JPH068790B2 - Surface inspection device - Google Patents
Surface inspection deviceInfo
- Publication number
- JPH068790B2 JPH068790B2 JP14377987A JP14377987A JPH068790B2 JP H068790 B2 JPH068790 B2 JP H068790B2 JP 14377987 A JP14377987 A JP 14377987A JP 14377987 A JP14377987 A JP 14377987A JP H068790 B2 JPH068790 B2 JP H068790B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- cap
- inspected
- optical mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title claims description 18
- 230000003287 optical effect Effects 0.000 claims description 56
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 2
- 230000001788 irregular Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 235000013405 beer Nutrition 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、表面検査装置、特にビンのキャップ,ビール
カン等のエンド(底面及び上面)等の物体の表面のキ
ズ,汚れ,打痕等の欠陥の有無を検査する表面検査装置
に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a surface inspection device, and in particular to a surface of an object such as an end (bottom surface and upper surface) of a bottle cap, beer can, etc. The present invention relates to a surface inspection device that inspects for the presence or absence of defects.
ビンのキャップやビールカン等のエンド等は、通常のプ
ラスチック又は金属製で、且つその平面(上面又は底
面)は円形である。更に、かかるキャップやエンドに
は、容器内の液体等による圧力変動に十分耐え得るよう
に、換言すればその強度を増すため、円心円状(リング
状)又は螺旋状の凹凸が、複数個形成されているのが普
通である。The cap of the bottle, the end of the beer can, etc. are made of ordinary plastic or metal, and the plane (top or bottom) thereof is circular. Further, in order to sufficiently withstand the pressure fluctuation due to the liquid in the container, in other words, to increase the strength, the cap and the end are provided with a plurality of concentric circles (rings) or spiral irregularities. It is usually formed.
第7図Aは、被検査物の一例である例えば金属製のビン
のキャップ(1)の上面図であり、同図Bは同図AのB−
B線に沿った断面図である。同図に於て、(a),(b)及び
(c)は、上述した如き同心円状の凹凸で、(a)はキャップ
(1)の上の表面より上方に突出したリング状の突部であ
り、(b)及び(c)は、キャップ(1)の上面のリング状の突
部(a)の内側部分に設けられたリング状の段部の境界を
夫々示す。FIG. 7A is a top view of a cap (1) of a metal bottle, which is an example of the object to be inspected, and FIG. 7B shows B- of FIG.
It is sectional drawing along the B line. In the figure, (a), (b) and
(c) is the concentric concavo-convex as described above, and (a) is the cap.
(B) and (c) are ring-shaped protrusions that project upward from the upper surface of (1), and are provided inside the ring-shaped protrusions (a) on the upper surface of the cap (1). The boundaries of the ring-shaped steps are shown respectively.
第8図は、第7図に示した如く被検査物であるビンのキ
ャップ(1)の表面のきず等の欠陥の有無を検査する従来
の表面検査装置の一例の略線図である。同図に於て、
(2)はキャップ(1)の表面を照明するランプの如き光源で
ある。この場合、キャップ(1)の表面には凹凸があるの
で、それ等の垂直な面をも照射するため、光源(2)は、
キャップ(1)の斜め上方に配置される。(3)は、キャップ
(1)の表面で反射された光源(2)よりの光を受け、ビデオ
信号を発生するビデオカメラの如き光電変換センサで、
キャップ(1)の中心(O)を通り、その表面に垂直なキ
ャップ(1)の中心軸(X)にその光学系の光軸が一致す
る如く、キャップ(1)の上方に配置される。(4)はコンピ
ュータ等で構成される電子処理装置で、ビデオカメラ
(3)よりのビデオ信号を分析処理して、キャップ(1)の表
面の良否を判定する。尚、第9図は、第8図の光源(2)
及びキャップ(1)の関係を示す平面図である。FIG. 8 is a schematic diagram of an example of a conventional surface inspection apparatus for inspecting the presence or absence of defects such as flaws on the surface of the cap (1) of the bottle to be inspected as shown in FIG. In the figure,
(2) is a light source such as a lamp that illuminates the surface of the cap (1). In this case, since the surface of the cap (1) has unevenness, the light source (2) is
It is located diagonally above the cap (1). (3) is the cap
A photoelectric conversion sensor such as a video camera that receives light from the light source (2) reflected on the surface of (1) and generates a video signal,
It is placed above the cap (1) so that the optical axis of the optical system passes through the center (O) of the cap (1) and is perpendicular to the surface of the cap (1). (4) is an electronic processing device composed of a computer, etc.
The video signal from (3) is analyzed to determine the quality of the surface of the cap (1). Incidentally, FIG. 9 shows the light source (2) of FIG.
FIG. 3 is a plan view showing the relationship between the cap and the cap (1).
扨て、キャップ(1)の斜め上方に配置された光源(2)より
の光は、キャップ(1)の上の表面で乱反射され、この乱
反射光の一部が光電変換センサ又はビデオカメラ(3)に
入射して、これによりキャップ(1)の表面の光像に対応
するビデオ信号が作られ、このビデオ信号が電子処理装
置(4)で処理されて、キャップ(1)の表面の、他に比して
異常に暗い或は異常に明るい点等となるキズや、汚れ等
の欠陥が検出され、キャップ(1)の表面の良否が判定さ
れるものである。Light from the light source (2), which is arranged diagonally above the cap (1), is diffusely reflected by the surface on the cap (1), and a part of this diffusely reflected light is generated by the photoelectric conversion sensor or the video camera (3). ), Which produces a video signal corresponding to the optical image of the surface of the cap (1), which is processed by the electronic processing unit (4) to In comparison with the above, defects such as stains and stains that are unusually dark or unusually bright are detected, and the quality of the surface of the cap (1) is determined.
この場合、第9図に示す如く、光源(2)よりの光のうち
の、中央部の光、即ちその光軸(A)に略々沿って進む
光に対して、キャップ(1)の表面のリング状の突部(a)及
び境界(b)及び(c)のうち、キャップ(1)の中心(O)に
関して、光源(2)側の太線で示す部分(a′),(b′),
(c′)及びリング状の突部(a)の部分(a′)の中心(O)
に対して反対側の部分(a″)は、第7図B及び第8図よ
り明らかな如く、壁状に立ち上っている部分で、これ等
の部分(a′),(b′),(c′)及び(a″)で光の乱反射が、
他の部に於ける乱反射より著しく多く、且つこれ等部分
の乱反射光は、ビデオカメラ(3)に直接入射する。一
方、同一のリング状の突部(a)及び境界(b),(c)の部分
(a′),(b′),(c′)及び(a″)以外の壁状に立ち上がっ
ている部分で乱反射される光の大部分は、第9図に於て
矢印(d)で示す方向に進み、ビデオカメラ(3)に直接入射
することはない。勿論、キャップ(1)の平面部で通常の
如く乱反射される光は、ビデオカメラ(3)へ入射し、キ
ャップ(1)のビデオ信号として出力され、電子処理装置
(4)へ入力され、この装置(4)に於て、上述の如く処理さ
れ、キャップ(1)の欠陥の有無、即ちキャップ(1)の良否
が判定される。尚、円弧状の部分(a′),(a″),(b′)
及び(c′)の角範囲(ARC)は、光軸(A)を中心に
して、90°よりは小さい。In this case, as shown in FIG. 9, of the light from the light source (2), the light at the central portion, that is, the light traveling substantially along the optical axis (A), is the surface of the cap (1). Of the ring-shaped protrusion (a) and the boundaries (b) and (c) of the cap (1) with respect to the center (O), portions (a ′) and (b ′) indicated by thick lines on the light source (2) side. ) 、
(c ') and the center (O) of the portion (a') of the ring-shaped protrusion (a)
The part (a ″) on the opposite side is a part that rises like a wall, as is apparent from FIGS. 7B and 8, and these parts (a ′), (b ′), ( Diffuse reflection of light in c ′) and (a ″)
The diffused light significantly more than the diffused reflection in other parts, and the diffused reflected light in these parts is directly incident on the video camera (3). On the other hand, the same ring-shaped protrusion (a) and boundaries (b) and (c)
Most of the light diffusely reflected by the wall-shaped rising portions other than (a ′), (b ′), (c ′) and (a ″) is indicated by an arrow (d) in FIG. 9. The light does not directly enter the video camera (3), but the light that is diffusely reflected by the flat surface of the cap (1) as usual enters the video camera (3) and enters the cap (1). Output as video signal, electronic processing device
The data is input to (4) and processed as described above in this device (4) to determine whether the cap (1) has a defect, that is, whether the cap (1) is good or bad. The arcuate parts (a '), (a "), (b')
The angular range (ARC) of (c ') is smaller than 90 ° about the optical axis (A).
上述した如く、従来の装置では、キャップ(1)の表面の
部分(a′),(b′),(c′)及び(a″)で光の乱反射が、他
の部分に比して著しく、これ等の乱反射光がビデオカメ
ラ(3)へ直接入射するので、ビデオカメラ(3)に於て、上
記部分(a′),(b′),(c′)及び(a″)の部分が他の部分
より際立って明るくなり、これ等部分(a′),(b′),
(c′)及び(a″)の欠陥の有無の検査が不可能であるばか
りでなく、他の部分の検査に悪影響を与える。これを解
決しようとすれば、キャップ(1)の表面の著しい乱反射
を起す部分を除外した他の部分の検査をするか、或は光
源(2)よりの光のキャップ(1)の表面を照射する角度を種
々変えながら、同一キャップ(1)の表面を部分に分け
て、何度も検査を繰り返さなければならず、手間もかか
り、時間的に大きな損失があった。As described above, in the conventional device, the diffused reflection of light at the portions (a ′), (b ′), (c ′) and (a ″) on the surface of the cap (1) is significantly larger than that at other portions. Since these diffusely reflected lights are directly incident on the video camera (3), the parts (a ′), (b ′), (c ′) and (a ″) in the video camera (3) are Are significantly brighter than the other parts, and these parts (a '), (b'),
Not only is it impossible to inspect for defects in (c ′) and (a ″), but it also adversely affects the inspection of other parts. Examine the other part excluding the part that causes diffuse reflection, or change the angle of irradiating the surface of the cap (1) of the light from the light source (2) with different parts of the same cap (1) surface. The inspection had to be repeated many times, which was time-consuming and costly.
従って、本発明は、上記問題点を一掃した新規な物体の
表面検査装置を提供せんとするにある。Therefore, the present invention aims to provide a novel surface inspection apparatus for an object which eliminates the above problems.
本発明によれば、1個の光源よりの光を2方向に分ける
光分割手段と、この光分割手段よりの2方向の光をそれ
ぞれ被検査物の表面に斜め上方向から照射する光反射手
段とを用い、光源により照射される凹凸面を有する被検
査物の表面を撮像し、そのビデオ信号を電子処理装置に
より処理して被検査物の表面を検査する装置に於いて、
光源の前方に光反射手段を反射した光が被検査物の表面
中心部を中心とする下方略三角形状範囲及びこれと対称
な上方略三角形状範囲では被検査物の表面を照射しない
不透明部とし、その他の範囲では光が透過し被検査物の
表面を照射する透明部とした光学マスクを配し、2方向
の光は互いに直交する如くなし、この2方向の光により
被検査物の表面を照射し、そこに於ける光の乱反射が略
一様になるようにした。According to the present invention, the light splitting means for splitting light from one light source into two directions and the light reflecting means for irradiating the light in two directions from the light splitting means onto the surface of the object to be inspected obliquely from above. In the device for inspecting the surface of the object to be inspected by imaging the surface of the object to be inspected having the uneven surface irradiated by the light source, and processing the video signal by the electronic processing device,
The light reflected by the light reflecting means in front of the light source is an opaque portion that does not illuminate the surface of the object to be inspected in the lower substantially triangular area centered on the center of the surface of the object to be inspected and in the upper substantially triangular area symmetrical to this. In other areas, an optical mask is provided as a transparent portion that transmits light and irradiates the surface of the object to be inspected, and the light in the two directions is arranged so as to be orthogonal to each other. Irradiation was performed so that the diffuse reflection of light there was substantially uniform.
本発明では、被検査物(1)の凹凸のある表面を、特別な
光学マスク(6C)を有する1個の光源(2C)及びハーフミラ
ー(7A),ミラー(7B),(7C)の組合せで、上記表面をその
表面に於ける光の乱反射が略々一様となるように照射
し、この乱反射光をビデオカメラ(3)で受け、それより
のビデオ信号を電子処理装置(4)で処理して、上記被検
査物(1)の表面の欠陥の有無を検査する。In the present invention, a combination of one light source (2C) having a special optical mask (6C), a half mirror (7A), a mirror (7B), and (7C) is provided on the uneven surface of the inspection object (1). Then, the above surface is irradiated so that the diffused reflection of light on the surface is substantially uniform, the diffused reflected light is received by the video camera (3), and the video signal from it is received by the electronic processing device (4). After processing, the presence or absence of defects on the surface of the inspection object (1) is inspected.
以下、第1及び第2を参照して、本発明の一実施例を説
明する。尚、第1図に示す本発明の例に於いては、光電
変換センサ(ビデオカメラ)(3)及び電子処理装置(4)
は、第8図に示した従来例と全く同一のものを用い、ビ
デオカメラ(3)の被検査物の一例であるキャッフ(1)に対
する配置も、第8図に示す例と略々同一なので、それ等
は、簡単のため、第1図には示してない。即ち、第1図
は本発明の主要部のみを示している。An embodiment of the present invention will be described below with reference to the first and second embodiments. Incidentally, in the example of the present invention shown in FIG. 1, a photoelectric conversion sensor (video camera) (3) and an electronic processing device (4)
Is the same as the conventional example shown in FIG. 8, and the arrangement of the video camera (3) with respect to the cuff (1), which is an example of the object to be inspected, is almost the same as the example shown in FIG. , They are not shown in FIG. 1 for simplicity. That is, FIG. 1 shows only the main part of the present invention.
第1図に於て、(2A),(2B)は、夫々キャップ(1)の表面
に、光を斜め上方より照射する光源で、この例ではそれ
等の光軸(5A),(5B)が、キャップ(1)の中心(O)に於
て交わるように、その斜め上方に配置されている。又、
(6A),(6B)は、夫々光源(2A),(2B)の光投射面の前方に
配置された光学マスクである。In FIG. 1, (2A) and (2B) are light sources that irradiate the surface of the cap (1) with light obliquely from above, and in this example, their optical axes (5A) and (5B). Are arranged diagonally above the cap (1) so that they intersect at the center (O). or,
(6A) and (6B) are optical masks arranged in front of the light projection surfaces of the light sources (2A) and (2B), respectively.
今、光学マスク(6A)が無いとすると、光源(2A)よりの光
は、第8及び第9図に就いて説明した如く、キャップ
(1)の表面のリング状の突部(a)の、角範囲(ARC)が
90°よりは小さい円弧状の部分(a′),(a″)、境界
(b),(c)の部分(b′),(c′)で、他の部分に較べて著し
く乱反射され、直接ビデオカメラ(3)へ入射して、前述
の如く検査不能の原因となる。従って、第1図に示す本
発明の例では、光源(2A)の光投射面の前方に、光学マス
ク(6A)を設け、光源(2A)よりの光が、少なくとも部分
(a′),(a″),(b′)及び(c′)に入射しないようにな
す。勿論、光源(2A)よりの光は、部分(a′),(a″),及
び(b′),(c′)以外のキャップ(1)の表面等には入射す
る。Assuming that the optical mask (6A) is not present, the light from the light source (2A) will be emitted from the cap as described in FIGS. 8 and 9.
The angular range (ARC) of the ring-shaped protrusion (a) on the surface of (1) is
Arc-shaped parts (a ′), (a ″) smaller than 90 °, boundary
In parts (b ') and (c') of (b) and (c), they are significantly diffused compared to other parts, and are directly incident on the video camera (3), which causes inspection failure as described above. . Therefore, in the example of the present invention shown in FIG. 1, an optical mask (6A) is provided in front of the light projection surface of the light source (2A) so that the light from the light source (2A) is at least partially exposed.
(a '), (a "), (b'), and (c ') are not incident. Of course, the light from the light source (2A) is part (a'), (a"), and (a). It is incident on the surface of the cap (1) other than b ') and (c').
次に、本発明による光学マスク(6A)(又は(6B))の一例
を、その正面図である第2図を参照して説明する。Next, an example of the optical mask (6A) (or (6B)) according to the present invention will be described with reference to the front view of FIG.
第2図に示す光学マスク(6A)は、例えば略々正方形状の
ガラス等の透明板を、2個の対角線で4個の三角形状の
部分(6A1),(6A2),(6A3),(6A4)に分け、対向する2個
の三角形状の部分、この例では(6A2),(6A4)の部分を、
例えば黒色塗料等を用いて不透明(第2図に於て斜線で
示す)となし、(6A1),(6A3)は透明部としたものであ
る。The optical mask (6A) shown in FIG. 2 is, for example, a substantially square transparent plate made of glass or the like and has four triangular portions (6A1), (6A2), (6A3), (2A) with two diagonal lines. 6A4) and divide two facing triangular parts, (6A2) and (6A4) in this example,
For example, it is made opaque (shown by diagonal lines in FIG. 2) by using black paint or the like, and (6A1) and (6A3) are transparent parts.
上述した如き光学マスク(6A)を、第1図に示す如く、光
源(2A)の光投射面の前方に、不透明部(6A2),(6A4)が上
下方向に並び且つ光源(2A)の光投射面と平行となる如く
配置する。この場合、光学マスク(6A)の中心(0A)が、略
々光源(2A)の光軸(5A)に一致するようになす。従って、
光源(2A)よりの光は、光学マスク(6A)により部分的に遮
断され、キャップ(1)の表面の部分(a′),(a″),
(b′),(c′)を含み、光軸(5A)に関して略々対称な略々
鼓状の部分には少くとも到達せず、それ等部以外のキャ
ップ(1)の表面に到達し、そこで通常の如く乱反射さ
れ、キャップ(1)の上方に配置されたビデオカメラ(3)へ
入射し、それよりのビデオ信号が電子処理装置(4)によ
り処理され、キャップ(1)の表面の検査が行われる。こ
れは、上述の如く、従来の装置と全く同様である。As shown in FIG. 1, the opaque parts (6A2) and (6A4) are arranged in the vertical direction in front of the light projection surface of the light source (2A) and the light of the light source (2A) is placed on the optical mask (6A) as described above. Place it so that it is parallel to the projection surface. In this case, the center (0A) of the optical mask (6A) substantially coincides with the optical axis (5A) of the light source (2A). Therefore,
The light from the light source (2A) is partially blocked by the optical mask (6A), and the surface portions (a ′), (a ″) of the cap (1),
It does not reach at least a substantially drum-shaped portion that includes (b ′) and (c ′) and is substantially symmetrical with respect to the optical axis (5A), and reaches the surface of the cap (1) other than those portions. , Where it is diffusely reflected as usual and is incident on the video camera (3) arranged above the cap (1), and the video signal from it is processed by the electronic processing device (4) and the surface of the cap (1) is processed. The inspection is done. This is exactly the same as the conventional device as described above.
上述の如く、光学マスク(6A)を用いると、光源(2A)より
の光は、キャップ(1)の表面の部分(a′),(a″),(b′)
及び(c′)を含む鼓状の部分に到達しないので、これ等
部分の検査はできない。従って、本発明では、第1図に
示す如く、光源(2A)及び光学マスク(6A)の組合せの他
に、同様の光源(2B)及び光学マスク(6B)の組合せを、前
者より所定の角間隔、即ち円弧状の部分(a′),(a″)‥
‥の角範囲(ARC)の少くとも1/2以上、(180°−1/
2ARC)以下離れた位置に、前者と同様にキャップ(1)
の表面を照射する如く配置する。従って、光源(2B)及び
光学マスク(6B)の組合せにより、光源(2A)及び光学マス
ク(6A)の組合せによっては光が到達しなかったキャップ
(1)の表面の部分(a′),(a″),(b′)及び(c′)を含む
鼓状の部分が照射される。尚、光学マスク(6B)の存在に
より、光源(2B)にとって光源(2A)に対する部分(a′),
(a″),(b′)及び(c′)に相当するキャップ(1)の表面の
部分には、光源(2B)よりの光は到達しないが、(これ等
部分は光源(2A)及び光学マスク(6A)の組合せにより、既
に照射されている)、その他の部分には、光源(2A)より
の光に重畳して到達する。As described above, when the optical mask (6A) is used, the light from the light source (2A) is emitted from the surface portion (a '), (a "), (b') of the cap (1).
Since the drum-shaped portion including (c ') and (c') is not reached, these portions cannot be inspected. Therefore, in the present invention, as shown in FIG. 1, in addition to the combination of the light source (2A) and the optical mask (6A), a similar combination of the light source (2B) and the optical mask (6B) is provided at a predetermined angle from the former. Spacing, that is, arcuate parts (a '), (a ") ...
The angular range (ARC) of at least 1/2 or more, (180 ° -1 /
2ARC) and place the cap (1) in the same position as the former.
Arrange so as to illuminate the surface of. Therefore, due to the combination of the light source (2B) and the optical mask (6B), the light did not reach depending on the combination of the light source (2A) and the optical mask (6A).
The drum-shaped portion including the surface portions (a ′), (a ″), (b ′) and (c ′) of (1) is irradiated. Due to the presence of the optical mask (6B), the light source ( For 2B), the part (a ′) for the light source (2A),
Although the light from the light source (2B) does not reach the surface portion of the cap (1) corresponding to (a ″), (b ′) and (c ′), (these portions are the light source (2A) and It has already been irradiated by the combination of the optical mask (6A)), and reaches the other portions by being superimposed on the light from the light source (2A).
上述の如く、本発明によれば、キャップ(1)の上面の突
部の部分(a′),(a″),(b′),(c′)の如く、1個の光
源のみよりの入射光を、他の部分に比して著しく乱反射
させ、キャップ(1)の表面検査を不可能とする部分
(a′),(a″),(b′),(c′)には、光学マスクを用いて
この光源よりの光を照射するようになすも、光学マスク
を有する他の光源を用いて照射するようにしたので、リ
ング又は円弧状の凹凸部を有するキャップ(1)の表面の
検査を、一回の検査で容易且つ確実に行い得る。As described above, according to the present invention, only one light source is used, such as the protrusions (a ′), (a ″), (b ′) and (c ′) on the upper surface of the cap (1). The part that makes incident light remarkably diffused compared to other parts and makes surface inspection of the cap (1) impossible.
For (a ′), (a ″), (b ′), and (c ′), an optical mask is used to irradiate light from this light source, but other light sources having an optical mask are used. Since the irradiation is performed, the surface of the cap (1) having the ring-shaped or arc-shaped concavo-convex portion can be easily and reliably inspected in one inspection.
又、光学マスク(6A),(6B)は、第2図に示すパターンに
限定する必要はなく、要は、少くとも不要に著しい乱反
射を起こす被検査物の表面の部分に光を照射しない。例
えば第3図に示す如く、中心(0A)に関し、上下対称の鼓
状の斜線で示す不透明部分(6a1),(6a2)を有するもので
もよい(他の部分(6a3),(6a4)は透明)。Further, the optical masks (6A) and (6B) do not have to be limited to the patterns shown in FIG. 2, and the point is that light is not applied to the surface portion of the object to be inspected that causes unnecessary diffused reflection at least unnecessarily. For example, as shown in FIG. 3, it may have opaque portions (6a1) and (6a2) indicated by vertically symmetrical squiggle lines with respect to the center (0A) (other portions (6a3) and (6a4) are transparent). ).
第4図は、本発明の他の例の第1図と同様の主要部の上
面図である。この例では、光源(2a),(2B)として、夫々
実質的に平行光を発射する光源を使用し、両者の光軸(5
A),(5B)が、キャップ(1)の中心(O)に於て、実質的
に直交するように配置する。尚、光学マスク(6A),(6B)
は、例えば第2図に示すものを、第1の例と同様に配置
する。FIG. 4 is a top view of a main portion similar to FIG. 1 of another example of the present invention. In this example, as the light sources (2a) and (2B), light sources that emit substantially parallel light are used, and the optical axes (5
A) and (5B) are arranged so as to be substantially orthogonal to each other at the center (O) of the cap (1). Optical masks (6A), (6B)
For example, the arrangement shown in FIG. 2 is arranged in the same manner as in the first example.
第4図の例によれば、光源(2A)及び光学マスク(6A)の組
合せにより、キャップ(1)の円形の表面のうち、その中
心(O)及び光源(2A)の光軸(5A)に関して対称な略々90
°の角範囲の扇形部分(1A),(1A′)が照射されるも、キ
ャップ(1)の表面のうち、その中心(O)及び他方の光
源(2B)の光軸(5B)に関して対称な残りの略々90°の角範
囲の扇形部分(1B),(1B′)は照射されない。この場合、
前述した著しい乱反射を起すキャップ(1)の表面の壁状
に立ち上がる円弧状の部分(a′),(b′)(a″)及び(a″)
は、光源(2A)によっては照射されない扇形部分(1B)及び
(1B′)内に夫々存在するので、キャップ(1)の表面の検
査不能を引き起すことはない。同様に、光源(2B)及び光
学マスク(6B)の組合せにより、光源(2A)及び光学マスク
(6A)の組合せでは照明されなかった扇形部分(1B),(1
B′)が照明されるも、残りの扇形部分(1A),(1A′)は照
明されない。勿論、光源(2B)及び光学マスク(6B)の組合
せにとって著しい乱反射を起す部分(a′),(b′),
(c′)及び(a″)は、この組合せによって照明されない部
分(1A′),(1A)内に夫々在るので、キャップ(1)の表面
の検査不能を引き起すことはない。According to the example of FIG. 4, the center (O) of the circular surface of the cap (1) and the optical axis (5A) of the light source (2A) are formed by combining the light source (2A) and the optical mask (6A). About 90 symmetrical about
Even though the fan-shaped parts (1A) and (1A ') in the angular range of ° are irradiated, they are symmetrical with respect to the center (O) of the surface of the cap (1) and the optical axis (5B) of the other light source (2B). The remaining fan-shaped parts (1B) and (1B ′) in the angular range of approximately 90 ° are not irradiated. in this case,
Arc-shaped portions (a ′), (b ′) (a ″) and (a ″) that rise up like a wall on the surface of the cap (1) that causes the above-mentioned remarkable diffuse reflection.
Is a fan-shaped part (1B) that is not illuminated by the light source (2A) and
Since they are present respectively in (1B ′), the surface of the cap (1) cannot be inspected. Similarly, by combining the light source (2B) and the optical mask (6B), the light source (2A) and the optical mask
The fan-shaped parts (1B) and (1
Although B ') is illuminated, the remaining fan-shaped portions (1A) and (1A') are not illuminated. Of course, for the combination of the light source (2B) and the optical mask (6B), the portions (a '), (b'), which cause remarkable diffuse reflection,
Since (c ′) and (a ″) are present in the portions (1A ′) and (1A) which are not illuminated by this combination, respectively, they do not cause the surface of the cap (1) to be inspectable.
上述した如く、第4図に示す本発明の例によれば、キャ
ップ(1)の全表面は、光源(2A)及び光学マスク(6A)の組
合せと、光源(2B)及び光学マスク(6B)の組合せとによっ
て、別々に換言すれば略々重複することなく一様に照射
されるので、キャップ(1)の表面に於ける入射光の通常
の乱反射は、略々一様で、キャップ(1)の表面の検査が
より正確に行い得る。As described above, according to the example of the present invention shown in FIG. 4, the entire surface of the cap (1) has a combination of the light source (2A) and the optical mask (6A), the light source (2B) and the optical mask (6B). Since the irradiation is performed separately and in other words, the light is uniformly emitted without substantially overlapping, the normal diffuse reflection of incident light on the surface of the cap (1) is almost uniform, and The surface inspection can be performed more accurately.
さて、第1及び第4図に示す本発明の例では、2個の光
源(2A),(2B)を使用したが、本発明は、2個の光源では
なく、1個の光源を従来からある適宜な光分割及び光反
射手段を用いることで実施し得る。Now, in the example of the present invention shown in FIGS. 1 and 4, two light sources (2A) and (2B) are used, but the present invention does not use two light sources but one light source from the prior art. This can be done by using some suitable light splitting and reflecting means.
以下、その一例を第5図を用いて説明する。An example thereof will be described below with reference to FIG.
第5図Aはその一例の主要部の上面図、第5図Bはその
斜視図である。この例では、例えば上記光学マスク(6A)
又は(6B)と同様の光学マスク(6C)を同様にその前面に有
する1個の光源(2C)と、1個の光分割手段、例えばハー
フミラー(7A)と、2個の光反射手段、例えばミラー(7
B),(7C)とを用いて、例えば第4図に示す例と同様に、
キャップ(1)の上面を照射する。尚、光源(2C)は、略々
平行光を発射する。FIG. 5A is a top view of a main part of the example, and FIG. 5B is a perspective view thereof. In this example, for example, the optical mask (6A)
Alternatively, one light source (2C) also having an optical mask (6C) similar to (6B) on its front surface, one light splitting means such as a half mirror (7A) and two light reflecting means, For example mirror (7
B) and (7C), for example, as in the example shown in FIG.
Irradiate the top surface of the cap (1). The light source (2C) emits substantially parallel light.
以下、この本発明の例を詳細に説明する、光源(2C)は、
その光軸(5C)がキャップ(1)の上面と略々平行且つその
中心軸(X)と直交する如く、キャップ(1)の上方に配
置される。ハーフミラー(7A)を、その鏡面(7A1)が略々
垂直且つキャップ(1)の中心軸(X)上に在り、その中
心(7A2)が光源(2C)の光軸(5C)及び中心軸(X)と交
り、更に鏡面(7A1)が光軸(5C)と略々45°の角を持って
交わる如く配置する。ミラー(7B)をその中心(7B2)が光
源(2C)の光軸(5C)と、ハーフミラー(7A)に関し光源(2C)
と反対側で交わり、その鏡面(7B1)は、ハーフミラー(7
A)を通過した光源(2C)よりの光がそこで全反射し、キャ
ップ(1)の上面に、例えば第4図の例の光源(2A)よりの
光と同様にキャップ(1)へ到達するように、光軸(5C)に
対して直交し且つ下方へ傾斜して配置する。又は、他方
のミラー(7C)を、その中心(7C2)が、光源(2C)の光軸(5
C)とハーフミラー(7A)の中心(7A2)に於て略々直交す線
分(7C3)の延長線と交わり、その鏡面(7C1)は、ハーフミ
ラー(7A)で反射された光源(2C)よりの光がその鏡面(7C
1)で再び反射され、キャップ(1)の上面に、例えば第4
図の例の光源(2B)よりの光と同様にキャップ(1)へ到達
する如く、上記線分(7C3)に対して直交し且つ下方に傾
斜して配置する。Hereinafter, this example of the present invention will be described in detail, the light source (2C) is
It is arranged above the cap (1) so that its optical axis (5C) is substantially parallel to the upper surface of the cap (1) and is orthogonal to its central axis (X). The mirror surface (7A1) of the half mirror (7A) is substantially vertical and is on the central axis (X) of the cap (1), and the center (7A2) is the optical axis (5C) and central axis of the light source (2C). It is placed so that it intersects with (X) and the mirror surface (7A1) intersects the optical axis (5C) at an angle of about 45 °. The center (7B2) of the mirror (7B) is the light axis (5C) of the light source (2C) and the half mirror (7A) is the light source (2C).
And the mirror surface (7B1) is half mirror (7B1).
Light from the light source (2C) that has passed through (A) is totally reflected there, and reaches the upper surface of the cap (1), for example, the light from the light source (2A) in the example of FIG. 4 to the cap (1). As described above, they are arranged orthogonal to the optical axis (5C) and inclined downward. Or, the other mirror (7C), the center (7C2), the optical axis (5C of the light source (2C)
C) and the center (7A2) of the half mirror (7A) intersect with the extension line of the line segment (7C3) that is substantially orthogonal to each other, and the mirror surface (7C1) is the light source (2C which is reflected by the half mirror (7A). ) From the mirror surface (7C
It is reflected again at 1) and is reflected on the upper surface of the cap (1), for example
As in the case of the light from the light source (2B) in the example in the figure, the light source (2B) is arranged so as to reach the cap (1) at right angles to the line segment (7C3) and inclined downward.
従って、第5図に示す例に於ては、光源は1個ではある
が、ハーフミラー(7A)の作用のもと、ミラー(7B)及び(7
C)があたかも、第4図の例の2個の光源(2A)及び(2B)と
同様の作用をする。従って、その作用効果は、第4図の
例と略々同一である。Therefore, in the example shown in FIG. 5, although there is only one light source, under the action of the half mirror (7A), the mirrors (7B) and (7
C) acts as if it were the two light sources (2A) and (2B) in the example of FIG. Therefore, the function and effect are almost the same as those in the example of FIG.
尚、第5図の例では、同図に示す如く、光電変換センサ
(3)は、ハーフミラー(7A)の下方に配置される。In the example of FIG. 5, as shown in FIG.
(3) is arranged below the half mirror (7A).
第6図A及びBは、夫々本発明の更に他の実施例の主要
部の上面図及び斜視図である。第6図の例は第5図の例
と、その構成要素は同じである。従って、第6図に於
て、第5図と同一符号は互に同一素子を示す。第6図の
例の第5図の例に対する主たる相違は、ミラー(7B)及び
(7C)の傾斜各が異っていることと、光源(2C)の光軸(5C)
が光電変換センサ(3)の光軸又はキャップ(1)の中心軸
(X)より外れていることとである。6A and 6B are respectively a top view and a perspective view of a main part of still another embodiment of the present invention. The example of FIG. 6 has the same components as the example of FIG. Therefore, in FIG. 6, the same symbols as in FIG. 5 indicate the same elements as each other. The main difference between the example of FIG. 6 and the example of FIG. 5 is the mirror (7B) and
The inclination of (7C) is different, and the optical axis (5C) of the light source (2C)
Is off from the optical axis of the photoelectric conversion sensor (3) or the central axis (X) of the cap (1).
即ち、第6図Aに示す如く、ミラー(7B)の鏡面(7B1)
を、光源(2C)の光軸(5C)に対して略々45°傾けると共
に、ミラー(7C)の鏡面(7C1)を線分(7C3)に対して約45°
傾ける。従って、両ミラー(7B)及び(7C)の鏡面(7B1)及
び(7C1)は下方へ傾斜していることを除けば、互いに平
行である。又、両鏡面(7B1)及び(7C1)は、そこで反射さ
れた光が、第6図Bに示す如く、その下方に配置されて
いるキャップ(1)を照射する如く、光軸(5C)及び線分(7C
3)に対して下方へ傾斜していることは、勿論である。こ
の場合も、光源(2C)より出て、ハーフミラー(7A)により
2方向に分けられ、夫々両鏡面(7B1)及び(7C1)で反射さ
れた光は、キャップ(1)の中心(O)で互に略々直交す
る如くキャップ(1)の表面を照射することは、第4図及
び第5図の例と同様である。又、光電変換センサ(3)
は、キャップ(1)の中心軸(X)とその光軸が一致する
如く配置される。従って、第6の例と第4図及び第5図
の例との作用効果も、略々同一である。That is, as shown in FIG. 6A, the mirror surface (7B1) of the mirror (7B)
Is tilted approximately 45 ° with respect to the optical axis (5C) of the light source (2C), and the mirror surface (7C1) of the mirror (7C) is approximately 45 ° with respect to the line segment (7C3).
Tilt. Therefore, the mirror surfaces (7B1) and (7C1) of both mirrors (7B) and (7C) are parallel to each other except that they are inclined downward. Also, the two mirror surfaces (7B1) and (7C1) have optical axes (5C) and (7C1) so that the light reflected there may irradiate the cap (1) disposed therebelow, as shown in FIG. 6B. Line segment (7C
Of course, it is inclined downward with respect to 3). Also in this case, the light emitted from the light source (2C), divided into two directions by the half mirror (7A), and reflected by both mirror surfaces (7B1) and (7C1), respectively, is the center (O) of the cap (1). Irradiating the surface of the cap (1) so that they are substantially orthogonal to each other is the same as in the example of FIGS. 4 and 5. Also, photoelectric conversion sensor (3)
Are arranged so that the central axis (X) of the cap (1) and its optical axis coincide with each other. Therefore, the operational effects of the sixth example and the examples of FIGS. 4 and 5 are substantially the same.
尚、第5及び第6の例に於ては、ハーフミラー(7A),ミ
ラー(7B),(7C)等は、図示せずも、適当な調製支持手段
により支持されると共に、その各角度が調製され得る。In the fifth and sixth examples, the half mirrors (7A), mirrors (7B), (7C), etc. are supported by suitable adjusting and supporting means (not shown), and their respective angles are Can be prepared.
又、光学マスクは、光源(2C)の前面に設ける代りに、ハ
ーフミラー(7A)の鏡面の前面の配置するか、或は各ミラ
ー(7B),(7C)の鏡面の前面に設けるようにしても良い。Also, instead of installing the optical mask on the front surface of the light source (2C), it should be placed on the front surface of the mirror surface of the half mirror (7A), or on the front surface of the mirror surface of each mirror (7B), (7C). May be.
尚、第5図及び第6図の例に於ても、光電変換センサ
(3)の出力が電子処理装置(4)により処理されて、被検査
物体の表面の欠陥の検査が行われるとは、勿論である。Incidentally, in the example of FIG. 5 and FIG. 6 also, the photoelectric conversion sensor
Of course, the output of (3) is processed by the electronic processing device (4) to inspect for defects on the surface of the object to be inspected.
上述の如く、本発明によれば、特殊な光学マスクを用い
た光源により、凹凸を有する被検査物の表面に於ける乱
反射が一様になるようこの表面を照射したので、この様
な被検査物の全面を1回の検査で、容易且つ確実に検査
し得る。As described above, according to the present invention, the light source using the special optical mask irradiates the surface of the inspected object having unevenness so that the diffused reflection is uniform on the surface of the inspected object. The entire surface of the object can be inspected easily and surely by one inspection.
尚、第5及び第6図の例によれば、第1及び第4図の例
の効果に加えて、高価な光源及び光学マスクの組合せが
1個ですむ。According to the examples of FIGS. 5 and 6, in addition to the effects of the examples of FIGS. 1 and 4, only one expensive light source and optical mask combination is required.
第1図は本発明の一例の主要部の略線図、第2図及び第
3図は各々第1図に示す光学マスクの一例の正面図、第
4,5及び6図は夫々本発明の他の例の主要部の略線
図、第7図A及びBは被検査物の上面及び断面図、第8
図は従来の表面検査装置の略線図、第9図はその動作説
明用の略線図である。 図に於て、(1)は被検査物、(2A),(2B),(2C)は光源、
(3)は光電変換センサ、(4)は電子処理装置、(6A),(6
B),(6C)は光学マスク、(7A)は光分割手段、(7B),(7C)
は光反射手段を夫々示す。FIG. 1 is a schematic diagram of a main part of an example of the present invention, FIGS. 2 and 3 are front views of an example of the optical mask shown in FIG. 1, and FIGS. FIG. 7A and FIG. 7B are schematic diagrams of the main part of another example, FIG.
FIG. 9 is a schematic diagram of a conventional surface inspection apparatus, and FIG. 9 is a schematic diagram for explaining the operation thereof. In the figure, (1) is the object to be inspected, (2A), (2B), (2C) are the light sources,
(3) is a photoelectric conversion sensor, (4) is an electronic processing device, (6A), (6
B) and (6C) are optical masks, (7A) is a light splitting means, (7B) and (7C)
Denote light reflecting means, respectively.
Claims (2)
割手段と、この光分割手段よりの2方向の光をそれぞれ
被検査物の表面に斜め上方向から照射する光反射手段と
を用い、上記光源により照射される凹凸面を有する上記
被検査物の表面を撮像し、そのビデオ信号を電子処理装
置により処理して被検査物の表面を検査する装置に於い
て、 上記光源の前方に上記光反射手段を反射した光が被検査
物の表面中心部を中心とする下方略三角形状範囲及びこ
れと対称な上方略三角形状範囲では上記被検査物の表面
を照射しない不透明部とし、その他の範囲では光が透過
し上記被検査物の表面を照射する透明部とした光学マス
クを配し、 上記2方向の光は互いに直交する如くなし、この2方向
の光により上記被検査物の表面を照射し、そこに於ける
光の乱反射が略一様になるようにしたことを特徴とする
表面検査装置。1. Light splitting means for splitting light from one light source into two directions, and light reflecting means for irradiating the light in two directions from the light splitting means onto the surface of the object to be inspected obliquely from above. In the device for inspecting the surface of the object to be inspected by imaging the surface of the object to be inspected, which has an uneven surface irradiated by the light source, and processing the video signal with an electronic processing device, An opaque portion that does not illuminate the surface of the object to be inspected in a lower substantially triangular area centered on the center of the surface of the object to be inspected In the other ranges, an optical mask is provided as a transparent portion that transmits light and irradiates the surface of the object to be inspected, and the light in the two directions is arranged so as to be orthogonal to each other. Irradiate the surface of the Surface inspection apparatus characterized by irregular reflection of was made to be substantially uniform.
を特徴とする特許請求の範囲第1項記載の表面検査装
置。2. The surface inspection apparatus according to claim 1, wherein the one light source emits substantially parallel light.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14377987A JPH068790B2 (en) | 1987-06-09 | 1987-06-09 | Surface inspection device |
| US07/179,052 US4868404A (en) | 1987-04-23 | 1988-04-08 | Surface inspection apparatus using a mask system to monitor uneven surfaces |
| CA000563887A CA1283964C (en) | 1987-04-23 | 1988-04-12 | Surface inspection apparatus |
| AU14593/88A AU595107B2 (en) | 1987-04-23 | 1988-04-13 | Surface inspection apparatus |
| GB8809128A GB2204125B (en) | 1987-04-23 | 1988-04-18 | Surface inspection apparatus |
| FR8805378A FR2614418A1 (en) | 1987-04-23 | 1988-04-22 | APPARATUS FOR INSPECTING SURFACES |
| DE3813662A DE3813662A1 (en) | 1987-04-23 | 1988-04-22 | SURFACE TESTER |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14377987A JPH068790B2 (en) | 1987-06-09 | 1987-06-09 | Surface inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63307337A JPS63307337A (en) | 1988-12-15 |
| JPH068790B2 true JPH068790B2 (en) | 1994-02-02 |
Family
ID=15346815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14377987A Expired - Lifetime JPH068790B2 (en) | 1987-04-23 | 1987-06-09 | Surface inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068790B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5959430B2 (en) * | 2012-12-21 | 2016-08-02 | 倉敷紡績株式会社 | Bottle cap appearance inspection device and appearance inspection method |
-
1987
- 1987-06-09 JP JP14377987A patent/JPH068790B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63307337A (en) | 1988-12-15 |
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