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JPH0616376B2 - Color picture tube screen exposure method - Google Patents
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JPH0616376B2 - Color picture tube screen exposure method - Google Patents

Color picture tube screen exposure method

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Publication number
JPH0616376B2
JPH0616376B2 JP2211722A JP21172290A JPH0616376B2 JP H0616376 B2 JPH0616376 B2 JP H0616376B2 JP 2211722 A JP2211722 A JP 2211722A JP 21172290 A JP21172290 A JP 21172290A JP H0616376 B2 JPH0616376 B2 JP H0616376B2
Authority
JP
Japan
Prior art keywords
film
light source
stripe
exposure
picture tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2211722A
Other languages
Japanese (ja)
Other versions
JPH03129635A (en
Inventor
浩二 久木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2211722A priority Critical patent/JPH0616376B2/en
Publication of JPH03129635A publication Critical patent/JPH03129635A/en
Publication of JPH0616376B2 publication Critical patent/JPH0616376B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 本発明はカラー受像管映像スクリーンの露光方法に関す
る。
The present invention relates to a method for exposing a color picture tube picture screen.

カラー受像管の映像スクリーンであるけい光面を形成す
るための露光方法は、ブラックマトリックス膜(以下B
M膜という)形成とけい光膜(以下PH膜という)形成と
を同一条件で行なう方法がBM膜PH膜との位置ずれが
なく、またその補正も不要となる。しかしながら、BM
膜形成時のホトレジストの膜厚は例えば0.6μm程度
と非常に薄いのに対し、PH膜形成時のけい光体スラリ
ーの膜厚は例えば30μm程度と前記ホトレジの膜厚に
比べ非常に厚く、またホトレジストとけい光体スラリー
とでは感光特性が異なり、更にBM膜はシャドウマスク
の開口孔より小さく、すなわちスロット形の開口孔の場
合はBM膜の幅がスロットの幅より小さく、円形の開口
孔ではBM膜の径が円形の径より小さく、PH膜は膜厚
の関係からシャドウマスクの開口孔より大きく、すなわ
ちスロット形の開口孔の場合はPH膜の幅がスロットの
幅より大きく、円形の開口孔の場合はPH膜が円形の径
より大きく形成しているので、両者を同一条件で形成す
るのは、BM膜形成の裕度が低下すると共に、PH膜形
成の接着強度(照度×時間)が不利となる。
The exposure method for forming the fluorescent surface which is the image screen of the color picture tube is a black matrix film (hereinafter referred to as B
The method in which the formation of the M film) and the formation of the fluorescent film (hereinafter referred to as the PH film) are performed under the same condition has no positional deviation from the BM film and the PH film, and its correction is also unnecessary. However, BM
The film thickness of the photoresist at the time of forming the film is very thin, for example, about 0.6 μm, whereas the film thickness of the phosphor slurry at the time of forming the PH film is, for example, about 30 μm, which is much thicker than the film thickness of the photoresist. Further, the photoresist and the phosphor slurry have different photosensitivity characteristics, and further, the BM film is smaller than the opening hole of the shadow mask, that is, in the case of the slot type opening hole, the width of the BM film is smaller than the width of the slot, and the circular opening hole The diameter of the BM film is smaller than the diameter of the circular shape, and the PH film is larger than the opening hole of the shadow mask because of the film thickness. In the case of the slot-shaped opening hole, the width of the PH film is larger than the width of the slot and the circular opening In the case of holes, since the PH film is formed larger than the circular diameter, forming both under the same conditions reduces the margin of BM film formation and reduces the adhesive strength of the PH film formation (illuminance x Time) is at a disadvantage.

本発明は上記背景に立ってなされたもので、BM膜形成
の裕度およびPH膜形成の接着強度をそれぞれ向上させ
ると共にBM膜とPH膜の位置ずれを防止することがで
きるカラー受像管映像スクリーンの露光方法を提供する
ことを目的とする。
The present invention has been made in view of the above background, and it is possible to improve the margin of BM film formation and the adhesive strength of PH film formation, respectively, and prevent the positional deviation between the BM film and the PH film. It is an object of the present invention to provide a method of exposing the same.

以下、本発明を図示の一実施例により説明する。第1図
に示すように、カラー受像管のけい光面形成は、パネル
1の内面に塗布したホトレジストまたはけい光体スラリ
ー2上に水銀灯を直接線状光源3とした露光装置により
シャドウマスク4に形成された開口孔のスリットパター
ン5の露光感光を行なって、第2図に示すように、BM
膜ストライプ6およびPH膜ストライプ7を形成してい
る。この時、光スポット8の最大露光範囲Dmax、最
小露光範囲Dminは、光源3の直径をA、スリットパ
ターン5のスリット幅をB、光源3からシャドウマスク
4までの距離をP、シャドウマスク4からパネル1内面
までの距離をQとすると、概略幾何学的に次式で表わさ
れる。
The present invention will be described below with reference to an embodiment shown in the drawings. As shown in FIG. 1, the fluorescent surface of the color picture tube is formed on the shadow mask 4 by an exposure device using a mercury lamp as a linear light source 3 on the photoresist or the phosphor slurry 2 applied to the inner surface of the panel 1. The slit pattern 5 of the formed opening is exposed to light and, as shown in FIG.
The film stripe 6 and the PH film stripe 7 are formed. At this time, the maximum exposure range Dmax and the minimum exposure range Dmin of the light spot 8 are as follows: the diameter of the light source 3 is A, the slit width of the slit pattern 5 is B, the distance from the light source 3 to the shadow mask 4 is P, and the shadow mask 4 is When the distance to the inner surface of the panel 1 is Q, it can be roughly geometrically expressed by the following equation.

Dmax=(B+A)×Q/P+B Dmin=(B−A)×Q/P+B この関係を図示すると第3図のように表わされる。Dmax = (B + A) × Q / P + B Dmin = (B−A) × Q / P + B This relationship is shown in FIG.

さて、BM膜ストライプ6の幅Cは、ピュリテイ裕度を
向上させるため、電子ビームの幅より小さく、すなわち
スリットパターン5のスリット幅Bより小さく形成す
る。このことを第3図によって説明すると、光スポット
9のDminの方で露光感光するようにする。すなわ
ち、光源径Aが大きくなるとDminは小さくなり、小
さいBM膜ストライプ6を形成するのに有利になる。
The width C of the BM film stripe 6 is formed smaller than the width of the electron beam, that is, smaller than the slit width B of the slit pattern 5 in order to improve the purity margin. This will be described with reference to FIG. 3. The exposure exposure is performed at the Dmin side of the light spot 9. That is, as the light source diameter A increases, Dmin decreases, which is advantageous for forming a small BM film stripe 6.

PH膜ストライプ7の形成は、膜厚が例えば30μmと
厚いけい光体スラリーを露光感光するため、充分な露光
量が必要となる。このことを第3図によって説明する
と、露光量を多くすることはDmaxの方で感光させる
ことになる。すなわち、PH膜ストライプ7の幅Eはス
リットパターン5のスリット幅Bより大きくなるが、最
大幅は相隣接するPH膜ストライプ7にはみ出さない幅
にする。このためには、Dmaxがなるべく小さく、D
minとDmaxの差が小さい程有利となる。これを満
足するには光源径Aが小さい方が良い。
The PH film stripe 7 is formed by exposing a photoconductor slurry having a large film thickness of, for example, 30 μm by exposure, and thus a sufficient exposure amount is required. Explaining this with reference to FIG. 3, increasing the exposure amount results in exposure at Dmax. That is, the width E of the PH film stripe 7 is larger than the slit width B of the slit pattern 5, but the maximum width is set so as not to extend to the adjacent PH film stripe 7. For this, Dmax is as small as possible
The smaller the difference between min and Dmax, the more advantageous. In order to satisfy this, it is better that the light source diameter A is smaller.

そこで、BM膜ストライプ6形成時はPH膜ストライプ
7形成時より太い光源径Aを備えた露光装置で露光する
ことにより、BM膜ストライプ6形成の裕度が向上する
と共に、PH膜ストライプ7形成の接着強度が向上す
る。また、ホトレジストの膜厚と蛍光体スラリーの膜厚
とはその厚さに相当の差があるため、その差を考慮して
光源とシャドウマスク間の距離をBM膜形成時とPH膜
形成時とで異なる寸法とすることでPH膜とBM膜の位
置ずれを防止する。すなわち、第4図に示すようにa点
の光源3からシャドウマスク4の開口孔のスリットパタ
ーン5を介してホトレンジスト膜2aを露光するとA点
が露光され、このA点を中心としたBM膜が形成され
る。一方蛍光体膜2bをBM膜の露光と同じa点から露
光すると膜厚の差によりA1点を中心として露光されて
1点を中心としたPH膜が形成され、BM膜とPH膜
はABの距離だけ位置ずれが発生する。従って、蛍光膜
2bの露光をA点と中心が一致したC点を露光するよう
に、a点よりシャドウマスク4に近接したb点の光源3
から行うことによりBM膜とPH膜の位置ずれを防止で
きる。a点とb点との間の距離ΔPは、けい光体スラリ
ーの膜厚がTの場合、第4図において三角径ALCが三
角形NLMに相似である条件からΔP=T×(P/Q)
として算出される。例えば、光源径AはBM膜ストライ
プ6形成時に1.5mmφを、PH膜ストライプ7形成時
に、0.9mmφをそれぞれ使用し、光源3からシャドウ
マスク4までの距離Pは、BM膜ストライプ6形成時を
PH膜ストライプ7形成時より0.3mm大きくして露光
位置ずれを補正して行なったところ、良好な結果が得ら
れた。ここで、光源径の違いによるBM膜ストライプ6
とPH膜ストライプ7との露光位置ずれは、前記のよう
に距離Pを変えることによって対処できるが、この外に
補正レンズ、ガラス板(図示せず)の板厚を変えることで
も対処できる。また、位置ずれ防止には光源径はBM膜
とPH膜で同一であってもよい。
Therefore, when the BM film stripe 6 is formed, exposure is performed with an exposure device having a light source diameter A larger than that when the PH film stripe 7 is formed, so that the margin of forming the BM film stripe 6 is improved and the PH film stripe 7 is formed. The adhesive strength is improved. Further, since there is a considerable difference between the thickness of the photoresist and the thickness of the phosphor slurry, the distance between the light source and the shadow mask is set to a value between when the BM film is formed and when the PH film is formed in consideration of the difference. By setting the different dimensions in, the positional deviation between the PH film and the BM film is prevented. That is, as shown in FIG. 4, when the photoresist film 2a is exposed from the light source 3 at the point a through the slit pattern 5 of the opening hole of the shadow mask 4, the point A is exposed, and the BM film centered at the point A is formed. It is formed. On the other hand, when the phosphor film 2b is exposed from the same point a as the exposure of the BM film, the phosphor film 2b is exposed centering on the point A 1 due to the difference in film thickness, and a PH film centering on the point A 1 is formed. Positional displacement occurs by the distance AB. Therefore, the light source 3 at the point b, which is closer to the shadow mask 4 than the point a, is exposed so as to expose the fluorescent film 2b at the point C whose center coincides with the point A.
From the above, it is possible to prevent the positional deviation between the BM film and the PH film. When the thickness of the phosphor slurry is T, the distance ΔP between the points a and b is ΔP = T × (P / Q) from the condition that the triangular diameter ALC is similar to the triangular NLM in FIG.
Is calculated as For example, the light source diameter A is 1.5 mmφ when the BM film stripe 6 is formed, 0.9 mmφ is used when the PH film stripe 7 is formed, and the distance P from the light source 3 to the shadow mask 4 is when the BM film stripe 6 is formed. When the exposure position deviation was corrected by making the value 0.3 mm larger than when the PH film stripe 7 was formed, good results were obtained. Here, the BM film stripe 6 due to the difference in light source diameter
The exposure position shift between the photo film stripe 7 and the PH film stripe 7 can be dealt with by changing the distance P as described above, but it can also be dealt with by changing the plate thickness of the correction lens and the glass plate (not shown). Further, the light source diameter may be the same for the BM film and the PH film for preventing the positional deviation.

このように光源とシャドウマスクとの距離を変えること
によってBM膜ストライプ6形成とPH膜ストライプ7
形成の品質を向上できるが、ストライプけい光面を形成
する場合には、第5図に示すようにスリットパターン5
の長手方向のブリッジ部9を消去する場合がある。この
ブリッジ部9を消去するためには、ブリッジ部9のピッ
チをF、線状光源3の長さをlとすると、l=(P+Q)
/Q・Fの長さの線状光源3が必要となる。
By thus changing the distance between the light source and the shadow mask, the BM film stripe 6 and the PH film stripe 7 are formed.
Although the quality of formation can be improved, when forming a stripe fluorescent surface, as shown in FIG.
The bridge portion 9 in the longitudinal direction may be erased. In order to erase the bridge portion 9, if the pitch of the bridge portion 9 is F and the length of the linear light source 3 is 1, then l = (P + Q)
A linear light source 3 having a length of / Q · F is required.

しかしながら、この線状光源3の長さlをBM膜ストラ
イプ6形成時とPH膜ストライプ7形成時とを同一長さ
で露光を行なうと、BH膜ストライプ6よりPH膜スト
ライプ7の有効面が長手方向において小さい形成される
ため、長手方向の端部に未発光部が生じ、けい光面の欠
点となる。これはBM膜ストライプ6の露光時の光源長
さlよりPH膜ストライプ7の露光時の光源長さlを、
例えば3〜4mm長くすることにより未発光部を除去でき
た。また、このことは両露光時の光源の長さlを変える
ことなく光源の移動距離を変えても対処できる。
However, if the length 1 of the linear light source 3 is exposed with the same length when the BM film stripe 6 is formed and when the PH film stripe 7 is formed, the effective surface of the PH film stripe 7 is longer than the BH film stripe 6. Since it is formed to be small in the direction, a non-luminous portion is generated at the end portion in the longitudinal direction, which becomes a defect of the fluorescent surface. This is because the light source length 1 at the time of exposure of the PH film stripe 7 is set to the light source length 1 at the time of exposure of the BM film stripe 6.
For example, the non-luminous portion could be removed by increasing the length by 3 to 4 mm. This can also be dealt with by changing the moving distance of the light source without changing the length 1 of the light source during both exposures.

なお、上記実施例においては、ストライプタイプのカラ
ー受像管について説明したが、ドットタイプのカラー受
像管のけい光面形成にも適用できる。
Although the stripe type color picture tube has been described in the above embodiment, it can be applied to the formation of the fluorescent surface of the dot type color picture tube.

以上の説明から明らかな如く、本発明の方法によれば、
BM膜の形成裕度が向上すると共に、PH膜の接着強度
が向上し、さらに両膜の位置のずれを防止できる。
As is clear from the above description, according to the method of the present invention,
The margin of formation of the BM film is improved, the adhesive strength of the PH film is improved, and the displacement of the positions of both films can be prevented.

【図面の簡単な説明】[Brief description of drawings]

図は本発明になる方法の一実施例を示し、第1図は露光
方法の原理説明図、第2図はストライプタイプけい光面
の平面説明図、第3図は露光強度を示す説明図、第4図
は光源の位置と露点とを説明するための原理説明図、第
5図はシャドウマスクのブリッジ部を消去するための線
線状光源長さを示す原理説明図である。 1……パネル、2……ホトレジストまたはけい光体スラ
リー、3……線状光源、4……シャドウマスク、5……
スリットパターン、6……BM膜ストライプ、7……P
H膜ストライプ、8……スポット。
FIG. 1 shows an embodiment of the method according to the present invention, FIG. 1 is an explanatory view of the principle of the exposure method, FIG. 2 is an explanatory plan view of a stripe type fluorescent surface, and FIG. 3 is an explanatory view showing exposure intensity. FIG. 4 is a principle explanatory diagram for explaining the position and dew point of the light source, and FIG. 5 is a principle explanatory diagram showing a linear light source length for erasing the bridge portion of the shadow mask. 1 ... Panel, 2 ... Photoresist or phosphor slurry, 3 ... Linear light source, 4 ... Shadow mask, 5 ...
Slit pattern, 6 ... BM film stripe, 7 ... P
H film stripe, 8 ... Spot.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】パネル内面に塗布したホトレジストおよび
けい光体スラリーに光源からの光線をシャドウマスクの
開口孔を通して露光感光を行なってブラックマトリック
ス膜およびけい光膜をそれぞれ露光装置で形成するカラ
ー受像管映像スクリーンの露光方法において、前記ブラ
ックマトリックス膜形成後の前記けい光膜形成時、前記
ブラックマトリックス膜形成時露光された点から垂直方
向に前記けい光体スラリーの膜厚分前記光源側の点が露
光される様前記光源を前記パネル側へ移動して露光を行
なうことを特徴とするカラー受像管映像スクリーンの露
光方法。
1. A color picture tube in which a photoresist and a phosphor slurry coated on the inner surface of a panel are exposed to light from a light source through an opening hole of a shadow mask to form a black matrix film and a phosphor film by an exposure device. In the method of exposing a video screen, when the fluorescent film is formed after the black matrix film is formed, the point on the light source side in the vertical direction from the exposed point when the black matrix film is formed is the point on the light source side by the film thickness of the phosphor slurry. An exposure method for a picture screen of a color picture tube, wherein the light source is moved to the panel side so as to be exposed to perform the exposure.
JP2211722A 1990-08-13 1990-08-13 Color picture tube screen exposure method Expired - Lifetime JPH0616376B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2211722A JPH0616376B2 (en) 1990-08-13 1990-08-13 Color picture tube screen exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2211722A JPH0616376B2 (en) 1990-08-13 1990-08-13 Color picture tube screen exposure method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP12299881A Division JPS5825036A (en) 1981-08-07 1981-08-07 Color picture tube image screen exposure method

Publications (2)

Publication Number Publication Date
JPH03129635A JPH03129635A (en) 1991-06-03
JPH0616376B2 true JPH0616376B2 (en) 1994-03-02

Family

ID=16610521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2211722A Expired - Lifetime JPH0616376B2 (en) 1990-08-13 1990-08-13 Color picture tube screen exposure method

Country Status (1)

Country Link
JP (1) JPH0616376B2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5082964A (en) * 1973-11-09 1975-07-04

Also Published As

Publication number Publication date
JPH03129635A (en) 1991-06-03

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