JPH0610657B2 - Surface inspection device - Google Patents
Surface inspection deviceInfo
- Publication number
- JPH0610657B2 JPH0610657B2 JP10076587A JP10076587A JPH0610657B2 JP H0610657 B2 JPH0610657 B2 JP H0610657B2 JP 10076587 A JP10076587 A JP 10076587A JP 10076587 A JP10076587 A JP 10076587A JP H0610657 B2 JPH0610657 B2 JP H0610657B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- cap
- light source
- inspected
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title claims description 17
- 230000003287 optical effect Effects 0.000 claims description 44
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 235000013405 beer Nutrition 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、表面検査装置、特にビンのキャップ、ビール
カン等のエンド(底面及び上面)等の物体の表面のキ
ズ、汚れ、打痕等の欠陥の有無を検査する表面検査装置
に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a surface inspection device, in particular, a surface of an object such as a bottle cap, an end (bottom surface and top surface) of a beer can, stains, dents, etc. The present invention relates to a surface inspection device that inspects for the presence or absence of defects.
ビンのキャップやビールカン等のエンド等は、通常プラ
スチック又は金属製で、且つその平面(上面又は底面)
は円形である。更に、かかるキャップやエンドには、容
器内の液体等による圧力変動に充分耐え得るように、換
言すればその強度を増すため、同心円状(リング状)又
は螺線状の凹凸が、複数個形成されているのが普通であ
る。Bottle caps and beer can ends are usually made of plastic or metal and are flat (top or bottom)
Is circular. Further, in order to sufficiently withstand the pressure fluctuation due to the liquid in the container, in other words, to increase its strength, such caps and ends are formed with a plurality of concentric (ring-shaped) or spiral-shaped irregularities. It is usually done.
第5図Aは、被検査物の一例である例えば金属製のビン
のキャップ(1)の上面図であり、同図Bは同図AのB−
B線に沿った断面図である。同図に於て、(a),
(b)及び(c)は、上述した如き同心円状の凹凸で、
(a)はキャップ(1)の上の表面より上方に突出したリ
ング状の突部であり、(b)及び(c)は、キャップ(1)の
上面のリング状の突部(a)の内側部分に設けられたリ
ング状の段部の境界を夫々示す。FIG. 5A is a top view of a cap (1) of a metal bottle, which is an example of the object to be inspected, and FIG. 5B shows B- of FIG.
It is sectional drawing along the B line. In the figure, (a),
(B) and (c) are concentric concavo-convex as described above,
(A) is a ring-shaped protrusion protruding upward from the upper surface of the cap (1), and (b) and (c) are ring-shaped protrusions (a) of the upper surface of the cap (1). The boundaries of the ring-shaped steps provided in the inner part are shown respectively.
第6図、第5図に示した如き被検査物であるビンのキャ
ップ(1)の表面のきず等の欠陥の有無を検査する従来の
表面検査装置の一例の略線図である。同図に於て、(2)
はキャップ(1)の表面を照明するランプの如き光源であ
る。この場合、キャップ(1)の表面には凹凸があるで
の、それ等の垂直な面をも照射するため、光源(2)は、
キャップ(1)の斜め上方に配置される。(3)は、キャップ
(1)の表面で反射された光源(2)よりの光を受け、ビデオ
信号を発生するビデオカメラの如き光電変換センサで、
キャップ(1)の中心(O)を通り、その表面に垂直なキ
ャップ(1)の中心軸(X)にその光学系の光軸が一致す
る如く、キャップ(1)の上方に配置される。(4)はコンピ
ュータ等で構成される電子処理装置で、ビデオカメラ
(3)よりのビデオ信号を分析処理して、キャップ(1)の表
面の良否を判定する。尚、第7図は、第6図の光源(2)
及びキャップ(1)の関係を示す平面図である。FIG. 6 is a schematic diagram of an example of a conventional surface inspection device for inspecting the presence or absence of defects such as flaws on the surface of the cap (1) of the bottle as the inspection object as shown in FIGS. 6 and 5. In the figure, (2)
Is a light source such as a lamp that illuminates the surface of the cap (1). In this case, since the surface of the cap (1) has irregularities, the light source (2) is
It is located diagonally above the cap (1). (3) is the cap
A photoelectric conversion sensor such as a video camera that receives light from the light source (2) reflected on the surface of (1) and generates a video signal,
It is placed above the cap (1) so that the optical axis of the optical system passes through the center (O) of the cap (1) and is perpendicular to the surface of the cap (1). (4) is an electronic processing device composed of a computer, etc.
The video signal from (3) is analyzed to determine the quality of the surface of the cap (1). Incidentally, FIG. 7 shows the light source (2) of FIG.
FIG. 3 is a plan view showing the relationship between the cap and the cap (1).
扨て、キャップ(1)の斜め上方に配置された光源(2)より
の光は、キャップ(1)の上の表面で乱反射され、この乱
反射光の一部が光電変換センサ又はビデオカメラ(3)に
入射して、これによりキャップ(1)の表面の光像に対応
するビデオ信号が作られ、このビデオ信号が電子処理装
置(4)で処理されて、キャップ(1)の表面の、他に比して
異常に暗い或は異常に明るい点等となるキズや、汚れ等
の欠陥が検出され、キャップ(1)の表面の良否が判定さ
れるものである。Light from the light source (2), which is arranged diagonally above the cap (1), is diffusely reflected by the surface on the cap (1), and a part of this diffusely reflected light is generated by the photoelectric conversion sensor or the video camera (3). ), Which produces a video signal corresponding to the optical image of the surface of the cap (1), which is processed by the electronic processing unit (4) to In comparison with the above, defects such as stains and stains that are unusually dark or unusually bright are detected, and the quality of the surface of the cap (1) is determined.
この場合、第7図に示す如く、光源(2)よりの光のうち
の、中央部の光、即ちその光軸(A)に略々沿って進む
光に対して、キャップ(1)の表面のリング状の突部
(a)及び境界(b)及び(c)のうち、キャップ(1)
の中心(O)に関して、光源(2)側の太線で示す部分
(a′),(b′),(c′)及びリング状の突部
(a)の部分(a′)の中央(O)に対して反対側の部
分(a″)は、第5図B及び第6図より明らかな如く、
壁状に立ち上っている部分で、これ等の部分(a′),
(b′),(c′)及び(a″)で光の乱反射が、他の
部に於ける乱反射より著しく多く、且つこれ等部分の乱
反射光は、ビデオカメラ(3)に直接入射する。一方、同
一のリング状の突部(a)及び境界(b),(c)の部
分(a′),(b′),(c′)及び(a″)以外の壁
状に立ち上がっている部分で乱反射された光の大部分
は、第7図に於て矢印(d)で示す方向に進み、ビデオ
カメラ(3)に直接入射することはない。勿論、キャップ
(1)の平面部で通常の如く乱反射される光は、ビデオカ
メラ(3)へ入射し、キャップ(1)のビデオ信号として出力
され、電子処理装置(4)へ入力され、この装置(4)に於
て、上述の如く処理され、キャップ(1)の欠陥の有無、
即ちキャップ(1)の良否が判定される。尚、円弧状の部
分(a′),(a″),(b′)及び(c′)の角範囲
は、光軸(A)を中心にして、90°よりは小さい。In this case, as shown in FIG. 7, of the light from the light source (2), the surface of the cap (1) with respect to the light at the central portion, that is, the light traveling substantially along its optical axis (A). Of the ring-shaped protrusions (a) and boundaries (b) and (c) of the cap, the cap (1)
With respect to the center (O) of the light source (2), the portions (a ′), (b ′), (c ′) indicated by the thick line and the center (O ′) of the ring-shaped protrusion (a) (a ′) ), The part (a ″) on the opposite side is as shown in FIG. 5B and FIG.
The part that rises like a wall. These parts (a '),
In (b '), (c') and (a "), the diffuse reflection of light is remarkably larger than the diffuse reflection in other parts, and the diffuse reflection light of these parts is directly incident on the video camera (3). On the other hand, the protrusions (a) and the boundaries (b) and (c), which are the same as each other, stand up in a wall shape other than the portions (a '), (b'), (c ') and (a "). Most of the light diffused and reflected by the portion travels in the direction indicated by the arrow (d) in FIG. 7 and does not enter the video camera (3) directly. Of course, the cap
Light that is diffusely reflected as usual on the flat surface of (1) enters the video camera (3), is output as a video signal of the cap (1), and is input to the electronic processing device (4). ) Is processed as described above, and the cap (1) is not defective,
That is, the quality of the cap (1) is determined. The angular range of the arcuate portions (a ′), (a ″), (b ′) and (c ′) is smaller than 90 ° about the optical axis (A).
上述した如く、従来の装置では、キャップ(1)の表面の
部分(a′),(b′),(c′)及び(a″)で光の
乱反射が、他の部分に比して著しく、これ等の乱反射光
がビデオカメラ(3)へ直接入射するので、ビデオカメラ
(3)に於て、上記部分(a′),(b′),(c′)及
び(a″)の部分が他の部分より際立って明るくなり、
これ等部分(a′),(b′),(c′)及び(a″)
の欠陥の有無の検査が不可能であるばかりでなく、他の
部分の検査に悪影響を与える。これを解決しょうとすれ
ば、キャップ(1)の表面の著しい乱反射を起す部分を除
外した他の部分の検査をするか、或は光源(2)よりの光
のキャップ(1)の表面を照射する角度を種々変えなが
ら、同一キャップ(1)の表面を部分に分けて、何度も検
査を繰り返さなければならず、手間もかかり、時間的に
大きな損失があった。As described above, in the conventional device, the diffuse reflection of light at the surface portions (a '), (b'), (c '), and (a ") of the cap (1) is remarkably higher than that of other portions. Since these diffused reflections are directly incident on the video camera (3),
In (3), the parts (a '), (b'), (c ') and (a ") are significantly brighter than the other parts,
These parts (a '), (b'), (c ') and (a ")
Not only is it impossible to inspect for defects, but it also adversely affects the inspection of other parts. In order to solve this, inspect the other part of the surface of the cap (1) excluding the part that causes significant diffuse reflection, or irradiate the surface of the cap (1) with light from the light source (2). The surface of the same cap (1) must be divided into parts and the inspection must be repeated many times while changing the angle to be changed, which is time-consuming and causes a large loss in time.
従って、本発明は、上記問題点を一掃した新規な物体の
表面検査装置を提供せんとするにある。Therefore, the present invention aims to provide a novel surface inspection apparatus for an object which eliminates the above problems.
本発明によれば、光電変換センサで光源により照射され
ている凹凸面を有する被検査物の表面を撮像し、そのビ
デオ信号を電子処理装置により処理して被検査物の表面
を検査する装置において、光源の前方に光源からの光が
被検査物の表面中心部を中心とする下方略三角形状範囲
及びこれと対称な上方略三角形状範囲では被検査物の表
面を照射しない不透明部とし、そのほかの範囲では光が
透過し被検査物の表面を照射する透明部とした光学マス
クを配し、光源をそれらの光軸が互いに直交する如く2
個配置し、両光源により被検査物の表面を斜め上方向か
ら照射し、そこに於ける光の乱反射が略一様になるよう
にした。According to the present invention, in an apparatus for inspecting the surface of an inspected object by imaging the surface of the inspected object having an uneven surface illuminated by a light source with a photoelectric conversion sensor and processing the video signal by an electronic processing device. In front of the light source, the light from the light source is an opaque portion that does not illuminate the surface of the object to be inspected in the lower substantially triangular area centered on the center of the surface of the object to be inspected and in the upper substantially triangular area symmetrical to this. In the range of 2), an optical mask that is a transparent portion that transmits light and irradiates the surface of the inspection object is arranged, and the light source is arranged so that their optical axes are orthogonal to each other.
Individually arranged, the light source illuminates the surface of the object to be inspected obliquely from above, so that the diffused reflection of light there is substantially uniform.
本発明では、被検査物(1)の凹凸のある表面を、夫々特
別な光学マスク(6A),(6B)を有する光源(2A),(2B)の2個
の組合せで、上記表面をその表面に於ける光の乱反射が
略々一様となるように照射し、この乱反射光をビデオカ
メラ(3)で受け、それよりのビデオ信号を電子処理装置
(4)で処理して、上記被検査物(1)の表面の欠陥の有無を
検査する。In the present invention, the uneven surface of the object to be inspected (1) is formed by combining the two surfaces of the light sources (2A) and (2B) having special optical masks (6A) and (6B), respectively. The irregular reflection of light on the surface is irradiated so that it becomes almost uniform, and this irregular reflection light is received by the video camera (3), and the video signal from it is processed by an electronic processing device.
By processing in (4), the surface of the object to be inspected (1) is inspected for defects.
以下、第1及び第2図を参照して、本発明の一実施例を
説明する。尚、本発明に於いては、光電変換センサ(ビ
デオカメラ)(3)及び電子処理装置(4)は、第6図に示し
た従来例と全く同一のものを用い、ビデオカメラ(3)の
被検査物の一例であるキャップ(1)に対する配置も、第
6図に示す例と略々同一なので、それ等は、簡単のた
め、第1図には示してない。即ち、第1図は本発明の主
要部のみを示している。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. In the present invention, the photoelectric conversion sensor (video camera) (3) and the electronic processing device (4) are exactly the same as those of the conventional example shown in FIG. The arrangement with respect to the cap (1), which is an example of the object to be inspected, is substantially the same as that of the example shown in FIG. 6, and therefore, these are not shown in FIG. 1 for simplicity. That is, FIG. 1 shows only the main part of the present invention.
第1図に於て、(2A),(2B)は、夫々キャップ(1)の表面
に、光を斜め上方より照射する光源で、この例では、そ
れ等の光軸(5A),(5B)が、キャップ(1)の中心(O)に於
て交わるように、その斜め上方に配置されている。又、
(6A),(6B)は、夫々光源(2A),(2B)の光投射面の前方に配
置された光学マスクである。In FIG. 1, (2A) and (2B) are light sources for irradiating the surface of the cap (1) with light obliquely from above, and in this example, their optical axes (5A) and (5B). ) Are arranged diagonally above so that they intersect at the center (O) of the cap (1). or,
(6A) and (6B) are optical masks arranged in front of the light projection surfaces of the light sources (2A) and (2B), respectively.
今、光学マスク(6A)が無いとすると、光源(2A)よりの光
は、第6及び第7図に就いて説明した如く、キャップ
(1)の表面のリング状の突部(a)の、角範囲が90゜より
は小さい円弧状の部分(a′),(a″)、境界(b),
(c)の部分(b′),(c′)で、他の部分に較べて著
しく乱反射され、直接ビデオカメラ(3)へ入射して、前
述の如く検査不能の原因となる。従って、本発明では、
光源(2A)の光投射面の前方に、光学マスク(6A)を設け、
光源(2A)よりの光が、少くとも部分(a′),
(a″),(b′)及び(c′)に入射しないようにな
す。勿論、光源(2A)よりの光は、部分(a′),
(a″),(b′)及び(c′)以外のキャップ(1)の
表面等には入射する。Assuming that there is no optical mask (6A), the light from the light source (2A) will be emitted from the cap as described in FIGS. 6 and 7.
The circular protrusions (a) on the surface of (1) have arc-shaped portions (a ′), (a ″) whose angular range is smaller than 90 °, boundaries (b),
The portions (b ') and (c') of (c) are remarkably irregularly reflected as compared with the other portions, and are directly incident on the video camera (3), causing the inspection failure as described above. Therefore, in the present invention,
An optical mask (6A) is provided in front of the light projection surface of the light source (2A),
The light from the light source (2A) is at least part (a '),
(A ″), (b ′) and (c ′) do not enter. Of course, the light from the light source (2A) is the portion (a ′),
It is incident on the surface of the cap (1) other than (a ″), (b ′) and (c ′).
次に、本発明による光学マスク(6A)(又は(6B))の一例
を、その正面図である第2図を参照して説明する。Next, an example of the optical mask (6A) (or (6B)) according to the present invention will be described with reference to the front view of FIG.
第2図に示す光学マスク(6A)は、例えば略々正方形状の
ガラス等の透明板を、2個の対角線で4個の三角形状の
部分(6A1),(6A2),(6A3),(6A4)に分け、対向する2個の
三角形状部分、この例では(6A2),(6A4)の部分を、例え
ば黒色塗料等を用いて不透明(第2図に於て黒色で示
す)となし、(6A1),(6A3)は透明部としたものである。The optical mask (6A) shown in FIG. 2 is, for example, a substantially square transparent plate such as glass, and four triangular portions (6A1), (6A2), (6A3), (2A) with two diagonal lines. 6A4) and two opposing triangular portions, in this example, the portions (6A2) and (6A4) are made opaque (shown in black in FIG. 2) using, for example, black paint, (6A1) and (6A3) are transparent parts.
上述した如き光学マスク(6A)を、第1図に示す如く、光
学(2A)の光投射面の前方に、不透明部(6A2),(6A4)が上
下方向に並び且つ光源(2A)の光投射面と平行となる如く
配置する。この場合、光学マスク(6A)の中心(0A)が、略
々光源(2A)の光軸(5A)に一致するようになす。従って、
光源(2A)よりの光は、光学マスク(6A)により部分的に遮
断され、キャップ(1)の表面の部分(a′),
(a″),(b′),(c′)には少くとも到達せず、
それ等部分以外のキャップ(1)の表面に到達し、そこで
通常の如く乱反射され、キャップ(1)の上方に配置され
たビデオカメラ(3)へ入射し、それよりのビデオ信号が
電子処理装置(4)により処理され、キャップ(1)の表面の
検査が行われる。これは、上述の如く、従来の装置と全
く同様である。As shown in FIG. 1, the optical mask (6A) as described above is arranged in front of the light projection surface of the optical (2A) with the opaque portions (6A2), (6A4) arranged vertically and the light of the light source (2A). Place it so that it is parallel to the projection surface. In this case, the center (0A) of the optical mask (6A) substantially coincides with the optical axis (5A) of the light source (2A). Therefore,
The light from the light source (2A) is partially blocked by the optical mask (6A), and the surface portion (a ') of the cap (1),
(A ″), (b ′), (c ′) are never reached,
It reaches the surface of the cap (1) other than those parts, is diffused as usual and is incident on the video camera (3) arranged above the cap (1), and the video signal from it is processed by the electronic processing device. Processed by (4), the surface of the cap (1) is inspected. This is exactly the same as the conventional device as described above.
上述の如く、光学マスク(6A)を用いると、光源(2A)より
の光は、キャップ(1)の表面の部分(a′),
(a″),(b′)及び(c′)には到達しないので、
これ等部分の検査はできない。従って、本発明では、第
1図に示す如く、光源(2A)及び光学マスク(6A)の組合せ
の他に、同様の光源(2B)及び光学マスク(6B)の組合せ
を、前者より所定の角間隔、即ち円弧状の部分
(a′),(a″)…の各範囲(ARC)の少くとも1/2
以上、(180°−1/2ARC)以下離れた位置に、前者と同
様のキャップ(1)の表面を照射する如く配置する。従っ
て、光源(2B)及び光学マスク(6B)の組合せにより、光源
(2A)及び光学マスク(6A)の組合せによっては光が到達し
たなかったキャップ(1)の表面の部分(a′),
(a″),(b′)及び(c′)等が照射される。尚、
光学マスク(6B)の存在により、光源(2A)に対する部分
(a′),(a″),(b′)及び(c′)に相当する
キャップ(1)の表面の部分には、光源(2B)よりの光は到
達しないが、(これ等部分は光源(2A)及び光学マスク(6
A)の組合せにより、既に照射されている)、その他の部
分には、光源(2A)よりの光に重畳して到達する。As described above, when the optical mask (6A) is used, the light from the light source (2A) is emitted from the surface portion (a ') of the cap (1),
Since (a ″), (b ′) and (c ′) are not reached,
These parts cannot be inspected. Therefore, in the present invention, as shown in FIG. 1, in addition to the combination of the light source (2A) and the optical mask (6A), a similar combination of the light source (2B) and the optical mask (6B) is provided at a predetermined angle from the former. Interval, that is, at least 1/2 of each range (ARC) of arcuate parts (a '), (a ") ...
As described above, it is arranged so that the surface of the cap (1) similar to the former is irradiated at a position separated by (180 ° -1 / 2 ARC) or less. Therefore, by combining the light source (2B) and the optical mask (6B), the light source
(A ') on the surface of the cap (1) where light did not reach due to the combination of (2A) and the optical mask (6A),
(A ″), (b ′), (c ′), etc. are irradiated.
Due to the presence of the optical mask (6B), the light source (2) is provided on the surface of the cap (1) corresponding to the portions (a '), (a "), (b') and (c ') with respect to the light source (2A). 2B) does not reach, but (these parts are the light source (2A) and the optical mask (6
It has already been irradiated by the combination of A)), and reaches the other portion by being superimposed on the light from the light source (2A).
上述の如く、本発明によれば、キャップ(1)の上面の突
部の部分(a′),(a″),(b′),(c′)の如
く、1個の光源のみよりの入射光を、他の部分に比して
著しく乱反射させ、キャップ(1)の表面検査を不可能と
する部分(a′),(a″),(b′),(c′)に
は、光学マスクを用いてこの光源よりの光を照射しない
ようになすも、光学マスクを有する他の光源を用いて照
射するようになしたので、リング又は円弧状の凹凸部を
有するキャップ(1)の表面の検査を、一回の検査で容易
且つ確実に行い得る。As described above, according to the present invention, only one light source is used, such as the protrusions (a '), (a "), (b') and (c ') on the upper surface of the cap (1). The portions (a '), (a "), (b'), (c ') that make the surface of the cap (1) impossible to be inspected due to the diffused reflection of the incident light remarkably, Although an optical mask is used so as not to irradiate light from this light source, since it is adapted to irradiate using another light source having an optical mask, the cap (1) having a ring-shaped or arc-shaped uneven portion is formed. The surface can be inspected easily and surely in one inspection.
又、光学マスク(6A),(6B)は、第2図に示すパターンに
限定する必要はなく、要は、不要に著しい乱反射を起こ
す被検査物の表面の部分に光を照射しない、例えば第3
図に示す如く、中心(0A)に関し、上下対称の鼓状の不透
明部分(6a1),(6a2)を有するものでもよい(他の部分(6a
3),(6a4)は透明)。第4図は、本発明の他の例の第1図
と同様の主要部の上面図である。Further, the optical masks (6A) and (6B) do not have to be limited to the patterns shown in FIG. 2, and the point is that, for example, the portion of the surface of the object to be inspected that causes unnecessary diffused reflection is not irradiated with light, for example, Three
As shown in the figure, it may have a vertically symmetrical drum-shaped opaque portion (6a1), (6a2) with respect to the center (0A) (other portion (6a
3) and (6a4) are transparent). FIG. 4 is a top view of a main portion similar to FIG. 1 of another example of the present invention.
この例では、光源(2A),(2B)として、夫々実質的に平行
光を発射する光源を使用し、両者の光軸(5A),(5B)が、
キャップ(1)の中心(O)に於て、実質的に直交するよ
うに配置する。尚、光学マスク(6A),(6B)は、例えば第
2図に示すものを、第1の例と同様に配置する。In this example, as the light sources (2A) and (2B), light sources that emit substantially parallel light are used, and both optical axes (5A) and (5B) are
At the center (O) of the cap (1), they are arranged so as to be substantially orthogonal to each other. The optical masks (6A) and (6B) shown in FIG. 2 are arranged in the same manner as in the first example.
第4図の例によれば、光源(2A)及び光学マスク(6A)の組
合せにより、キャップ(1)の円形の表面のうち、その中
心(O)及び光源(2A)の光軸(5A)に関して対称な略々90
°の角範囲の扇形部分(1A),(1A′)が照射されるも、
キャップ(1)の表面のうち、その中央(O)及び他方の
光源(2B)の光軸(5B)に関して対称な残りの略々90°の角
範囲の扇形部分(1B),(1B′)は照射されない。この場
合、前述した著しい乱反射を起すキャップ(1)の表面の
壁状に立ち上がる円弧状の部分(a′),(b′),
(c′)及び(a″)は、光源(2A)によって照射されな
い扇形部分(1B)及び(1B′)内に夫々存在するので、キ
ャップ(1)の表面の検査不能を引き起こすことはない。
同様に、光源(2B)及び光学マスク(6B)の組合せにより、
光源(2A)及び光学マスク(6A)の組合せでは照明されなか
った扇形部分(1B),(1B′)が照明されるも、残りの扇
形部分(1A),(1A′)は照明されない。勿論、光源(2B)
及び光学マスク(6B)の組合せにとって著しい乱反射を起
す部分(a′),(b′),(c′)及び(a″)は、
この組合せによって照明されない部分(1A′),(1A)内
に夫々在るので、キャップ(1)の表面の検査不能を引き
起すことはない。According to the example of FIG. 4, the center (O) of the circular surface of the cap (1) and the optical axis (5A) of the light source (2A) are formed by combining the light source (2A) and the optical mask (6A). About 90 symmetrical about
The fan-shaped parts (1A) and (1A ') in the angular range of ° are irradiated,
Of the surface of the cap (1), the fan-shaped portions (1B), (1B ') in the remaining approximately 90 ° angular range that are symmetrical with respect to the center (O) and the optical axis (5B) of the other light source (2B). Is not irradiated. In this case, the arc-shaped portions (a '), (b'), which rise up like a wall on the surface of the cap (1) which causes the above-mentioned remarkable diffuse reflection,
Since (c ') and (a ") are present in the fan-shaped portions (1B) and (1B') which are not illuminated by the light source (2A), respectively, they do not cause the inspection failure of the surface of the cap (1).
Similarly, by the combination of the light source (2B) and the optical mask (6B),
The fan portions (1B) and (1B ') which were not illuminated by the combination of the light source (2A) and the optical mask (6A) are illuminated, but the remaining fan portions (1A) and (1A') are not illuminated. Of course, the light source (2B)
And the portions (a ′), (b ′), (c ′) and (a ″) that cause significant diffuse reflection for the combination of the optical mask (6B) are
Since the portions (1A ') and (1A) not illuminated by this combination are present respectively, the surface of the cap (1) cannot be inspected.
上述した如く、第4図の例によれはば、キャップ(1)の
全表面は、光源(2A)及び光学マスク(6A)の組合せと、光
源(2B)及び光学マスク(6B)の組合せとによって、別々
に、換言すれば略々重複することなく一様に照射される
ので、キャップ(1)の表面に於ける入射光の通常の乱反
射は、略々一様で、キャップ(1)の表面の検査がより正
確に行い得る。As described above, according to the example of FIG. 4, the entire surface of the cap (1) has the combination of the light source (2A) and the optical mask (6A) and the combination of the light source (2B) and the optical mask (6B). The different diffuse reflections of the incident light on the surface of the cap (1) are substantially uniform, and thus the normal diffuse reflection of the incident light on the surface of the cap (1) is substantially uniform. Surface inspection can be done more accurately.
上述の如く、本発明によれば、特殊な光学マスクを用い
た光源により、凹凸を有する被検査物の表面に於ける乱
反射が一様になるようこの表面を照射したので、この様
な被検査物の全面を1回の検査で、容易且つ確実に検査
し得る。As described above, according to the present invention, the light source using the special optical mask irradiates the surface of the inspected object having unevenness so that the diffused reflection is uniform on the surface of the inspected object. The entire surface of the object can be inspected easily and surely by one inspection.
第1図は本発明の一例の主要部の略線図、第2図及び第
3図は各々第1図に示す光学マスクの一例の正面図、第
4図は本発明の他の例の主要部の略線図、第5図A及び
Bは被検査物の上面及び断面図、第6図は従来の表面検
査装置の略線図、第7図はその動作説明用の略線図であ
る。 図に於て、(1)は被検査物、(2A),(2B)は光源、(3)は光
電変換センサ、(4)は電子処理装置、(6A),(6B)は光学マ
スクを夫々示す。FIG. 1 is a schematic diagram of a main part of an example of the present invention, FIGS. 2 and 3 are front views of an example of the optical mask shown in FIG. 1, and FIG. 4 is a main view of another example of the present invention. 5A and 5B are top and sectional views of the object to be inspected, FIG. 6 is a schematic diagram of a conventional surface inspection apparatus, and FIG. 7 is a schematic diagram for explaining the operation thereof. . In the figure, (1) is an object to be inspected, (2A) and (2B) are light sources, (3) is a photoelectric conversion sensor, (4) is an electronic processing device, and (6A) and (6B) are optical masks. Show each.
Claims (2)
る凹凸面を有する被検査物の表面を撮像し、そのビデオ
信号を電子処理装置により処理して被検査物の表面を検
査する装置において、 上記光源の前方に光源からの光が被検査物の表面中心部
を中心とする下方略三角形状範囲及びこれと対称な上方
略三角形状範囲では上記被検査物の表面を照射しない不
透明部とし、その他の範囲では光が透過し上記被検査物
の表面を照射する透明部とした光学マスクを配し、 上記光源をそれらの光軸が互いに直交する如く2個配置
し、上記両光源により上記被検査物の表面を斜め上方向
から照射し、そこに於ける光の乱反射が略一様になるよ
うにしたことを特徴とする表面検査装置。1. An apparatus for inspecting the surface of an object to be inspected by capturing an image of the surface of the object to be inspected, which has an uneven surface illuminated by a light source with a photoelectric conversion sensor, and processing the video signal thereof by an electronic processing device. Light from the light source in front of the light source is an opaque portion which does not illuminate the surface of the object to be inspected in a lower substantially triangular area centered on the surface center of the object to be inspected and in an upper substantially triangular area symmetrical to this. In the other range, an optical mask is provided as a transparent portion that transmits light and irradiates the surface of the object to be inspected, and two light sources are arranged so that their optical axes are orthogonal to each other. A surface inspection device characterized by irradiating the surface of an object to be inspected obliquely from above so that the diffused reflection of light there is substantially uniform.
ことを特徴とする特許請求の範囲第1項記載の表面検査
装置。2. The surface inspection apparatus according to claim 1, wherein each of the two light sources emits substantially parallel light.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076587A JPH0610657B2 (en) | 1987-04-23 | 1987-04-23 | Surface inspection device |
| US07/179,052 US4868404A (en) | 1987-04-23 | 1988-04-08 | Surface inspection apparatus using a mask system to monitor uneven surfaces |
| CA000563887A CA1283964C (en) | 1987-04-23 | 1988-04-12 | Surface inspection apparatus |
| AU14593/88A AU595107B2 (en) | 1987-04-23 | 1988-04-13 | Surface inspection apparatus |
| GB8809128A GB2204125B (en) | 1987-04-23 | 1988-04-18 | Surface inspection apparatus |
| FR8805378A FR2614418A1 (en) | 1987-04-23 | 1988-04-22 | APPARATUS FOR INSPECTING SURFACES |
| DE3813662A DE3813662A1 (en) | 1987-04-23 | 1988-04-22 | SURFACE TESTER |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076587A JPH0610657B2 (en) | 1987-04-23 | 1987-04-23 | Surface inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63265148A JPS63265148A (en) | 1988-11-01 |
| JPH0610657B2 true JPH0610657B2 (en) | 1994-02-09 |
Family
ID=14282597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10076587A Expired - Lifetime JPH0610657B2 (en) | 1987-04-23 | 1987-04-23 | Surface inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610657B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109282759B (en) * | 2018-10-05 | 2023-04-25 | 福建钜铖汽车配件有限公司 | Automobile piston surface roughness detection method |
-
1987
- 1987-04-23 JP JP10076587A patent/JPH0610657B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63265148A (en) | 1988-11-01 |
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