JPH0616108B2 - Semiconductor radiation position detector - Google Patents

Description

TECHNICAL FIELD The present invention relates to an improvement of a semiconductor radiation position detecting device, and this semiconductor radiation position detecting device is, for example, a scintillation camera normally used in nuclear medicine diagnosis. And emission CT equipment (Computer tomography equipment)
It is useful to obtain a distribution image of a specific RI nuclide by detecting the two-dimensional position of radiation having a specific energy as described above, or is used in other fields such as science and engineering.

(B) Conventional Technology In a conventional two-dimensional semiconductor radiation position detecting device, for example, when the detection pixels are arranged in a matrix of n × n, providing a preamplifier for each pixel is very expensive when n is large. Due to the complexity, the rectangular strip electrode method (Checker-Bo
ard-Type), a signal line is shared for each row and each column so that a signal can be extracted commonly for each row and each column. In this case, in addition to the method of providing a preamplifier for each row and each column (that is, the number of preamplifiers is 2n), a method of further reducing preamplifiers such as a resistance charge division method or a time difference measurement method using a delay line (for example, 4) etc. Of these, the method in which a preamplifier is provided for each row and column is essentially the best in spatial resolution, but in the past, in general, in addition to the preamplifier, a waveform shaping amplifier and a discriminator (a single wave height discriminator is used. You can also use a channel analyzer)
Is required for each row and each column, and if n is too large, the circuit becomes complicated and the cost becomes high.

Next, a conventional example of the semiconductor radiation position detecting device of the type in which a preamplifier is provided for each row and each column will be described.
Here, for convenience of explanation, it is assumed that the detection pixels are in a 16 × 16 matrix. FIG. 1 shows a semiconductor detection unit using a typical orthogonal strip electrode system (Checker-Board-Type). The radiation detection semiconductor substrate 1 is a Ge or Si elemental semiconductor or a compound such as CdTe or HgI ₂ . It is made of a semiconductor, and the ground side electrodes (including the case of virtual ground) 21 to 21.
6 and the bias applying side electrodes 31 to 316 are sandwiched by parallel plate electrodes facing each other, and radiation to be measured such as gamma rays passes through a collimator (not shown) and either one of the electrode surfaces (the bias applying side electrode surface in FIG. 1). ) (Especially in the case of a commonly used parallel porous collimator, it is incident from a direction perpendicular to the electrode surface). The semiconductor substrate 1 is a depletion layer of a high-purity semiconductor such as Ge or Si, or an intrinsic region compensated by lithium ions, and the electrodes 21 to 216 and 31 to 316 are p ^+.
Or having an n ⁺ layer, but with Hgl ₂ and high resistance CdT
In the case of e, since the insulating property is high, the substrate 1 is the crystal itself,
The electrodes 21 to 216 and 31 to 316 are formed by vapor deposition of Pd, Ge or the like, Acadak coating, or the like.

The ground side electrodes are 16 strip-shaped electrodes 2 divided in the X direction.
1 to 216, each of the electrodes 21 to 216 is connected to each of the corresponding preamplifiers 6a1 to 6a16 by DC coupling, and the voltage outputs VX1 to VX16 are obtained from them. The ground electrodes 21 to 216 may be actually grounded through a resistor or may be virtually grounded by the preamplifiers 6a1 to 6a16. The bias applying electrode is
It is composed of 16 strip-shaped electrodes 31 to 316 divided in the Y direction orthogonal to the X direction, and each of the electrodes 31 to 316 is connected to a high voltage power source through a corresponding bias resistor 41 to 416, and Each capacitor 51-51
6 are connected to corresponding preamplifiers 6b1 to 6b16 by AC coupling, respectively, and voltage outputs VY1 to VY16 are obtained. Therefore, when the radiation is absorbed somewhere in the semiconductor substrate 1, a large number of electron-hole pairs having an amount proportional to the energy of the radiation are generated, and the electron group and the hole group move in opposite directions, The closest electrode (that is, any of the electrodes 21 to 216 and any of the electrodes 31 to 316) approaches and arrives. Preamplifiers 6a1-6a1
6, 6b1 to 6b16 are, for example, charge-sensitive preamplifiers, and the output stage thereof may include a voltage amplification stage or a waveform shaping voltage amplification stage. Due to the above radiation, the electrodes 2i and 3j closest to the incident position (where i and j are 1 ≦
An electric charge is induced in (i, j ≦ 16), and as a result, voltage signals are output from the corresponding preamplifiers 6ai and 6bj, whereby the incident position of the radiation can be identified.

Preamplifier outputs VX1 to VX16, VY1 to VY16
The processing circuit of 1 has been conventionally constructed as shown in FIG. In FIG. 2, outputs VX1 to VX16 of each preamplifier having position information in the X direction are input to corresponding waveform shaping amplifiers 7a1 to 7a16, and output signal VE1.
~ VE16 are obtained respectively. Each of the discriminators 8a1 to 8a16 is composed of a comparator or the like, and outputs the digital pulse signals Px1 to Px16, respectively, only when the input signals VE1 to VE16 exceed a preset threshold voltage VTH. The digital pulse signals Px1 to Px16 are input to the control side of the OR circuit 9a, the latch circuit 11a, and the analog multiplexer 15. When at least one of the digital pulse signals Px1 to Px16 is output, the pulse signal T1x is output from the OR circuit 9a, this signal T1x is input to the coincidence counting and timing control circuit 10, and normally the corresponding signal T2x is output. The coincidence counting and timing control circuit 10 quickly transmits the latch circuit 11a to fix the contents of the latch circuit 11a (the latch circuit 11a is composed of a D-type latch circuit or a D-type flip-flop). The output of the fixed latch circuit 11a is
While being inputted to the encoder 12a and coded and then inputted to the latch circuit 13a, it is also inputted to the coincidence counting and timing control circuit 10, and the digital pulse signal P
It is determined whether or not two or more of x1 to Px16 are not simultaneously output (for example, a parity generator / checker IC is used for identification).

Similarly, outputs VY1 to VY16 of the respective preamplifiers having position information in the Y direction are corresponding waveform shaping amplifiers 7b1 to 7b7.
The signals VE1 'to VE1 obtained by inputting to b16
6'is a corresponding discriminator 8b1 to 8b1
8b16, and the digital pulse signals Py1 to Py16 are output only when the threshold voltage VTH is exceeded. This digital pulse signal Py1
The Py16 is input to the OR circuit 9b and the latch circuit 11b, and when at least one of the digital pulse signals Py1 to Py16 is output, the OR circuit 9b outputs a pulse signal T1y, and this signal T1y is used for simultaneous counting and timing control. The corresponding signal T2y, which is input to the circuit 10, is normally immediately transmitted from the coincidence counting and timing control circuit 10 to the latch circuit 11b to fix the content of the latch circuit 11b. The output of the fixed latch circuit 11b is input to the encoder 12b, coded, and then input to the latch circuit 13b, while being also input to the coincidence counting and timing control circuit 10, among the digital pulse signals Py1 to Py16. Identify whether two or more are output at the same time.

The signals VE1 to VE16 are input to the data side of the analog multiplexer 15, and the analog multiplexer 15 has the discriminators 8a1 to 8a16.
Of the waveform shaping amplifier corresponding to the discriminator that outputs the pulse signal, that is, the waveform shaping amplifier 7a1
7a16 is composed of an analog switch for passing only one of the output signals to the subsequent main amplifier 16, and compared with the case where each of the signals VE1 to VE16 is simply added and input to the main amplifier 16. It serves to reduce noise (i.e. prevent a reduction in energy resolution).

The energy signal Z, which is the output of the main amplifier 16, is input to the wave height analyzer 17, and it is determined whether or not it is included in one or a plurality of preset energy ranges (windows). If so, the signal S is input to the simultaneous counting and timing control circuit 10.

In the coincidence counting and timing control circuit 10, only one of the signals Px1 to Px16 is output, only one of the signals Py1 to Py16 is output, a signal related to the signal T1x, and a signal T1y. It is determined whether or not the following four conditions are satisfied, that is, the signal with respect to is simultaneous within a certain time range (that is, coincidence counting), the signal S is output from the wave height analyzer 17, and
When all of these are satisfied, the signal T3 is output to fix the contents of the latch circuits 13a and 13b, and after a certain time, an unblank signal is output and input to the CRT display device 18. Fixed latch circuits 13a, 13
b for each output Dig. X and Dig. Y is a digital position signal, and each is a D / A converter and driver 14
a, 14b are converted to analog position signals X and Y, and CR
It is input to the T display device 18, and a two-dimensional image is displayed.

Although omitted in FIG. 2 for simplification of description, in the latch circuits 13a and 13b, the coded signals output from the encoders 12a and 12b are input to the high-order bit section to generate a random number generator (for example, (It can be configured using a counter, etc.) is input to the lower bit part and both are D / A converted to prevent the image from concentrating on each pixel and make it easier to see. Is necessary for.

In the coincidence counting and timing control circuit 10, the signal T1
x (or T1y) is input and the signal T2y (or T
2y) occurs, even if the signal T1x (or T1y) resulting from another event that occurs subsequently is input, reception is prohibited during the processing time relating to the previous event, that is, the signal T2x (or T2x (or T2y) is not generated, and the signal G is applied to the analog multiplexer 15 to fix the switch state for a certain time. Furthermore, any one of the above four conditions
If any of the conditions is not satisfied, the reset state is immediately returned.

Instead of FIG. 2, the waveform shaping amplifiers 7a1 to 7a16 may not be used for waveform shaping for the energy signal as shown in FIG. 3, and only the main amplifier 16 may be used.

Further, the waveform shaping amplifiers 7a1 to 7a1 in FIG.
6 is a waveform shaping amplifier (for example, having a short time constant) for input to the discriminators 8a1 to 8a16,
Energy signal or analog multiplexer 15
Shaping amplifier for input to (for example, long time constant)
It is also conceivable to divide it into two types.

(C) Purpose The present invention is a semiconductor that simplifies the circuit when the number of rows and columns is large in the type in which the preamplifier is provided for each row and each column as described above and, as a result, reduces the cost. An object is to provide a radiation position detecting device.

(D) Configuration In the semiconductor radiation position detecting device according to the present invention,
An assembly in which a plurality of detection pixels sandwiching a radiation detection semiconductor substrate between two electrodes facing each other are arranged in a matrix, and a preamplifier commonly provided for each row of the matrix from one of these counter electrodes. Row direction signal extraction means for extracting the output for each row via the column direction signal extraction means for extracting the output for each column from the other of the counter electrodes through a preamplifier provided in common for each column of the matrix. A first row for each block into which a plurality of outputs for each row extracted by the row-direction signal extracting means are grouped into a plurality of blocks and a plurality of outputs in each block are guided. Direction adding means, first row direction wave height discriminating means for each block to which respective outputs of the first row direction adding means are input, and the first row direction wave height valve The output from the means is input, a first row representing whether the output of any row block
The first row-direction encoder that obtains the code signal of the above and the output in which the plurality of outputs in each block are numbered in the same order for all the blocks related to the output for each row and the numbered numbers are the same Second row direction addition means for each number for adding each other, second row direction wave height discrimination means for each number to which the output of each of the second row direction addition means is input, and A second row-direction encoder that receives the output from the second row-direction wave height discriminating means and obtains a second code signal in the row direction that represents which number of the output, and these first and second code signals Row-direction position signal output means for obtaining a row-direction position signal indicating in which row an output has occurred and a plurality of outputs for each column extracted by the column-direction signal extraction means are grouped into a plurality of blocks. Divided into First column direction addition means for each block to which a plurality of outputs in each block are guided, and first column for each block to which each output of the first column direction addition means is input Directional wave height discriminating means, and an output from the first columnar wave height discriminating means is input, and a column direction first indicating the output of which column direction block is output.
And a first column direction encoder that obtains the code signal of the above, and an output in which the same number is assigned to each of the multiple outputs in each block in the same order for all the blocks related to the output for each column described above. Second column direction addition means for each number for adding each other, second column direction wave height discrimination means for each number to which an output of each of the second column direction addition means is input, A second column-direction encoder, which receives the output from the second column-direction wave height discriminating means and obtains a second code signal in the column direction that represents which number of the output, and these first and second code signals A column direction position signal output means for obtaining a column direction position signal indicating in which column an output has occurred, and an output from one side of the opposing electrodes and an output from the other side thereof are within a predetermined time range. Whether it is simultaneous within It is characterized in that it is provided with coincidence counting means for outputting and wave height analyzing means for discriminating whether or not the energy signal obtained from at least one side of the counter electrode is within one or more predetermined energy ranges. Has become.

(E) Embodiment FIG. 4 shows an embodiment of the present invention.
Similarly to the case where the signal processing in the X direction and the Y direction in the circuit shown in the figure is the same except for the relationship of the energy signal, the signal processing in the X direction and the Y direction is the same in the embodiments described below. For simplicity, FIG. 4 shows only the signal processing in the X direction. The main amplifier 16 and the wave height analyzer 17 are the same as in the case of FIG. 2, and the latch circuits 13a and 13b and the subsequent parts are also the same as in the case of FIG. In particular, FIG. 4 shows that each of the preamplifier outputs VX1 to VX16 having position information in the X direction is grouped into four, and VX1 to VX are combined.
4 blocks, VX5-VX8 blocks, VX9-V
X12 block, VX13 to VX16 block 4
An example is shown in which it is divided into two blocks.

The signals VX1 to VX4 in the first block are added by the adder 100.
a1 and its added output is the waveform shaping amplifier 107.
It is input to a1 and an output signal VE1u is obtained. Similarly, the signals VX5 to VX8 in the second block, the signals VX9 to VX12 in the third block, and the signals VX13 to VX16 in the fourth block correspond via adders 100a2, 100a3 and 100a4, respectively. Waveform shaping amplifiers 107a2, 107a3 and 10
7a4, and output signals VE2u, VE3u and VE4u are obtained. The first group of signals VX1, VX5, VX9 and VX13 in each block is also input to the adder 100a1 ', and the added output is input to the waveform shaping amplifier 107a1' to obtain the output signal VE1l. Similarly, the second signals VX2, VX6, VX10 and VX14, the third signals VX3, VX7, VX11 and VX15, and the fourth signals VX4, VX8, VX12 and VX1 in each block are included.
Each group of 6 has a corresponding adder 100a.
2 ', 100a3' and 100a4 'and corresponding waveform shaping amplifiers 107a2', 107a3 'and 10
7a4 ', and output signals VE21, VE31 and VE41 are obtained.

Discriminators 108a1 to 108a4, 108a
Each of 1'-108a4 'receives the input signal VE1u.
.About.VE4u, VE1l to VE4l exceed the preset threshold voltage VTH respectively, the digital pulse signals Px1u to Px4u, Px1l to Px4
Output l respectively. The signals Px1u to Px4u are OR
The signal Px1l is input to the control side of the circuit 109a, the latch circuit 111a, and the analog multiplexer 115.
~ Px4l is an OR circuit 109a 'and a latch circuit 111
a'and the control side of the analog multiplexer 115. When at least one of the signals Px1u to Px4u is output, the OR circuit 109a
Outputs a pulse signal T1xu, and this signal T1xu
Is input to the coincidence counting and timing control circuit 110, and normally the corresponding signal T2xu is promptly output from the circuit 1
10 is transmitted to the latch circuit 111a and is transmitted to the latch circuit 1a.
The contents of 11a are fixed. Similarly, signals Px1l to Px4
When at least one signal of l is output, the pulse signal T1x is output from the OR circuit 109a ′,
This signal T1xl is input to the coincidence counting and timing control circuit 110, and normally the corresponding signal T2xl is promptly transmitted from the circuit 110 to the latch circuit 111a 'to fix the contents of the latch circuit 111a'. The outputs of the fixed latch circuits 111a and 111a 'are input to the corresponding encoders 112a and 112a', respectively, and coded. The code signal from the encoder 112a is input to the upper bit portion of the latch circuit 13a, and the code signal from the encoder 112a 'is input to the lower bit portion of the latch circuit 13a. In addition, the latch circuit 111
The outputs of a and 111a ′ are also input to the coincidence counting and timing control circuit 110, and whether two or more signals among the signals Px1u to Px4u are not output at the same time,
Further, it is discriminated whether or not two or more signals among the signals Px1l to Px4l are simultaneously output.

The same applies to the Y direction, and signals T1yu and T1y
1, T2yu, T2yl are signals T in the X direction.
1xu, T1xl, T2xu, T2xl, and discriminators 108b1 to 108b4.
Each of the digital pulse signals P of 108b1 'to 108b4'
y1u to Py4u and Py1l to Py4l are present corresponding to the signals Px1u to Px4u and Px1l to Px4l in the X direction.

The signals VE1u to VE4u and VE1l to VE4 are provided on the data side of the analog multiplexers 115 and 115 '.
1 is respectively inputted, and only the signals respectively selected by the signals Px1u to Px4u and the signals Px1l to Px4l are passed. Further, the outputs of the analog analog multiplexers 115 and 115 ′ are added by the adder 101 and then input to the main amplifier 16. The main amplifier 16 and the wave height analyzer 17 are the same as in the case of FIG. 2, and the signal S is input to the coincidence counting and timing control circuit 110.

In the coincidence counting and timing control circuit 110, only one of the signals Px1u to Px4u is output, only one of the signals Px1l to Px4l is output, only one of the signals Py1u to Py4u. Is output, only one of the signals Py1l to Py4l is output, and each of the four timing signals for the signals T1xu, T1xl, T1yu and T1yl is simultaneously output within a fixed time range for all four. If all six conditions are satisfied (that is, coincidence counting), that the signal S is output from the wave height analyzer 17, and the signal T3 is satisfied.
Is output, the contents of the latch circuits 13a and 13b are fixed, and an unblank signal is output after a certain period of time. The latch circuits 13a and 13b, the D / A converters and drivers 14a and 14b, and the CRT display device 1
8 is the same as in FIG. In addition, the signal T
The process when 1xu (or T1xl, T1yu, T1yl) occurs, that is, the prohibition of acceptance of a later event, the signal G, and the reset process are the same as those in FIG.

For the sake of convenience of explanation, the case of a 16 × 16 matrix has been described above, but it is needless to say that the same can be applied to other arrangements (the number of rows and the number of columns may be different). . For example, it can be applied to the case of a 256 × 256 matrix, and is particularly effective when the number is large. That is, 256 × 2 = 51 in the conventional case (FIG. 2).
Two waveform shaping amplifiers and a discriminator are required. According to the present invention, 16 × 16 = 256
Divided into 16 blocks of 16 blocks each, 16 × 2 × 2 = 6
4 will be better.

Further, the above description shows only one embodiment, and various modifications can be structurally made without departing from the spirit of the invention.

For example, in FIG. 4, the entire range from the waveform shaping amplifier to the discriminator is divided into blocks and made common, but only the latter half of the waveform shaping amplifier and the range of the discriminator or only the discriminator. The range may be divided into blocks and made common. Although the adder 101 is shown as an independent unit in FIG. 4, the analog multiplexer 11
Since 5,115 'can be configured by adding an analog switch to the input part of the adder, the adder 101 can be combined with the analog multiplexers 115, 115'. Also, the energy signal Z is made in FIG. 4 in relation to the sum of the outputs of both analog multiplexers 115, 115 ', but using the output of only one of the analog multiplexers 115, 115'. Alternatively, VE1u to VE4u and / or VE1l to VE1l may be simply added without using the analog multiplexer output. Further, each output of the waveform shaping amplifier in the Y direction can be used as an energy signal. Although the threshold voltage VTH applied to each discriminator is common in FIG. 4, it can be distinguished by the X direction and the Y direction, or the discriminators 108a1 to 108a4 for each block.
And the discriminator 108a having the same number in the block
You may distinguish by 1'-108a4 '. Further, the threshold voltage VTH may be changed depending on the lower limit level of the energy window given to the wave height analyzer 17. Further, a single channel analyzer or the like may be used instead of the discriminator.

Further, a configuration as shown in FIG. 5 corresponding to the conventional configuration as shown in FIG. 3 can be considered.

Further, in the configuration of FIG. 4, the waveform shaping amplifier 107a
1 to 107a4, 107a1 'to 107a4' are replaced by discriminators 108a1 to 108a4, 10
8a1 ', 108a4' for inputting a waveform shaping amplifier (for example, a short time constant) and an energy signal, that is, for inputting to analog multiplexers 115, 115 '(for example, a long time constant). It is also possible to configure it in two types (corresponding to FIG. 3 of the related art).

Also, a semiconductor detector different from the example shown in FIG. 1 may be used. For example, a plurality of substrates 1 as shown in FIG. 1 are arranged and each electrode showing the same X or Y coordinate is
The different substrates may be connected to each other. In FIG. 1, a groove is formed in the electrode dividing portion in order to prevent crosstalk between adjacent electrodes, but it is also possible to divide only the electrode portion without forming such a groove. In addition, each semiconductor substrate has one anode and one cathode, and a plurality of such substrates are arranged, and the anodes having the same X (or Y) coordinates are connected to each other and the same Y (or X ) It is also possible to adopt a configuration in which the cathodes indicating the coordinates are connected to each other. Generally, the radiation is incident from one electrode surface side, but the invention is also applicable to a semiconductor detection unit having a configuration in which the radiation is incident from a direction parallel to the electrode surface.

Further, by arranging the semiconductor detectors shown in FIG. 1 etc. in a ring shape or a hexagonal shape, the emission C of the multilayer slice can be obtained.
It is also possible to apply it to the T device.

(F) Effects According to the present invention, the circuit is simplified, and therefore the number of parts, the amount of wiring, and the number of substrates can be reduced, and as a result, the cost can be reduced and the size of the entire device can be reduced.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a typical semiconductor detector, FIGS. 2 and 3 are block diagrams of a conventional circuit unit, and FIG. 4 is a block diagram of a circuit unit according to an embodiment of the present invention. The figure is a block diagram of a circuit unit according to a modification. 1 ... Radiation detecting semiconductor substrates 21 to 216, 31 to 316 ... Electrodes 6a1 to 6a16, 6b1 to 6b16 ... Preamplifiers 7a1 to 7a16, 7b1 to 7b16, 107a1 to 1
07a4, 107a1 'to 107a4' ... Waveform shaping amplifiers 8a1 to 8a16, 8b1 to 8b16, 108a1 to 1
08a4, 108al 'to 108a4' ... Discriminator 100a1 ... 100a4, 100a1 'to 100a
4 ', 101 ... Adder 17 ... Wave height analyzer

Claims (3)

[Claims] 1. An assembly having a plurality of detection pixels arranged in a matrix, wherein a radiation detection semiconductor substrate is sandwiched by two electrodes facing each other, and one of these counter electrodes is common to each row of the matrix. Row direction signal extraction means for extracting output for each row via a preamplifier provided in the column direction, and column direction for extracting output for each column via a preamplifier commonly provided for each column of the matrix from the other of the counter electrodes. The signal extraction means and the output for each row extracted by the row-direction signal extraction means are grouped into a plurality of blocks and divided into a plurality of blocks, and a plurality of outputs in each block are led to each block. First row direction adding means, first row direction wave height discriminating means for each block to which respective outputs of the first row direction adding means are input, and the first row The output from the counter pulse height discriminator means is input, a first row representing whether the output of any row block
The first row-direction encoder that obtains the code signal of the above and the output in which the plurality of outputs in each block are numbered in the same order for all the blocks related to the output for each row and the numbered numbers are the same Second row direction addition means for each number for adding each other, second row direction wave height discrimination means for each number to which the output of each of the second row direction addition means is input, and A second row-direction encoder that receives the output from the second row-direction wave height discriminating means and obtains a second code signal in the row direction that represents which number of the output, and these first and second code signals Row-direction position signal output means for obtaining a row-direction position signal indicating in which row an output has occurred and a plurality of outputs for each column extracted by the column-direction signal extraction means are grouped into a plurality of blocks. Divided into First column direction addition means for each block to which a plurality of outputs in each block are guided, and first column for each block to which each output of the first column direction addition means is input Directional wave height discriminating means, and an output from the first columnar wave height discriminating means is input, and a column direction first indicating the output of which column direction block is output.
And a first column direction encoder that obtains the code signal of the above, and an output in which the same number is assigned to each of the multiple outputs in each block in the same order for all the blocks related to the output for each column described above. Second column direction addition means for each number for adding each other, second column direction wave height discrimination means for each number to which an output of each of the second column direction addition means is input, A second column-direction encoder, which receives the output from the second column-direction wave height discriminating means and obtains a second code signal in the column direction that represents which number of the output, and these first and second code signals A column direction position signal output means for obtaining a column direction position signal indicating in which column an output has occurred, and an output from one side of the opposing electrodes and an output from the other side thereof are within a predetermined time range. Whether it is simultaneous within A semiconductor having a coincidence counting means for outputting and a wave height analyzing means for discriminating whether or not an energy signal obtained from at least one side of the counter electrode is within one or more predetermined energy ranges. Radiation position detector. 2. When n and m are arbitrary positive integers, the number of rows or columns of the matrix is 2 ^{n + m} , and 2 ^{n +} fetched by the row or column direction signal fetching means. ^{The m} outputs are grouped into 2 ^m units and 2 ⁿ
The first row or column-direction encoder is configured to output a first n-bit code signal representing which of the 2 ⁿ blocks is the output, The second row or column directional encoder has a second number which indicates which number of 2 ^m outputs in each block is the output.
And the row- or column-direction position signal output means synthesizes the n-bit code signal as an upper bit and the m-bit code signal as a lower bit. by, the claims, characterized in that it is configured to obtain a row or column position signal n + m bits representing which one of the outputs of the 2 ^{n + m} pieces of output for a row or column The semiconductor radiation position detecting device according to item 1. 3. A first row-direction waveform shaping / amplifying means for each block is inserted between the first row-direction adding means and the first row-direction wave height discriminating means, and the second row-direction adding means is provided. A second row-direction waveform shaping / amplifying means for each number is inserted between the means and the second row-direction wave height discriminating means, and the first column-direction adding means and the first column-direction wave height discriminating means are provided. A first column-direction waveform shaping / amplifying means for each block is inserted between them, and a second column-direction waveform for each number is provided between the second column-direction adding means and the second column-direction wave height discriminating means. The semiconductor radiation position detecting device according to claim 1, wherein a shaping amplification means is inserted.