方向に向けて押圧体7の下面に
装置することによるモータの大型化、あるいは、アクチ
ユエータを押圧体7の往復動方向に対して斜めに傾けて
装置することによる構造の複雑化を回避することができ
る。Further, the pressing body 7 is driven by an actuator 11 using a bimorph type piezoelectric ceramic 12, and since the bimorph type piezoelectric ceramic 12 is excellent in high-speed response, the phase is sequentially shifted to the actuator 11. By applying a high-frequency pulse voltage, the rotor 4 can be smoothly and continuously rotated. Further, the bimorph type piezoelectric ceramic 12 is curved so that the plate-shaped one changes its curvature. Since a large amount of change of 20 can be taken, the actuator with a long overall length is used to obtain the stroke required for the pressing body 7 as in the case of using an actuator using a laminated piezoelectric ceramic as a drive source. 4 is installed on the lower surface of the pressing body 7 in the direction of the center of the motor 4, or the size of the motor is increased, or an actuator is attached to the pressing body 7. It is possible to avoid the complication of the structure due to device to be inclined obliquely with respect to the backward direction.
第4図は本発明の他の実施例を示し、このステツピング
モータは、ボデイ31が、中心孔32を有し、かつ、外周面
の全長にわたつて60度の間隔で6個の膨出部33を放射状
に突設した断面星形の軸線方向に細長い筒状をなし、そ
の中心孔32内に、前記実施例と同様に、外周面に外周歯
35を連続して形成したロータ34が水平軸周りの回転自由
に支持され、各膨出部33の内周面に、ロータ34の中心を
向いた案内溝36が全長にわたつて形成され、各案内溝36
内に、互いに向き合う2個で対を成し、外周歯35に対す
る位相のずれが反時計方向に1/3ピツチずつ順次に増加
する送り歯38をロータ34との対応面に形成した押圧体37
が、ロータ33の中心方向の進退自由に嵌装され、各押圧
体37の下面に、前記したバイモルフ型圧電セラミツク12
を駆動源とするアクチユエータ11がボデイ31の軸線方向
に沿つて装置されて固定され、作動子20が押圧体37の下
面に対応されており、互いに向き合う位置IとIV、位置
IIとV及び位置IIIとVIのアクチユエータ11に対して通
電と遮電とを一定のサイクルでくり返して、互いに向き
合う押圧体37を反時計方向に順次に駆動することによ
り、ロータ34を反時計方向に1/3ピツチずつ間欠回転さ
せることができ、互いに向き合う2個の押圧体37の送り
歯38でロータ34の外周歯35を押圧してロータ34を駆動す
るようにしたから、大きな駆動力が得られるとともに、
外周歯35を押したときにロータ34に曲げモーメントが作
用しない利点を有する。FIG. 4 shows another embodiment of the present invention. In this stepping motor, a body 31 has a central hole 32, and six bulges are formed at intervals of 60 degrees over the entire length of the outer peripheral surface. In the axial direction of the star-shaped cross section in which the portions 33 are radially projected, a long and slender tubular shape is formed.
A rotor 34 formed by continuously forming 35 is rotatably supported around a horizontal axis, and a guide groove 36 facing the center of the rotor 34 is formed over the entire length on the inner peripheral surface of each bulging portion 33. Guide groove 36
A pressing body 37 is formed on the surface corresponding to the rotor 34, in which two feed teeth 38 which face each other and whose phase shift with respect to the outer peripheral teeth 35 sequentially increases counterclockwise by 1/3 pitch are formed.
Is fitted in the rotor 33 so as to move back and forth in the center direction, and the above-mentioned bimorph type piezoelectric ceramics 12 are attached to the lower surface of each pressing body 37.
An actuator 11 having a drive source as a drive source is installed and fixed along the axial direction of the body 31, and the actuator 20 corresponds to the lower surface of the pressing body 37.
The rotor 11 is rotated counterclockwise by repeatedly energizing and blocking the actuators 11 at positions II and V and positions III and VI in a fixed cycle, and sequentially driving the pressing bodies 37 facing each other in the counterclockwise direction. It is possible to rotate the rotor 34 intermittently by 1/3 pitch and to drive the rotor 34 by pressing the outer peripheral teeth 35 of the rotor 34 with the feed teeth 38 of the two pressing bodies 37 facing each other. As well as getting
This has the advantage that no bending moment acts on the rotor 34 when the outer peripheral teeth 35 are pushed.
なお、上記各実施例では、外周歯5及び35が二等辺三角
形になつていて、両側に斜面が形成されているから、押
圧体7及び37を各実施例とは逆に時計方向に順次駆動す
ると、ロータ4及び34を時計方向に1/3ピツチずつ回転
させることができるのであるが、ロータ4及び34を一方
向にのみ回転させれば良いときには、外周歯5及び35を
一側にのみ斜面を有する鋸歯状としても良く、さらに、
送り歯8及び38の装置個数は2個以上任意である。In each of the above-mentioned embodiments, since the outer peripheral teeth 5 and 35 are in an isosceles triangle and the slopes are formed on both sides, the pressing bodies 7 and 37 are sequentially driven in the clockwise direction contrary to the respective embodiments. Then, the rotors 4 and 34 can be rotated clockwise by 1/3 pitch at a time. However, when it is sufficient to rotate the rotors 4 and 34 in only one direction, the outer peripheral teeth 5 and 35 can be rotated only in one side. It may be serrated with a slope, and
The number of devices of the feed dogs 8 and 38 may be two or more.
発明の構成及び作用効果 上記実施例によつて具体的に説明したように、本発明の
バイモルフ型圧電セラミツクを駆動源とするアクチユエ
ータを用いたステツピングモータは、一側若しくは両側
に斜面を有する多数の歯を外周面に設けたロータを筒形
のボデイ内に回転自由に支持し、該ボデイの内周面に前
記歯に係合する係合部を有し、かつ、前記ロータの中心
方向への進退自由な複数の押圧体を、前記係合部の前記
歯に対する位相を異ならせて装置するとともに、電圧の
印加により伸長する細長い圧電セラミツク板の一面に金
属板等の伸縮率の小さい裏板を張着して、前記圧電セラ
ミツク板の伸長復帰により曲率が変化するか、または、
電圧の印加により一方が伸長し他方が収縮する圧電セラ
ミツク板同士を張り合わせて、該両圧電セラミツク板の
伸縮復帰により曲率が変化するバイモルフ型圧電セラミ
ツクの曲率の変化により長さ方向の中央部に装着された
作動子を往復運動させるアクチユエータを前記各押圧体
の外側において前記ボデイに固定して前記作動子を前記
押圧体の外面に対応し、前記各アクチユエータに順次に
位相のずれた電圧を印加することにより前記押圧体を順
次に前進及び後退させて、該押圧体の前進時に前記係合
部で前記歯の斜面を押圧することにより前記ロータを一
定角度ずつ回転させる構成としたことを要旨とするもの
であつて、ロータの歯と位相がずれた位置にある押圧体
の係合部が直接に歯の斜面を押してロータを回転させる
のであるからロータを一定角度ずつ確実に回転させるこ
とができるとともに、ロータの歯と押圧体の係合部との
機械的な係合でロータの回転を停止させるのであるか
ら、ロータを任意の回転角度で確実に止めることがで
き、また、高速応答性に優れたバイモルフ型圧電セラミ
ツクを使用したアクチユエータで各押圧体を駆動するよ
うにしたから、順次に位相のずれた高周波のパルス電圧
を夫々のアクチユエータに印加することによつて、ロー
タを円滑に連続回転させることができ、しかも、バイモ
ルフ型圧電セラミツクは、板状のものが曲率を変えるよ
うに変形するのであつて、作動子の変位量を大きく取る
ことができるから、積層型圧電セラミツクを駆動源とす
るアクチユエータを用いた場合のように、押圧体に必要
なストロークを得るために、全長を長く取つたアクチユ
エータをロータの中心に向けて押圧体の下面に装置した
り、あるいは、アクチユエータを押圧体の往復動方向に
対して斜めに傾けて装置する複雑な構造とする必要がな
く、ステツピングモータの小型化及び構造の簡単化を計
ることができる効果を奏する。As described in detail with reference to the above embodiments, a stepping motor using an actuator having a bimorph type piezoelectric ceramic of the present invention as a driving source has a large number of slopes on one side or both sides. A rotor provided with teeth on its outer peripheral surface is rotatably supported in a cylindrical body, and has an engaging portion for engaging the teeth on the inner peripheral surface of the body, Of a plurality of pressing bodies that can freely move back and forth with different phases of the engaging portions with respect to the teeth, and a back plate with a small expansion / contraction rate such as a metal plate on one surface of an elongated piezoelectric ceramic plate that expands when a voltage is applied. And the curvature changes due to the extension and return of the piezoelectric ceramic plate, or
Piezoelectric ceramic plates, one of which expands and the other of which contracts when a voltage is applied, are attached to each other, and the curvature changes when the piezoelectric ceramic plates expand and contract and are mounted at the center in the longitudinal direction due to the change in the curvature of the bimorph piezoelectric ceramic. An actuator for reciprocating the operated actuator is fixed to the body on the outside of each of the pressing bodies, the actuator corresponds to the outer surface of the pressing body, and a voltage having a phase shift is sequentially applied to each of the actuators. In this way, the pressing body is sequentially advanced and retracted, and when the pressing body is advanced, the engaging portion presses the inclined surface of the tooth to rotate the rotor by a constant angle. However, since the engaging portion of the pressing body, which is out of phase with the teeth of the rotor, directly pushes the inclined surface of the teeth to rotate the rotor. Can be reliably rotated by a fixed angle, and rotation of the rotor is stopped by mechanical engagement between the teeth of the rotor and the engaging portion of the pressing body, so that the rotor can be reliably rotated at any rotation angle. Since each actuator is driven by an actuator that uses a bimorph type piezoelectric ceramic that can be stopped and has excellent high-speed response, a high-frequency pulse voltage with a phase shift is sequentially applied to each actuator. As a result, the rotor can be smoothly and continuously rotated, and the bimorph type piezoelectric ceramic deforms so that the plate-shaped one changes its curvature, and thus the displacement of the actuator can be made large. Therefore, as in the case of using an actuator that uses a laminated piezoelectric ceramic as a drive source, the total length must be long to obtain the stroke required for the pressing body. It is not necessary to mount the actuator on the lower surface of the pressing body toward the center of the rotor or to tilt the actuator obliquely with respect to the reciprocating direction of the pressing body to form a complicated structure. This has the effect of achieving downsizing and simplification of the structure.
第1図は本発明の一実施例の一部切欠正面図、第2図は
アクチユエータの拡大断面図、第3図はバイモルフ型圧
電セラミツクの部分拡大斜視図であり、第4図は本発明
の他の実施例の一部切欠正面図であり、第5図は他のバ
イモルフ型圧電セラミツクの部分拡大斜視図である。 1、31:ボデイ、4、34:ロータ、5、35:外周歯、7、3
7:押圧体、8、38:送り歯、11:アクチユエータ、12:バ
イモルフ型圧電セラミツク、13:圧電セラミツク板、14:
裏板、20:作動子、40、41:電極1 is a partially cutaway front view of an embodiment of the present invention, FIG. 2 is an enlarged sectional view of an actuator, FIG. 3 is a partially enlarged perspective view of a bimorph type piezoelectric ceramic, and FIG. FIG. 5 is a partially cutaway front view of another embodiment, and FIG. 5 is a partially enlarged perspective view of another bimorph type piezoelectric ceramic. 1, 31: Body, 4, 34: Rotor, 5, 35: Peripheral teeth, 7, 3
7: Pressing body, 8, 38: Feed dog, 11: Actuator, 12: Bimorph type piezoelectric ceramic, 13: Piezoelectric ceramic plate, 14:
Back plate, 20: Actuator, 40, 41: Electrode
Claims (2)
を外周面に設けたロータを筒形のボデイ内に回転自由に
支持し、該ボデイの内周面に前記歯に係合する係合部を
有し、かつ、前記ロータの中心方向への進退自由な複数
の押圧体を、前記係合部の前記歯に対する位相を異なら
せて装置するとともに、電圧の印加により伸長する細長
い圧電セラミツク板の一面に金属板等の伸縮率の小さい
裏板を張着して、前記圧電セラミツク板の伸長復帰によ
り曲率が変化するバイモルフ型圧電セラミツクの曲率の
変化により長さ方向の中央部に装着された作動子を往復
運動させるアクチユエータを前記各押圧体の外側におい
て前記ボデイに固定して前記作動子を前記押圧体の外面
に対応し、前記各アクチユエータに順次に位相のずれた
電圧を印加することにより前記押圧体を順次に前進及び
後退させて、該押圧体の前進時に前記係合部で前記歯の
斜面を押圧することにより前記ロータを一定角度ずつ回
転させる構成としたことを特徴とするバイモルフ型圧電
セラミツクを駆動源とするアクチユエータを用いたステ
ツピングモータ。1. A rotor for rotatably supporting a rotor having a large number of teeth having inclined surfaces on one side or both sides on an outer peripheral surface thereof, the inner peripheral surface of the body engaging with the teeth. A plurality of pressing bodies having joint portions and free to move back and forth in the center direction of the rotor are provided with different phases of the engaging portions with respect to the teeth, and are elongated piezoelectric ceramics which are extended by applying a voltage. A back plate having a small expansion / contraction ratio such as a metal plate is attached to one surface of the plate, and the piezoelectric ceramic plate is mounted at the central portion in the longitudinal direction due to the change in the curvature of the bimorph type piezoelectric ceramic whose curvature is changed by the extension return. An actuator for reciprocating the actuator is fixed to the body on the outside of each of the pressing bodies, the actuator corresponds to the outer surface of the pressing body, and voltages having a phase shift are sequentially applied to each of the actuators. The bimorph is configured so that the pressing body is sequentially advanced and retracted by the above, and when the pressing body is advanced, the engaging portion presses the inclined surface of the tooth to rotate the rotor by a constant angle. Type stepping motor using an actuator that uses a piezoelectric ceramic as a drive source.
を外周面に設けたロータを筒形のボデイ内に回転自由に
支持し、該ボデイの内周面に前記歯に係合する係合部を
有し、かつ、前記ロータの中心方向への進退自由な複数
の押圧体を、前記係合部の前記歯に対する位相を異なら
せて装置するとともに、電圧の印加により一方が伸長し
他方が収縮する圧電セラミツク板同士を張り合わせて、
該両圧電セラミツク板の伸縮復帰により曲率が変化する
バイモルフ型圧電セラミツクの曲率の変化により長さ方
向の中央部に装着された作動子を往復運動させるアクチ
ユエータを前記各押圧体の外側において前記ボデイに固
定して前記作動子を前記押圧体の外面に対応し、前記各
アクチユエータに順次に位相のずれた電圧を印加するこ
とにより前記押圧体を順次に前進及び後退させて、該押
圧体の前進時に前記係合部で前記歯の斜面を押圧するこ
とにより前記ロータを一定角度ずつ回転させる構成とし
たことを特徴とするバイモルフ型圧電セラミツクを駆動
源とするアクチユエータを用いたステツピングモータ。2. A rotor for rotatably supporting a rotor having a large number of teeth having inclined surfaces on one side or both sides on an outer peripheral surface thereof, the inner peripheral surface of the body engaging with the teeth. A plurality of pressing bodies that have a joint portion and are free to move back and forth in the center direction of the rotor are provided with different phases with respect to the teeth of the engaging portion, and one of them is extended by applying a voltage and the other is extended. The piezoelectric ceramic plates that contract
An actuator that reciprocates an actuator mounted in the central portion in the longitudinal direction by the change of the curvature of the bimorph type piezoelectric ceramic whose curvature is changed by the expansion and contraction return of both the piezoelectric ceramic plates is attached to the body outside the pressing bodies. The actuator is fixed to correspond to the outer surface of the pressing body, and the pressing body is sequentially advanced and retracted by applying voltages having a phase shift to each of the actuators, and when the pressing body is advanced. A stepping motor using an actuator using a bimorph type piezoelectric ceramic as a drive source, characterized in that the rotor is rotated by a predetermined angle by pressing the inclined surface of the tooth with the engaging portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60017838A JPH0783620B2 (en) | 1985-01-31 | 1985-01-31 | Stepping motor using an actuator driven by a bimorph type piezoelectric ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60017838A JPH0783620B2 (en) | 1985-01-31 | 1985-01-31 | Stepping motor using an actuator driven by a bimorph type piezoelectric ceramic |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61177178A JPS61177178A (en) | 1986-08-08 |
| JPH0783620B2 true JPH0783620B2 (en) | 1995-09-06 |
Family
ID=11954820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60017838A Expired - Lifetime JPH0783620B2 (en) | 1985-01-31 | 1985-01-31 | Stepping motor using an actuator driven by a bimorph type piezoelectric ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0783620B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6437485B1 (en) | 2000-12-20 | 2002-08-20 | Piezomotor Uppsala Ab | Double bimorph electromechanical element |
-
1985
- 1985-01-31 JP JP60017838A patent/JPH0783620B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61177178A (en) | 1986-08-08 |
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