JPH06103261B2 - Absorption spectrometer - Google Patents
Absorption spectrometerInfo
- Publication number
- JPH06103261B2 JPH06103261B2 JP33578987A JP33578987A JPH06103261B2 JP H06103261 B2 JPH06103261 B2 JP H06103261B2 JP 33578987 A JP33578987 A JP 33578987A JP 33578987 A JP33578987 A JP 33578987A JP H06103261 B2 JPH06103261 B2 JP H06103261B2
- Authority
- JP
- Japan
- Prior art keywords
- cell
- signal
- gas
- detector
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010521 absorption reaction Methods 0.000 title claims description 18
- 239000012530 fluid Substances 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 14
- 238000009499 grossing Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 6
- 230000001360 synchronised effect Effects 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007797 non-conventional method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、マルチ流体変調方式(これは本発明者らの名
付けた名称である)という従来になかった特異な手法を
採用することによって、ただ1個の検出器を用いるだけ
でありながら、サンプルガス中の特定の測定対象成分の
濃度を低濃度から高濃度まで精度よく測定できるように
した吸光分析計に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention adopts a unique non-conventional method called a multi-fluid modulation method (this is the name named by the present inventors). The present invention relates to an absorption spectrometer capable of accurately measuring the concentration of a specific measurement target component in a sample gas from a low concentration to a high concentration while using only one detector.
尚、上記マルチ流体変調方式による流体分析方法につい
ては、本願出願人が昭和62年12月11日付にて特許出願し
ているところである。The applicant of the present application has filed a patent application for the fluid analysis method using the multi-fluid modulation method on December 11, 1987.
例えば赤外線ガス分析計等の吸光分析計は、光源から赤
外線をセル内に入射し、セル内のサンプルガスによる吸
光度合いを測定し、サンプルガス中の特定の測定対象成
分の濃度を測定するものである。そして、この種の分析
計はランバート・ベールの法則を基礎原則とするもので
あって、入射光をI0,セル長をl,測定波長と測定対象成
分によって定まる吸光度係数をk,測定対象成分の濃度を
Cとすると、透過光Iは、 I=I0 e-kcl なる式で表される。For example, an absorption spectrometer such as an infrared gas analyzer is one in which infrared rays are incident on a cell from a light source, the degree of absorption by the sample gas in the cell is measured, and the concentration of a specific measurement target component in the sample gas is measured. is there. This type of analyzer is based on Lambert-Beer's law as a basic principle. The incident light is I 0 , the cell length is l, the absorption coefficient determined by the measurement wavelength and the measurement target component is k, and the measurement target component is k. Letting the density of C be C, the transmitted light I is expressed by the following formula: I = I 0 e −kcl .
従って、吸光分析計における測定対象成分の濃度と出力
との関係は、第3図に示すように、測定対象成分の濃度
が高くなるに従って出力を表す曲線の曲がりが大きくな
る。このため、第3図における直線に近い部分を使用し
て測定精度を向上させるために、従来においては、測定
対象成分の濃度が高い(大きい)ときはセル長の短かい
ものを用い、また、前記濃度が低い(小さい)ときはセ
ル長の長いものを用いて、セルを使い分けるようにして
いた。Therefore, as for the relationship between the concentration of the measurement target component and the output in the absorption spectrometer, as the concentration of the measurement target component increases, the curve of the curve representing the output increases. Therefore, in order to improve the measurement accuracy by using the portion close to the straight line in FIG. 3, conventionally, when the concentration of the measurement target component is high (large), the cell length is short, and When the concentration is low (small), a cell having a long cell length is used to selectively use the cell.
しかしながら、上記のようにセルを使い分けるために
は、セル長の異なるセルを何種類も用意する必要があ
り、又、排ガス等濃度変化が大きいサンプルガスの測定
の場合には、上記セルの使い分けによっては連続的に測
定することができないといった欠点がある。However, in order to properly use the cells as described above, it is necessary to prepare many kinds of cells having different cell lengths, and in the case of measuring a sample gas having a large concentration change of exhaust gas, etc. Has the drawback that it cannot be measured continuously.
本発明は、上述の事柄に留意してなされたもので、その
目的とするところは、セル長の異なるセルを何種類も用
意する必要がなく、又、濃度変化が大きいサンプルガス
の測定に有効な、低濃度から高濃度に亘って連続的に測
定することができる測定濃度範囲が広い吸光分析計を提
供することにある。The present invention has been made with the above matters in mind, and its object is to eliminate the need to prepare any number of cells having different cell lengths, and to measure sample gas with large concentration changes. It is another object of the present invention to provide an absorption spectrometer with a wide measurement concentration range capable of continuously measuring from low concentration to high concentration.
上述の目的を達成するため、本発明に係る吸光分析計
は、光源と検出器との間にセル長が互いに異なる2つの
セルを互いに直列に設け、これら2つのセルに対してサ
ンプルガスと比較ガスとを、一定周期で同時かつ連続的
に切り換え供給する流体変調手段を前記各セルに対して
1つずつ設け、これら2つの流体変調手段によるサンプ
ルガスと比較ガスとの変調周波数が互いに異なるように
し、前記検出器からの出力信号を、前記各セルに対する
各変調周波数の信号成分に分離してそれぞれ整流及び平
滑化することによりサンプルガス中の測定対象成分の濃
度を低濃度から高濃度まで測定できるようにしてある。In order to achieve the above-mentioned object, the absorption spectrometer according to the present invention is provided with two cells having different cell lengths in series between a light source and a detector and comparing these two cells with a sample gas. One fluid modulation means is provided for each of the cells to switch the gas simultaneously and continuously in a constant cycle, and the modulation frequencies of the sample gas and the comparison gas by these two fluid modulation means are different from each other. The output signal from the detector is separated into signal components of each modulation frequency for each cell and rectified and smoothed respectively to measure the concentration of the component to be measured in the sample gas from low concentration to high concentration. I can do it.
上記構成によれば、2つのセルに共通に設けられた1つ
の検出器からはそれぞれのセルに対応する2つの信号成
分が重畳した状態の出力信号が出力される。そして、こ
れら両信号成分は相異なる周波数で変調されているの
で、前記検出器からの出力信号を各セルに対する各変調
周波数の信号成分に分離してそれぞれ整流及び平滑化す
ることにより、サンプルガス中の測定対象成分の濃度を
低濃度から高濃度まで測定することができ、上記目的は
完全に達成される。According to the above configuration, an output signal in a state in which two signal components corresponding to the respective cells are superposed is output from one detector provided in common to the two cells. Since both of these signal components are modulated at different frequencies, the output signal from the detector is separated into signal components of each modulation frequency for each cell and rectified and smoothed, respectively, in the sample gas. The concentration of the component to be measured can be measured from a low concentration to a high concentration, and the above object is completely achieved.
以下、本発明の一実施例を、第1図及び第2図を参照し
ながら説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
第1図は、本発明に係る吸光分析計としての赤外線ガス
分析計の一例を示し、同図において、1,2は互いに直列
に配置されたセル長が互いに異なるセル(以下、長セル
1,短セル2という)で、赤外線発生用の光源3と検出器
4との間に設けられている。FIG. 1 shows an example of an infrared gas analyzer as an absorption spectrometer according to the present invention. In FIG. 1, 1 and 2 are cells that are arranged in series and have different cell lengths (hereinafter, long cells).
1, short cell 2), which is provided between the light source 3 for infrared radiation and the detector 4.
検出器4は例えばコンデンサマイクロホン型検出器より
なり、その内部には測定対象成分と同じガス又は測定対
象成分の特性吸収波長と略同じ波長に吸収帯域を有する
ガスが封入してある。The detector 4 is, for example, a condenser microphone type detector, and the same gas as the component to be measured or a gas having an absorption band at a wavelength substantially the same as the characteristic absorption wavelength of the component to be measured is enclosed in the detector 4.
5,6は長セル1,短セル2に対してそれぞれサンプルガス
Sと比較ガスRとを一定周期で同時かつ連続的に切り換
え供給する流体変調手段で、例えばロータリバルブより
なる。そして、これら流体変調手段5,6によるサンプル
ガスSと比較ガスRとの変調周波数が互いに異なるよう
にしてあり、例えば流体変調手段5の変調周波数は1ヘ
ルツであり、流体変調手段6のそれは2ヘルツである。
従って、上記変調周波数を有する流体変調手段5,6によ
って、サンプルガスSと比較ガスRとを長セル1,短セル
2に供給した場合、検出器4からは、長セル1に対する
変調周波数付近の帯域の信号と短セル2に対する変調周
波数付近の帯域の信号とが重畳された出力信号Aが出力
される。Reference numerals 5 and 6 denote fluid modulators for switching the sample gas S and the reference gas R to the long cell 1 and the short cell 2, respectively, simultaneously and continuously at a constant cycle, and are composed of, for example, rotary valves. The modulation frequencies of the sample gas S and the comparison gas R by the fluid modulation means 5 and 6 are different from each other. For example, the modulation frequency of the fluid modulation means 5 is 1 hertz and that of the fluid modulation means 6 is 2 Hz. Hertz.
Therefore, when the sample gas S and the comparison gas R are supplied to the long cell 1 and the short cell 2 by the fluid modulation means 5 and 6 having the above-mentioned modulation frequency, the detector 4 detects that the sample gas S and the comparison gas R are in the vicinity of the modulation frequency for the long cell 1. An output signal A in which the band signal and the band signal near the modulation frequency for the short cell 2 are superimposed is output.
10はプリアンプ7を介して検出器4の出力側に接続され
る信号処理手段で、その具体的構成は第2図に示すよう
に、プリアンプ7を介して入力される、検出器4からの
出力信号Aを、2つの信号処理系列に分岐して処理する
ように構成してある。Reference numeral 10 is a signal processing means connected to the output side of the detector 4 via the preamplifier 7, and its specific configuration is, as shown in FIG. 2, an output from the detector 4 input via the preamplifier 7. The signal A is divided into two signal processing sequences and processed.
即ち、一方の信号処理系列には、長セル1に対する変調
周波数(1ヘルツ)付近の帯域の信号(例えばaL)のみ
を分離して取り出す(通過させる)ためのバンドパスフ
ィルタ11を設けると共に、その後段に、長セル1に対す
る流体変調手段5に付設された同期信号発生器5aからの
同期信号(流体変調手段5による実際の流体変調動作を
信号:1ヘルツ)により、ハンドパスフィルタ11のみでは
不十分であるおそれがある分離作用を補足してより一層
精度の良い検波を行えると同時に、分離された交流を直
流に変換(整流)できるように、ハンドパスフィルタ11
からの出力信号aLを同期整流するための同期検波整流回
路13を設け、更に、その後段には、同期検波整流回路13
からの出力信号aLを平滑化すると共に高周波ノイズを除
去するため平滑回路15の一例としてのローパスフィルタ
が設けてあり、そして、他方の信号処理系列には、短セ
ル2に対する流体変調手段6の変調周波数(2ヘルツ)
付近の帯域の信号(例えばaH)のみを分離して取り出す
ためのハンドパスフィルタ12を設けると共に、その後段
に、短セル2に対する流体変調手段6に付設された同期
信号器6aからの同期信号(流体変調手段6による実際の
流体変調動作を信号:2ヘルツ)により、ハンドパスフィ
ルタ12のみでは不十分であるおそれがある分離作用を補
足してより一層精度の良い分離を行えると同時に、分離
された交流を直流に変換できるようにハンドパスフィル
タ12からの出力信号aHを同期整流するための同期検波整
流回路14を設け、更に、その後段には、同期検波整流回
路14からの出力信号aHを平滑化すると共に高周波ノイズ
を除去するため平滑回路15の一例としてのローパスフィ
ルタが設けてなるものであり、この信号処理手段10から
は、長セル1,短セル2にそれぞれ対応する信号成分とし
てaL及びaHが互いに独立した状態で出力される。That is, one signal processing sequence is provided with a bandpass filter 11 for separating and extracting (passing) only a signal (for example, a L ) in a band near the modulation frequency (1 hertz) for the long cell 1, and In the subsequent stage, by the synchronization signal from the synchronization signal generator 5a attached to the fluid modulation means 5 for the long cell 1 (the actual fluid modulation operation by the fluid modulation means 5 is a signal: 1 hertz), only the hand-pass filter 11 is used. A hand-pass filter 11 is provided to supplement the separation action that may be insufficient to perform more accurate detection and at the same time to convert (rectify) the separated AC into DC.
The synchronous detection rectifier circuit 13 for synchronously rectifying the output signal a L from the synchronous detection rectification circuit 13 is provided, and further, the synchronous detection rectification circuit 13 is provided in the subsequent stage.
A low-pass filter as an example of the smoothing circuit 15 is provided for smoothing the output signal a L from the device and removing high frequency noise, and the other signal processing sequence includes the fluid modulator 6 for the short cell 2. Modulation frequency (2 hertz)
A hand-pass filter 12 for separating and extracting only a signal (for example, a H ) in a nearby band is provided, and a sync signal from a sync signal device 6a attached to the fluid modulation means 6 for the short cell 2 is provided at the subsequent stage. By (actual fluid modulation operation by the fluid modulation means 6 is signal: 2 Hertz), the separation action which may be insufficient with the hand-pass filter 12 alone can be supplemented to perform more accurate separation and at the same time A synchronous detection rectifier circuit 14 for synchronously rectifying the output signal a H from the hand-pass filter 12 so as to convert the generated alternating current into direct current is provided, and further, in the subsequent stage, the output signal from the synchronous detection rectification circuit 14 are those low-pass filter as an example of a smoothing circuit 15 for removing high-frequency noise is provided with smoothing an a H, from the signal processing unit 10 has a length cell 1, the short cell 2 A L and a H is output at mutually independent state as the corresponding signal component Re respectively.
尚、信号処理手段10としては、上記電気回路のようなハ
ード的な手段に限らず、フーリエ解析(周波数分離処理
に相当する)及び絶対値平均化処理(整流・平滑化処理
に相当する)等の数値解析の演算処理が可能とされたコ
ンピュータシステムのようなソフト的な手段を採用する
こともできる。The signal processing means 10 is not limited to hardware means such as the above electric circuit, but Fourier analysis (corresponding to frequency separation processing) and absolute value averaging processing (corresponding to rectification / smoothing processing), etc. It is also possible to employ software-like means such as a computer system capable of performing the arithmetic processing of the numerical analysis.
而して、上記構成の吸光分析計において、流体変調手段
5,6によってサンプルガスSと比較ガスRとを、長セル
1,短セル2に対してそれぞれ1ヘルツ,2ヘルツの変調周
波数でもって同時かつ連続的に供給すると、長セル1,短
セル2に共通に設けられた1つの検出器4は、長セル1
に対応する信号成分(低濃度領域(例えばppm〜1%程
度)に見合う信号成分aL)と、短セル2に対応する信号
成分(高濃度領域(例えば1%以上)に見合う信号成分
aH)とが重畳した出力信号Aを出力し、しかも、両信号
成分aLとaHは相異なる周波数で変調されているので、検
出器4からの出力信号Aを長セル1,短セル2に対する各
変調周波数の信号成分aL,aHに分離してそれぞれ整流及
び平滑化することにより、測定対象成分の低濃度領域及
び高濃度領域にそれぞれ対応する信号aL及びaHを得るこ
とができ、従って、測定対象成分の低濃度領域及び高濃
度領域における濃度を得ることができる。Thus, in the absorption spectrometer having the above structure, the fluid modulation means
5, 6 and 6 sample gas S and comparative gas R
When 1 and 2 Hertz modulation frequencies of 1 and 2 Hertz are simultaneously and continuously supplied to the short cell 2 and the short cell 2, respectively, one detector 4 commonly provided for the long cell 1 and the short cell 2 is
Signal component (a signal component a L corresponding to a low concentration region (for example, ppm to 1%)) and a signal component corresponding to the short cell 2 (a signal component corresponding to a high concentration region (for example, 1% or more))
a H ) is output, and since both signal components a L and a H are modulated at different frequencies, the output signal A from the detector 4 is converted into a long cell 1 and a short cell To obtain the signals a L and a H respectively corresponding to the low concentration region and high concentration region of the measurement target component by separating the signal components a L and a H of each modulation frequency for 2 and rectifying and smoothing them respectively. Therefore, it is possible to obtain the concentrations of the measurement target component in the low concentration region and the high concentration region.
本発明は上記実施例に限られるものではなく、紫外線ガ
ス分析計等の他の吸光分析計にも適用することができ
る。そして、流体変調手段5,6を4方切り換え電磁弁や
3方切り換え電磁弁等で構成してもよい。又、検出器4
は固体検出器で構成してもよい。更に、本発明に係る吸
光分析計を自動レンジ切り換え手段と組み合わせるよう
にしてもよい。The present invention is not limited to the above embodiment, but can be applied to other absorption spectrometers such as an ultraviolet gas analyzer. The fluid modulation means 5 and 6 may be configured by a 4-way switching solenoid valve, a 3-way switching solenoid valve, or the like. Also, the detector 4
May be a solid-state detector. Furthermore, the absorption spectrometer according to the present invention may be combined with automatic range switching means.
以上説明したように、本発明に係る吸光分析計は、光源
と検出器との間にセル長が互いに異なる2つのセルを互
いに直列に設け、これら2つのセルに対してサンプルガ
スと比較ガスとを、一定周期で同時かつ連続的に切り換
え供給する流体変調手段を前記各セルに対して1つずつ
設け、これら2つの流体変調手段によるサンプルガスと
比較ガスとの変調周波数が互いに異なるようにし、前記
検出器からの出力信号を、前記各セルに対する各変調周
波数の信号成分に分離してそれぞれ整流及び平滑化する
ことによりサンプルガス中の測定対象成分の濃度を低濃
度から高濃度まで測定できるようにしてあるので、セル
長の異なるセルを何種類も用意する必要がない。又、濃
度変化が大きいサンプルガスの測定の場合においても、
低濃度から高濃度に亘って連続的に測定することができ
るといった優れた効果を奏する。As described above, in the absorption spectrometer according to the present invention, two cells having different cell lengths are provided in series between the light source and the detector, and the sample gas and the reference gas are supplied to these two cells. , One fluid modulation means is provided for each of the cells to be switched simultaneously and continuously at a constant cycle, and the modulation frequencies of the sample gas and the comparison gas by these two fluid modulation means are different from each other, By separating the output signal from the detector into signal components of each modulation frequency for each cell and rectifying and smoothing them, the concentration of the measurement target component in the sample gas can be measured from low concentration to high concentration. Therefore, it is not necessary to prepare many kinds of cells having different cell lengths. Also, when measuring a sample gas with a large concentration change,
It has an excellent effect that it can continuously measure from low concentration to high concentration.
第1図は本発明に係る吸光分析計の一例を示す構成図、
第2図は信号処理手段の一例を示すブロック図である。 第3図は吸光分析計における濃度と出力との関係を示す
特性図である。 1,2…セル、3…光源、4…検出器、5,6…流体変調手
段、A…出力信号、aL,aH…信号成分、S…サンプルガ
ス、R…比較ガスFIG. 1 is a block diagram showing an example of an absorption spectrometer according to the present invention,
FIG. 2 is a block diagram showing an example of the signal processing means. FIG. 3 is a characteristic diagram showing the relationship between the concentration and the output in the absorption spectrometer. 1, 2 ... Cell, 3 ... Light source, 4 ... Detector, 5,6 ... Fluid modulation means, A ... Output signal, a L , a H ... Signal component, S ... Sample gas, R ... Comparison gas
Claims (1)
る2つのセルを互いに直列に設け、これら2つのセルに
対してサンプルガスと比較ガスとを、一定周期で同時か
つ連続的に切り換え供給する流体変調手段を前記各セル
に対して1つずつ設け、これら2つの流体変調手段によ
るサンプルガスと比較ガスとの変調周波数が互いに異な
るようにし、前記検出器からの出力信号を、前記各セル
に対する各変調周波数の信号成分に分離してそれぞれ整
流及び平滑化することによりサンプルガス中の測定対象
成分の濃度を低濃度から高濃度まで測定できるようにし
たことを特徴とする吸光分析計。1. Two cells having different cell lengths are provided in series between a light source and a detector, and a sample gas and a reference gas are simultaneously and continuously supplied to these two cells at regular intervals. One fluid modulation means for switching and supplying is provided for each cell so that the modulation frequencies of the sample gas and the comparison gas by these two fluid modulation means are different from each other, and the output signal from the detector is An absorption spectrometer characterized in that it is possible to measure the concentration of the measurement target component in the sample gas from low concentration to high concentration by separating the signal components of each modulation frequency for each cell and rectifying and smoothing them respectively. .
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33578987A JPH06103261B2 (en) | 1987-12-29 | 1987-12-29 | Absorption spectrometer |
| US07/278,046 US5102806A (en) | 1987-12-11 | 1988-11-30 | Method for analyzing fluid by multi-fluid modulation mode |
| US07/820,146 US5255072A (en) | 1987-12-11 | 1992-01-13 | Apparatus for analyzing fluid by multi-fluid modulation mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33578987A JPH06103261B2 (en) | 1987-12-29 | 1987-12-29 | Absorption spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174942A JPH01174942A (en) | 1989-07-11 |
| JPH06103261B2 true JPH06103261B2 (en) | 1994-12-14 |
Family
ID=18292457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33578987A Expired - Lifetime JPH06103261B2 (en) | 1987-12-11 | 1987-12-29 | Absorption spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06103261B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5306052B2 (en) * | 2009-05-19 | 2013-10-02 | 株式会社堀場製作所 | Gas analyzer |
| CN102175608A (en) * | 2011-01-05 | 2011-09-07 | 上海德凯仪器有限公司 | Light path absorption pool device for infrared gas analysis |
| CN106605139A (en) * | 2015-04-30 | 2017-04-26 | 富士电机株式会社 | Laser gas analyzers for ships |
| CN111077083A (en) * | 2019-12-10 | 2020-04-28 | 北京市理化分析测试中心 | Variable-range gas-phase molecular absorption cell system and absorption spectrometer |
-
1987
- 1987-12-29 JP JP33578987A patent/JPH06103261B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01174942A (en) | 1989-07-11 |
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